Vacuum coating equipment with plasma cleaning device

Abstract

The utility model discloses vacuum coating equipment with a plasma cleaning device, which belongs to the technical field of vacuum coating and comprises a reaction furnace, a partition plate fixedly mounted in the reaction furnace, a plurality of high-pressure nozzles fixedly mounted in the partition plate, a fixing ring fixedly mounted on the outer side of the reaction furnace, and a plasma cleaning device fixedly mounted on the outer side of the fixing ring. A plurality of electric push rods are fixedly mounted at the top of the fixing ring, a same circular top plate is fixedly mounted at the output ends of the electric push rods, a connecting column is fixedly mounted at the bottom of the circular top plate, a circular top cover is fixedly mounted at the bottom of the connecting column, and a sealing ring is fixedly mounted on the outer side of the circular top cover; a first motor is fixedly installed at the bottom of the circular top cover. Through the mutual cooperation of the first motor, the connecting disc, the connecting rod, the first rubber pad and the placing plate, the cleaning surface of a workpiece can be continuously changed in the cleaning process, so that the workpiece is cleaned more thoroughly, the overall cleaning uniformity of the workpiece is greatly improved, and the practicability is wider.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum coating technical field especially, relates to a vacuum coating equipment with plasma cleaning device. BACKGROUND

[0002] Vacuum coating equipment is the pure metal is placed in the vacuum chamber evaporation formation vapor atom, then the vapor atom is condensed and adhered to the surface of the substrate when contacting the substrate of lower temperature in the movement process, forms the even coating on the substrate surface, and plasma cleaning is a kind of brand-new high-tech technology, utilizes plasma to reach the effect that conventional cleaning method cannot reach, plasma is a state of matter, and gas is ionized to become plasma state by applying sufficient energy to it, so as to utilize the properties of these active components to process sample surface, to achieve the purpose of cleaning.

[0003] In the prior art vacuum coating equipment with plasma cleaning device, the workpiece is generally placed on the placing plate for cleaning, the workpiece cannot be driven to rotate, so that the cleaning surface of the workpiece cannot be changed constantly in the cleaning process, thereby leading to that the workpiece is not cleaned completely in local, the uniformity of the overall cleaning of the workpiece is greatly reduced, and the practicality is not wide, therefore, the utility model provides a vacuum coating equipment with plasma cleaning device to solve the problem. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a vacuum coating equipment with plasma cleaning device to solve the problem in the background art.

[0005] In order to achieve the above object, the utility model adopts the following technical scheme:

[0006] A vacuum coating equipment with plasma cleaning device, comprising: a reaction furnace, a partition plate is fixedly installed in the inside of the reaction furnace, a plurality of high-pressure nozzles are fixedly installed in the inside of the partition plate, a fixing ring is fixedly installed on the outside of the reaction furnace, a plurality of electric push rods are fixedly installed on the top of the fixing ring, the same circular top plate is fixedly installed on the output end of the plurality of electric push rods, a connecting column is fixedly installed on the bottom of the circular top plate, a circular top cover is fixedly installed on the bottom of the connecting column, a sealing ring is fixedly installed on the outside of the circular top cover, a No. 1 motor is fixedly installed on the bottom of the circular top cover, a connecting disc is fixedly connected to the output end of the No. 1 motor, a plurality of connecting rods are fixedly installed on the bottom of the connecting disc, the same No. 1 rubber pad is fixedly installed on the bottom of the plurality of connecting rods, and a placing plate is fixedly installed on the bottom of the No. 1 rubber pad.

[0007] Preferably, the bottom of the connecting disc is fixedly provided with two baffles, a same bidirectional screw is rotatably arranged between the two baffles, two driving blocks are threadedly connected to the outer side of the bidirectional screw, two driving rods are hingedly connected to the outer side of the two driving blocks, a same fixing block is hingedly connected to one end of the four driving rods, a fixing disc is fixedly arranged on the bottom of the fixing block, and a second rubber pad is fixedly arranged on the bottom of the fixing disc.

[0008] Preferably, the top of the circular top cover is fixedly provided with two vacuum pumps, a suction pipe is communicated with the suction port of each vacuum pump, the outer side of each suction pipe is fixedly arranged in the circular top cover, and an exhaust pipe is communicated with the exhaust port of each vacuum pump, and the outer side of each exhaust pipe is fixedly arranged in the circular top cover.

[0009] Preferably, the outer side of the bidirectional screw is provided with two external threads with opposite rotation directions, one side of one of the baffles is fixedly provided with a second motor, and the output end of the second motor is fixedly connected to one end of the bidirectional screw.

[0010] Preferably, the bottom of the connecting disc is fixedly provided with a plurality of guide columns, the bottom end of each guide column is fixedly arranged on the top of a same fixing disc, a same guide plate is fixedly arranged between the two baffles, and the outer side of the guide plate is slidably connected to the inner side of the two driving blocks.

[0011] Preferably, the top of the reaction furnace is provided with a circular hole, the bottom of the reaction furnace is fixedly provided with a plurality of supporting legs, the liquid inlet of the reaction furnace is communicated with a feeding pipe, the liquid outlet of the feeding pipe is communicated with the reaction furnace, the outer side of the feeding pipe is provided with a first control valve, the gas inlet of the reaction furnace is communicated with a gas inlet pipe, the gas outlet of the gas inlet pipe is communicated with the reaction furnace, and the outer side of the gas inlet pipe is provided with a second control valve.

[0012] In the utility model, the workpiece fixed on the top of the first rubber pad is moved to the inside of the reaction furnace by driving the circular top plate through the electric push rod, and then the circular top cover and the sealing ring seal the circular hole on the top of the reaction furnace, then the inside of the reaction furnace is made into a vacuum state through the suction pipe and the exhaust pipe by starting the two vacuum pumps, then the plasma gas is transported into the reaction furnace through the gas inlet pipe by opening the second control valve, and at the same time, the workpiece fixed on the top of the first rubber pad is rotated by rotating the first motor, so that the workpiece can continuously change the cleaning surface during the cleaning process, the workpiece cleaning is more clean, the uniformity of the overall workpiece cleaning is greatly improved, and the practicability is wider.

[0013] The vacuum coating equipment with the plasma cleaning device comprises a reaction furnace, a fixed ring, an electric push rod, a circular top plate, a partition plate, a high-pressure nozzle, a connecting column, a circular top cover, a sealing ring, a vacuum pump, an air suction pipe, an exhaust pipe, a first motor, a connecting disc, a connecting rod, a first rubber pad, a placing plate, a baffle, a second motor, a bidirectional screw rod, a driving block, a driving rod, a fixed block, a fixed disc, a second rubber pad and a guide column.

[0014] The utility model discloses a structure design is reasonable, and the mutual cooperation between first motor, connecting disc, connecting rod, first rubber pad and placing plate makes the workpiece in the cleaning process can change the cleaning surface constantly to make the workpiece cleaning more clean, and the evenness of workpiece overall cleaning is improved greatly, and the practicality is wider. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is a kind of vacuum coating equipment with the plasma cleaning device of the utility model to propose the three-dimensional structure schematic diagram;

[0016] Figure 2 It is a kind of vacuum coating equipment with the plasma cleaning device of the utility model to propose the sectional structure schematic diagram;

[0017] Figure 3 It is the structure schematic diagram of placing plate, second rubber pad and fixed disc that the utility model proposes;

[0018] Figure 4 It is the sectional structure schematic diagram of baffle, first rubber pad and placing plate that the utility model proposes.

[0019] In the drawing: 1, reaction furnace;2, fixed ring;3, electric push rod;4, circular top plate;5, partition plate;6, high-pressure nozzle;7, connecting column;8, circular top cover;9, sealing ring;10, vacuum pump;11, air suction pipe;12, exhaust pipe;13, first motor;14, connecting disc;15, connecting rod;16, first rubber pad;17, placing plate;18, baffle;19, second motor;20, bidirectional screw rod;21, driving block;22, driving rod;23, fixed block;24, fixed disc;25, second rubber pad;26, guide column;27, feed pipe;28, first control valve;29, air inlet pipe;30, second control valve;31, support leg;32, guide plate. DETAILED DESCRIPTION

[0020] The technical scheme in the utility model embodiment will be clearly and completely described below with the drawings in the utility model embodiment, and obviously, the described embodiment is only a part of the embodiment of the utility model, not all the embodiment.

[0021] Referring to Figures 1-4 A vacuum coating equipment with plasma cleaning device, comprising: reaction furnace 1, the inside of reaction furnace 1 is fixedly installed with baffle 5, baffle 5 is fixedly installed with multiple high-pressure nozzles 6 inside, the outside of reaction furnace 1 is fixedly installed with fixed ring 2, the top of fixed ring 2 is fixedly installed with multiple electric push rods 3, the output end of multiple electric push rods 3 is fixedly installed with the same circular top plate 4, the bottom of circular top plate 4 is fixedly installed with connecting column 7, the bottom of connecting column 7 is fixedly installed with circular top cover 8, the outside of circular top cover 8 is fixedly installed with sealing ring 9, the bottom of circular top cover 8 is fixedly installed with No. 1 motor 13, the output end of No. 1 motor 13 is fixedly connected with connecting disc 14, the bottom of connecting disc 14 is fixedly installed with multiple connecting rods 15, the bottom of multiple connecting rods 15 is fixedly installed with the same No. 1 rubber pad 16, the bottom of No. 1 rubber pad 16 is fixedly installed with placing plate 17.

[0022] In the embodiment, the bottom of connecting disc 14 is fixedly installed with two baffles 18, the same bidirectional screw 20 is rotatably installed between two baffles 18, two drive blocks 21 are threadedly connected to the outside of bidirectional screw 20, two drive rods 22 are hingedly connected to the outside of two drive blocks 21, one end of four drive rods 22 is hingedly connected with the same fixed block 23, the bottom of fixed block 23 is fixedly installed with fixed disc 24, the bottom of fixed disc 24 is fixedly installed with No. 2 rubber pad 25, so as to facilitate the fixation of workpieces placed on the top of No. 1 rubber pad 16 through fixed disc 24 and No. 2 rubber pad 25.

[0023] In the embodiment, the top of circular top cover 8 is fixedly installed with two vacuum pumps 10, the suction ports of two vacuum pumps 10 are communicated with suction pipes 11, the outside of two suction pipes 11 is fixedly installed in the inside of circular top cover 8, the gas outlets of two vacuum pumps 10 are communicated with exhaust pipes 12, the outside of two exhaust pipes 12 is fixedly installed in the inside of circular top plate 4, so as to facilitate the vacuumization of the inside of reaction furnace 1 through suction pipes 11 and exhaust pipes 12.

[0024] In the embodiment, the outside of bidirectional screw 20 is provided with two external threads with opposite rotation directions, one side of one baffle 18 is fixedly installed with No. 2 motor 19, the output end of No. 2 motor 19 is fixedly connected to one end of bidirectional screw 20, the bottom of connecting disc 14 is fixedly installed with multiple guide columns 26, the bottom ends of multiple guide columns 26 are fixedly installed on the top of the same fixed disc 24, the same guide plate 32 is fixedly installed between two baffles 18, the outside of guide plate 32 is slidingly connected to the inside of two drive blocks 21, so as to keep two drive blocks 21 stable during movement through guide plate 32.

[0025] In this embodiment, the top of the reaction furnace 1 is provided with a circular hole, the bottom of the reaction furnace 1 is fixedly provided with a plurality of supporting legs 31, the liquid inlet of the reaction furnace 1 is communicated with a feeding pipe 27, the liquid outlet of the feeding pipe 27 is communicated with the reaction furnace 1, a first control valve 28 is arranged outside the feeding pipe 27, the gas inlet of the reaction furnace 1 is communicated with a gas inlet pipe 29, the gas outlet of the gas inlet pipe 29 is communicated with the reaction furnace 1, a second control valve 30 is arranged outside the gas inlet pipe 29, so that the sprayed raw materials can be conveniently transported into the reaction furnace 1 through the feeding pipe 27, and the plasma gas can be conveniently transported into the reaction furnace 1 through the gas inlet pipe 29.

[0026] In use, the workpiece is placed on the top of the first rubber pad 16, then the second motor 19 is started to drive the bidirectional screw rod 20 to rotate, the driving block 21 connected with the bidirectional screw rod 20 is driven to move, the driving rod 22 is driven to rotate, the fixed block 23 is driven to move vertically, the fixed disc 24 and the second rubber pad 25 are driven to move vertically, so that the fixed disc 24 and the second rubber pad 25 fix the workpiece placed on the top of the first rubber pad 16, the workpiece does not move during rotation, then the electric push rod 3 is started to drive the circular top plate 4 to move, the workpiece fixed on the top of the first rubber pad 16 is further driven to move into the reaction furnace 1, until the circular hole on the top of the reaction furnace 1 is sealed by the circular top cover 8 and the sealing ring 9, then the two vacuum pumps 10 are started, the reaction furnace 1 is connected with the suction pipe 11 and the exhaust pipe 12 to make the inside of the reaction furnace 1 into a vacuum state, then the second control valve 30 is opened to transport the plasma gas into the reaction furnace 1 through the gas inlet pipe 29, at the same time, the first motor 13 is rotated to drive the workpiece fixed on the top of the first rubber pad 16 to rotate, so that the workpiece can change the cleaning surface during cleaning, the workpiece is cleaned more cleanly, the uniformity of the overall cleaning of the workpiece is greatly improved, the practicability is wider, after cleaning, the first control valve 28 is opened to transport the sprayed raw materials into the reaction furnace 1 through the feeding pipe 27, then the raw materials are sprayed through the high-pressure spray head 6, so that the workpiece fixed on the top of the first rubber pad 16 can be sprayed through the high-pressure spray head 6 during rotation, so that the workpiece is sprayed more uniformly.

[0027] The vacuum coating equipment with a plasma cleaning device is described in detail. The principle and implementation of the present application are described in the above examples. The above examples are used to help understand the method and core idea of the present application. It should be noted that, for ordinary skilled persons in the technical field, without departing from the principle of the present application, the present application can be improved and modified in many ways, and these improvements and modifications also fall within the protection scope of the present application.

Claims

1. A vacuum coating device with a built-in plasma cleaning unit, characterized in that, include: A reactor (1) is provided, with a partition (5) fixedly installed inside the reactor (1). Multiple high-pressure nozzles (6) are fixedly installed inside the partition (5). A fixing ring (2) is fixedly installed on the outside of the reactor (1). Multiple electric push rods (3) are fixedly installed on the top of the fixing ring (2). The output ends of the multiple electric push rods (3) are fixedly installed on the same circular top plate (4). A connecting column (7) is fixedly installed at the bottom of the circular top plate (4). A circular top cover (8) is provided, and a sealing ring (9) is fixedly installed on the outer side of the circular top cover (8). A No. 1 motor (13) is fixedly installed at the bottom of the circular top cover (8). A connecting plate (14) is fixedly connected to the output end of the No. 1 motor (13). Multiple connecting rods (15) are fixedly installed at the bottom of the connecting plate (14). The same No. 1 rubber pad (16) is fixedly installed at the bottom of the multiple connecting rods (15). A placement plate (17) is fixedly installed at the bottom of the No. 1 rubber pad (16).

2. The vacuum coating equipment with integrated plasma cleaning device according to claim 1, characterized in that, Two baffles (18) are fixedly installed at the bottom of the connecting plate (14). The same bidirectional screw (20) is rotatably installed between the two baffles (18). Two drive blocks (21) are threadedly connected to the outer side of the bidirectional screw (20). Two drive rods (22) are hinged to the outer side of each of the two drive blocks (21). One end of each of the four drive rods (22) is hinged to the same fixing block (23). A fixing plate (24) is fixedly installed at the bottom of the fixing block (23). A second rubber pad (25) is fixedly installed at the bottom of the fixing plate (24).

3. The vacuum coating equipment with integrated plasma cleaning device according to claim 1, characterized in that, Two vacuum pumps (10) are fixedly installed on the top of the circular top cover (8). The suction ports of the two vacuum pumps (10) are connected to suction pipes (11). The outer sides of the two suction pipes (11) are fixedly installed inside the circular top cover (8). The exhaust ports of the two vacuum pumps (10) are connected to exhaust pipes (12). The outer sides of the two exhaust pipes (12) are fixedly installed inside the circular top plate (4).

4. The vacuum coating equipment with integrated plasma cleaning device according to claim 2, characterized in that, The outer side of the bidirectional screw (20) is provided with two external threads with opposite directions of rotation. A second motor (19) is fixedly installed on one side of the baffle (18). The output end of the second motor (19) is fixedly connected to one end of the bidirectional screw (20).

5. A vacuum coating device with a built-in plasma cleaning unit according to claim 2, characterized in that, Multiple guide posts (26) are fixedly installed at the bottom of the connecting plate (14). The bottom ends of the multiple guide posts (26) are fixedly installed on the top of the same fixed plate (24). The same guide plate (32) is fixedly installed between the two baffles (18). The outer side of the guide plate (32) is slidably connected to the inside of the two drive blocks (21).

6. A vacuum coating device with a built-in plasma cleaning unit according to claim 1, characterized in that, The reactor (1) has a round hole at the top and multiple support legs (31) fixedly installed at the bottom. The inlet of the reactor (1) is connected to a feed pipe (27), and the outlet of the feed pipe (27) is connected to the inside of the reactor (1). A first control valve (28) is provided on the outside of the feed pipe (27). The inlet of the reactor (1) is connected to an air inlet pipe (29), and the outlet of the air inlet pipe (29) is connected to the inside of the reactor (1). A second control valve (30) is provided on the outside of the air inlet pipe (29).

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