Surface-mounted crystal oscillator evaporation device

Abstract

The utility model relates to the technical field of surface-mounted crystal oscillator processing, in particular to a surface-mounted crystal oscillator evaporation device which comprises a vacuum shell, a sealing door arranged on the front face of the vacuum shell, a controller embedded in the sealing door and a vacuum assembly used for vacuumizing the interior of the vacuum shell. An electric crucible and a turn-over clamp are arranged in the vacuum shell, the turn-over clamp is arranged right above the electric crucible, the turn-over clamp is used for clamping a patch crystal oscillator to turn over, and the electric crucible is used for enabling a heating evaporation material to be evaporated or sublimated to generate gas particles; the vacuum assembly, the electric crucible and the turn-over clamp are all electrically connected with the controller. According to the utility model, double-sided evaporation can be carried out on the surface-mounted crystal oscillator, the vacuum evaporation efficiency of the surface-mounted crystal oscillator is improved, and the processing period of the surface-mounted crystal oscillator is shortened.

Description

TECHNICAL FIELD

[0001] The utility model relates to patch crystal processing technical field, concretely is a kind of patch crystal oscillator evaporation device. BACKGROUND

[0002] Patch crystal oscillator is derived from polyhedral quartz rod, first be cut into the hexahedron rod that shines, again after repeated cutting and grinding, quartz rod is finally made into a pile of thin round sheet, when processing patch crystal oscillator, double-sided vacuum evaporation coating processing is needed to circular patch crystal oscillator, vacuum evaporation coating is a kind of technology that certain material is deposited on the surface of substrate material by heating evaporation source to evaporate under vacuum condition, and the evaporated material is called evaporation material.For example, the Chinese patent with the authorization announcement No.CN214327861U discloses a kind of evaporation equipment, and the evaporation equipment includes shell, heating equipment, bearing structure and blocking structure, wherein, shell has evaporation cavity;Heating equipment is located in evaporation cavity, and heating equipment includes steam outlet, and heating equipment is used to heat material to form steam;Bearing structure is located in evaporation cavity and is located at one side of heating equipment, and bearing structure is used to carry wafer;Blocking structure includes bearing and first crystal oscillator piece on bearing, and blocking structure has first position and second position, before evaporation, blocking structure is located at first position to shield steam outlet, and first crystal oscillator piece is located at the side of bearing towards heating equipment, when detecting that evaporation is in stable state by first crystal oscillator piece, blocking structure changes from first position to second position to avoid steam outlet.The evaporation equipment realizes the monitoring of evaporation stable condition in initial evaporation, and guarantees that the material deposited on the surface of wafer after avoiding by blocking structure is more uniform.

[0003] But in actual application, the above-mentioned equipment still has the following deficiencies: since patch crystal oscillator is fixed on bearing structure, the rising evaporation gas particles can only contact one side of patch crystal oscillator, so that after single-sided patch crystal oscillator evaporation coating, patch crystal oscillator needs to be turned over manually to complete double-sided vacuum evaporation of patch crystal oscillator, and the process of manual turning over is time-consuming and laborious, which reduces the vacuum evaporation efficiency of patch crystal oscillator and prolongs the processing cycle of patch crystal oscillator. UTILITY MODEL CONTENTS

[0004] The utility model aims at the above-mentioned insufficient, provides a kind of patch crystal oscillator evaporation device, can carry out double-sided evaporation to patch crystal oscillator, improves the vacuum evaporation efficiency of patch crystal oscillator, and shortens the processing cycle of patch crystal oscillator.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical solutions:

[0006] A surface mount crystal oscillator vapor deposition apparatus includes a vacuum housing, a sealed door disposed on the front of the vacuum housing, a controller embedded in the sealed door, a vacuum assembly for evacuating the interior of the vacuum housing, an electric crucible and a flipping fixture disposed inside the vacuum housing, the flipping fixture being disposed directly above the electric crucible and used to clamp and flip the surface mount crystal oscillator, the electric crucible being used to cause the heated vapor deposition material to evaporate or sublimate to generate gas particles, and the vacuum assembly, the electric crucible and the flipping fixture being electrically connected to the controller.

[0007] Furthermore, the flipping fixture includes a flipping frame, a fixing block fixed on the flipping frame, a clamping block disposed opposite the fixing block, a clamping electric cylinder used to drive the clamping block closer to or away from the fixing block, a flipping stepper motor fixed on the side wall of the vacuum housing, rotating shafts disposed on both sides of the flipping frame, the output shaft of the flipping stepper motor driving and connecting adjacent rotating shafts, the clamping electric cylinder fixed on the flipping frame, a plurality of fixing grooves disposed on the rear side of the fixing block, and a plurality of clamping grooves disposed on the front side of the clamping block opposite the fixing grooves, wherein the fixing grooves and clamping grooves are brought together to form a clamping groove.

[0008] Furthermore, the flipping frame is provided with symmetrical sliding grooves on the left and right sides, the fixing block is fixed to the front end of the flipping frame, and the two ends of the clamping block are slidably connected in the sliding grooves.

[0009] Furthermore, the bottom of the fixing block is slidably connected to an abutment plate, which is used to drive the abutment plate to slide back and forth. The abutment cylinder is fixed to the bottom of the flipping frame, and a sensor is embedded in the abutment plate. When the abutment cylinder is in the extended state, the sensor is positioned directly opposite the clamping groove.

[0010] Furthermore, the vacuum assembly includes a vacuum pump installed on one side of the vacuum housing, a pressure sensor fixed inside the vacuum housing, and a pressure pipe connecting the pump's suction end to the pressure pipe inside the vacuum housing.

[0011] The beneficial effects of this utility model are:

[0012] In practical applications, the sealed door is opened, the surface mount crystal oscillator is clamped by the flipping fixture, the sealed door is closed, and the vacuum assembly is used to evacuate the inside of the vacuum housing. The electric crucible causes the heated vapor deposition material to evaporate or sublimate, generating gas particles. After single-sided vapor deposition, the surface mount crystal oscillator is flipped using the flipping fixture, allowing both sides of the surface mount crystal oscillator to be vapor-deposited without manual flipping, resulting in higher vapor deposition efficiency. This invention enables double-sided vapor deposition of surface mount crystal oscillators, improving the vacuum vapor deposition efficiency of surface mount crystal oscillators and shortening the processing cycle of surface mount crystal oscillators. Attached Figure Description

[0013] Figure 1This is a schematic diagram of the overall structure of this utility model;

[0014] Figure 2 This is a first-view structural schematic diagram of the flipping clamp in this utility model;

[0015] Figure 3 This is a structural schematic diagram of the flipping clamp in this utility model from a second perspective;

[0016] Reference numerals: 1. Vacuum housing; 2. Electric crucible; 3. Flipping fixture; 31. Flipping frame; 311. Rotating shaft; 312. Slide groove; 32. Fixing block; 321. Fixing groove; 33. Clamping block; 331. Clamping groove; 34. Clamping electric cylinder; 35. Flipping stepper motor; 36. Abutment plate; 37. Abutment electric cylinder; 38. Sensor; 41. Vacuum pump; 42. Pressure sensor; 43. Pressure pipe. Detailed Implementation

[0017] like Figure 1 , Figure 2 and Figure 3 As shown, a surface mount crystal oscillator vapor deposition apparatus includes a vacuum housing 1, a sealed door disposed on the front of the vacuum housing 1, a controller embedded in the sealed door, a vacuum assembly for evacuating the interior of the vacuum housing 1, an electric crucible 2 and a flipping clamp 3 disposed inside the vacuum housing 1, the flipping clamp 3 being disposed directly above the electric crucible 2, the flipping clamp 3 being used to clamp and flip the surface mount crystal oscillator, the electric crucible 2 being used to cause the heated vapor deposition material to evaporate or sublimate to generate gas particles, and the vacuum assembly, the electric crucible 2 and the flipping clamp 3 being electrically connected to the controller.

[0018] In use, open the sealed door, clamp the chip crystal oscillator with the flipping clamp 3, close the sealed door, and evacuate the vacuum housing 1 through the vacuum assembly. The electric crucible 2 causes the heated vapor deposition material to evaporate or sublimate to generate gas particles. After single-sided vapor deposition, the chip crystal oscillator is flipped with the flipping clamp 3 so that both sides of the chip crystal oscillator can be vapor deposited without manual flipping, resulting in higher vapor deposition efficiency. This utility model can perform double-sided vapor deposition on chip crystal oscillators, improving the vacuum vapor deposition efficiency of chip crystal oscillators and shortening the processing cycle of chip crystal oscillators.

[0019] like Figure 1 , Figure 2 and Figure 3As shown, the flipping fixture 3 includes a flipping frame 31, a fixing block 32 fixed on the flipping frame 31, a clamping block 33 positioned opposite the fixing block 32, a clamping electric cylinder 34 used to drive the clamping block 33 closer to or further away from the fixing block 32, a flipping stepper motor 35 fixed on the side wall of the vacuum housing 1, and rotating shafts 311 on both sides of the flipping frame 31. The output shaft of the flipping stepper motor 35 drives and connects to adjacent rotating shafts 311. The clamping electric cylinder 34 is fixed to the flipping frame. On the 31, the rear side of the fixing block 32 is provided with multiple fixing grooves 321, and the front side of the clamping block 33 is provided with multiple clamping grooves 331 facing the fixing grooves 321. The fixing grooves 321 and clamping grooves 331 are brought together to form a clamping groove. In this embodiment, the clamping block 33 is driven to approach the fixing block 32 by the clamping electric cylinder 34 to clamp the chip crystal oscillator in the clamping groove. After the single-sided vapor deposition is completed, the flipping stepper motor 35 drives the rotating shaft 311 to rotate the flipping frame 31 and the chip crystal oscillator 180° so that the chip crystal oscillator can be vapor deposited on both sides.

[0020] like Figure 1 , Figure 2 and Figure 3 As shown, the flipping frame 31 is symmetrically provided with sliding grooves 312 on the left and right sides. The fixing block 32 is fixed to the front end of the flipping frame 31. The two ends of the clamping block 33 are slidably connected in the sliding grooves 312. In this embodiment, the sliding grooves 312 guide the clamping block 33 to prevent the clamping block 33 from tilting during the sliding process.

[0021] like Figure 1 , Figure 2 and Figure 3 As shown, the bottom of the fixing block 32 is slidably connected to an abutment plate 36, and an abutment cylinder 37 is used to drive the abutment plate 36 to slide back and forth. The abutment cylinder 37 is fixed to the bottom of the flipping frame 31. A sensor 38 is embedded in the abutment plate 36. When the abutment cylinder 37 is in the extended state, the sensor 38 is positioned facing the clamping groove. In this embodiment, when placing the surface mount crystal oscillator, the abutment cylinder 37 is in the extended state, and the surface mount crystal oscillator is placed on the abutment plate 36 between the fixing groove 321 and the clamping groove 331. The sensor 38... When the chip crystal oscillator is activated, and all sensors 38 detect it, the clamping cylinder 34 drives the clamping block 33 to approach the fixing block 32, clamping the chip crystal oscillator in the clamping groove. The abutment cylinder 37 drives the abutment plate 36 to retract to the bottom of the fixing block 32. After double-sided vapor deposition is completed, the abutment cylinder 37 drives the abutment plate 36 to extend again, and the clamping cylinder 34 drives the clamping block 33 to move away from the fixing block 32, causing the chip crystal oscillator to fall back onto the abutment plate 36, allowing the chip crystal oscillator to be removed. The sensor 38 is a distance sensor, with its detection end facing upwards.

[0022] like Figure 1 ,Figure 2 and Figure 3 As shown, the vacuum assembly includes a vacuum pump 41 installed on one side of the vacuum housing 1, a pressure sensing sensor 42 fixed inside the vacuum housing 1, and a gas pressure pipe 43 connecting the pumping end of the vacuum pump 41 and the gas pressure pipe 43 inside the vacuum housing 1. In this embodiment, the vacuum pump 41 and the gas pressure pipe 43 are used to evacuate the inside of the vacuum housing 1, and the pressure sensing sensor 42 is used to detect the gas pressure inside the vacuum housing 1.

[0023] The specific embodiments described herein are merely illustrative examples of this utility model. Those skilled in the art to which this utility model pertains may make various modifications or additions to the described specific embodiments or use similar methods to replace them, without departing from the scope defined by this utility model.

Claims

1. A surface mount crystal oscillator vapor deposition apparatus, characterized in that: The device includes a vacuum housing, a sealed door located on the front of the vacuum housing, a controller embedded in the sealed door, a vacuum assembly for evacuating the interior of the vacuum housing, an electric crucible and a flipping fixture located inside the vacuum housing, the flipping fixture being positioned directly above the electric crucible and used to clamp and flip the surface mount crystal oscillator, the electric crucible being used to cause the heated vapor deposition material to evaporate or sublimate to generate gas particles, and the vacuum assembly, the electric crucible, and the flipping fixture being electrically connected to the controller.

2. The chip oscillator evaporation apparatus according to claim 1, characterized in that, The flipping fixture includes a flipping frame, a fixing block fixed on the flipping frame, a clamping block positioned opposite the fixing block, a clamping electric cylinder used to drive the clamping block closer to or away from the fixing block, a flipping stepper motor fixed on the side wall of the vacuum housing, rotating shafts on both sides of the flipping frame, the output shaft of the flipping stepper motor driving and connecting adjacent rotating shafts, the clamping electric cylinder fixed on the flipping frame, multiple fixing slots on the rear side of the fixing block, and multiple clamping slots on the front side of the clamping block opposite the fixing slots. The fixing slots and clamping slots close together to form a clamping groove.

3. The chip crystal evaporation apparatus according to claim 2, characterized in that, The flipping frame is symmetrically provided with sliding grooves on the left and right sides. The fixing block is fixed to the front end of the flipping frame, and the two ends of the clamping block are slidably connected in the sliding grooves.

4. The chip crystal evaporation apparatus according to claim 2, characterized in that, The bottom of the fixing block is slidably connected to an abutment plate, which is used to drive the abutment plate to slide back and forth. The abutment electric cylinder is fixed to the bottom of the flipping frame. A sensor is embedded in the abutment plate. When the abutment electric cylinder is in the extended state, the sensor is positioned directly opposite the clamping groove.

5. The chip crystal oscillator evaporation apparatus according to claim 1, characterized in that, The vacuum assembly includes a vacuum pump installed on one side of the vacuum housing, a pressure sensor fixed inside the vacuum housing, and a pressure pipe connecting the pump's suction end to the pressure pipe inside the vacuum housing.

Images