ALD source bottle

Abstract

The utility model discloses an ALD (atomic layer deposition) source bottle and belongs to the technical field of ALD coating equipment. The ALD source bottle comprises a bottle body, a measurement connecting pipe and a floating ball type liquid level sensor; the bottom end of the measurement connecting pipe extends into the bottle body, and the top end of the measurement connecting pipe upwards penetrates out of the bottle body in a sealing manner along the Z-axis; the floating ball type liquid level sensors are located in the bottle body, the measuring connecting pipe is connected with the multiple floating ball type liquid level sensors at intervals along the Z axis, and the multiple floating ball type liquid level sensors are used for correspondingly detecting the liquid levels of the liquid reaction source in the bottle body. The plurality of floating ball type liquid level sensors can ensure that the obtained liquid level height information is diversified, so that liquid can be supplemented into the bottle body or liquid level alarm can be prompted in time according to the obtained different liquid level height information; moreover, the floating ball type liquid level sensor with high reliability is adopted to detect the liquid level height information, so that the problem of deviation of a pressure sensing detection mode caused by repeated change of the pressure in the bottle body can be eliminated, and the accuracy and the reliability of the obtained liquid level height can be ensured.

Description

Technical Field

[0001] This utility model relates to the field of ALD coating equipment technology, and in particular to an ALD source bottle. Background Technology

[0002] ALD coating equipment specifically refers to atomic layer deposition (ALD) coating equipment, which is an advanced chemical vapor deposition technology device used to prepare thin film materials. In other words, ALD coating is a chemical vapor deposition technology based on ordered, surface self-saturating reactions. It is a method of forming a thin film by alternately pulsedly introducing reaction sources into the reaction chamber and causing a gas-solid phase chemical adsorption reaction on the surface of the deposition substrate.

[0003] When the reaction source in the ALD source bottle is liquid, it is necessary to monitor the liquid level in the ALD source bottle in a timely manner. However, since the liquid level is usually obtained by pressure sensing, the information obtained is limited and cannot be used to replenish the liquid in the ALD source bottle or issue a liquid level alarm in a timely manner. Furthermore, during the ALD coating process, the liquid reaction source in the ALD source bottle needs to be converted into gas to be introduced into the reaction chamber, which causes repeated pressure changes in the ALD source bottle. This leads to deviations in the pressure sensing detection method and cannot guarantee the accuracy and reliability of the obtained liquid level.

[0004] To address the above issues, there is an urgent need for an ALD source bottle to solve these problems. Utility Model Content

[0005] The purpose of this invention is to provide an ALD source bottle that can replenish liquid in the bottle or provide a liquid level alarm in a timely manner based on different liquid level height information, and can ensure the accuracy and reliability of the obtained liquid level height.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] ALD source bottles include:

[0008] The bottle contains a liquid reaction source.

[0009] The measuring connecting tube has its bottom end inserted into the bottle body and its top end sealed and protrudes out of the bottle body along the Z-axis.

[0010] A float-type liquid level sensor is located inside the bottle. Several float-type liquid level sensors are connected at intervals along the Z-axis on the measuring connecting pipe. The several float-type liquid level sensors are used to detect the liquid level of each liquid reaction source inside the bottle.

[0011] As an optional solution, the float-type liquid level sensor is installed at the middle liquid level position, low liquid level position, alarm liquid level position and high liquid level position of the bottle.

[0012] As an optional solution, each of the aforementioned float-type liquid level sensors can be detachably connected to the measuring connection pipe.

[0013] As an optional solution, the measuring connection tube includes:

[0014] A hollow cylindrical body extends along the Z-axis, with its bottom end extending into the bottle body and its top end sealingly extending upward along the Z-axis out of the bottle body. A float-type liquid level sensor is connected to the hollow cylindrical body.

[0015] The base plate is sealed to the bottom opening of the hollow cylindrical body;

[0016] The top plate is sealed to the top opening of the hollow cylindrical body.

[0017] As an optional solution, the distance between the base plate and the inner bottom end face of the bottle body along the Z-axis is 1mm-2mm.

[0018] As an optional solution, the float-type liquid level sensor has an upper liquid level surface and a lower liquid level surface. Among two adjacent float-type liquid level sensors along the Z-axis, the distance between the lower liquid level surface of the upper float-type liquid level sensor and the upper liquid level surface of the lower float-type liquid level sensor is the liquid level height detection range of the lower float-type liquid level sensor.

[0019] As an optional solution, the ALD source bottle further includes:

[0020] The first connecting pipe has one end inserted into the bottle body and immersed in the liquid reaction source, and the other end extends upward along the Z-axis to the outside of the bottle body. The part of the first connecting pipe extending out of the bottle body is connected to a first manual valve. The end of the first connecting pipe inserted into the bottle body is inserted into a slot on the inner bottom end face of the bottle body.

[0021] The second connecting pipe has one end inserted into the bottle and suspended above the liquid reaction source, and the other end extending upward along the Z-axis to the outside of the bottle. The part of the second connecting pipe extending out of the bottle is connected to a second manual valve.

[0022] As an optional solution, the ALD source bottle further includes:

[0023] A protective partition is disposed inside the bottle. The protective partition is used to isolate the measuring connecting tube from the first connecting tube and the second connecting tube, so that the first connecting tube and the second connecting tube are located on the same side of the protective partition, and the measuring connecting tube is located on the other side of the protective partition.

[0024] As an optional solution, the protective partition is sealed to the two inner walls of the bottle body on opposite sides, the top of the protective partition is sealed to the inner top surface of the bottle body, the bottom of the protective partition is located above the inner bottom surface of the bottle body, and along the Z-axis, the bottom surface of the float-type liquid level sensor located at the alarm liquid level height position of the bottle body is higher than the bottom surface of the protective partition.

[0025] As an optional feature, along the Z-axis, the bottom surface of the protective partition is 1mm-3mm higher than the inner bottom surface of the bottle.

[0026] The beneficial effects of this utility model are as follows:

[0027] The ALD source bottle of this invention features a measuring connecting tube whose bottom end extends into the bottle body, while its top end extends sealed upwards along the Z-axis to the outside of the bottle. Simultaneously, a float-type liquid level sensor is installed inside the bottle, and several float-type liquid level sensors are connected at intervals along the Z-axis on the measuring connecting tube. These sensors detect the liquid levels of the liquid reaction source within the bottle, allowing for the replenishment of liquid reaction source or the issuance of a liquid level alarm signal based on the detected levels. This prevents the liquid reaction source level from being too low, thus avoiding interference with the subsequent ALD coating process and ensuring its proper operation. The method utilizes several float-type liquid level sensors to detect the various liquid levels of the liquid reaction source within the bottle. On one hand, the presence of multiple float-type liquid level sensors at different heights ensures diverse liquid level information, allowing for real-time display of multiple different liquid level readings. This enables timely replenishment of liquid or alerts based on the acquired liquid level information. On the other hand, employing highly reliable float-type liquid level sensors eliminates the bias caused by repeated pressure changes within the bottle, thus ensuring the accuracy and reliability of the acquired liquid level readings. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the structure of the ALD source bottle provided by this utility model;

[0029] Figure 2 This is a schematic diagram of the internal structure of the ALD source bottle provided by this utility model. Figure 1 ;

[0030] Figure 3 This is a schematic diagram of the internal structure of the ALD source bottle provided by this utility model. Figure 2 ;

[0031] Figure 4 This is a schematic diagram of the assembly structure between the measuring connecting pipe, the float-type liquid level sensor, and the display screen provided by this utility model.

[0032] Explanation of reference numerals in the attached figures:

[0033] 1-Bottle body; 11-Slot; 2-Measuring connecting tube; 21-Hollow cylinder; 22-Bottom plate; 23-Top plate;

[0034] 3-Float-type liquid level sensor; 31-Upper liquid level; 32-Lower liquid level;

[0035] 4-First connecting pipe; 5-First manual valve; 6-Second connecting pipe; 7-Second manual valve;

[0036] 8-Protective partition; 9-Display screen. Detailed Implementation

[0037] All features disclosed in this specification, or all steps in all disclosed methods or processes, may be combined in any way, except for mutually exclusive features and / or steps.

[0038] Any feature disclosed in this specification, unless specifically stated otherwise, may be replaced by other equivalent or similar features. That is, unless specifically stated otherwise, each feature is merely one example of a series of equivalent or similar features. Throughout this specification, the same reference numerals indicate the same elements.

[0039] To make the technical problem solved by this utility model, the technical solution adopted, and the technical effect achieved clearer, the technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0040] This embodiment proposes an ALD source bottle and an ALD coating device including the ALD source bottle. Specifically, the ALD coating device refers to an Atomic Layer Deposition (ALD) coating device. This ALD source bottle can promptly replenish liquid or issue a liquid level alarm based on different acquired liquid level information, ensuring that the liquid level of the liquid reaction source within the ALD source bottle remains at a suitable working level. Furthermore, the ALD source bottle guarantees the accuracy and reliability of the acquired liquid level information. The ALD coating device is a common type of ALD coating device in the prior art; therefore, its working principle will not be described in detail here.

[0041] Specifically, such as Figures 1 to 4 As shown, the ALD source bottle includes a bottle body 1, a measuring connecting tube 2, and a float-type liquid level sensor 3. The liquid reaction source described above is placed inside the bottle body 1. The bottom end of the measuring connecting tube 2 extends into the bottle body 1, and the top end of the measuring connecting tube 2 extends sealed upwards along the Z-axis to the outside of the bottle body 1. The float-type liquid level sensors 3 are located inside the bottle body 1, and several float-type liquid level sensors 3 are connected at intervals along the Z-axis on the measuring connecting tube 2. These float-type liquid level sensors 3 are used to detect the liquid level of each liquid reaction source inside the bottle body 1. Here, the specific type of liquid reaction source is not limited and needs to be determined according to the actual ALD coating requirements. The float-type liquid level sensor 3 features high precision, high reliability, simple structure, convenient debugging, and wide applicability.

[0042] Compared to existing technologies, the ALD source bottle in this embodiment changes the method of detecting the liquid level of the liquid reaction source inside the bottle 1. The bottom end of the measuring connecting pipe 2 extends into the bottle 1, while the top end of the measuring connecting pipe 2 extends sealed upwards along the Z-axis to the outside of the bottle 1. Simultaneously, a float-type liquid level sensor 3 is installed inside the bottle 1, and several float-type liquid level sensors 3 are connected at intervals along the Z-axis on the measuring connecting pipe 2. These float-type liquid level sensors 3 detect the various liquid levels of the liquid reaction source inside the bottle 1, allowing for the replenishment of liquid reaction source into the bottle 1 or the issuance of a liquid level alarm signal based on the detected levels. This prevents the subsequent ALD coating process from being affected by excessively low liquid levels of the liquid reaction source inside the bottle 1. To ensure the normal operation of the ALD coating process, several float-type liquid level sensors 3 are used to detect the liquid levels of the liquid reaction source inside the bottle 1. On the one hand, the presence of several float-type liquid level sensors 3 at different liquid level heights ensures diverse liquid level information, i.e., it can display multiple different liquid level heights in real time, thus enabling timely replenishment of liquid into the bottle 1 or prompting of a liquid level alarm based on the different liquid level height information obtained. On the other hand, using highly reliable float-type liquid level sensors 3 for liquid level detection eliminates the problem of deviation in pressure sensing detection caused by repeated pressure changes inside the bottle 1, thereby ensuring the accuracy and reliability of the obtained liquid level height.

[0043] Furthermore, in this embodiment, the ALD source bottle only requires the addition of a measuring connection pipe 2 and a float-type liquid level sensor 3 for mutual cooperation to accurately detect the liquid level of the liquid reaction source inside the bottle 1. This eliminates the need to modify the original structure of the bottle 1, thus ensuring no additional production cost is incurred. Simultaneously, the relatively simple structure of the measuring connection pipe 2 and the float-type liquid level sensor 3 does not increase the overall structural complexity or floor space occupied by the ALD source bottle. In this embodiment, the float-type liquid level sensor 3 can specifically be a JC-661 type float-type liquid level sensor.

[0044] Furthermore, by sealing the top of the measuring connecting tube 2 upwards along the Z-axis to the outside of the bottle body 1, the sealing between the measuring connecting tube 2 and the bottle body 1 can be guaranteed, preventing the sealing effect of the entire bottle body 1 from being affected by the setting of the measuring connecting tube 2. On the other hand, it is convenient to set up a control structure that communicates with the float-type liquid level sensor 3 on the part of the measuring connecting tube 2 that extends outside the bottle body 1. This allows the control structure to receive and analyze the detection results transmitted by each float-type liquid level sensor 3, and to control the corresponding automatic liquid replenishment operation and automatic liquid level alarm operation based on the analysis, thereby ensuring a high degree of automation of the entire ALD source bottle. The control structure can adopt a common control structure in the existing technology, and the specific control principle of the control structure will not be described here.

[0045] Specifically, such as Figures 1 to 3 As shown, the bottle body 1 is specifically a sealed cylindrical structure, and can be made of stainless steel, Hastelloy, or other corrosion-resistant materials. In this embodiment, the bottle body 1 is made of 316L stainless steel, which is corrosion-resistant, high-temperature resistant, and high-strength.

[0046] Furthermore, such as Figures 2 to 4 As shown, float-type liquid level sensors 3 are installed at the middle liquid level position, low liquid level position, alarm liquid level position and high liquid level position of the bottle body 1. That is, four float-type liquid level sensors 3 are connected at intervals along the Z-axis on the measuring connecting pipe 2.

[0047] Specifically, when the float-type liquid level sensor 3 detects that the liquid level of the liquid reaction source in the bottle 1 is at the low liquid level height or the alarm liquid level height, it is necessary to replenish the liquid reaction source into the bottle 1; when the float-type liquid level sensor 3 detects that the liquid level of the liquid reaction source is at the alarm liquid level height, it issues a liquid level alarm signal, requiring immediate replenishment of the liquid reaction source into the bottle 1. This avoids the impact of the liquid level of the liquid reaction source in the bottle 1 being too low on the subsequent ALD coating process, ensuring the smooth operation of the ALD coating process. The process proceeds normally. When the float-type liquid level sensor 3 detects that the liquid level of the liquid reaction source in the bottle 1 is at the high liquid level position, it indicates that it is not necessary to add liquid reaction source to the bottle 1 at this time. The control structure can then control the amount of inert gas subsequently introduced into the bottle 1 to generate bubbles from the liquid reaction source based on the high liquid level detection result of the float-type liquid level sensor 3. That is, the corresponding ALD coating working parameters can be adjusted according to the high liquid level detection result, ensuring the quality of ALD coating while avoiding resource waste. Specifically, the inert gas mentioned above can be nitrogen.

[0048] That is, by setting the above four float-type liquid level sensors 3 at different liquid level heights on the measuring connection pipe 2, the four different liquid level information of the liquid reaction source in the bottle 1 can be obtained through the display of each float-type liquid level sensor 3. In this way, the ALD coating process can be adjusted according to the four different liquid level information to meet the matching requirements, thereby better ensuring the smooth progress of the entire ALD coating process.

[0049] Specifically, such as Figure 1 , Figure 2 and Figure 4 As shown, a display screen 9 is also provided on the part of the measuring connecting pipe 2 that extends out of the bottle body 1. The display screen 9 is communicatively connected to the control structure described above. When the liquid surface of the liquid reaction source inside the bottle body 1 contacts the float-type liquid level sensor 3 at each liquid level height position, the control structure controls the display screen 9 to display the corresponding color. For example, when the liquid surface of the liquid reaction source contacts the float-type liquid level sensor 3 at the alarm liquid level height position, the control structure controls the display screen 9 to display black; when the liquid surface of the liquid reaction source contacts the float-type liquid level sensor 3 at the low liquid level height position, the control structure controls the display screen 9 to display red; when the liquid surface of the liquid reaction source contacts the float-type liquid level sensor 3 at the medium liquid level height position, the control structure controls the display screen 9 to display blue; and when the liquid surface of the liquid reaction source contacts the float-type liquid level sensor 3 at the high liquid level height position, the control structure controls the display screen 9 to display yellow. The working liquid level of the liquid reaction source inside the bottle 1 is usually set to the above-mentioned mid-level height; the display screen 9 can adopt a display structure commonly used in the prior art.

[0050] By displaying and differentiating the liquid level of the liquid reaction source inside bottle 1 with intuitive colors, the specific liquid level of the liquid reaction source inside bottle 1 can be quickly and easily determined, avoiding errors in judging the liquid level and ensuring the speed and accuracy of determining the liquid level of the liquid reaction source.

[0051] Furthermore, each float-type level sensor 3 is detachably connected to the measuring connection pipe 2. This allows for individual removal and repair or replacement of a damaged float-type level sensor 3 without affecting the operation and maintenance of other float-type level sensors 3. This ensures good operational independence for each float-type level sensor 3 and reduces maintenance costs. Specifically, the float-type level sensor 3 can be detachably connected to the measuring connection pipe 2 using clamps. The specific detachable connection method between the float-type level sensor 3 and the measuring connection pipe 2 is not limited here.

[0052] Furthermore, such as Figures 1 to 4As shown, the measuring connecting tube 2 includes a hollow cylindrical body 21, a bottom plate 22, and a top plate 23. The hollow cylindrical body 21 extends along the Z-axis, with its bottom end extending into the bottle body 1 and its top end sealingly extending upwards along the Z-axis to the outside of the bottle body 1. Each float-type liquid level sensor 3 is connected to the hollow cylindrical body 21. The bottom plate 22 is sealed to the bottom opening of the hollow cylindrical body 21, and the top plate 23 is sealed to the top opening of the hollow cylindrical body 21, forming a long cylindrical measuring connecting tube 2. The control structure and display screen 9 are both connected to the portion of the hollow cylindrical body 21 that sealsly extends upwards along the Z-axis to the outside of the bottle body 1.

[0053] By using a hollow cylindrical body 21, the weight of the measuring connecting pipe 2 can be reduced, ensuring the overall weight of the ALD source bottle is not excessive. Furthermore, the hollow cylindrical body 21 is easier to manufacture, thus not increasing the overall production cost of the ALD source bottle. Additionally, its cylindrical structure facilitates the quick and easy installation of each float-type liquid level sensor 3 onto the hollow cylindrical body 21. Simultaneously, by sealing the top plate 23 and bottom plate 22 at the top and bottom openings of the hollow cylindrical body 21 respectively, a sealing mechanism can be achieved. By closing the top and bottom openings of the hollow cylindrical body 21, the liquid reaction source inside the bottle 1 can be prevented from flowing into the hollow cylindrical body 21 through the bottom opening. This ensures that the measuring connecting tube 2 will not interfere with the liquid reaction source inside the bottle 1, guaranteeing that the liquid reaction source is evenly distributed inside the bottle 1. Furthermore, it prevents dust and impurities from flowing into the hollow cylindrical body 21 through the top opening, thus preventing dust and impurities from entering the bottle 1 and better protecting the cleanliness of the liquid reaction source inside the bottle 1.

[0054] Specifically, along the Z-axis, the distance between the base plate 22 and the inner bottom end face of the bottle 1 is 1mm-2mm. On the one hand, this avoids the distance between the base plate 22 and the inner bottom end face of the bottle 1 being too large, which would affect the stability of the hollow cylindrical body 21 within the bottle 1, thus ensuring the stability of the placement of each float-type liquid level sensor 3 on the hollow cylindrical body 21 within the bottle 1. On the other hand, this avoids the distance between the base plate 22 and the inner bottom end face of the bottle 1 being too small, which would affect the uniform flow of the liquid reaction source to the periphery of the hollow cylindrical body 21, thus ensuring better uniformity of the flow of the liquid reaction source within the entire bottle 1.

[0055] Specifically, the hollow cylindrical body 21, the bottom plate 22, and the top plate 23 can be an integral structure to ensure the stability and sealing of the entire measuring connecting pipe 2; and the hollow cylindrical body 21, the bottom plate 22, and the top plate 23 can be made of stainless steel, Hastelloy, or other corrosion-resistant materials. In this embodiment, the hollow cylindrical body 21, the bottom plate 22, and the top plate 23 are made of 316L stainless steel.

[0056] Furthermore, such as Figure 4 As shown, the float-type liquid level sensor 3 has an upper liquid level surface 31 and a lower liquid level surface 32. The distance between the lower liquid level surface 32 of the upper float-type liquid level sensor 3 and the upper liquid level surface 31 of the lower float-type liquid level sensor 3, which is adjacent to each other along the Z-axis, is the liquid level detection range of the lower float-type liquid level sensor 3. That is, when the liquid level of the liquid reaction source inside the bottle 1 is between the lower liquid level surface 32 of the upper float-type liquid level sensor 3 and the upper liquid level surface 31 of the lower float-type liquid level sensor 3, and when the liquid level of the liquid reaction source inside the bottle 1 contacts the lower float-type liquid level sensor 3, the lower float-type liquid level sensor 3 will emit a liquid level detection signal. This ensures that the detection range of each float-type liquid level sensor 3 is large, which is beneficial for ensuring more accurate liquid level detection results.

[0057] Specifically, such as Figures 1 to 3 As shown, the ALD source bottle also includes a first connecting pipe 4 and a second connecting pipe 6. One end of the first connecting pipe 4 extends into the bottle body 1 and is immersed in the liquid reaction source. The other end of the first connecting pipe 4 extends upward along the Z-axis to the outside of the bottle body 1. A first manual valve 5 is connected to the portion of the first connecting pipe 4 extending outside the bottle body 1, allowing control of the opening and closing of the first connecting pipe 4. One end of the second connecting pipe 6 extends into the bottle body 1 and is suspended above the liquid reaction source. The other end of the second connecting pipe 6 extends upward along the Z-axis to the outside of the bottle body 1. A second manual valve 7 is connected to the portion of the second connecting pipe 6 extending outside the bottle body 1, allowing control of the opening and closing of the second connecting pipe 6. Both the first manual valve 5 and the second manual valve 7 can be common manual valves found in the prior art.

[0058] like Figure 2 and Figure 3 As shown, by setting a first connecting pipe 4 and a second connecting pipe 6 with a length difference inside the bottle body 1, that is, the first connecting pipe 4 is a long pipe and the second connecting pipe 6 is a short pipe, a pressure difference can be formed inside the bottle body 1 through the length difference between the first connecting pipe 4 and the second connecting pipe 6. This facilitates the automatic replenishment of liquid or the conversion of the liquid reaction source inside the bottle body 1 into gas to be introduced into the reaction chamber for ALD coating through the mutual cooperation between the first connecting pipe 4 and the second connecting pipe 6.

[0059] Specifically, when liquid reaction source needs to be added to bottle 1, nitrogen gas is introduced into the second connector 6 of another ALD source bottle. The nitrogen gas then presses down along the Z-axis against the liquid reaction source in bottle 1, forcing the liquid reaction source into the first connector 4. The liquid reaction source in bottle 1 is then automatically forced into the bottle 1 that needs replenishment through the first connector 4, thus achieving automatic replenishment. That is, the short-tube inlet and long-tube outlet is the automatic replenishment mode. When gas needs to be introduced into the reaction chamber for ALD coating, nitrogen gas is introduced into the first connector 4. The nitrogen gas in the first connector 4 causes bubbles to rise in the liquid reaction source, heating the liquid reaction source in bottle 1. The rising bubbles are heated to form gas, which is then automatically introduced into the reaction chamber through the second connector 6 for ALD coating. That is, the long-tube inlet and short-tube outlet is the bubble-forming mode for ALD coating.

[0060] Specifically, such as Figure 2 As shown, one end of the first connecting tube 4 extends into the bottle body 1 and is inserted into the slot 11 on the inner bottom surface of the bottle body 1. The slot 11 provides a stable limiting and fixing effect on the first connecting tube 4, avoiding the problem of the first connecting tube 4 shaking or shifting in position within the bottle body 1. This ensures that one end of the first connecting tube 4 is always immersed in the liquid reaction source, thereby ensuring that the nitrogen gas in the first connecting tube 4 can smoothly rise and bubble in the liquid reaction source.

[0061] Furthermore, such as Figure 2 As shown, the ALD source bottle also includes a protective partition 8, which is disposed inside the bottle body 1. The protective partition 8 is used to separate the measuring connecting tube 2 from the first connecting tube 4 and the second connecting tube 6, so that the first connecting tube 4 and the second connecting tube 6 are located on the same side of the protective partition 8, and the measuring connecting tube 2 is located on the other side of the protective partition 8. The protective partition 8 and the bottle body 1 can be an integral structure or a separate structure.

[0062] By installing a protective partition 8 inside the bottle body 1, the first connecting pipe 4 / second connecting pipe 6 can be separated from the measuring connecting pipe 2 / float-type liquid level sensor 3. On the one hand, when the gas flow rate generated by heating inside the bottle body 1 is too large, it can prevent the liquid reaction source inside the bottle body 1 from splashing upward under the action of the gas, which would cause abnormal measurement results of the float-type liquid level sensor 3. This can better ensure the accuracy and reliability of the detection results of the float-type liquid level sensor 3. On the other hand, it can prevent the float-type liquid level sensor 3 from shaking due to large fluctuations in the liquid surface of the liquid reaction source inside the bottle body 1 under the action of the gas. This can ensure that the float-type liquid level sensor 3 does not wobble, thereby better ensuring the accuracy and reliability of the detection results of the float-type liquid level sensor 3, and ensuring accurate detection of the remaining amount of liquid reaction source inside the bottle body 1.

[0063] Furthermore, such as Figure 2 As shown, the protective partition 8 is sealed to the two inner walls of the bottle body 1 on opposite sides, the top of the protective partition 8 is sealed to the inner top surface of the bottle body 1, the bottom of the protective partition 8 is located above the inner bottom surface of the bottle body 1, and along the Z-axis, the bottom surface of the float-type liquid level sensor 3, which is set at the alarm liquid level height position of the bottle body 1, is higher than the bottom surface of the protective partition 8.

[0064] By positioning the bottom of the protective partition 8 above the inner bottom surface of the bottle body 1, a flow gap is created between the bottom of the protective partition 8 and the inner bottom surface of the bottle body 1. This allows the liquid reaction source on both sides of the protective partition 8 to flow evenly through this gap, thus ensuring better uniformity of the liquid reaction source flow throughout the bottle body 1. Simultaneously, the bottom surface of the float-type liquid level sensor 3, located at the alarm liquid level height position, is higher than the bottom surface of the protective partition 8. This allows the protective partition 8 to completely isolate each float-type liquid level sensor 3 from the first connecting pipe 4 / second connecting pipe 6, preventing the large flow of gas generated by the first connecting pipe 4 and second connecting pipe 6 during operation from affecting each float-type liquid level sensor 3.

[0065] Specifically, such as Figure 2 As shown, along the Z-axis, the bottom surface of the protective partition 8 is 1mm-3mm higher than the inner bottom surface of the bottle 1. On the one hand, this can prevent the gap between the bottom surface of the protective partition 8 and the inner bottom surface of the bottle 1 from being too large, which would affect the isolation effect on the float-type liquid level sensor 3, thus ensuring that the first connecting pipe 4 / second connecting pipe 6 and the measuring connecting pipe 2 / float-type liquid level sensor 3 are completely isolated by the protective partition 8. On the other hand, this can prevent the gap between the bottom surface of the protective partition 8 and the inner bottom surface of the bottle 1 from being too small, which would affect the uniform flow of the liquid reaction source between the opposite sides of the protective partition 8, thus better ensuring the uniformity of the flow of the liquid reaction source within the entire bottle 1.

[0066] Specifically, the protective partition 8 can be made of stainless steel, Hastelloy, or other corrosion-resistant materials. In this embodiment, the protective partition 8 is made of 316L stainless steel.

[0067] In this embodiment, the ALD source bottle is equipped with float-type liquid level sensors 3 at various liquid level positions within the bottle body 1. This ensures diverse liquid level information, allowing for timely replenishment of liquid into the bottle body 1, liquid level alarm prompts, or adjustment of ALD coating process parameters based on the diverse liquid level information. This satisfies various requirements of the ALD coating process and prevents the liquid level of the liquid reaction source within the bottle body 1 from being too low, which could affect the ALD coating process. Furthermore, the use of float-type liquid level sensors 3 eliminates the problem of pressure sensing deviations caused by repeated pressure changes within the bottle body 1, ensuring the accuracy and reliability of the acquired liquid level.

[0068] In this embodiment, the ALD source bottle is equipped with a measuring connection tube 2 and a float-type liquid level sensor 3 that work together to make the structure of the measuring connection tube 2 and the float-type liquid level sensor 3 relatively simple, occupy a small area, and have a low cost.

[0069] In this embodiment, the ALD source bottle displays the liquid level of the liquid reaction source inside the bottle 1 using a visually appealing color, allowing for quick and easy identification of the specific liquid level. This ensures both speed and accuracy in determining the liquid level of the liquid reaction source.

[0070] In this embodiment, the ALD source bottle has a protective partition 8 inside the bottle body 1, which separates the first connecting pipe 4 / second connecting pipe 6 from the measuring connecting pipe 2 / float-type liquid level sensor 3. This prevents the liquid reaction source inside the bottle body 1 from splashing upwards under the action of gas, which could cause abnormal measurement results of the float-type liquid level sensor 3, thus ensuring the accuracy and reliability of the detection results of the float-type liquid level sensor 3. It also ensures that the float-type liquid level sensor 3 will not wobble, thereby ensuring accurate detection of the remaining amount of liquid reaction source inside the bottle body 1.

[0071] The above description is only a preferred embodiment of this utility model. For those skilled in the art, there will be changes in the specific implementation method and application scope based on the idea of ​​this utility model. The content of this specification should not be construed as a limitation of this utility model.

Claims

1. An ALD source bottle, characterized by The application relates to an ALD source bottle. The bottle body (1) is internally provided with a liquid reaction source; The measuring connecting pipe (2) is connected with the bottle body (1) and has a bottom end extending into the bottle body (1) and a top end sealingly penetrating out of the bottle body (1) along the Z axis; The float ball type liquid level sensor (3) is arranged in the bottle body (1), and a plurality of float ball type liquid level sensors (3) are arranged on the measuring connecting pipe (2) along the Z axis, and the plurality of float ball type liquid level sensors (3) are used for detecting the liquid level of the liquid reaction source in the bottle body (1).

2. The ALD source bottle of claim 1, wherein, The bottle body (1) is provided with the float ball type liquid level sensor (3) at a middle liquid level position, a low liquid level position, an alarm liquid level position and a high liquid level position.

3. The ALD source bottle of claim 1, wherein, Each float ball type liquid level sensor (3) is detachably connected to the measuring connecting pipe (2).

4. The ALD source bottle of any one of claims 1-3, wherein, The measuring connecting pipe (2) comprises: The hollow cylindrical body (21) has a length extending along the Z axis, a bottom end extending into the bottle body (1) and a top end sealingly penetrating out of the bottle body (1) along the Z axis, and the float ball type liquid level sensor (3) is connected to the hollow cylindrical body (21); The bottom plate (22) is sealingly connected to the bottom opening of the hollow cylindrical body (21); The top plate (23) is sealingly connected to the top opening of the hollow cylindrical body (21).

5. The ALD source bottle of claim 4, wherein, Along the Z axis, the spacing between the bottom plate (22) and the inner bottom end surface of the bottle body (1) is 1mm-2mm.

6. The ALD source bottle of any one of claims 1-3, wherein, The float ball type liquid level sensor (3) has an upper liquid level surface (31) and a lower liquid level surface (32), and the spacing between the lower liquid level surface (32) of the upper float ball type liquid level sensor (3) and the upper liquid level surface (31) of the lower float ball type liquid level sensor (3) is the liquid level detection range of the lower float ball type liquid level sensor (3).

7. The ALD source bottle of any one of claims 1-3, wherein, The ALD source bottle further comprises: The first connecting pipe (4) has one end extending into the bottle body (1) and immersed in the liquid reaction source and the other end penetrating out of the bottle body (1) along the Z axis, and the part of the first connecting pipe (4) penetrating out of the bottle body (1) is connected with the first manual valve (5), and the one end of the first connecting pipe (4) extending into the bottle body (1) is inserted into the insertion slot (11) on the inner bottom end surface of the bottle body (1); The second connecting pipe (6) has one end extending into the bottle body (1) and suspended above the liquid reaction source and the other end penetrating out of the bottle body (1) along the Z axis, and the part of the second connecting pipe (6) penetrating out of the bottle body (1) is connected with the second manual valve (7).

8. The ALD source bottle of claim 7, wherein, The ALD source bottle further comprises: The protective partition plate (8) is arranged in the bottle body (1), the protective partition plate (8) is used for isolating the measuring connecting pipe (2) from the first connecting pipe (4) and the second connecting pipe (6), so that the first connecting pipe (4) and the second connecting pipe (6) are located on the same side of the protective partition plate (8), and the measuring connecting pipe (2) is located on the other side of the protective partition plate (8).

9. The ALD source bottle of claim 8, wherein, The opposite sides of the protective partition (8) are respectively sealed and connected to the two inner side wall surfaces of the bottle body (1), the top end of the protective partition (8) is sealed and connected to the inner top end surface of the bottle body (1), the bottom end of the protective partition (8) is spaced above the inner bottom end surface of the bottle body (1) along the Z axis, and the bottom end surface of the floating ball type liquid level sensor (3) arranged at the alarm liquid level position of the bottle body (1) is higher than the bottom end surface of the protective partition (8).

10. The ALD source bottle of claim 9, wherein, The bottom end surface of the protective partition (8) is 1mm-3mm higher than the inner bottom end surface of the bottle body (1) along the Z axis.

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