Silicon carbide crystal annealing furnace

Abstract

The utility model discloses a silicon carbide crystal annealing furnace which comprises a supporting frame located in a furnace body, a screw rod is arranged on the supporting frame, the screw rod is located in the furnace body, the end portion of the screw rod is connected with the side wall of the supporting frame, and a transmission plate and a screw sleeve are arranged on the furnace body. The conveying plate is located on one side of the supporting frame and slidably connected with the furnace body, the threaded sleeve is located on one side of the threaded rod and located on the conveying plate, the threaded sleeve is used for being in threaded connection with the threaded rod, and a conveying mechanism is arranged on the furnace body; the device is simple in structure and reasonable in design, after raw materials on the supporting frame are processed, a worker adjusts the conveying mechanism to enable the threaded sleeve to be in threaded connection with the threaded rod, the threaded sleeve drives the threaded rod to move in the direction away from the furnace body till the raw materials on the supporting frame are separated from the furnace body, and therefore the worker does not need to hold a clamp by hand to stretch into the furnace body to take out the raw materials; and the damage of the furnace body to workers is reduced, the workers are protected, and the production safety is improved.

Description

Technical Field

[0001] This utility model relates to the technical field of annealing furnaces, specifically a silicon carbide crystal annealing furnace. Background Technology

[0002] An annealing furnace is a key piece of equipment used in the heat treatment of materials. It is primarily used to improve the internal structure of raw materials, relieve stress, and enhance mechanical and processing properties through heating and slow cooling. Annealing furnaces are widely used in the heat treatment processes of materials such as metals, glass, ceramics, and semiconductors.

[0003] The shortcomings of existing technology:

[0004] The aforementioned annealing furnace includes a furnace body with a support frame installed inside, on which raw materials are placed. After the raw materials are processed, workers need to use clamps to reach into the furnace and remove the raw materials from the support frame. During this process, workers are easily burned by the high-temperature gases inside the furnace, posing a safety hazard. Utility Model Content

[0005] The purpose of this invention is to provide a silicon carbide crystal annealing furnace to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A silicon carbide crystal annealing furnace includes a support frame located inside the furnace body. A screw is mounted on the support frame and is located inside the furnace body. The end of the screw is connected to the side wall of the support frame. A transfer plate and a screw sleeve are mounted on the furnace body. The transfer plate is located on one side of the support frame and is slidably connected to the furnace body. The screw sleeve is located on one side of the screw and on the transfer plate, and is used for threaded connection with the screw. A transfer mechanism is mounted on the furnace body, and the transfer mechanism includes:

[0008] A horizontal plate is located on the side of the transmission plate away from the support frame and is connected to the side wall of the transmission plate. The bottom of the horizontal plate is slidably connected to the bottom of the furnace body. A driving component is provided on the horizontal plate, which is connected to the horizontal plate and is used to drive the horizontal plate to move.

[0009] A transmission source is located on a transmission plate and is connected to a screw sleeve and is used to drive the screw sleeve to rotate.

[0010] Preferably, the transmission source includes:

[0011] Driven wheel, the driven wheel is located on the transmission plate and is rotatably connected to the side wall of the transmission plate;

[0012] The driving wheel is located on the transmission plate and is rotatably connected to the side wall of the transmission plate. The driving wheel is located on one side of the driven wheel and is meshed with the driven wheel.

[0013] A drive motor is located on the transmission plate and connected to the side wall of the transmission plate. The output shaft of the drive motor is coaxially connected to the drive wheel.

[0014] Preferably, the driving component includes:

[0015] A drive rod, which is located on the side of the horizontal plate away from the transmission plate and is connected to the horizontal plate;

[0016] A hydraulic cylinder is located on the furnace body, the cylinder body of the hydraulic cylinder is connected to the furnace body, and the piston rod of the hydraulic cylinder is coaxially connected to the drive rod.

[0017] Preferably, a vertical groove is vertically formed on the side of the horizontal plate near the transmission plate. A slider and a limiting mechanism are provided on the transmission plate. One side of the slider is connected to the side wall of the transmission plate, and the other side of the slider extends into the vertical groove and is connected to the side wall of the vertical groove. The limiting mechanism is located on the horizontal plate and is connected to the screw and used to limit the screw.

[0018] Preferably, the limiting mechanism includes:

[0019] A guide block is located on the side of the transmission plate near the screw and is connected to the transmission plate. A guide surface is provided on the upper part of the guide block, and the guide surface is used to slide in connection with the side wall of the screw.

[0020] There are two abutting members, which are located on both sides of the screw. Each abutting member is located on the horizontal plate and is connected to the transmission plate and is used to drive the transmission plate to move.

[0021] Preferably, the abutment member includes:

[0022] A support shaft is located on a horizontal plate and connected to the side wall of the horizontal plate. A support groove is coaxially formed on the support shaft.

[0023] A contact rod, one end of which extends into the support groove and is slidably connected to the side wall of the support groove, and the other end of which is connected to the side wall of the transmission plate;

[0024] An abutment spring is located inside a support groove. One end of the abutment spring is connected to the side wall of the support groove, and the other end of the abutment spring is connected to the end of an abutment rod.

[0025] Preferably, the horizontal plate is provided with a baffle, which is used to abut against the side wall of the slider, and the baffle is used to cover the vertical groove. The baffle is detachably connected to the horizontal plate.

[0026] Preferably, a ball bearing is provided on the side wall of the slider, one side of the ball bearing is connected to the side wall of the slider, and the other side of the ball bearing is in contact with the side wall of the vertical groove.

[0027] Compared with the prior art, the beneficial effects of this utility model are:

[0028] 1. This silicon carbide crystal annealing furnace, through the screw, screw sleeve, transfer plate and transfer mechanism set on the furnace body, after the raw material on the support frame is processed, the operator adjusts the transfer mechanism, adjusts the position of the transfer plate and screw sleeve, and makes the screw sleeve threadedly connected to the screw. The operator then adjusts the position of the transfer plate, thereby driving the screw sleeve, screw and support frame to move synchronously, so that the raw material on the support frame is separated from the furnace body. Therefore, the operator does not need to use a clamp to reach into the furnace body to remove the raw material on the support frame, thereby reducing the harm caused to the operator by the high temperature gas in the furnace body, protecting the operator and improving the safety of production and processing;

[0029] 2. This silicon carbide crystal annealing furnace, by setting a limiting mechanism, allows the screw sleeve to be transported to a set position, thereby facilitating the connection between the screw sleeve and the screw rod. This allows the operator to adjust the position of the screw sleeve, thereby driving the screw rod and the support frame to move synchronously until the raw material on the support frame is separated from the furnace body, making it convenient for the operator to operate. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0031] Figure 2 This is a partial structural diagram of the present invention, mainly showing the storage tank;

[0032] Figure 3 This is an exploded view of part of the structure of this utility model, mainly showing the transmission mechanism;

[0033] Figure 4 This is an exploded view of part of the structure of this utility model, mainly showing the support groove.

[0034] In the diagram: 1. Furnace body; 11. Support frame; 12. Support frame; 13. Storage trough; 14. Roller; 21. Screw; 22. Screw sleeve; 23. Bearing; 3. Transmission plate; 4. Transmission mechanism; 41. Horizontal plate; 42. Transmission source; 421. Driven wheel; 422. Driving wheel; 423. Drive motor; 51. Vertical groove; 52. Baffle; 53. Slider; 54. Ball bearing; 6. Driving component; 61. Hydraulic cylinder; 62. Driving rod; 7. Limiting mechanism; 71. Guide block; 72. Abutment component; 721. Support shaft; 722. Abutment spring; 723. Abutment rod; 8. Support groove. Detailed Implementation

[0035] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0036] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0037] In the description of this patent, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "setting" should be interpreted broadly. For example, they can refer to a fixed connection or setting, a detachable connection or setting, or an integrated connection or setting. Those skilled in the art can understand the specific meaning of the above terms in this patent according to the specific circumstances.

[0038] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "several" means two or more, unless otherwise explicitly specified.

[0039] Please see Figure 1-4 As shown, this utility model provides a technical solution for a silicon carbide crystal annealing furnace:

[0040] A silicon carbide crystal annealing furnace includes a furnace body 1 located on a support frame 11. A support frame 12 is installed inside the furnace body 1. The side wall of the support frame 12 is slidably connected to the inner side wall of the furnace body 1. A storage trough 13 is vertically formed on the support frame 12, and raw materials are placed in the storage trough 13. Rollers 14 and a screw 21 are installed on the support frame 12. The rollers 14 are located at the bottom of the support frame 12 and are rotatably connected to the support frame 12, thereby facilitating the movement of the support frame 12 on the furnace body 1. The end of the horizontally arranged screw 21 is located at the end of the support frame 12, and a bearing 23 is installed on the screw 21. The screw 21 is rotatably connected to the side wall of the support frame 12 through the bearing 23.

[0041] A drive component 6, a transmission mechanism 4, a transmission plate 3, and a screw sleeve 22 are installed on one side of the furnace body 1. The drive component 6 includes a hydraulic cylinder 61 and a drive rod 62. The transmission mechanism 4 includes a transmission source 42 and a horizontal plate 41. The transmission source 42 includes a drive motor 423, a drive wheel 422, and a driven wheel 421.

[0042] Hydraulic cylinder 61 is located on one side of furnace body 1, and the cylinder body of hydraulic cylinder 61 is fixedly connected to the top of support frame 11. The piston rod of hydraulic cylinder 61 is coaxially fixedly connected to drive rod 62, and the end of the horizontally arranged drive rod 62 is fixedly connected to the side wall of horizontal plate 41. The vertically arranged horizontal plate 41 is L-shaped and slidably connected to support frame 11. A vertical groove 51 is vertically opened at the top of horizontal plate 41, and a slider 53 is installed in the vertical groove 51. The vertically arranged slider 53 is located in the vertical groove 51 and slidably connected to the side wall of the vertical groove 51. A ball bearing 54 is installed on the side wall of slider 53. One side of the ball bearing 54 is rotatably connected to the side wall of slider 53, and the other side of slider 53 contacts the side wall of vertical groove 51, thereby reducing wear between slider 53 and vertical groove 51. A baffle 52 is installed on the top of the horizontal plate 41. The horizontally arranged baffle 52 is detachably connected to the horizontal plate 41 by bolts. The baffle 52 is used to cover the vertical groove 51 and to abut against the slider 53, so as to prevent the slider 53 from easily disengaging from the vertical groove 51. The vertically arranged transmission plate 3 is located on the side of the horizontal plate 41 near the furnace body 1, and the transmission plate 3 is L-shaped. The side wall of the transmission plate 3 is fixedly connected to the side wall of the slider 53. The drive motor 423 is located on the transmission plate 3 and is fixedly connected to the side wall of the transmission plate 3. The output shaft of the drive motor 423 is coaxially fixedly connected to the drive wheel 422. The side wall of the vertically arranged drive wheel 422 is rotatably connected to the side wall of the transmission plate 3. The vertically arranged driven wheel 421 is located on one side of the drive wheel 422 and is meshed with the drive wheel 422. The driven wheel 421 is rotatably connected to the side wall of the transmission plate 3. The horizontally arranged screw sleeve 22 is coaxially inserted through the driven wheel 421 and is fixedly connected to the driven wheel 421. The screw sleeve 22 is used for threaded connection with the screw 21.

[0043] After the processing on the support frame 12 is completed, the operator starts the hydraulic cylinder 61. The piston rod of the hydraulic cylinder 61 extends and retracts, driving the drive rod 62 to move coaxially, which in turn drives the horizontal plate 41, the slider 53 and the transmission plate 3 to move synchronously. When the drive rod 62 is transmitted to the set position, the side wall of the support frame 12 abuts against the inner side wall of the furnace body 1, and the end of the screw sleeve 22 abuts against the end of the screw 21. Then, the operator starts the drive motor 423. The output shaft of the drive motor 423 rotates, driving the drive wheel 422 to rotate synchronously, which in turn drives the driven wheel 421 to rotate synchronously, which in turn drives the screw sleeve 22 to rotate synchronously, so that the screw sleeve 22 is threadedly connected to the screw 21. At this time, driven by the screw 21, the support frame 12 moves away from the furnace body 1, thereby driving the raw material in the support frame 12 to move synchronously until the support frame 12 is separated from the furnace body 1. Therefore, the operator does not need to use a clamp to reach into the furnace body 1 to remove the raw material, thereby reducing the damage caused by the furnace body 1 to the operator, protecting the operator and improving production safety.

[0044] A limiting mechanism 7 is installed on the transmission plate 3. The limiting mechanism 7 includes a guide block 71 and an abutment 72. The vertically arranged guide block 71 is located on the side of the transmission plate 3 near the furnace body 1, and the side wall of the guide block 71 is fixedly connected to the side wall of the transmission plate 3. A guide surface is provided on the guide block 71, which is used to contact the screw 21, so that the screw 21 can smoothly contact the screw sleeve 22 and be transmitted into the screw sleeve 22. There are two abutment members 72, which are located on both sides of the screw sleeve 22. Each abutment member 72 includes a support shaft 721, an abutment spring 722, and an abutment rod 723. The vertically arranged support shaft 721 is located on the horizontal plate 41 and is fixedly connected to the horizontal plate 41. A support groove 8 is coaxially opened on the top of the support shaft 721. The vertically arranged abutment spring 722 is located in the support groove 8, and one end of the abutment spring 722 is fixedly connected to the bottom wall of the support groove 8. The other end of the abutment spring 722 is fixedly connected to the bottom of the abutment rod 723. One end of the vertically arranged abutment rod 723 extends into the support groove 8 and is slidably connected to the side wall of the support groove 8. The other end of the abutment rod 723 is fixedly connected to the transmission plate 3.

[0045] The transmission plate 3 and the abutment rod 723 are supported by the elastic potential energy of the abutment spring 722. At the same time, when the transmission plate 3 moves in the direction close to the support frame 12, the guide surface on the guide block 71 contacts the screw 21, and the end of the screw 21 abuts against the side wall of the screw sleeve 22. The elastic potential energy of the abutment spring 722 limits the transmission plate 3 and the screw sleeve 22, making it difficult for the screw sleeve 22 to move freely. As a result, after the drive motor 423 is started, the screw 21 moves in the direction close to the screw sleeve 22 until the screw 21 and the screw sleeve 22 are threadedly connected. Under the drive of the hydraulic cylinder 61, the screw 21 and the support frame 12 move in the direction away from the furnace body 1, which facilitates the separation of the support frame 12 from the furnace body 1.

[0046] The working principle of this utility model is as follows:

[0047] In this embodiment of a silicon carbide crystal annealing furnace, after the raw material on the support frame 12 inside the furnace body 1 has been processed, the operator starts the hydraulic cylinder 61 and the drive motor 423. The piston rod of the hydraulic cylinder 61 extends and retracts, driving the drive rod 62 to move, thereby driving the horizontal plate 41, the transmission plate 3, and the screw sleeve 22 to move synchronously. Through the elastic potential energy of the guide block 71 and the abutment spring 722, the position of the transmission plate 3 is adjusted, and then the position of the screw sleeve 22 is adjusted until the end of the screw sleeve 22 abuts against the end of the screw 21. At this time, the output shaft of the drive motor 423 rotates, driving the drive wheel 422 to rotate synchronously, thereby driving the driven wheel 421 to rotate synchronously. The rotation of screw 21 drives the screw sleeve 22 to rotate synchronously. The rotation of the screw sleeve 22 causes the screw 21 to be threadedly connected to the screw sleeve 22, thereby driving the screw 21 and the support frame 12 to move away from the furnace body 1. At this time, the operator adjusts the hydraulic cylinder 61 in the opposite direction. The piston rod of the hydraulic cylinder 61 moves away from the furnace body 1, thereby driving the drive rod 62 to move synchronously. This, in turn, drives the horizontal plate 41, the transmission plate 3, the screw sleeve 22 and the screw 21 to move synchronously until the screw 21 and the support frame 12 are separated from the furnace body 1. This eliminates the need for the operator to insert a clamp into the furnace body 1, reducing the risk of injury to the operator from the furnace body 1, protecting the operator and improving production safety.

[0048] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A silicon carbide crystal annealing furnace, comprising a support frame (12) located within the furnace body (1), characterized in that: A screw (21) is provided on the support frame (12). The screw (21) is located inside the furnace body (1). The end of the screw (21) is connected to the side wall of the support frame (12). A transmission plate (3) and a screw sleeve (22) are provided on the furnace body (1). The transmission plate (3) is located on one side of the support frame (12) and is slidably connected to the furnace body (1). The screw sleeve (22) is located on one side of the screw (21) and on the transmission plate (3). The screw sleeve (22) is used for threaded connection with the screw (21). A transmission mechanism (4) is provided on the furnace body (1). The transmission mechanism (4) includes: A horizontal plate (41) is located on the side of the transmission plate (3) away from the support frame (12) and is connected to the side wall of the transmission plate (3). The bottom of the horizontal plate (41) is slidably connected to the bottom of the furnace body (1). A driving component (6) is provided on the horizontal plate (41). The driving component (6) is connected to the horizontal plate (41) and is used to drive the horizontal plate (41) to move. A transmission source (42) is located on a transmission plate (3). The transmission source (42) is connected to a screw sleeve (22) and is used to drive the screw sleeve (22) to rotate.

2. The silicon carbide crystal annealing furnace according to claim 1, characterized in that: The transmission source (42) includes: Driven wheel (421), the driven wheel (421) is located on the transmission plate (3) and is rotatably connected to the side wall of the transmission plate (3); The driving wheel (422) is located on the transmission plate (3) and is rotatably connected to the side wall of the transmission plate (3). The driving wheel (422) is located on one side of the driven wheel (421) and is meshed with the driven wheel (421). A drive motor (423) is located on the transmission plate (3) and connected to the side wall of the transmission plate (3). The output shaft of the drive motor (423) is coaxially connected to the drive wheel (422).

3. The silicon carbide crystal annealing furnace according to claim 1, characterized in that: The driving component (6) includes: A drive rod (62) is located on the side of the cross plate (41) away from the transmission plate (3) and is connected to the cross plate (41); A hydraulic cylinder (61) is located on the furnace body (1). The cylinder body of the hydraulic cylinder (61) is connected to the furnace body (1). The piston rod of the hydraulic cylinder (61) is coaxially connected to the drive rod (62).

4. The silicon carbide crystal annealing furnace according to claim 1, characterized in that: A vertical groove (51) is vertically opened on the side of the horizontal plate (41) near the transmission plate (3). A slider (53) and a limiting mechanism (7) are provided on the transmission plate (3). One side of the slider (53) is connected to the side wall of the transmission plate (3), and the other side of the slider (53) extends into the vertical groove (51) and is connected to the side wall of the vertical groove (51). The limiting mechanism (7) is located on the horizontal plate (41). The limiting mechanism (7) is connected to the screw (21) and is used to limit the screw (21).

5. A silicon carbide crystal annealing furnace according to claim 4, characterized in that: The limiting mechanism (7) includes: Guide block (71), the guide block (71) is located on the side of the transmission plate (3) near the screw (21) and is connected to the transmission plate (3). The guide block (71) has a guide surface on its upper surface, and the guide surface is used to slide with the side wall of the screw (21). There are two abutting members (72), which are located on both sides of the screw (21). Each abutting member (72) is located on the horizontal plate (41). Each abutting member (72) is connected to the transmission plate (3) and is used to drive the transmission plate (3) to move.

6. The silicon carbide crystal annealing furnace according to claim 5, characterized in that: The abutment (72) includes: A support shaft (721) is located on a horizontal plate (41) and connected to the side wall of the horizontal plate (41). A support groove (8) is coaxially provided on the support shaft (721). Abutting rod (723), one end of which extends into the support groove (8) and is slidably connected to the side wall of the support groove (8), and the other end of which is connected to the side wall of the transmission plate (3); An abutment spring (722) is located in the support groove (8). One end of the abutment spring (722) is connected to the side wall of the support groove (8), and the other end of the abutment spring (722) is connected to the end of the abutment rod (723).

7. A silicon carbide crystal annealing furnace according to claim 4, characterized in that: A baffle (52) is provided on the horizontal plate (41). The baffle (52) is used to abut against the side wall of the slider (53). The baffle (52) is used to cover the vertical groove (51). The baffle (52) is detachably connected to the horizontal plate (41).

8. A silicon carbide crystal annealing furnace according to claim 4, characterized in that: The slider (53) has a ball (54) on its side wall. One side of the ball (54) is connected to the side wall of the slider (53), and the other side of the ball (54) is in contact with the side wall of the vertical groove (51).

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