Air floatation motion platform

Abstract

The utility model provides an air floating motion platform which comprises a base, a first driving part and air floating guide rails arranged at the two ends of the base in the first direction, a cross beam is arranged between the two air floating guide rails, the two ends of the cross beam are connected with air floating plates, and the first driving part drives the cross beam to move in the second direction. An opening is formed between at least one end, facing the cross beam, of the air floating guide rail and the base, the air floating plate is partially and movably arranged in the opening and faces the base, and airflow holes are formed in all surfaces of the air floating guide rail; air flow holes in the air floating plates generate air flow acting on the base and the air floating guide rails, generated upward air floating force and generated downward air floating force are matched with each other, air floating force generated by the two air floating plates in the first direction is matched with each other, the air floating plates are suspended above the base in the moving process of the cross beam, and the air floating plates do not make contact with the air floating guide rails. Friction among the air floating plate, the base and the air floating guide rail during moving is avoided, the air floating motion platform can be made to be light, and the motion speed and precision of the air floating motion platform can be improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the motion platform technical field, concretely relates to a light weight air floating motion platform. BACKGROUND

[0002] With the development and progress of science and technology, in some high-tech fields, the traditional mechanical guide rail platform has been unable to meet the specific needs, the mechanical guide rail due to its structural characteristics, the slider and the guide rail realize linear motion through the ball, this kind of movement mode, there is certain friction and wear, the platform precision is difficult to reach nanometer or even submicron grade, and after long-term use, the precision will gradually decrease with the wear of the guide rail.

[0003] In recent years, air floating products are widely used in some high-end technical fields, and air floating motion platforms have also begun to attract more attention, due to the non-contact design of the air floating guide rail, there is almost no wear during the movement, and high precision and high stability can be maintained for a long time, and the platform precision is more easily realized at the nanometer level.

[0004] At present, the air floating motion platform mainly has two structural forms, namely standard air floating bearing structure and air floating plate structure. Among them, the standard air floating bearing has relatively low installation requirements, and standard products can be selected, which is helpful for batch production and manufacturing, but its structure design is bulky, increases the load of the moving parts, and is not conducive to high-speed processing. The design of the air floating plate structure is more flexible, and the structure is compact, which is conducive to the lightweight of the moving parts and improves the movement speed and precision. However, the existing air floating plate structure of the air floating motion platform needs to be matched with vacuum adsorption or magnetic adsorption to make the adsorption plate suspended and stable, and the structure is relatively complex, which is not conducive to the lightweight of the moving parts. INVENTION CONTENTS

[0005] The utility model solves the technical problems of prior art, provides an air floating motion platform, which is compact in structure, convenient to arrange, can realize lightweight of the moving parts, and is stable and reliable as a whole, and has high dynamic precision.

[0006] The technical scheme adopted by the utility model to solve the above technical problems is:

[0007] A high-precision air floating motion platform structure, comprising a base, a first driving member and air floating guide rails arranged at both ends of the base along a second direction, the first direction and the second direction being perpendicular to each other in the same plane, a cross beam extending along the first direction being arranged between the two air floating guide rails, the cross beam being connected with air floating plates at both ends thereof, the first driving member driving the cross beam to move in the second direction, and a gap being present between the cross beam and the air floating guide rails;

[0008] At least the air floating guide rail has an opening between the end of the cross beam and the base, the air floating guide rail at the opening has a first side facing the base and a second side facing the cross beam, each air floating plate is partially movably arranged in the corresponding opening, and each surface of the air floating plate facing the base and the air floating guide rail is provided with an airflow hole;

[0009] When the gas is introduced into the air floating plate, the airflow generated by each airflow hole on the air floating plate acts on the base and the air floating guide rail, the upward air floating force generated by the airflow acting on the base and the downward air floating force generated by the airflow acting on the first side are matched with each other, the air floating forces generated by the two air floating plates in the first direction are matched with each other, so that the air floating plates stably float above the base during the movement of the cross beam in the second direction, and the air floating plates do not contact the air floating guide rail.

[0010] Preferably, the air floating plate is a square structure, the air floating plate outside the opening is connected with the end of the cross beam, the upward air floating force generated by the airflow acting on the base through the airflow hole on the air floating plate facing the base and the downward air floating force generated by the airflow acting on the first side through the airflow hole on the air floating plate facing the first side are matched with each other, the air floating forces generated by the airflow holes on the two air floating plates facing the second side are matched with each other, so that the air floating plates stably float above the base during the movement of the cross beam in the second direction, and the air floating plates do not contact the air floating guide rail.

[0011] Preferably, the air floating plate is wrapped outside the air floating guide rail, and the side of the air floating plate close to the other air floating plate is fixedly connected with the cross beam.

[0012] Preferably, the air floating plate is a concave structure and is wrapped at the end of the air floating guide rail facing the cross beam, or the air floating plate is an L-shaped structure, and the side of the air floating plate close to the other air floating plate is fixedly connected with the cross beam.

[0013] Preferably, the first driving member is a linear motor and is arranged between the two air floating guide rails, the first driving member includes a first mover and a first stator, the first stator is mounted on the base, and the second mover is connected with the cross beam.

[0014] Preferably, the first driving member is a linear motor and is arranged between the two air floating guide rails, the first driving member includes a first mover and a first stator, the first stator is mounted on the base, and the second mover is connected with the cross beam.

[0015] Optionally, the second driving member and the floating platform movably arranged on the cross beam are further included, the second driving member drives the floating platform to move in the first direction, the floating platform stably floats above the base during the movement, and the floating platform does not contact the cross beam.

[0016] Optionally, the floating table comprises a carrier plate arranged above the cross beam, first air floating plates arranged on both sides of the cross beam along the second direction, and a second air floating plate arranged below the cross beam, each first air floating plate is connected with the carrier plate and the second air floating plate to form a channel for the cross beam to be inserted into.

[0017] During the movement of the floating table in the first direction, the cross beam has a gap with the carrier plate, the first air floating plate and the second air floating plate, and the second air floating plate also has a gap with the base.

[0018] Optionally, the second driving member is a linear motor comprising a second stator and a second mover, the second stator is installed on the cross beam, and the carrier plate is connected with the second mover through a second connecting plate.

[0019] Optionally, the side of each first air floating plate facing the cross beam and the side of the second air floating plate facing the base are both provided with air flow holes.

[0020] The carrier plate is provided with a magnet, and the magnet cooperates with the second stator to generate a downward magnetic attraction force.

[0021] When gas is introduced into the first air floating plate and the second air floating plate, the air flow holes on the first air floating plate generate air flow acting on the cross beam, the air flow holes on the second air floating plate generate air flow acting on the base, and the downward magnetic attraction force is cooperated to make the second air floating plate suspended above the base, and the cross beam has a gap with the carrier plate, the first air floating plate and the second air floating plate.

[0022] Optionally, the side of each first air floating plate facing the cross beam and the side of the second air floating plate facing the base are both provided with air flow holes.

[0023] The side of the second air floating plate facing the base is also provided with a vacuum adsorption hole.

[0024] The second air floating plate has a first containing cavity and a second containing cavity which are not communicated with each other, the first containing cavity is communicated with the air flow hole on the second air floating plate, and the second containing cavity is communicated with the vacuum adsorption hole on the second air floating plate.

[0025] When gas is introduced into the first air floating plate and the first containing cavity, and the second containing cavity is vacuumized, the air flow holes on the first air floating plate generate air flow acting on the cross beam, the air flow holes on the second air floating plate generate air flow acting on the base, and the vacuum adsorption hole on the second air floating plate generates a downward adsorption force, so that the second air floating plate is suspended above the base, and the cross beam has a gap with the carrier plate, the first air floating plate and the second air floating plate.

[0026] Compared with the prior art, the utility model has the following advantages: based on the structure of the utility model, when the gas is passed into the air float plate, the air flow hole on the air float plate produces air flow on the base and the air float guide rail, the upward air float force and the downward air float force produced cooperate with each other, the air float force produced in the first direction cooperates with each other, the air float plate can be stably suspended above the base in the process that the crossbeam moves in the second direction without the cooperation of other components, and the air float plate does not contact the air float guide rail, thereby avoiding the friction between the air float plate and the base and the air float guide rail in the moving process, and the air float movement platform can be lightened, which is favorable for improving the movement speed and precision.

[0027] In addition, the floating table arranged on the crossbeam can be driven to move in the first direction by cooperating with the second driving member, so that the floating table can move in the first direction and the second direction. The floating table does not contact the base and the crossbeam in the process of moving in the first direction, so that the friction between the floating table and the base and the crossbeam can be avoided, and the movement in the first direction also has high speed and precision. BRIEF DESCRIPTION OF DRAWINGS

[0028] Figure 1 The utility model provides a first air float movement platform's structural schematic diagram;

[0029] Figure 2 Another structure schematic diagram of the first air float movement platform provided by the utility model;

[0030] Figure 3 For Figure 1 Position relation schematic drawing of crossbeam and floating table;

[0031] Figure 4 The utility model provides a second air float movement platform's structural schematic diagram;

[0032] Figure 5 The utility model provides a third air float movement platform's structural schematic diagram.

[0033] In the drawing: 1, base;2 - first driving member;3 - air float guide rail;31 - opening;4 - crossbeam;5 - air float plate;6 - first connecting plate;7 - second driving member;8 - floating table;81 - object plate;82 - first air float plate;83 - second air float plate;84 - magnet;9 - second connecting plate. DETAILED DESCRIPTION

[0034] To make the objects, technical solutions and advantages of the embodiments of the present application clearer, the following will be combined with the accompanying drawings to make a clear and complete description of the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only some but not all of the embodiments of the present application. The components of the embodiments of the present application described and shown in the accompanying drawings can be arranged and designed in various different configurations.

[0035] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but only represents selected embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative labor are within the scope of protection of the present application.

[0036] It should be noted that: similar reference numbers and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0037] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly placed when the product of the application is used, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0038] The features and performances of the present application are further described in detail below in combination with the embodiments.

[0039] Reference Figures 1-5 The air floating movement platform provided by the embodiments of the present application comprises a base 1, a first driving member 2, and air floating guide rails 3 extending along a second direction and arranged at both ends of the base 1 along a first direction, the first direction and the second direction are perpendicular to each other in the same plane, a cross beam 4 extending along the first direction is arranged between the two air floating guide rails 3, and the cross beam 4 is connected with air floating plates 5 at both ends thereof, the first driving member 2 drives the cross beam 4 to move in the second direction, and a gap exists between the cross beam 4 and the air floating guide rails 3;

[0040] At least one end of the air floating guide rail 3 towards the cross beam 4 and the base 1 has an opening 31, the air floating guide rail 3 at the opening 31 has a first side facing the base 1 and a second side facing the cross beam 4, each air floating plate 5 is partially movably arranged in the corresponding opening 31, and airflow holes (not shown in the figure) are arranged on each surface of the air floating plate 5 facing the base 1 and the air floating guide rail 3;

[0041] When the gas is introduced into the air float plate 5, the air flow holes on the air float plate 5 generate air flow on the base 1 and the air float guide rail 3, the upward air float force and the downward air float force generated are matched with each other, the air float forces generated by the two air float plates 5 in the first direction are matched with each other, so that the air float plate 5 is suspended above the base 1 during the movement of the cross beam 4 in the second direction, and the air float plate 5 does not contact the air float guide rail 3.

[0042] The cross beam 4 can be placed on the product to be processed, and the cross beam 4 is driven to move in the second direction by the first driving member 2, so that the product to be processed placed on the cross beam 4 moves in the second direction, so as to process the product to be processed.

[0043] The base 1 can be made of marble material, of course, other materials can also be used, as long as the base 1 has good load stability.

[0044] When it is necessary to drive the cross beam 4 to move in the second direction, the gas is introduced into the air float plate 5, that is, the air float plate 5 has a cavity containing gas, which is communicated with the external gas supply device, the gas supply device injects gas (such as compressed air) into the cavity, each air flow hole on the air float plate 5 is communicated with the cavity, and the gas in the cavity is discharged through each air flow hole to generate air flow on the base 1 and the air float guide rail 3, the upward air float force and the downward air float force generated can be matched with each other, and the air float forces generated by the two air float plates 5 in the first direction can also be matched with each other, so that the cross beam 4 can be moved in the second direction without additional magnetic attraction or vacuum adsorption, that is, the air float plate 5 is stably suspended above the base 1 during the movement of the cross beam 4 in the second direction, and the air float plate 5 does not contact the air float guide rail 3, that is, there is a gap between the air float plate 5 and the base 1 and the air float guide rail 3, so as to avoid friction between the air float plate 5 and the base 1 and the air float guide rail 3 during the movement, and the air float movement platform can be lightened, which is beneficial to improve the movement speed and precision.

[0045] The first driving member 2 of the embodiment can be a linear motor, which can be arranged between the two air float guide rails 3, or one linear motor can be arranged at each air float guide rail 3. When the first driving member 2 is a linear motor, it includes a first mover and a first stator. When the first driving member 2 is arranged between the two air float guide rails 3, the first stator can be mounted on the base 1, and the second mover is connected with the cross beam 4.

[0046] During the movement of the cross beam 4 in the second direction, the first stator is fixed, the first mover is connected with the cross beam 4, and the first mover is driven to move in the second direction by using the working principle of the linear motor, so that the cross beam 4 moves in the second direction, and the air float plate 5 does not contact the base 1 and the air float guide rail 3 during the movement.

[0047] Reference Figures 1-2The opening 31 of the embodiment is similar to an "L" shape, i.e., the first edge and the second edge are combined into a shape similar to an "L", and the first edge and the second edge are connected to each other and perpendicular to each other.

[0048] In one specific embodiment, with continued reference to Figures 1-2 The air floating guide rail 3 only needs to be provided with the opening 31 between the end facing the cross beam 4 and the base 1. The air floating plate 5 is a square structure, which is located between the base 1, the air floating guide rail 3 and the cross beam 4, and the air floating plate 5 outside the opening 31 is connected to the end of the cross beam 4, and the air floating plate 5 is only provided with the airflow holes on the side facing the base 1, the first edge and the second edge. The airflow generated by the airflow holes on the air floating plate 5 facing the base 1 acts on the base 1 to generate upward air floating force, and the airflow generated by the airflow holes on the air floating plate 5 facing the first edge acts on the first edge to generate downward air floating force, which cooperate with each other, and the air floating force generated by the airflow holes on the two air floating plates 5 facing the second edge act on the second edge to cooperate with each other, so that the air floating plate 5 stably floats above the base 1 during the movement of the cross beam 4 in the second direction, and the air floating plate 5 does not contact with the air floating guide rail 3, i.e., the air floating plate 5 does not contact with the first edge and the second edge.

[0049] In this embodiment, if one first driving member 2 is correspondingly provided at each air floating guide rail 3, and the first driving member 2 is a linear motor, the first stator can be installed on the air floating guide rail 3, and the first mover is connected to the cross beam 4 through the first connecting plate 6.

[0050] It can be understood that when the air floating plate 5 is not aerated, the air floating plate 5 contacts with the base 1, and at this time, there is a gap between the air floating plate 5 and the first edge and the second edge, and the gap value needs to meet that when the air floating plate 5 is aerated, the air floating plate 5 does not contact with the first edge, the second edge and the base 1.

[0051] In another implementable embodiment, with reference to Figure 4 The air floating plate 5 is wrapped outside the air floating guide rail 3, and the side of the air floating plate 5 close to the other air floating plate 5 is fixedly connected to the cross beam 4.

[0052] In this embodiment, the air floating guide rail 3 can be provided in a shape similar to a "T" character, i.e., as Figure 4The cross section of the air floating guide rail 3 is "T" shape. The air floating guide rail 3 has an opening 31 between the end facing the beam 4 and the base 1, and has another opening between the end away from the beam 4 and the base 1. The air floating plate 5 is covered on the outer side of the air floating guide rail 3. When the air floating plate 5 is not aerated, the air floating plate 5 is in contact with the base 1. At this time, there is a gap between the air floating plate 5 and each surface of the air floating guide rail 3 except the top surface. Of course, there can be a gap between the air floating plate 5 and each surface of the air floating guide rail 3. The gap can make the air floating plate 5 not in contact with each surface of the air floating guide rail 3 when the air floating plate 5 is aerated, and the air floating plate 5 is suspended above the base 1 (i.e. not in contact with the base 1).

[0053] It can be understood that in this embodiment, the upward air floating force generated by each air floating plate 5 and the downward air floating force generated by each air floating plate 5 can also be matched with each other. The air floating forces generated by the two air floating plates 5 in the first direction can be matched with each other, so that the air floating plate 5 is not in contact with each surface of the base 1 and the air floating guide rail 3.

[0054] In another embodiment, referring to Figure 5 , the air floating plate 5 is a concave structure, which is covered on the end of the air floating guide rail 3 facing the beam 4, or the air floating plate 5 is an L-shaped structure. The side of the air floating plate 5 close to the other air floating plate 5 is fixedly connected with the beam 4.

[0055] In this embodiment, the air floating guide rail 3 can be arranged as a structure similar to "7" shape, or can be arranged as Figure 5 a structure similar to "T" shape. That is, the opening 31 can be arranged only between the end of the air floating guide rail 3 facing the beam 4 and the base 1, or the opening 31 can be arranged between the end of the air floating guide rail 3 facing the beam 4 and the base 1, and another opening can be arranged between the end away from the beam 4 and the base 1. The concave air floating plate 5 is sleeved on the protruding part of the air floating guide rail 3 close to the beam 4, or the end of the L-shaped air floating plate 5 is inserted into the opening 31 close to the beam 4.

[0056] If the air floating plate 5 is a concave structure, when the air floating plate 5 is not aerated, the air floating plate 5 is in contact with the base 1. At this time, there is a gap between the air floating plate 5 and each surface of the air floating guide rail 3 except the top surface. Of course, there can be a gap between the air floating plate 5 and each surface of the air floating guide rail 3. The gap can make the air floating plate 5 not in contact with each surface of the air floating guide rail 3 when the air floating plate 5 is aerated, and the air floating plate 5 is suspended above the base 1 (i.e. not in contact with the base 1).

[0057] If the air floating plate 5 is L-shaped, when the air floating plate 5 is not aerated, the air floating plate 5 is in contact with the base 1, at this time, there is a gap between the air floating plate 5 and each surface of the air floating rail 3, the gap can make the air floating plate 5 not in contact with each surface of the air floating rail 3 and the base 1 when the air floating plate 5 is aerated, and the air floating plate 5 is suspended above the base 1.

[0058] Similar to the previous two embodiments, the upward air floating force generated by each air floating plate 5 cooperates with the downward air floating force, and the air floating forces generated by the two air floating plates 5 in the first direction cooperate with each other, so that the air floating plate 5 is not in contact with each surface of the air floating rail 3 and the base 1.

[0059] The specific values of the gaps in each state in each embodiment are not specifically limited, and the number, size and air flow pressure of each air flow hole of each surface of the air floating plate 5 are also not specifically limited, as long as the embodiment can be realized, so that the air floating plate 5 does not contact the base 1 and the air floating rail 3 during movement in the second direction, and the air floating plate 5 can be stably suspended above the base 1.

[0060] In a further preferred embodiment, the air floating motion platform of the embodiment further comprises a second driving member 7 and a floating table 8 movably sleeved on the cross beam 4, the second driving member 7 drives the floating table 8 to move in the first direction, the floating table 8 is stably suspended above the base 1 during movement, and the floating table 8 does not contact the cross beam 4.

[0061] The product to be processed, such as a wafer or a battery piece, can be placed on the floating table 8, and the floating table 8 is driven by the second driving member 7 to move in the first direction, so that the product to be processed placed on the floating table 8 can move in the first direction and the second direction.

[0062] The floating table 8 can be stably suspended above the base 1 during movement, and the floating table 8 does not contact the cross beam 4, so as to avoid friction between the floating table 8 and the base 1 and the cross beam 4, thereby improving the movement speed and precision in the first direction, and cooperating with the movement in the second direction, so that the air floating motion platform has high movement speed and precision during movement.

[0063] Specifically, referring to Figure 3 , the floating table 8 comprises a carrier plate 81 arranged above the cross beam 4, first air floating plates 82 arranged on both sides of the cross beam 4 along the second direction, and a second air floating plate 83 arranged below the cross beam 4, the two first air floating plates 82 are respectively connected with the carrier plate 81 and the second air floating plate 83 to form a channel for the cross beam 4 to insert, that is, after the cross beam 4 passes through the channel, the two ends thereof are respectively connected with the corresponding air floating plate 5, so that the floating table 8 is sleeved on the cross beam 4.

[0064] During the movement of the floating platform 8 in the first direction, gaps are formed between the cross beam 4 and the object plate 81, the first air floating plate 82 and the second air floating plate 83, and between the second air floating plate 83 and the base 1, so as to avoid friction between the floating platform 8 and the base 1 and the cross beam 4 during the movement of the floating platform 8.

[0065] The second driving member 7 of the embodiment can also be a linear motor, which comprises a second mover and a second stator. The second stator can be mounted on the cross beam 4, and the object plate 81 is connected with the second mover through the second connecting plate 9.

[0066] In one specific embodiment, referring to Figure 3 The side of each first air floating plate 82 facing the cross beam 4 and the side of the second air floating plate 83 facing the base 1 are provided with air flow holes (not shown in the figure);

[0067] The object plate 81 is provided with a magnet 84, which cooperates with the second stator to generate a downward magnetic attraction force.

[0068] When the first air floating plate 82 and the second air floating plate 83 are filled with gas, the air flow holes on the first air floating plate 82 generate air flow acting on the cross beam 4, and the air flow holes on the second air floating plate 83 generate air flow acting on the base 1, which cooperates with the downward magnetic attraction force to make the second air floating plate 83 stably suspended above the base 1, and gaps are formed between the cross beam 4 and the object plate 81, the first air floating plate 82 and the second air floating plate 83.

[0069] It can be understood that the magnet 84 is arranged above the second stator, and the magnet 84 and the second stator are of opposite magnetic poles, so as to generate a downward magnetic attraction force.

[0070] In another way, magnets can also be arranged on the object plate 81 and the cross beam 4. In order to better describe, the magnet arranged on the object plate 81 is named as a first magnet, and the magnet arranged on the cross beam 4 is named as a second magnet. The first magnet is arranged above the second magnet, and the first magnet and the second magnet are of opposite magnetic poles, so as to generate a downward magnetic attraction force.

[0071] Similar to the air floating plate 5, the first air floating plate 82 and the second air floating plate 83 also have accommodating cavities for accommodating gas. The accommodating cavities in the first air floating plate 82 and the second air floating plate 83 are in communication with an external gas supply device, and the gas supply device supplies gas (such as compressed air) to the accommodating cavities. The air flow holes on the first air floating plate 82 are in communication with the accommodating cavity in the first air floating plate 82, and the air flow holes on the second air floating plate 83 are in communication with the accommodating cavity in the second air floating plate 83.

[0072] When the first air float plate 82 and the second air float plate 83 are not aerated, the second air float plate 83 is in contact with the base 1, and at this time, the cross beam 4 and the object plate 81, the second air float plate 83, and each first air float plate 82 have a certain gap value, which needs to meet the condition that when the first air float plate 82 and the second air float plate 83 are aerated to make the second air float plate 83 suspended above the base 1, the cross beam 4 and the object plate 81, the second air float plate 83, and each first air float plate 82 still have a gap (i.e., not in contact) to ensure that the floating table 8 does not rub against the cross beam 4 during movement.

[0073] When it is necessary to drive the floating table 8 to move in the first direction, the accommodation cavities in the first air float plate 82 and the second air float plate 83 are supplied with gas, so that the gas flow holes on the first air float plate 82 and the second air float plate 83 generate gas flow, the gas flow generated by the gas flow holes on the first air float plate 82 acts on the cross beam 4 to generate air float force towards the first air float plate 82, and the air float force generated by the two first air float plates 82 on both sides of the cross beam 4 cooperate with each other; the gas flow generated by the gas flow holes on the second air float plate 83 acts on the base 1 to generate upward air float force, which cooperates with the downward magnetic attraction force to enable the floating table 8 to stably suspend above the base 1 during movement in the first direction, and the object plate 81, each first air float plate 82, and the second air float plate 83 are not in contact with the cross beam 4, so as to maintain high-precision and high-stability movement for a long time.

[0074] In another implementable manner, the side of the first air float plate 82 facing the cross beam 4 and the side of the second air float plate 83 facing the base 1 are also provided with gas flow holes, and the side of the second air float plate 83 facing the base 1 is also provided with vacuum adsorption holes;

[0075] The second air float plate 83 has a first accommodation cavity and a second accommodation cavity which are not in communication with each other, the first accommodation cavity is in communication with the gas flow holes on the second air float plate 83, and the second accommodation cavity is in communication with the vacuum adsorption holes on the second air float plate 83; when gas is supplied into the first air float plate 82 and the first accommodation cavity, and the second accommodation cavity is vacuumized, the gas flow holes on the first air float plate 82 generate gas flow acting on the cross beam 4, the gas flow holes on the second air float plate 83 generate gas flow acting on the base 1, and the vacuum adsorption holes on the second air float plate 83 generate downward adsorption force, so that the second air float plate 83 is stably suspended above the base 1, and the cross beam 4 has a gap with the object plate 81, the first air float plate 82, and the second air float plate 83.

[0076] It can be understood that the second accommodating cavity is communicated with the external vacuum generating device, when it is needed to move the floating table 8 in the first direction, the second accommodating cavity is vacuumized by the vacuum generating device, so that the downward suction force of the vacuum suction hole is generated, the upward air floating force generated by the air flow hole on the second air floating plate 83 acts on the base 1, and the air floating force generated by the two first air floating plates 82 acting on the cross beam 4 is matched, so that the floating table 8 is stably suspended above the base 1 during movement in the first direction, and the object plate 81, the first air floating plate 82 and the second air floating plate 83 are not in contact with the cross beam 4.

[0077] The embodiment does not specifically limit the specific values of the gaps between the object plate 81, the first floating plate 82, the second floating plate 83 and the cross beam 4 in various states and the gap between the second floating plate 83 when it is suspended above the base 1, and does not specifically limit the number, size and air flow pressure generated by each air flow hole of the air flow holes on the first air floating plate 82 and the second air floating plate 83, and does not specifically limit the number, size and suction force generated by each vacuum suction hole of the vacuum suction holes on the second air floating plate 83, as long as the embodiment can be realized, so that the floating table 8 can be stably suspended above the base 1 during movement in the first direction and not in contact with the cross beam 4.

[0078] Through the design of the embodiment, the floating table can be stably suspended above the base during movement in the first direction, and is not in contact with the base and the cross beam, so as to avoid friction between the floating table and the base and the cross beam, so that the movement in the first direction can maintain high precision and high stability for a long time.

[0079] Similarly, the air floating plate is not in contact with the base and the air floating guide rail during movement of the floating table in the second direction, so as to avoid friction between the air floating plate and the base and the air floating guide rail, and the air floating plate can be stably suspended above the base during movement in the second direction without additional cooperation of the vacuum suction force or the magnetic suction force, so as to make the moving part lightweight, which can further improve the movement speed and precision, so as to maintain high precision and high stability during long-time movement.

[0080] The above embodiments are only used to illustrate the design idea and characteristics of the utility model, and the purpose is to enable those skilled in the art to understand the content of the utility model and implement it, and the protection scope of the utility model is not limited to the above embodiments. Therefore, any equivalent changes or modifications made according to the principles and design ideas disclosed in the utility model are within the protection scope of the utility model.

Claims

1. An air-floating motion platform, characterized in that: The device includes a base, a first driving member, and air-bearing guide rails extending along a second direction at both ends of the base along a first direction. The first direction and the second direction are perpendicular to each other in the same plane. A crossbeam extending along the first direction is provided between the two air-bearing guide rails. Air-bearing plates are connected to both ends of the crossbeam. The first driving member drives the crossbeam to move in the second direction. There is a gap between the crossbeam and the air-bearing guide rails. At least one end of the air flotation guide rail facing the crossbeam has an opening between it and the base. The air flotation guide rail at the opening has a first side facing the base and a second side facing the crossbeam. Each air flotation plate is partially movable in the corresponding opening, and airflow holes are opened on each side of the air flotation plate facing the base and the air flotation guide rail. When gas is introduced into the air flotation plate, the airflow holes on the air flotation plate generate airflow that acts on the base and the air flotation guide rail. The resulting upward and downward air buoyancy forces work together. The air buoyancy forces generated by the two air flotation plates in the first direction work together, so that the air flotation plates are stably suspended above the base during the movement of the crossbeam in the second direction, and the air flotation plates do not contact the air flotation guide rail.

2. The air-floating motion platform according to claim 1, characterized in that: The air flotation plate has a square structure. The air flotation plate located outside the opening is connected to the end of the crossbeam. The airflow generated by the airflow holes on the air flotation plate facing the base creates an upward buoyancy force on the base. This force is combined with the downward buoyancy force generated by the airflow generated by the airflow holes on the air flotation plate facing the first side. The airflow generated by the airflow holes on the two air flotation plates facing the second side creates an upward buoyancy force on the second side. This combination ensures that the air flotation plate is stably suspended above the base during the movement of the crossbeam in the second direction, and the air flotation plate does not contact the air flotation guide rail.

3. The air-floating motion platform according to claim 1, characterized in that: The air flotation plate covers the outside of the air flotation guide rail, and the side of the air flotation plate closest to another air flotation plate is fixedly connected to the crossbeam.

4. The air-floating motion platform according to claim 1, characterized in that: The air flotation plate has a U-shaped structure and covers the end of the air flotation guide rail facing the crossbeam, or the air flotation plate has an L-shaped structure; the side of the air flotation plate closest to the other air flotation plate is fixedly connected to the crossbeam.

5. An air-floating motion platform according to any one of claims 1-4, characterized in that: The first driving component is a linear motor, which is set between two air-bearing guide rails. The first driving component includes a first moving part and a first stator. The first stator is mounted on the base, and the second moving part is connected to the crossbeam.

6. The air-floating motion platform according to claim 2, characterized in that: Each air-bearing guide rail is equipped with a first driving component, which is a linear motor, including a first moving part and a first stator. The first stator is installed on the air-bearing guide rail, and the first moving part is connected to the crossbeam through a first connecting plate.

7. An air-floating motion platform according to any one of claims 1-4 and 6, characterized in that: It also includes a second driving component and a floating platform movably mounted on the crossbeam. The second driving component drives the floating platform to move in a first direction. During the movement, the floating platform is stably suspended above the base, and the floating platform does not contact the crossbeam.

8. The air-floating motion platform according to claim 7, characterized in that: The floating platform includes a carrying plate above the crossbeam, first air flotation plates on both sides of the crossbeam along the second direction, and a second air flotation plate below the crossbeam. Each first air flotation plate is connected to the carrying plate and the second air flotation plate to form a channel for the crossbeam to be inserted. During the movement of the floating platform in the first direction, there are gaps between the crossbeam and the load plate, the first air flotation plate and the second air flotation plate, and there is also a gap between the second air flotation plate and the base.

9. The air-floating motion platform according to claim 8, characterized in that: The second driving component is a linear motor, which includes a second stator and a second mover. The second stator is mounted on the crossbeam, and the load plate is connected to the second mover through a second connecting plate.

10. The air-floating motion platform according to claim 9, characterized in that: Each of the first air flotation plates has airflow holes on the side facing the crossbeam and the second air flotation plate has airflow holes on the side facing the base. Magnets are mounted on the carrier plate, and the magnets work together with the second stator to generate a downward magnetic attraction force; When gas is introduced into the first and second air flotation plates, the airflow holes on the first air flotation plate generate airflow that acts on the crossbeam, and the airflow holes on the second air flotation plate generate airflow that acts on the base. Combined with the downward magnetic attraction, the second air flotation plate is suspended above the base, and there are gaps between the crossbeam and the carrier plate, as well as between the first and second air flotation plates.

11. The air-floating motion platform according to claim 9, characterized in that: Each of the first air flotation plates has airflow holes on the side facing the crossbeam and the second air flotation plate has airflow holes on the side facing the base. The second air flotation plate also has vacuum adsorption holes on the side facing the base; The second air flotation plate has a first accommodating cavity and a second accommodating cavity that are not interconnected. The first accommodating cavity is connected to the airflow holes on the second air flotation plate, and the second accommodating cavity is connected to the vacuum adsorption holes on the second air flotation plate. When gas is introduced into the first air flotation plate and the first receiving cavity, and the second receiving cavity is evacuated, the airflow holes on the first air flotation plate generate airflow that acts on the crossbeam, and the airflow holes on the second air flotation plate generate airflow that acts on the base. The vacuum adsorption holes on the second air flotation plate generate a downward adsorption force, causing the second air flotation plate to suspend above the base. There are gaps between the crossbeam and the carrier plate, and between the first and second air flotation plates.

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