Four-probe probe with storage module
By integrating a storage module and an encryption chip into the four-probe probe, the lifespan of the probe can be monitored and verified securely, solving the problems of insufficient lifespan monitoring and low security in existing technologies, and improving measurement accuracy and security.
Patent Information
- Application Number
- CN202520194787.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-07
- Publication Date
- 2026-02-17
- Estimated Expiration
- 2035-02-07
AI Technical Summary
Existing four-probe probes cannot monitor lifespan in semiconductor testing, leading to decreased measurement accuracy and a lack of security measures, posing a risk of unauthorized access.
Design a four-probe probe with a storage module, integrating a storage chip and an encryption chip. Transmit lifespan recording data and encrypted ID data through an outgoing cable to achieve probe lifespan monitoring and security verification.
Effective monitoring of probe lifespan ensures measurement accuracy, and encrypted ID verification prevents unauthorized access, thus enhancing probe security and reliability.
Smart Images
Figure CN223926503U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to the technical field of semiconductor testing, specifically relates to a four-probe probe with storage module. BACKGROUND
[0002] The existing four-probe probe is usually connected with four probes to contact the semiconductor to be measured and connected with the collection system to realize detection sampling in the semiconductor testing process. However, the user cannot know the remaining service life of the probe in the long-term use process, so the probe cannot be replaced in time before the expected service life ends, the service life of the probe may exceed the expectation, and the accuracy of measurement is affected. Moreover, the existing four-probe probe does not have corresponding safety settings and cannot prevent illegal access, and the use safety and reliability need to be improved. UTILITY MODEL CONTENTS
[0003] The utility model aims at providing a four-probe probe with storage module to solve the above problems in the prior art.
[0004] In order to realize the above purpose, the utility model adopts the following technical scheme:
[0005] The utility model provides a four-probe probe with storage module, including probe main part, the inside of probe main part is equipped with probe row, storage module and lead-out cable row, the probe row includes four sampling probes and two communication probes, the lead-out cable row includes six lead-out cables, the storage module includes storage chip and encryption chip, the four sampling probes and two communication probes are connected with the six lead-out cables of lead-out cable row respectively, and the other end of six lead-out cables is used for docking with external collection board, the other end of four sampling probes all extends to the outside of probe main part, and the other end of two communication probes is electrically connected with storage chip and encryption chip respectively, the storage chip is used for outputting service life record data, and the encryption chip is used for outputting encryption ID data.
[0006] When the probe is applied, the external acquisition board can be connected with the probe through the lead-out cable array, and the encrypted ID data and the service life record data can be transmitted to the external acquisition board through the two communication probes. The external acquisition board can receive the encrypted ID data and decrypt the ID data to perform ID verification. If the ID verification is passed, the subsequent connection with the four-probe probe is performed to ensure the security of data interaction between the four-probe probe and the external acquisition board and prevent illegal access. Meanwhile, the external acquisition board can receive the service life record data to determine the service life of the four-probe probe. If the service life of the four-probe probe is within the range, the four-probe probe can continue to be connected for semiconductor testing. When the semiconductor testing is performed, the four sampling probes can be used to contact the semiconductor material to be tested to sample data in the semiconductor testing process. The four sampling probes transmit the test sampling data to the corresponding lead-out cable, and the lead-out cable transmits the test sampling data to the external acquisition board. The external acquisition board uses the test sampling data of the four sampling probes to complete four-probe method testing analysis of the semiconductor material to obtain corresponding test results.
[0007] In a possible design, the probe body is provided with a fixed penetration plate, the storage module is arranged on the fixed penetration plate, and the four sampling probes penetrate the fixed penetration plate, and the two communication probes are inserted into the fixed penetration plate and are electrically connected with the storage chip and the encryption chip. When the probe is applied, the fixed penetration plate is convenient for integrating the storage chip and the encryption chip, and is convenient for inserting the probe array to limit and protect the probe array.
[0008] In a possible design, the probe body includes a main housing and an upper cover plate, the probe array, the storage module, the lead-out cable array and the fixed penetration plate are arranged in the main housing, and the upper cover plate is detachably connected with the main housing. When the probe is applied, the main housing, the probe array, the storage module, the lead-out cable array and the fixed penetration plate in the main housing can be effectively protected by covering the main housing with the upper cover plate. The upper cover plate and the main housing are detachably connected, which is convenient for assembly and disassembly.
[0009] In one possible design, the probe body further comprises a pressing block and a terminal, one side of the main shell is provided with a mounting slot, and the pressing block and the terminal are assembled in the mounting slot; the pressing block is used for pressing and limiting the terminal, and one end of the terminal is connected with the lead cable row.
[0010] In one possible design, the terminal is perpendicular to the probe row in the direction of connection. In application, by setting the direction of connection of the terminal perpendicular to the probe row, the overall length of the four-probe probe can be effectively reduced, and the structural layout of the four-probe probe can be optimized, so that the four-probe probe is more compact and applicable.
[0011] In one possible design, one end of the main shell is provided with a detachable lower fixed penetrating cover plate, and the sampling probes pass through the lower fixed penetrating cover plate and extend out of the lower fixed penetrating cover plate. In application, the four sampling probes passing through the lower fixed penetrating cover plate can be effectively limited, and the lower fixed penetrating cover plate is detachably connected with the main shell, so that the assembly and disassembly of the lower fixed penetrating cover plate and the sampling probes are facilitated.
[0012] In one possible design, the sampling probes are copper alloy probes or tungsten alloy probes. In application, the copper alloy probes or tungsten alloy probes have excellent electrical conductivity and wear resistance, and can improve the test stability.
[0013] In one possible design, the four sampling probes are arranged in a linear equal interval, and the interval between the two adjacent sampling probes is in the range of 0.2mm-2mm. In application, by arranging the four sampling probes in a linear equal interval and setting the corresponding interval, the four-probe probe can be universally applicable to various test conditions.
[0014] Beneficial effects: the four sampling probes and two communication probes are designed, and the storage module is arranged to save the service life record data and encrypted ID data, so that the service life of the probe can be effectively monitored during each test, the user is reminded to replace the probe in time, the accuracy of each measurement is ensured, the safety and reliability of the probe test are effectively improved, and illegal access is prevented. BRIEF DESCRIPTION OF DRAWINGS
[0015] In order to more clearly illustrate the technical solutions of the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiment or prior art description. Obviously, the drawings in the following description only constitute some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.
[0016] Fig. 1 It is an overall assembly structure diagram of the present application.
[0017] Fig. 2 It is an exploded view of the present application.
[0018] Fig. 3 It is a schematic diagram of the probe array setting structure of the present application.
[0019] In the figure: 1, main shell; 2, probe array; 21, sampling probe; 22, communication probe; 3, storage module; 4, lead cable array; 5, fixed through plate; 6, upper cover plate; 7, pressing block; 8, terminal; 9, lower fixed through cover plate. DETAILED DESCRIPTION
[0020] It should be noted that the description of these embodiments is used to help understand the present application, but does not constitute a limitation of the present application. The specific structure and functional details disclosed in this paper are only used to describe the example embodiments of the present application. However, the present application can be embodied in many alternative forms, and should not be understood as limited in the embodiments described herein.
[0021] It should be understood that, unless otherwise explicitly specified and limited, the corresponding terms should be broadly understood, for example, "connection" can be fixedly connected, or detachably connected, or integrally connected; can be electrically connected, can be directly connected, or indirectly connected through an intermediate medium, can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the embodiments can be understood according to the specific circumstances.
[0022] In the following description, specific details are provided to facilitate a full understanding of the example embodiments. However, those skilled in the art should understand that the example embodiments can be implemented without these specific details. For example, systems can be shown in block diagrams to avoid unnecessary details that make examples unclear. In other embodiments, well-known processes, structures and techniques can not be shown in unnecessary details to avoid obscuring the embodiments.
[0023] Embodiment 1:
[0024] The embodiment provides a four-probe probe head with a storage module, as shown inFigs. 1 to 3 As shown, it comprises a probe body, the inside of the probe body is provided with a probe row 2, a storage module 3 and a lead-out cable row 4, the probe row 2 comprises four sampling probes 21 and two communication probes 22, the lead-out cable row 4 comprises six lead-out cables, the storage module 3 comprises a storage chip and an encryption chip, the four sampling probes 21 and the two communication probes 22 are respectively connected with the six lead-out cables of the lead-out cable row 4, and the other end of the six lead-out cables is used for docking with an external collection board, the other end of the four sampling probes 21 extends to the outside of the probe body, the other end of the two communication probes 22 is respectively electrically connected with the storage chip and the encryption chip, the storage chip is used for outputting service life record data, and the encryption chip is used for outputting encrypted ID data.
[0025] In specific implementation, the lead-out cable row 4 can be electrically connected with the external collection board, the encrypted ID (identity number) data is outputted through the encryption chip, the service life record data is outputted through the storage chip, the encrypted ID data and the service life record data are respectively transmitted to the corresponding lead-out cables by the two communication probes 22, and then the encrypted ID data and the service life record data are respectively transmitted to the external collection board by the corresponding two lead-out cables. The external collection board can receive the encrypted ID data and perform decryption processing to obtain decrypted ID data, perform ID verification on the decrypted ID data, and perform subsequent docking processing with the four-probe probe after the ID verification is passed, and does not allow testing if the ID verification is not passed, so as to ensure the safety of data interaction between the four-probe probe and the external collection board. At the same time, the external collection board can receive the service life record data to judge the service life of the four-probe probe, if it is still within the expected service life of the four-probe probe, the four-probe probe can continue to be docked for semiconductor testing, if it has exceeded the expected service life, the user is prompted to replace the probe, so as to ensure the accuracy of the test. When performing semiconductor testing, the four sampling probes 21 can be used to contact the semiconductor material to be tested to sample data in the semiconductor testing process, the four sampling probes 21 transmit the test sampling data to the corresponding lead-out cables, and then the test sampling data is transmitted to the external collection board by the corresponding lead-out cables, and the external collection board completes four-probe method test analysis on the semiconductor material by using the test sampling data of the four sampling probes 21 to obtain the corresponding test result. The storage chip can adopt an electrically erasable programmable read-only memory (EEPROM), and the encryption chip can adopt an FS88x6 series encryption chip or an LKT series encryption chip.
[0026] Further, the probe body is provided with a fixed penetrating plate 5, the storage module 3 is arranged on the fixed penetrating plate 5, the four sampling probes 21 penetrate the fixed penetrating plate 5, and the two communication probes 22 are inserted into the fixed penetrating plate 5 and electrically connected with the storage chip and the encryption chip respectively. In specific implementation, the fixed penetrating plate 5 facilitates the integration of the storage chip and the encryption chip, and facilitates the insertion of the probe row 2, thereby playing a limiting protection role on the probe row 2.
[0027] Further, the probe body comprises a main shell 1 and an upper cover plate 6, the probe row 2, the storage module 3, the lead-out cable row 4 and the fixed penetrating plate 5 are arranged in the main shell 1, and the upper cover plate 5 is detachably connected with the main shell 1. In specific implementation, the main shell 1 is effectively protected by covering the upper cover plate 6 with the main shell 1, and the upper cover plate 6 is detachably connected with the main shell 1, thereby facilitating assembly and disassembly.
[0028] Further, the probe body further comprises a pressing block 7 and a wiring terminal 8, one side of the main shell 1 is provided with a mounting slot, the pressing block 7 and the wiring terminal 8 are assembled in the mounting slot, the pressing block 7 is used for pressing the wiring terminal 8 to limit the wiring terminal 8, and one end of the wiring terminal 8 is connected with the lead-out cable row 4. In specific implementation, the lead-out cable row 4 and the external collection board are connected through the wiring terminal 8, thereby realizing signal transmission between the lead-out cable row 4 and the external collection board. The pressing block 7 and the wiring terminal 8 are assembled in the mounting slot, and the wiring terminal 8 is pressed by the pressing block 7, thereby effectively limiting and fixing the wiring terminal 8 to prevent the wiring terminal 8 from loosening during use.
[0029] Further, the docking direction of the wiring terminal 8 is perpendicular to the probe row 2. In specific implementation, the docking direction of the wiring terminal 8 is set to be perpendicular to the probe row 2, thereby effectively reducing the overall length of the four-probe probe, optimizing the structural layout of the four-probe probe, and making the four-probe probe smaller and more suitable.
[0030] Further, one end of the main shell 1 is provided with a detachable lower fixed penetrating cover plate 9, and the sampling probes 21 penetrate the lower fixed penetrating cover plate 9 and extend out of the lower fixed penetrating cover plate 9. In specific implementation, the four sampling probes 21 penetrating the lower fixed penetrating cover plate 9 are effectively limited by the lower fixed penetrating cover plate 9, and the lower fixed penetrating cover plate 9 is detachably connected with the main shell 1, thereby facilitating assembly and disassembly of the lower fixed penetrating cover plate 9 and the sampling probes 21.
[0031] Further, the sampling probes 21 are made of copper alloy probes or tungsten alloy probes. In specific implementation, the copper alloy probes or tungsten alloy probes have excellent electrical conductivity and wear resistance, thereby improving test stability.
[0032] Further, the four sampling probes 21 are arranged in a line at equal intervals, and the interval between the two adjacent sampling probes 21 is in the range of 0.2mm-2mm. In the specific implementation, through the line arrangement at equal intervals and the corresponding interval setting between the sampling probes 21, the four-probe probe can be universally applicable to various test working conditions.
[0033] Finally, it should be noted that: the above only for the preferred embodiments of the present application, and not for limiting the scope of the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the scope of protection of the present application.
Claims
1. A four-probe probe with a tape storage module, characterized by, The probe main body is internally provided with a probe row (2), a storage module (3) and an outgoing cable row (4), the probe row (2) comprises four sampling probes (21) and two communication probes (22), the outgoing cable row (4) comprises six outgoing cables, the storage module (3) comprises a storage chip and an encryption chip, the four sampling probes (21) and the two communication probes (22) are respectively connected with the six outgoing cables of the outgoing cable row (4), and the other ends of the six outgoing cables are used for docking with an external acquisition board, the other ends of the four sampling probes (21) all extend out of the probe main body, the other ends of the two communication probes (22) are respectively electrically connected with the storage chip and the encryption chip, the storage chip is used for outputting service life record data, and the encryption chip is used for outputting encrypted ID data.
2. A four-probe probe with storage module according to claim 1, characterized in that, The probe main body is internally provided with a fixed penetrating plate (5), the storage module (3) is arranged on the fixed penetrating plate (5), the four sampling probes (21) penetrate through the fixed penetrating plate (5), and the two communication probes (22) are inserted into the fixed penetrating plate (5) and are electrically connected with the storage chip and the encryption chip respectively.
3. A four-probe probe with storage module according to claim 2, characterized in that, The probe main body comprises a main shell (1) and an upper cover plate (6), the probe row (2), the storage module (3), the outgoing cable row (4) and the fixed penetrating plate (5) are arranged in the main shell (1), and the upper cover plate (6) is detachably connected with the main shell (1).
4. A four-probe probe head with storage module according to claim 3, characterized in that The probe main body further comprises a pressing block (7) and a wiring terminal (8), one side of the main shell (1) is provided with a mounting slot, the pressing block (7) and the wiring terminal (8) are assembled in the mounting slot, the pressing block (7) is used for pressing the wiring terminal (8) and limiting the wiring terminal (8), and one end of the wiring terminal (8) is connected with the outgoing cable row (4).
5. A four-probe probe head with storage module according to claim 4, characterized in that The docking direction of the wiring terminal (8) is perpendicular to the probe row (2).
6. A four-probe probe head with storage module according to claim 3, characterized in that One end of the main shell (1) is provided with a detachable lower fixed penetrating cover plate (9), the sampling probe (21) penetrates through the lower fixed penetrating cover plate (9) and extends out of the lower fixed penetrating cover plate (9).
7. The four-probe probe with storage module according to claim 1, characterized in that, The sampling probe (21) is a copper alloy probe or a tungsten alloy probe.
8. The four-probe probe with storage module according to claim 1, characterized in that, The four sampling probes (21) are arranged in a one-word equal-interval mode, and the interval between the two adjacent sampling probes (21) is within the range of 0.2mm-2mm.