Scanning electron microscope sample stage fixing device for nanoindentation experiment

Abstract

The utility model relates to the technical field of mechanical property detection and observation, and discloses a scanning electron microscope sample stage fixing device for a nanometer press-in experiment, which comprises a press-in test bed, a scanning electron microscope sample stage body is arranged on the upper side of the press-in test bed, an L-shaped supporting table is fixedly arranged on the rear side of the upper end of the press-in test bed, and a clamping groove is formed in the upper end of the L-shaped supporting table. A circle center hole groove is formed in the middle of the upper end of the press-in test bed. According to the utility model, the scanning electron microscope sample stage body with an observation sample is placed on the press-in test bench, and the locking mechanism and the two groups of fixing mechanisms are matched to fix the scanning electron microscope sample stage body, so that the stability of the scanning electron microscope sample stage body is enhanced, and the press-in detection precision is not influenced; meanwhile, mounting and dismounting of the scanning electron microscope sample table body on the press-in test table can be rapidly completed, the insertion column and the scanning electron microscope sample table body can be ejected upwards through the electric telescopic rod, a worker can conveniently use tweezers for clamping and transferring, operation is convenient, use is flexible, and efficiency is high.

Description

Technical Field

[0001] This utility model relates to the field of mechanical property testing and observation technology, specifically a scanning electron microscope sample stage fixing device for nano-indentation experiments. Background Technology

[0002] In the case of micro-samples, due to their small size, micro-nano indentation testing is required before transferring the samples to scanning electron microscopes or other detection devices for observation of the damage morphology. During the transfer of deformed samples from the indentation test stage to the observation stage, external forces may cause new deformations. Furthermore, in a single indentation test, only a few samples on the stage are subjected to indentation, and in subsequent collections, indented and non-indented samples are easily confused, making it difficult to identify the corresponding indented sample during electron microscopy. Even if an indented sample is observed, the different orientations of the sample on the indentation test stage and the observation stage prevent accurate observation of the indentation-damaged surface.

[0003] To address the aforementioned issues and avoid directly transferring the sample from the indentation stage to the observation stage, a new method is adopted: fixing the scanning electron microscope (SEM) sample stage to the indentation stage, performing indentation testing, and then directly transferring the sample stage and the entire sample to the SEM stage for observation. During this process, it is necessary to ensure that the accuracy of the indentation testing is not affected, and to facilitate quick fixing and disassembly of the scanning electron microscope (SEM) sample stage. Utility Model Content

[0004] (a) Technical problems to be solved

[0005] The purpose of this invention is to provide a scanning electron microscope (SEM) sample stage fixing device for nano-indentation experiments to solve the problem mentioned in the background art. In order to avoid directly transferring the sample from the indentation experimental stage to the observation experimental stage, the current method involves fixing the SEM sample stage to the indentation experimental stage, performing indentation detection, and then directly transferring the sample stage and the entire sample to the SEM experimental stage for observation. During this process, it is necessary to ensure that the accuracy of the indentation detection is not affected, and to facilitate quick fixing and disassembly of the scanning sample stage.

[0006] (II) Technical Solution

[0007] To achieve the above objectives, this utility model provides the following technical solution: a scanning electron microscope sample stage fixing device for nano-indentation experiments, comprising an indentation test stage, a scanning electron microscope sample stage body disposed on the upper side of the indentation test stage, an L-shaped support platform fixedly installed on the rear side of the upper end of the indentation test stage, a central hole groove opened in the middle of the upper end of the indentation test stage, an electric telescopic rod fixedly installed on the bottom inner side of the central hole groove, an insertion post fixedly installed on the bottom of the scanning electron microscope sample stage body, the insertion post being inserted into the central hole groove, a communicating inner groove opened in the upper inner part of the indentation test stage, a locking mechanism for locking the insertion post disposed in the communicating inner groove, and two sets of fixing mechanisms for fixing the scanning electron microscope sample stage body symmetrically disposed on the left and right sides of the upper end of the indentation test stage.

[0008] Preferably, the locking mechanism includes a motor, a threaded rod, and two movable plates. The motor is fixedly installed on the rear right side of the inner groove. The threaded rod is fixedly installed on the output shaft of the motor. The left end of the threaded rod is rotatably installed on the left wall of the inner groove. The two ends of the threaded rod are symmetrically provided with threads in opposite directions of rotation, and the two ends of the threaded rod are symmetrically threaded to the movable plates.

[0009] The above technical solution enables the motor to drive the threaded rod to rotate, thereby controlling the movement of the two moving plates towards or away from each other.

[0010] Preferably, the locking mechanism further includes two inserts and two slots. Inserts are fixedly installed at the middle of the relatively close ends of the two movable plates. Corresponding slots are opened at the left and right ends of the insert post, and the two inserts are inserted into the corresponding two slots.

[0011] With the above technical solution, when the two moving plates move closer to each other, the two inserts are inserted into the corresponding slots to lock the inserts, thereby restricting the inserts from moving stably within the central slot.

[0012] Preferably, the movable end of the electric telescopic rod is fixedly installed with a top column, and the bottom of the insertion column is provided with a corresponding positioning groove, and the top column is inserted into the positioning groove.

[0013] With the above technical solution, after the entire indentation test is completed, the electric telescopic rod is activated to push the insertion post and the scanning electron microscope sample stage body to rise smoothly, making it convenient to use tweezers to clamp the insertion post and transfer the scanning electron microscope sample stage body to the scanning electron microscope test stage for observation.

[0014] Preferably, each set of fixing mechanisms includes a column, a fixing plate, and a lifting plate. The column is rotatably mounted on the pressing test bench, the upper end of the column is fixedly mounted with a fixing plate, and the middle outer side of the column is movably fitted with a lifting plate.

[0015] With the above technical solution, the column can rotate freely on the press-in test platform. When it is necessary to strengthen and fix the scanning electron microscope sample stage, the column is rotated to move the fixing plate above the scanning electron microscope sample stage. The pressing lifting plate is then used to press and fix the plate onto the scanning electron microscope sample stage for further reinforcement and stability.

[0016] Preferably, each set of fixing mechanisms further includes a threaded hole, a threaded post, and a handle. The fixing plate has a threaded hole, and a threaded post is threaded through the threaded hole. A handle is fixedly installed at the upper end of the threaded post, and the lower end of the threaded post is rotatably installed on the lifting plate.

[0017] Using the above technical solution, the staff grasps and rotates the handle, causing the threaded column to rotate, thereby pushing the lifting plate down and pressing it to the scanning electron microscope sample stage for further reinforcement and stability.

[0018] Preferably, a cylinder is fixedly installed on the lower side of the top of the L-shaped support platform, and a pressing control device is fixedly installed on the output end of the cylinder. A pressing head is provided at the bottom of the pressing control device, and the center of the pressing head is on the same vertical line as the center of the scanning electron microscope sample stage.

[0019] Using the above technical solution, after fixing the position of the scanning electron microscope sample stage, the cylinder is activated to push the pressing control device downward, and the pressing head performs a pressing experiment on the sample on the scanning electron microscope sample stage.

[0020] Compared with the prior art, this utility model provides a scanning electron microscope sample stage fixing device for nanoindentation experiments, which has the following advantages:

[0021] This invention comprises a pressing test stage, an L-shaped support stage, a scanning electron microscope (SEM) sample stage, a central slot, a post, an electric telescopic rod, a connecting inner groove, a locking mechanism, a fixing mechanism, a top column, a positioning groove, a cylinder, a pressing control device, and a pressing head. The SEM sample stage with the sample to be observed is placed on the pressing test stage. The locking mechanism quickly locks the post in place, ensuring stability. Two sets of fixing mechanisms further secure the SEM sample stage, enhancing its stability and ensuring the accuracy of the pressing test is not affected. The locking and fixing mechanisms can quickly fix the SEM sample stage and also quickly disassemble it from the pressing test stage. The electric telescopic rod can push the post along with the SEM sample stage upwards, facilitating the transfer of the sample using tweezers. The invention is convenient, flexible, and efficient. Attached Figure Description

[0022] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0023] Figure 2 This is a schematic diagram of the orthographic section of the present invention;

[0024] Figure 3 This is a cross-sectional view of the present invention.

[0025] Figure 4 This utility model Figure 2 Enlarged structural diagram at point A in the middle;

[0026] Figure 5 This utility model Figure 2 Enlarged structural diagram at point B.

[0027] In the diagram: 1. Press-in test bench; 2. L-shaped support platform; 3. Scanning electron microscope sample stage body; 4. Central hole slot; 5. Insert column; 6. Electric telescopic rod; 7. Connecting inner groove; 8. Locking mechanism; 801. Motor; 802. Threaded rod; 803. Moving plate; 804. Insert block; 805. Slot; 9. Fixing mechanism; 901. Column; 902. Fixing plate; 903. Lifting plate; 904. Threaded hole; 905. Threaded column; 906. Handle; 10. Top column; 11. Positioning groove; 12. Cylinder; 13. Press-in control device; 14. Press head. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0029] Example 1:

[0030] like Figure 1-4 As shown, the present invention provides a scanning electron microscope sample stage fixing device for nano-indentation experiments, including an indentation test stage 1, a scanning electron microscope sample stage body 3 on the upper side of the indentation test stage 1, an L-shaped support platform 2 fixedly installed on the upper rear side of the indentation test stage 1, a central hole groove 4 opened in the middle of the upper end of the indentation test stage 1, an electric telescopic rod 6 fixedly installed on the bottom inner side of the central hole groove 4, a pin 5 fixedly installed on the bottom of the scanning electron microscope sample stage body 3, the pin 5 being inserted into the central hole groove 4, a connecting inner groove 7 opening in the upper inner part of the indentation test stage 1 communicating with the central hole groove 4, a locking mechanism 8 for locking the pin 5 being provided in the connecting inner groove 7, and two sets of fixing mechanisms 9 for fixing the scanning electron microscope sample stage body 3 symmetrically arranged on the left and right sides of the upper end of the indentation test stage 1.

[0031] Specifically, the locking mechanism 8 includes a motor 801, a threaded rod 802, and two movable plates 803. The motor 801 is fixedly installed on the rear right side of the inner groove 7. The threaded rod 802 is fixedly installed on the output shaft of the motor 801. The left end of the threaded rod 802 is rotatably mounted on the left wall of the inner groove 7. The outer ends of the threaded rod 802 are symmetrically provided with threads in opposite directions of rotation, and the outer ends of the threaded rod 802 are symmetrically threaded to the movable plates 803. The advantage is that starting the motor 801 drives the threaded rod 802 to rotate, controlling the relative movement of the two movable plates 803 towards or away from each other.

[0032] Specifically, the locking mechanism 8 also includes two insert blocks 804 and two slots 805. Insert blocks 804 are fixedly installed at the center of the relatively close ends of the two moving plates 803. Corresponding slots 805 are provided at both ends of the insertion post 5, and the two insert blocks 804 are inserted into the corresponding slots 805. The advantage is that when the two moving plates 803 move closer together, the two insert blocks 804 are inserted into the corresponding slots 805, locking the insertion post 5 and thus preventing it from moving stably within the central hole slot 4.

[0033] Specifically, a top post 10 is fixedly installed at the movable end of the electric telescopic rod 6, and a corresponding positioning groove 11 is opened at the bottom of the insertion post 5. The top post 10 is inserted into the positioning groove 11. The advantage is that after the entire insertion test is completed, the electric telescopic rod 6 is activated, pushing the insertion post 5 and the scanning electron microscope sample stage 3 to rise smoothly. This makes it convenient to use tweezers to hold the insertion post 5 and transfer the scanning electron microscope sample stage 3 to the scanning electron microscope test stage for observation.

[0034] Example 2:

[0035] like Figure 1 and Figure 5 As shown, this is an improvement on the previous embodiment. Specifically, each set of fixing mechanisms 9 includes a column 901, a fixing plate 902, and a lifting plate 903. The column 901 is rotatably mounted on the pressing test table 1, the fixing plate 902 is fixedly mounted on the upper end of the column 901, and the lifting plate 903 is movably sleeved on the outer side of the middle part of the column 901. The advantage is that the column 901 can rotate freely on the pressing test table 1. When it is necessary to strengthen and fix the scanning electron microscope sample stage 3, the column 901 is rotated to move the fixing plate 902 above the scanning electron microscope sample stage 3, and the downward-pressing lifting plate 903 is used to pressurize and fix it on the scanning electron microscope sample stage 3 for further reinforcement and stability.

[0036] Specifically, each fixing mechanism 9 also includes a threaded hole 904, a threaded post 905, and a handle 906. The fixing plate 902 has a threaded hole 904, through which the threaded post 905 is threaded. The handle 906 is fixedly installed at the upper end of the threaded post 905, and the lower end of the threaded post 905 is rotatably mounted on the lifting plate 903. The advantage is that the operator can grasp the handle 906 and rotate it, causing the threaded post 905 to rotate, thereby pushing the lifting plate 903 down and pressing it against the scanning electron microscope sample stage 3 for further reinforcement and stability.

[0037] Specifically, a cylinder 12 is fixedly installed on the lower side of the top of the L-shaped support stage 2. A pressing control device 13 is fixedly installed on the output end of the cylinder 12. A pressing head 14 is provided at the bottom of the pressing control device 13, and the center of the pressing head 14 is on the same vertical line as the center of the scanning electron microscope sample stage 3. The advantage is that after the position of the scanning electron microscope sample stage 3 is fixed, the cylinder 12 is activated, pushing the pressing control device 13 downward, and the pressing head 14 performs a pressing experiment on the sample on the scanning electron microscope sample stage 3.

[0038] In use, the operator first evenly distributes the sample on the scanning electron microscope (SEM) sample stage 3, then places the SEM sample stage 3 on the pressing test stage 1. The bottom insert 5 is inserted into the central slot 4, and the top post 10 on the electric telescopic rod 6 is inserted into the positioning slot 11. The motor 801 is started, driving the threaded rod 802 to rotate, controlling the two moving plates 803 to move closer together, driving the two insert blocks 804 to insert into the two slots 805 on the insert 5, thus locking the insert 5. Further rotating the two columns 901 rotates the fixing plate 902 to the top of the SEM sample stage 3. The handle 906 is grasped and rotated, driving the threaded post 905 to rotate. The lifting plate 903 is pushed down and pressed and fixed onto the scanning electron microscope sample stage 3 for further reinforcement and stability. Finally, the cylinder 12 is activated to push the pressing control device 13 downward. The pressing head 14 presses the sample on the scanning electron microscope sample stage 3 for pressing experiment. After the pressing experiment is completed, the pressing control device 13 is returned to its original position, the locking mechanism 8 is released from locking the insertion post 5, and the two sets of fixing mechanisms 9 are released from pressing and fixing the scanning electron microscope sample stage 3. The electric telescopic rod 6 is activated, and the top column 10 pushes out the insertion post 5, making it easy to use tweezers to hold the insertion post 5. Thus, the scanning electron microscope sample stage 3 and the sample are transferred together to the scanning electron microscope test stage for observation.

[0039] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A scanning electron microscope sample stage fixation device for nanoindentation experiments, comprising an indentation test stage (1), characterized in that: The upper side of the indentation test bench (1) is provided with a scanning electron microscope sample table body (3), the upper end rear side of the indentation test bench (1) is fixedly installed with an L-shaped support table (2), the upper end middle part of the indentation test bench (1) is provided with a circular hole groove (4), the inner side bottom of the circular hole groove (4) is fixedly installed with an electric telescopic rod (6), the bottom of the scanning electron microscope sample table body (3) is fixedly installed with a plug-in column (5), the plug-in column (5) is inserted into the circular hole groove (4), the inner side of the upper end of the indentation test bench (1) is provided with a communication inner groove (7) which is communicated with the circular hole groove (4), the communication inner groove (7) is provided with a locking mechanism (8) which locks the plug-in column (5), and the upper end left and right sides of the indentation test bench (1) are symmetrically provided with two groups of fixing mechanisms (9) which fix the scanning electron microscope sample table body (3).

2. The SEM sample holder fixing device for nanoindentation experiment according to claim 1, wherein: The locking mechanism (8) comprises a motor (801), a threaded rod (802) and two moving plates (803), the right end rear side in the communication inner groove (7) is fixedly installed with the motor (801), the output shaft of the motor (801) is fixedly installed with the threaded rod (802), the left end of the threaded rod (802) is rotatably installed on the left wall of the communication inner groove (7), the outer sides of the two ends of the threaded rod (802) are symmetrically provided with threads which rotate in opposite directions, and the outer sides of the two ends of the threaded rod (802) are symmetrically connected with the moving plates (803) through threads.

3. The SEM sample holder fixation device for nanoindentation experiments according to claim 2, wherein: The locking mechanism (8) further comprises two plug-in blocks (804) and two plug-in grooves (805), one end of each of the two moving plates (803) is fixedly installed with the plug-in block (804), the left and right ends of the plug-in column (5) are provided with corresponding plug-in grooves (805), and the two plug-in blocks (804) are inserted into the corresponding two plug-in grooves (805).

4. The SEM sample holder fixation device for nanoindentation experiments according to claim 1, wherein: The movable end of the electric telescopic rod (6) is fixedly installed with a top column (10), the bottom of the plug-in column (5) is provided with a corresponding positioning groove (11), and the top column (10) is inserted into the positioning groove (11).

5. The SEM sample holder fixation device for nanoindentation experiments according to claim 1, wherein: Each group of the fixing mechanism (9) comprises a stand column (901), a fixed plate (902) and a lifting plate (903), the stand column (901) is rotatably installed on the indentation test bench (1), the upper end of the stand column (901) is fixedly installed with the fixed plate (902), and the middle part outer side of the stand column (901) movably sheathes the lifting plate (903).

6. The SEM sample holder fixation device for nanoindentation experiments according to claim 5, wherein: Each group of the fixing mechanism (9) further comprises a threaded hole (904), a threaded column (905) and a rotating handle (906), the fixed plate (902) is provided with the threaded hole (904), the threaded hole (904) is threadedly connected with the threaded column (905), the upper end of the threaded column (905) is fixedly installed with the rotating handle (906), and the lower end of the threaded column (905) is rotatably installed on the lifting plate (903).

7. The SEM sample holder fixation device for nanoindentation experiments of claim 1, wherein: The top end lower side of the L-shaped supporting table (2) is fixedly installed with a gas cylinder (12), the output end of the gas cylinder (12) is fixedly installed with a pressing control device (13), the bottom of the pressing control device (13) is provided with a pressing head (14), and the center of the pressing head (14) is on the same vertical line with the center of the scanning electron microscope sample table body (3).

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