Foup clamping device and pick-and-place equipment

Abstract

The utility model relates to the technical field of mechanical clamps, in particular to a Foup clamping device and picking and placing equipment, which comprises a base, two clamping plates, a limiting mechanism and a locking mechanism, the clamping plates are in an L shape, a sliding groove is formed between the bottom face of the base and the clamping plates, the locking mechanism comprises a linkage rod and two locking assemblies arranged on the two sides of the base, the two locking assemblies and the two clamping plates are arranged in a one-to-one correspondence mode, each locking assembly comprises a mounting base, an elastic piece and a locking block, and the bottom face of each mounting base is upwards concavely provided with a telescopic cavity. The locking blocks are slidably connected to the inner wall of the telescopic cavity in a lifting mode, the two ends of the elastic piece elastically abut against the top wall of the telescopic cavity and the top faces of the locking blocks correspondingly, the bottom ends of the locking blocks can stretch into the sliding grooves from top to bottom, extrusion slopes are arranged on the outer sides of the bottom ends of the locking blocks, and the two ends of the linkage rod are fixedly connected with the locking blocks of the two locking assemblies correspondingly. The Foup clamping device is simple in structure, low in cost, convenient to operate and good in Foup clamping stability.

Description

TECHNICAL FIELD

[0001] The utility model relates to mechanical clamp technical field especially is a kind of Foup clamping device and taking and placing equipment. BACKGROUND

[0002] Foup (Foup, Front-Opening Unified Pod) is a special container used for storing and transporting wafers in semiconductor manufacturing, to ensure that wafers are not contaminated and physically damaged during the manufacturing process, and is essential for the protection of wafers and efficient production. The Foup clamping device is used to clamp the top plate of the Foup to facilitate the transfer of the Foup. The structure of the Foup clamping device in the prior art is various, such as: the Chinese patent document with application number 202323155525.6 discloses a clamping device and robot, the Chinese patent document with application number 202320297346.7 discloses a wafer box clamping device, and the Chinese patent document with application number 202322536135.7 discloses a wafer transfer clamping arm. The structures disclosed in the above patent documents are complex, increase the cost, and are inconvenient to operate.

[0003] Therefore, the defect is very obvious, and a solution needs to be provided. UTILITY MODEL CONTENT

[0004] In order to solve the above technical problems, the purpose of the utility model is to provide a Foup clamping device and taking and placing equipment.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A Foup clamping device, comprising a base, two clamping plates oppositely installed on both sides of the base, a limiting mechanism installed at one end of the base, and a locking mechanism installed at the other end of the base; the clamping plate is L-shaped, a sliding groove is formed between the bottom surface of the base and the clamping plate, the locking mechanism comprises a linkage rod and two locking assemblies arranged on both sides of the base, the two locking assemblies are respectively and one-to-one arranged with the two clamping plates, the locking assembly comprises a mounting seat, an elastic member and a locking block, the bottom surface of the mounting seat is upwardly recessed with an expansion cavity, the locking block is connected to the inner wall of the expansion cavity in a lifting and sliding manner, the two ends of the elastic member are respectively in elastic contact with the top wall of the expansion cavity and the top surface of the locking block, the bottom end of the locking block can extend into the sliding groove from top to bottom, the bottom end of the locking block is provided with a pressing slope outside, and the two ends of the linkage rod are respectively fixedly connected with the locking blocks of the two locking assemblies.

[0007] Further, the side wall of the mounting seat is provided with a lifting groove in communication with the expansion cavity, the end portion of the linkage rod extends into the expansion cavity through the lifting groove, and the linkage rod can move up and down in the lifting groove.

[0008] Furthermore, the inner wall of the mounting base is provided with a guide groove that communicates with the telescopic cavity, and the side wall of the locking block is provided with a guide rod that is slidably connected to the guide groove.

[0009] Furthermore, the end of the clamping plate is provided with a guide slope, which is located at the bottom end of the slide groove.

[0010] Furthermore, the end of the clamping plate is provided with an observation hole that communicates with the slide groove. The observation hole is located on one side of the slide groove and is correspondingly set with the locking block.

[0011] Furthermore, a handle is provided on one side of the base and / or the mounting plate.

[0012] Furthermore, the handle is equipped with an anti-slip part.

[0013] Furthermore, a lifting ring is provided on the top surface of the base, and a lifting rope is connected to the lifting ring.

[0014] Furthermore, the structure of the limiting mechanism is the same as that of the locking mechanism, and the limiting mechanism and the locking mechanism are symmetrically arranged on the base.

[0015] This utility model also provides a picking and placing device, including the above-mentioned Foup clamping device.

[0016] The beneficial effects of this invention are as follows: In practical applications, when the Foup needs to be transferred, the top plate of the Foup aligns with the two locking components. Then, the Foup clamping device is driven to move laterally, causing the top plate of the Foup to insert laterally into the two sliding grooves. During this insertion, the top plate of the Foup will press against the pressing slope of the locking block. As the Foup clamping device moves relative to the top plate of the Foup, the locking block will slide upward relative to the telescopic cavity and compress the spring. The Foup is inserted into the groove until one end of its top plate abuts against the limiting mechanism. At this point, the top plate of the Foup is fully inserted into the groove, and the top plate releases the pressure on the inclined surface of the locking block. Under the rebound force of the elastic element, the locking block moves downward, causing its bottom end to extend into the groove. The locking block, in conjunction with the limiting mechanism, limits the top plate of the Foup within the groove, thus locking the top plate of the Foup onto the Foup clamping device. The Foup clamping device can then move the Foup along with it. When it is necessary to remove the Foup from the Foup clamping device, pull the linkage rod upward. This causes the linkage rod to move the locking blocks of the two locking components upward synchronously and compress the elastic element until the locking block retracts into the telescopic cavity. Then, the top plate of the Foup can be moved out from the inside of the groove. After the top plate of the Foup is removed from the groove, the locking block re-enters the groove under the rebound force of the elastic element. The Foup clamping device of this application has a simple structure, low cost, convenient operation, and good stability in clamping Foups. Attached Figure Description

[0017] Fig. 1 This is a three-dimensional structural diagram of the present invention.

[0018] Fig. 2 This is a three-dimensional structural diagram of the locking component of this utility model.

[0019] Fig. 3 This is an exploded view of the locking assembly of this utility model.

[0020] Explanation of reference numerals in the attached figures:

[0021] 1. Base; 2. Clamping plate; 3. Limiting mechanism; 4. Locking mechanism; 5. Slide groove; 6. Linkage rod; 7. Locking assembly; 8. Mounting seat; 9. Elastic element; 10. Locking block; 11. Telescopic cavity; 12. Extrusion slope; 13. Lifting groove; 14. Guide groove; 15. Guide rod; 16. Guide slope; 17. Observation hole; 18. Handle; 19. Anti-slip part; 20. Lifting ring; 21. Lifting rope. Detailed Implementation

[0022] To facilitate understanding by those skilled in the art, the present invention will be further described below with reference to embodiments and accompanying drawings. The content mentioned in the embodiments is not intended to limit the present invention.

[0023] like Figs. 1 to 3 As shown, this utility model provides a Foup clamping device, which includes a base 1, two clamping plates 2 oppositely mounted on both sides of the base 1, a limiting mechanism 3 mounted on one end of the base 1, and a locking mechanism 4 mounted on the other end of the base 1; the clamping plates 2 are L-shaped, and a sliding groove 5 is formed between the bottom surface of the base 1 and the clamping plates 2; the locking mechanism 4 includes a linkage rod 6 and two locking components 7 disposed on both sides of the base 1, the two locking components 7 being respectively disposed one-to-one with the two clamping plates 2, and the locking components 7 The device includes a mounting base 8, an elastic element 9, and a locking block 10. The bottom surface of the mounting base 8 is recessed with a telescopic cavity 11. The locking block 10 is slidably connected to the inner wall of the telescopic cavity 11. The two ends of the elastic element 9 elastically abut against the top wall of the telescopic cavity 11 and the top surface of the locking block 10, respectively. The bottom end of the locking block 10 can extend into the sliding groove 5 from top to bottom. The outer side of the bottom end of the locking block 10 is provided with a pressing inclined surface 12. The two ends of the linkage rod 6 are fixedly connected to the locking blocks 10 of the two sets of locking components 7, respectively. Specifically, the elastic element 9 can be a spring.

[0024] In practical applications, when the Foup needs to be transferred, the top plate of the Foup aligns with the two locking components 7, and then the Foup clamping device is driven to move laterally, so that the top plate of the Foup is laterally inserted into the two sliding grooves 5. During the process of the top plate of the Foup being laterally inserted into the sliding grooves 5, the top plate of the Foup will abut against the pressing slope 12 of the locking block 10. As the Foup clamping device moves relative to the top plate of the Foup, the locking block 10 will slide upward relative to the telescopic cavity 11 and compress the elastic element 9 until the Foup... One end of the top plate of p abuts against the limiting mechanism 3. At this time, the top plate of the Foup is fully inserted into the slide groove 5, and the top plate of the Foup releases the squeezing force on the squeezing inclined surface 12 of the locking block 10. The locking block 10 moves downward under the action of the elastic force of the elastic member 9, so that the bottom end of the locking block 10 extends into the slide groove 5. The locking block 10 cooperates with the limiting mechanism 3 to limit the top plate of the Foup in the slide groove 5, so as to lock the top plate of the Foup on this Foup clamping device. This Foup clamping device can then drive the Foup to move together. When it is necessary to detach the Foup from this Foup clamping device, pull the linkage rod 6 upwards. This causes the linkage rod 6 to move the locking blocks 10 of the two locking components 7 upwards simultaneously, compressing the elastic element 9 until the locking blocks 10 retract into the telescopic cavity 11. At this point, the top plate of the Foup can be moved out from the inside of the slide groove 5. After the top plate of the Foup is removed from the slide groove 5, the locking blocks 10 re-enter the slide groove 5 under the rebound force of the elastic element 9. This Foup clamping device has a simple structure, low cost, convenient operation, and good stability in clamping the Foup.

[0025] In this embodiment, the side wall of the mounting base 8 is provided with a lifting groove 13 that communicates with the telescopic cavity 11. The end of the linkage rod 6 extends into the telescopic cavity 11 through the lifting groove 13, and the linkage rod 6 can move up and down within the lifting groove 13. This structural design not only facilitates the connection between the linkage rod 6 and the locking block 10, but the lifting groove 13 also guides the lifting of the linkage rod 6, and provides support when the linkage rod 6 abuts against the bottom wall of the lifting groove 13.

[0026] In this embodiment, the inner wall of the mounting base 8 is provided with a guide groove 14 communicating with the telescopic cavity 11, and a guide rod 15 protrudes from the side wall of the locking block 10. The guide rod 15 is slidably connected to the guide groove 14. During the process of the locking block 10 moving up and down in the telescopic cavity 11, the guide rod 15 moves up and down in the guide groove 14. The guide groove 14 guides the guide rod 15, improving the stability of the lifting and lowering movement of the locking block 10.

[0027] In this embodiment, the end of the clamping plate 2 is provided with a guide slope 16, which is located on the bottom surface of the end of the slide groove 5. This structural design allows the guide slope 16 to guide the top plate of the Foup, facilitating its insertion into the slide groove 5.

[0028] In this embodiment, the end of the clamping plate 2 is provided with an observation hole 17 that communicates with the slide groove 5. The observation hole 17 is located on one side of the slide groove 5 and is correspondingly provided with the locking block 10. In practical applications, the operator observes the state of the locking block 10 through the observation hole 17 to ensure that the locking block 10 locks the top plate of the Foup in the slide groove 5.

[0029] In this embodiment, a handle 18 is provided on one side of the base 1 and / or the clamping plate 2. In practical applications, the operator can operate this Foup clamping device by holding the handle 18.

[0030] In this embodiment, the handle 18 is provided with an anti-slip part 19, which has friction texture. In practical applications, the operator grips the anti-slip part 19 of the handle 18 to prevent hand slippage.

[0031] In this embodiment, a lifting ring 20 is provided on the top surface of the base 1, and a lifting rope 21 is connected to the lifting ring 20. The lifting rope 21 is provided so that when the Foup clamping device clamps the top plate of the Foup, the lifting rope 21 can lift the Foup from top to bottom, which facilitates the transfer of the Foup from top to bottom.

[0032] In this embodiment, the structure of the limiting mechanism 3 is the same as that of the locking mechanism 4, and the limiting mechanism 3 and the locking mechanism 4 are symmetrically arranged on the base 1. This structural design makes the limiting mechanism 3 and the locking mechanism 4 identical, which facilitates maintenance and the manufacturing of this Foup clamping device. They are interchangeable, reducing maintenance costs, and the top plate of the Foup can be inserted into the slide groove 5 from either end of this Foup clamping device.

[0033] This utility model also provides a picking and placing device, including the aforementioned Foup clamping device. This picking and placing device possesses all the beneficial effects of the Foup clamping device, which will not be elaborated further here.

[0034] All technical features in this embodiment can be freely combined according to actual needs.

[0035] The above embodiments are preferred implementations of this utility model. In addition, this utility model can also be implemented in other ways. Any obvious substitutions without departing from the concept of this technical solution are within the protection scope of this utility model.

Claims

1. A Foup clamping device, characterized in that: The system includes a base (1), two clamping plates (2) mounted opposite each other on both sides of the base (1), a limiting mechanism (3) mounted on one end of the base (1), and a locking mechanism (4) mounted on the other end of the base (1). The clamping plates (2) are L-shaped, and a groove (5) is formed between the bottom surface of the base (1) and the clamping plates (2). The locking mechanism (4) includes a linkage rod (6) and two locking components (7) mounted on both sides of the base (1). The two locking components (7) are respectively arranged in a one-to-one correspondence with the two clamping plates (2). The locking components (7) include a mounting rod (6) and a locking mechanism (4) mounted on the other end of the base (1). The mounting base (8), elastic element (9), and locking block (10) are provided. The bottom surface of the mounting base (8) is recessed with a telescopic cavity (11). The locking block (10) is slidably connected to the inner wall of the telescopic cavity (11). The two ends of the elastic element (9) elastically abut against the top wall of the telescopic cavity (11) and the top surface of the locking block (10) respectively. The bottom end of the locking block (10) can extend into the sliding groove (5) from top to bottom. The outer side of the bottom end of the locking block (10) is provided with a pressing slope (12). The two ends of the linkage rod (6) are fixedly connected to the locking blocks (10) of the two sets of locking components (7) respectively.

2. The Foup clamping device according to claim 1, characterized in that: The side wall of the mounting base (8) is provided with a lifting groove (13) that communicates with the telescopic cavity (11). The end of the linkage rod (6) extends into the telescopic cavity (11) through the lifting groove (13), and the linkage rod (6) can move up and down in the lifting groove (13).

3. The Foup clamping device according to claim 1, characterized in that: The inner wall of the mounting base (8) is provided with a guide groove (14) that communicates with the telescopic cavity (11), and the side wall of the locking block (10) is provided with a guide rod (15), which is slidably connected to the guide groove (14).

4. A Foup clamping device according to claim 1, characterized in that: The end of the clamping plate (2) is provided with a guide slope (16), which is located on the bottom surface of the end of the slide groove (5).

5. A Foup clamping device according to claim 1, characterized in that: The end of the clamping plate (2) is provided with an observation hole (17) that communicates with the slide groove (5). The observation hole (17) is located on one side of the slide groove (5) and is correspondingly set with the locking block (10).

6. A Foup clamping device according to claim 1, characterized in that: A handle (18) is installed on one side of the base (1) and / or the mounting plate (2).

7. A Foup clamping device according to claim 6, characterized in that: The handle (18) is provided with an anti-slip part (19).

8. A Foup clamping device according to claim 1, characterized in that: The top surface of the base (1) is provided with a lifting ring (20), and the lifting ring (20) is connected to a lifting rope (21).

9. A Foup clamping device according to claim 1, characterized in that: The structure of the limiting mechanism (3) is the same as that of the locking mechanism (4), and the limiting mechanism (3) and the locking mechanism (4) are symmetrically arranged on the base (1).

10. A pick-and-place device, characterized in that: Includes the Foup clamping device as described in any one of claims 1 to 9.

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