Silicon wafer detection device

Abstract

The utility model relates to the technical field of silicon wafer detection, in particular to a silicon wafer detection device, which comprises a transfer mechanism, a detection mechanism and a detection mechanism, the conveying belt is connected with the transfer mechanism, is positioned below the transfer mechanism and is used for conveying the silicon wafers; when the arc-shaped plate is damaged after working for a long time and the arc-shaped plate and the insertion block need to be disassembled, the plate body is pushed downwards, the sliding block slides out of the groove of the base body, and then the insertion block and the arc-shaped plate can be taken out from one side of the base body, so that the operation is convenient and rapid; the edge of the base body can press the inclined face of the extending part of the sliding block, so that the sliding block is contained in the inserting block and compresses the spring outside the guide rod, when the sliding block moves to the position of the groove in the base body, the spring pushes the sliding block and inserts the sliding block into the groove, connection between the inserting block and the base body is rapidly achieved, and the working efficiency of maintenance personnel is improved.

Description

Technical Field

[0001] This utility model relates to the field of silicon wafer testing technology, and in particular to a silicon wafer testing device. Background Technology

[0002] After silicon wafers are manufactured, they need to be inspected using testing equipment. Silicon wafer inspection checks include diameter, thickness, bending, warpage, defects, crystal planes, surface contamination (organic matter), resistivity, crystal orientation, oxygen and carbon content, surface flatness and roughness, trace element content, and reflectivity. The instruments used include thickness gauges, microscopes, XRD, gas chromatography, X-ray fluorescence spectroscopy, secondary ion mass spectrometry, and resistivity meters.

[0003] In existing technologies, silicon wafer alignment is particularly important when transporting silicon wafers to the inspection box. It can ensure the stability of silicon wafer flow, prevent wafer blockage, and reduce the wafer breakage rate. The silicon wafer alignment structure requires frequent reciprocating motion of the drive components (frequent start-stop and forward / reverse rotation of the motor), and precise position control is required to prevent damage to the silicon wafer. Therefore, this type of silicon wafer alignment device has a complex structure, the motor is prone to damage, and the production and maintenance costs are high.

[0004] In related technologies, by setting an adjustable-gap rotating rod, when the edge of the silicon wafer collides with the rotating rod, the cylindrical structure outside the rotating rod can move the silicon wafer toward the center of the conveyor belt, thereby correcting the wafer's deviation. At the same time, this actuation mechanism has a relatively simple structure, reducing the cost required for production. However, since one end of the rotating rod is fixedly installed on the adjustment mechanism, the rotating rod is constantly subjected to collisions with the silicon wafer during long-term use, making maintenance inconvenient. Furthermore, the rigid collision between the rotating rod and the silicon wafer can easily cause damage to the silicon wafer due to the collision, increasing the cost of use and reducing production efficiency. Utility Model Content

[0005] The purpose of this invention is to provide a silicon wafer inspection device to solve the problems mentioned in the background art.

[0006] The technical solution adopted in this utility model is:

[0007] A silicon wafer inspection device, comprising:

[0008] The transfer mechanism is installed on top of the testing platform;

[0009] A conveyor belt, connected to and located below the transfer mechanism, is used to transport silicon wafers;

[0010] The testing box is installed outside the conveyor belt, and the testing box and the transfer mechanism are respectively located at both ends of the conveyor belt;

[0011] The conveyor belt is equipped with correction components on both sides; the correction components include:

[0012] The frame is fixedly installed on the top of the testing box;

[0013] A dual-axis motor is fixedly installed inside the frame.

[0014] One end of the lead screw is fixedly installed at the output ends on both sides of the dual-axis motor, and the other end of the lead screw is rotatably connected to the inside of the frame.

[0015] The base is threaded to the outside of the lead screw, and the base is slidably connected to the frame.

[0016] The insert block is slidably connected to the interior of the base body;

[0017] An arc-shaped plate is fixedly connected to one side of the insert block, and several guide rods are rotatably connected to one side of the arc-shaped plate;

[0018] An installation mechanism is located inside the plug and is used to install the plug inside the base.

[0019] Optionally, the mounting mechanism includes:

[0020] The slider is slidably connected to the inside of the insert block;

[0021] A guide rod is fixedly connected to the inside of the insert block, the guide rod is slidably connected to the slider, and a spring is sleeved on the outside of the guide rod;

[0022] A plate is fixedly connected to one side of the slider, and one end of the plate extends to the outside of the insert block and is slidably connected to the insert block for pulling the slider.

[0023] Optionally, the top of the slider extends above the insert and is provided with an inclined surface, and the interior of the base has a groove of the same size and shape as the inclined portion of the slider, for inserting the slider and installing the insert.

[0024] Optionally, it may also include a fixing component for mounting the frame.

[0025] Optionally, the fixing component includes:

[0026] The box is fixedly connected to both sides of the conveyor belt, and the inside of the box has a groove for inserting the frame.

[0027] Threaded holes are provided on both sides of the frame and on one side of the box.

[0028] Screws, threaded into the inside of the threaded hole, are used to fix the frame.

[0029] Optionally, the lead screws on both sides of the dual-axis motor have opposite thread directions.

[0030] Optionally, the seat body has a through groove inside, the size and shape of which are the same as those of the insert block.

[0031] Optionally, the arc shape of the arc plate is positioned on one side close to the transfer mechanism to correct the deviation of the silicon wafers transferred by the transfer mechanism.

[0032] Compared with the prior art, the beneficial effects of this utility model are:

[0033] When the curved plate needs to be replaced due to long-term damage, push the plate downwards to disengage the slider from the groove of the seat, and the insert and curved plate can be removed. The operation is convenient and quick. When the operator inserts the new insert and curved plate into the through groove inside the seat, the edge of the seat will press the inclined surface of the slider's protruding part, thereby causing the slider to retract into the insert and compressing the spring outside the guide rod. When the slider moves to the groove inside the seat, the spring pushes the slider and inserts it into the groove, thus quickly connecting the insert and the seat, increasing the work efficiency of maintenance personnel. Attached Figure Description

[0034] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0035] Figure 1 This is a schematic diagram of the overall structure in this application;

[0036] Figure 2 This is a schematic diagram of the conveyor belt and the correction assembly in this application;

[0037] Figure 3 This is a schematic diagram of the internal structure of the frame in this application;

[0038] Figure 4 This is a schematic diagram of the structure of the arc-shaped plate after disassembly in this application;

[0039] Figure 5 This is a schematic diagram of the internal structure of the insert block in this application.

[0040] Figure label:

[0041] 1. Transfer mechanism; 2. Conveyor belt; 3. Testing box;

[0042] 4. Correction assembly; 41. Frame; 42. Dual-axis motor; 43. Lead screw; 44. Base; 45. Insert block; 46. Arc plate; 47. Mounting mechanism; 471. Slider; 472. Guide rod; 473. Plate;

[0043] 5. Fixing components; 51. Housing; 52. Threaded holes; 53. Screws. Detailed Implementation

[0044] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use, or the orientation or positional relationship commonly understood by those skilled in the art. They are only used to facilitate the description of this utility model and to simplify the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0045] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0046] In current related technologies, by setting an adjustable-gap rotating rod, when the edge of the silicon wafer collides with the rotating rod, the cylindrical structure outside the rotating rod can move the silicon wafer toward the center of the conveyor belt, thereby correcting the wafer's deviation. At the same time, the structure of this actuation mechanism is relatively simple, reducing the production cost. However, since one end of the rotating rod is fixedly mounted on the adjustment mechanism, the rotating rod is easily damaged by the constant collisions with the silicon wafer during long-term use. The fixed rotating rod is inconvenient to disassemble and replace, resulting in maintenance difficulties and increased operating costs.

[0047] like Figure 1-5 As shown in the figure, this utility model embodiment provides a silicon wafer inspection device, which includes several parts such as a transfer mechanism 1, a conveyor belt 2, and an inspection box 3.

[0048] The transfer mechanism 1, conveyor belt 2, and inspection box 3 are all fixedly installed on the inspection platform. The transfer mechanism 1 and inspection box 3 are located at both ends of the conveyor belt 2. The transfer mechanism 1 includes multiple conveyor belts and a robotic arm structure (neither of which is shown in the figure). When the silicon wafer is transported to the robotic arm by the conveyor belt, the robotic arm picks up the silicon wafer with a suction cup and then places the silicon wafer on the conveyor belt 2. The conveyor belt 2 runs through the interior of the transfer mechanism 1 and the inspection box 3, and is used to transport the silicon wafer transferred from the transfer mechanism 1 into the interior of the inspection box 3. A laser beam is emitted by a laser instrument (not shown in the figure) inside the inspection box 3 to scan the edge of the silicon wafer. The reflected light signal is received by a photoelectric sensor. The diameter of the silicon wafer is determined by calculating the blocking time or spot displacement of the laser beam. The reflected optical path difference between the upper and lower surfaces of the silicon wafer is measured by a laser interferometer (not shown in the figure) inside the inspection box 3. The thickness of the silicon wafer is calculated by the interference fringes.

[0049] In use, the transfer mechanism 1, conveyor belt 2, and testing box 3 are started. The conveyor belt inside the transfer mechanism 1 transports the silicon wafer to the robotic arm of the transfer mechanism 1. The robotic arm picks up the silicon wafer and places it on top of the conveyor belt 2. The silicon wafer is then transported into the testing box 3 through the conveyor belt 2, where it is tested.

[0050] Furthermore, to prevent positional deviation during silicon wafer transport, the detection device is also equipped with a deviation correction component 4.

[0051] Specifically, such as Figure 1-5 As shown, the correction assembly 4 includes a frame 41, a dual-axis motor 42, and a lead screw 43.

[0052] The dual-axis motor 42 is fixedly installed inside the frame 41 and electrically connected to an external power source for easy operation. Lead screws 43 are mounted on both sides of the output end of the dual-axis motor 42 via bearings, with the threads of the two lead screws 43 in opposite directions. The base 44 is threaded onto the outside of the lead screws 43. When the dual-axis motor 42 is started, the two lead screws 43 rotate in the same direction. The dual-axis motor 42 drives the lead screws 43 with opposite threads on both sides to rotate synchronously, causing the two bases 44 to move towards or away from each other, thereby adjusting... The spacing of the arc plates 46 is adapted to accommodate silicon wafers of different sizes. An arc plate 46 is installed on one side of the base 44. A rotatably connected guide rod is provided on one side of the arc plate 46. The surface of the guide rod is covered with a flexible buffer layer. A rubber pad is provided on the inner side of the arc plate 46 to prevent the silicon wafer from being scratched. When the offset silicon wafer hits the arc plate 46, the arc area on the arc plate 46 will push the silicon wafer toward the center of the conveyor belt 2. The guide rod on the arc plate 46 will also rotate to prevent the outside of the arc plate 46 from pressing the silicon wafer against the arc edge, thereby enhancing the guiding effect on the silicon wafer.

[0053] The installation mechanism 47 is located inside the insert 45, facilitating the installation of the insert 45. If the arc plate 46 is damaged after prolonged use and needs to be removed along with the insert 45, the plate 473 is pushed downwards, causing the slider 471 to slide out of the groove inside the base 44. This allows the insert 45 and arc plate 46 to be removed from one side of the base 44. A new insert 45 and arc plate 46 are then aligned with the through slot inside the base 44 and inserted. During insertion, the edge of the base 44 presses against the inclined surface of the extended portion of the slider 471, pushing the slider 471 downwards, compressing the spring outside the guide rod 472, and causing the slider 471 to retract into the insert 45. This prevents the slider 471 from interfering with the continued insertion of the insert 45. When the slider 471 moves to the groove inside the base 44, the spring pushes the slider 471 and inserts it into the groove, thus connecting the insert 45 to the base 44. The operation is simple.

[0054] Furthermore, in order to facilitate the maintenance of the frame 41, the testing device is also equipped with a fixing component 5 to fix the frame 41 in place.

[0055] Specifically, such as Figures 2-3 As shown, the fixing component 5 includes a housing 51, a threaded hole 52, and a screw 53.

[0056] The housing 51 is fixed on both sides of the conveyor belt 2, and has grooves inside that match the bottom of the frame 41, making it easy to install the frame 41. Both the frame 41 and the threaded hole 52 have threaded holes 52 on one side. After the frame 41 is inserted into the housing 51, the threaded holes 52 of the two are on the same horizontal line. At this time, screws 53 can be screwed in to fix the frame 41. When the frame 41 needs to be maintained, the screws 53 can be unscrewed to remove the frame 41. The operation is simple.

[0057] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A silicon wafer inspection device, characterized in that, include: The transfer mechanism is installed on top of the testing platform; A conveyor belt, connected to and located below the transfer mechanism, is used to transport silicon wafers; The testing box is installed outside the conveyor belt, and the testing box and the transfer mechanism are respectively located at both ends of the conveyor belt; The conveyor belt is equipped with correction components on both sides; the correction components include: The frame is fixedly installed on the top of the testing box; A dual-axis motor is fixedly installed inside the frame. One end of the lead screw is fixedly installed at the output ends on both sides of the dual-axis motor, and the other end of the lead screw is rotatably connected to the inside of the frame. The base is threaded to the outside of the lead screw, and the base is slidably connected to the frame. The insert is slidably connected to the interior of the base; An arc-shaped plate is fixedly connected to one side of the insert block, and several guide rods are rotatably connected to one side of the arc-shaped plate; An installation mechanism is located inside the plug and is used to install the plug inside the base.

2. The silicon wafer inspection device according to claim 1, characterized in that, The mounting mechanism includes: a slider, which is slidably connected to the interior of the insert block; A guide rod is fixedly connected to the inside of the insert block, the guide rod is slidably connected to the slider, and a spring is sleeved on the outside of the guide rod; A plate is fixedly connected to one side of the slider, and one end of the plate extends to the outside of the insert block and is slidably connected to the insert block for pulling the slider.

3. The silicon wafer inspection device according to claim 2, characterized in that: The top of the slider extends above the insert and has a slope. The interior of the base has a groove of the same size and shape as the sloped portion of the slider, for inserting the slider and installing the insert.

4. The silicon wafer inspection device according to claim 1, characterized in that, It also includes a fixing component for mounting the frame.

5. A silicon wafer inspection device according to claim 4, characterized in that, The fixing component includes: a housing, which is fixedly connected to both sides of the conveyor belt, and the housing has a groove inside for inserting the frame; Threaded holes are provided on both sides of the frame and on one side of the box. Screws, threaded into the inside of the threaded hole, are used to fix the frame.

6. The silicon wafer inspection device according to claim 1, characterized in that: The lead screws on both sides of the dual-axis motor have opposite thread directions.

7. The silicon wafer inspection device according to claim 1, characterized in that: The seat body has a through groove inside, and the size and shape of the through groove are the same as those of the insert block.

8. A silicon wafer inspection device according to claim 1, characterized in that: The arc-shaped plate is positioned on the side near the transfer mechanism to correct the deviation of the silicon wafers transferred by the transfer mechanism.

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