Wastewater collecting device for semiconductor processing

Abstract

The utility model relates to a waste water collecting device for semiconductor processing, which belongs to the technical field of semiconductor processing and comprises a waste water collecting box and a partition plate fixedly connected inside the waste water collecting box, and a purifying and filtering structure extending into the waste water collecting box is arranged at the top of the waste water collecting box. The purifying and filtering structure comprises a mounting seat which is slidably connected to the top of the wastewater collecting tank and extends into the wastewater collecting tank, and an internal thread sleeve is fixedly connected to the lower surface of the mounting seat. According to the waste water collecting device for semiconductor processing, by arranging a mounting base and an inner threaded sleeve, a purification filter cylinder is conveniently mounted in the waste water collecting box, meanwhile, the purification filter cylinder is conveniently disassembled and assembled, then by arranging a mounting block and a fixing bolt, the mounting base is conveniently mounted, and meanwhile by arranging a conveying pump and a conveying pipeline, the conveying efficiency is improved. By arranging the flow divider, the filtered wastewater can be conveyed into the purification filter cartridge, so that the wastewater is purified and filtered.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, specifically to a wastewater collection device for semiconductor processing. Background Technology

[0002] Semiconductor wastewater refers to wastewater, sewage, and waste liquid generated during the production process. It contains production materials, intermediate products, and finished products lost with the water, as well as pollutants generated during the production process. With the rapid development of industry, the types and quantities of wastewater have increased rapidly, and the pollution of water bodies has become increasingly widespread and serious, threatening human health and safety. Semiconductor wastewater is generally filtered through wastewater filtration devices.

[0003] In semiconductor processing, wastewater collection devices are required. Chinese utility model patent CN215667379U discloses a wastewater collection device for semiconductor processing, including a collection tank. The collection tank comprises a collection trough, an inlet pipe, and a drain pipe. The inlet pipe is located at the top of the collection tank and extends through the collection tank into the collection trough. This utility model introduces semiconductor wastewater into the collection tank through the inlet pipe. First, the wastewater passes through a microfiltration membrane in a microfiltration layer to filter particles. Then, it passes through an activated carbon filter in an activated carbon filter layer to further remove odors and impurities, improving the filtration effect and removing corrosive substances. The wastewater then flows into a collection trough for collection. A reverse osmosis layer prevents water in the collection trough from back-permeating into the activated carbon filter layer. An electrolyzer is installed in the collection trough. The electrolyzer is activated to electrolyze the water in the collection trough to obtain electrolyzed water. The bottom of the collection trough slopes towards the drain pipe, allowing the water in the collection trough to drain quickly.

[0004] However, during the use of this utility model, the semiconductor wastewater contains a large amount of solid waste, which will cause blockage inside the device after a long period of use. At the same time, there is no corresponding disassembly and assembly structure, making it inconvenient to replace the internal filter structure, which affects the practicality and cannot meet the production needs. Therefore, a semiconductor processing wastewater collection device is proposed to solve the above-mentioned problems. Summary of the Invention

[0005] To address the shortcomings of existing technologies, this utility model provides a wastewater collection device for semiconductor processing, which has the advantage of easy replacement of filter parts. It solves the problem that semiconductor wastewater contains a large amount of solid waste, which can cause blockages in the device after prolonged use. Furthermore, the lack of a corresponding disassembly and assembly structure makes it difficult to replace the internal filter structure, thus affecting its practicality and failing to meet production needs.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a wastewater collection device for semiconductor processing, comprising a wastewater collection tank and a partition fixedly connected inside the wastewater collection tank, wherein a purification and filtration structure extending into the top of the wastewater collection tank is provided.

[0007] The purification and filtration structure includes a mounting base that is slidably connected to the top of the wastewater collection tank and extends into it. An internal threaded sleeve is fixedly connected to the lower surface of the mounting base. A purification and filtration cylinder extending into the wastewater collection tank is connected to the internal thread of the internal threaded sleeve. Mounting blocks are fixedly connected to both the left and right sides of the mounting base. A fixing bolt extending into the wastewater collection tank is threadedly connected to the top of the mounting block.

[0008] Furthermore, a diverter is fixedly installed on the top of the mounting base, and a connecting pipe is fixedly installed between the diverter and the mounting base, the connecting pipe being connected to the interior of the purification filter cartridge.

[0009] Furthermore, a delivery pump is fixedly installed on the top of the wastewater collection tank, the output end of the delivery pump is fixedly connected to the top of the distributor, and the end of the delivery pump away from the distributor is fixedly connected to a connecting pipe extending into the interior of the wastewater collection tank.

[0010] Furthermore, a drain pipe extending into the wastewater collection tank is fixedly connected to one side of the wastewater collection tank, and a dosing pipe extending into the wastewater collection tank is fixedly connected to the top of the front of the wastewater collection tank.

[0011] Furthermore, the wastewater collection tank is slidably connected to a pre-filter, a secondary filter, and an activated carbon filter extending to its front, which are arranged sequentially from left to right.

[0012] Furthermore, the primary filter consists of an installation frame, a filter core, and an installation plate. The filter core is fixedly connected to the inside of the installation frame. Positioning strips extending into the wastewater collection tank are fixedly connected to the top and bottom of the installation frame. The installation frame is fixedly connected to one side of the installation plate, and a sealing strip is fixedly connected to the side of the installation plate near the installation frame.

[0013] Furthermore, a drain pipe extending into the bottom of one side of the wastewater collection tank is fixedly connected, and an inlet pipe is fixedly connected to the side of the wastewater collection tank near the drain pipe.

[0014] Compared with the prior art, the present invention provides a wastewater collection device for semiconductor processing, which has the following advantages:

[0015] 1. This semiconductor processing wastewater collection device, by setting a mounting base and an internal threaded sleeve, facilitates the installation of the purification filter cartridge inside the wastewater collection tank, and also facilitates the disassembly and assembly of the purification filter cartridge. Furthermore, by setting a mounting block and fixing bolts, it is easy to install the mounting base. At the same time, by setting a delivery pump and delivery pipeline, and by setting a diverter, the filtered wastewater can be delivered to the purification filter cartridge, thereby purifying and filtering the wastewater.

[0016] 2. This semiconductor processing wastewater collection device, by setting up a pre-filter, a secondary filter, and an activated carbon filter, can perform preliminary filtration of wastewater. Simultaneously, the inclusion of positioning strips and sealing strips facilitates the disassembly and assembly of the pre-filter, while also providing a sealing effect. This solves the problem that semiconductor wastewater contains a large amount of solid waste, which can cause blockages to the device's internal structure after prolonged use. Furthermore, the lack of a corresponding disassembly and assembly structure makes it difficult to replace the internal filter structure, affecting practicality and failing to meet production needs. Attached Figure Description

[0017] Figure 1 This is a cross-sectional view of the structure of this utility model;

[0018] Figure 2 This is a schematic diagram of the purification and filtration structure of this utility model;

[0019] Figure 3 This is a three-dimensional structural view of the mounting frame of this utility model;

[0020] Figure 4 This is a three-dimensional view of the structure of this utility model.

[0021] In the diagram: 1 Wastewater collection tank, 2 Baffle, 3 Mounting base, 4 Internal threaded sleeve, 5 Purification filter cartridge, 6 Diverter, 7 Transfer pump, 8 Transfer pipeline, 9 Drain pipe, 10 Primary filter, 11 Secondary filter, 12 Activated carbon filter, 13 Mounting frame, 14 Positioning strip, 15 Filter core, 16 Mounting plate, 17 Sealing strip, 18 Sewage pipe, 19 Inlet pipe. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Please see Figures 1 to 4This embodiment of a semiconductor processing wastewater collection device includes a wastewater collection tank 1 and a partition 2 fixedly connected inside the wastewater collection tank 1. The top of the wastewater collection tank 1 is provided with a purification and filtration structure extending into it. The purification and filtration structure includes a mounting base 3 slidably connected to the top of the wastewater collection tank 1 and extending into it. An internal threaded sleeve 4 is fixedly connected to the lower surface of the mounting base 3. The internal threaded sleeve 4 is internally threaded with a purification and filtration cylinder 5 extending into the wastewater collection tank 1. Mounting blocks are fixedly connected to both the left and right sides of the mounting base 3. The top of the mounting blocks is threaded with a fixing bolt extending into the wastewater collection tank 1.

[0024] Among them, a diverter 6 is fixedly installed on the top of the mounting base 3, and a connecting pipe is fixedly installed between the diverter 6 and the mounting base 3. The connecting pipe is connected to the inside of the purification filter cartridge 5. A delivery pump 7 is fixedly installed on the top of the wastewater collection tank 1. The output end of the delivery pump 7 is fixedly connected to the top of the diverter 6. The end of the delivery pump 7 away from the diverter 6 is fixedly connected to a connecting pipe extending into the inside of the wastewater collection tank 1.

[0025] In this embodiment, a drain pipe 9 extending into the wastewater collection tank 1 is fixedly connected to one side, and a dosing pipe extending into the wastewater collection tank 1 is fixedly connected to the top of the front side of the wastewater collection tank 1. A valve is fixedly installed on the outside of the drain pipe 9. By setting up the dosing pipe, it is convenient for staff to use chemical substances to purify the wastewater, thereby improving the purification effect.

[0026] In this embodiment, a primary filter 10, a secondary filter 11, and an activated carbon filter 12 are slidably connected to the inside of the wastewater collection tank 1, extending to its front side. The primary filter 10, the secondary filter 11, and the activated carbon filter 12 are arranged sequentially from left to right.

[0027] The primary filter 10 consists of an installation frame 13, a filter core 15, and an installation plate 16. The filter core 15 is fixedly connected to the inside of the installation frame 13. Positioning strips 14 extending into the wastewater collection tank 1 are fixedly connected to the top and bottom of the installation frame 13. The installation frame 13 is fixedly connected to one side of the installation plate 16. A sealing strip 17 is fixedly connected to the side of the installation plate 16 near the installation frame 13.

[0028] It should be noted that the pre-filter 10, intermediate filter 11 and activated carbon filter 12 have the same composition and structure, but the filter cores 15 of the three are different, which can achieve the effect of three-layer filtration of wastewater.

[0029] In this embodiment, a drain pipe 18 extending into the bottom of one side of the wastewater collection tank 1 is fixedly connected, and an inlet pipe 19 is fixedly connected to the side of the wastewater collection tank 1 near the drain pipe 18. A valve is fixedly installed on the outside of the drain pipe 18 to achieve the effect of sewage discharge.

[0030] The working principle of the above embodiments is as follows:

[0031] First, the staff transports the wastewater from semiconductor processing to the wastewater collection tank 1 through the inlet pipe 19. Then, the wastewater passes through the primary filter 10, the intermediate filter 11, and the activated carbon filter 12 in sequence. After that, the transfer pump 7 is started to transport the filtered wastewater to the purification filter cartridge 5 for further purification. After purification, the wastewater is discharged through the drain pipe 9.

[0032] All electrical components mentioned in this article are electrically connected to the main controller and power supply. The main controller can be a conventional known device such as a computer that performs control functions. Furthermore, the existing publicly available power connection technology is common knowledge in this field and will not be elaborated upon in this article.

[0033] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0034] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A wastewater collection device for semiconductor processing, comprising a wastewater collection tank (1) and a partition (2) fixedly connected inside the wastewater collection tank (1), characterized in that: The wastewater collection tank (1) is provided with a purification and filtration structure extending into its interior at the top; The purification and filtration structure includes a mounting base (3) that is slidably connected to the top of the wastewater collection tank (1) and extends into its interior. An internal threaded sleeve (4) is fixedly connected to the lower surface of the mounting base (3). A purification filter cylinder (5) extending into the wastewater collection tank (1) is connected to the internal thread of the internal threaded sleeve (4). Mounting blocks are fixedly connected to both the left and right sides of the mounting base (3). A fixing bolt extending into the wastewater collection tank (1) is threadedly connected to the top of the mounting block.

2. The semiconductor processing wastewater collection device according to claim 1, characterized in that: A diverter (6) is fixedly installed on the top of the mounting base (3), and a connecting pipe is fixedly installed between the diverter (6) and the mounting base (3). The connecting pipe is connected to the interior of the purification filter cartridge (5).

3. The semiconductor processing wastewater collection device according to claim 2, characterized in that: A delivery pump (7) is fixedly installed on the top of the wastewater collection tank (1). The output end of the delivery pump (7) is fixedly connected to the top of the diverter (6). The end of the delivery pump (7) away from the diverter (6) is fixedly connected to a connecting pipe extending into the interior of the wastewater collection tank (1).

4. The semiconductor processing wastewater collection device according to claim 1, characterized in that: A drain pipe (9) extending into the wastewater collection tank (1) is fixedly connected to one side of the wastewater collection tank (1), and a dosing pipe extending into the wastewater collection tank (1) is fixedly connected to the top of the front of the wastewater collection tank (1).

5. A wastewater collection device for semiconductor processing according to claim 1, characterized in that: The wastewater collection tank (1) is slidably connected to a primary filter (10), a secondary filter (11), and an activated carbon filter (12) extending to its front side, and the primary filter (10), secondary filter (11), and activated carbon filter (12) are arranged from left to right.

6. The semiconductor processing wastewater collection device according to claim 5, characterized in that: The primary filter (10) consists of an installation frame (13), a filter core (15), and an installation plate (16). The filter core (15) is fixedly connected to the inside of the installation frame (13). The top and bottom of the installation frame (13) are fixedly connected to positioning strips (14) extending into the wastewater collection tank (1). The installation frame (13) is fixedly connected to one side of the installation plate (16). A sealing strip (17) is fixedly connected to the side of the installation plate (16) near the installation frame (13).

7. The semiconductor processing wastewater collection device according to claim 1, characterized in that: A drain pipe (18) extending into the bottom of one side of the wastewater collection tank (1) is fixedly connected, and an inlet pipe (19) is fixedly connected to the side of the wastewater collection tank (1) near the drain pipe (18).

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