Evaporation source protection device of winding type vacuum coating machine

Abstract

The utility model discloses an evaporation source protection device of a winding type vacuum coating machine, which comprises a rack and further comprises a stirring assembly used for preventing a coating material from being stacked; the stirring assembly comprises a sliding table, a partition plate and shaft rods, the partition plate is rotationally connected with the sliding table, the multiple shaft rods are rotationally connected to the partition plate, and the multiple barrels are fixedly connected to the shaft rods correspondingly; according to the utility model, the coating material can be uniformly heated by stirring.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum coating technology, and in particular relates to a protection device for the evaporation source of a roll-up vacuum coating machine. Background Technology

[0002] Vacuum coating machines are widely used in various fields, including aerospace, electronics, optics, and machinery. For example, in aerospace, they are used to manufacture high-temperature and corrosion-resistant coatings; in electronics, they are used to manufacture coatings for electronic components such as capacitors, inductors, and resistors; in optics, they are used to manufacture coatings for optical components such as optical lenses; and in machinery, they are used to manufacture wear-resistant and corrosion-resistant coatings. The process mainly involves heating the film material to its evaporation temperature through a evaporation source using methods such as resistance heating, electron beam bombardment, or laser irradiation, causing it to directly transform from a solid to a gaseous state. The evaporated material then travels freely in a vacuum environment and eventually deposits on the substrate surface. However, during the heating and evaporation process, the accumulation of coating materials can lead to insufficient heating at the bottom, thus affecting evaporation. This paper proposes a structure that enables uniform heating of the coating material. Utility Model Content

[0003] To address the shortcomings of existing technologies, this utility model provides an evaporation source protection device for a roll-up vacuum coating machine, which solves the aforementioned problems.

[0004] To achieve the above objectives, this utility model is implemented through the following technical solution: an evaporation source protection device for a roll-up vacuum coating machine, including a frame and a stirring assembly for preventing the accumulation of coating material; the stirring assembly includes a slide, a partition, and a shaft, the partition is rotatably connected to the slide, a plurality of shafts are rotatably connected to the partition, and a plurality of cylinders are respectively fixedly connected to the shafts.

[0005] Beneficial effects

[0006] This utility model provides a protection device for the evaporation source of a roll-up vacuum coating machine, which has the following advantages compared with the prior art:

[0007] The user activates the heater to heat up the material, causing the coating material inside the frame to evaporate. Simultaneously, the user starts the motor, causing the lead screw fixed to the motor's output shaft to rotate at a constant speed. This drives a threaded slide to move linearly along its connection to the lead screw. The slide then drives a transmission gear to slide synchronously, causing the gear to roll on a rack meshing with it. This, in turn, drives a shaft fixed to its center to rotate synchronously, causing a central gear fixed to its center to rotate synchronously. This central gear then drives multiple meshing auxiliary gears around it to rotate synchronously, and these auxiliary gears, in conjunction with their meshing gear rings, rotate on their own axes while simultaneously revolving around the central gear. During the revolution, the shaft fixed to the center of the auxiliary gear rotates synchronously, causing multiple cylinders fixed to it to rotate at a constant speed. As they rotate, these cylinders sequentially enter the coating material and gradually come into contact with the bottom layer of coating material, thus filling it with the coating material. During this process, the cylinders continue to revolve and rotate, causing the bottom layer of coating material to rotate upwards. When the opening on the cylinder rotates downwards, the coating material inside falls onto the top layer of coating material, thus adjusting the layering of the coating material and ensuring that the coating material is heated evenly. This prevents the bottom layer of coating material from being underheated and unable to evaporate. During this process, the slide table continues to slide, thus uniformly stirring the coating material in the frame and effectively preventing the coating material falling from the multiple cylinders from repeatedly accumulating. Attached Figure Description

[0008] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0009] Figure 2 This is a cross-sectional schematic diagram of the overall structure of this utility model.

[0010] Figure 3 This is a cross-sectional schematic diagram of the transmission structure of this utility model.

[0011] Figure reference numerals: Frame 101, stirring assembly 2, slide table 201, partition plate 202, shaft 203, cylinder 204, shaft gear 205, auxiliary gear 206, shaft 207, transmission gear 208, connecting plate 209, rack 301, slide rod 302, lead screw 303, motor 304, sealing plate 305, electric heater 306. Detailed Implementation

[0012] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0013] The specific implementation of this utility model will be described in detail below with reference to specific embodiments.

[0014] Please see Figures 1-3 The present invention provides an embodiment of an evaporation source protection device for a roll-to-roll vacuum coating machine, comprising a frame 101 and further comprising:

[0015] Stirring component 2 is used to prevent coating material from accumulating;

[0016] The stirring assembly 2 includes a slide 201, a partition 202, and a shaft 203. The partition 202 is rotatably connected to the slide 201, and a plurality of shafts 203 are rotatably connected to the partition 202. A plurality of cylinders 204 are respectively fixedly connected to the shafts 203.

[0017] For the above examples, those skilled in the art should know that the implementation of the above technical solutions is not limited to the specific partition 202 described in the above embodiments. For example, the partition 202 is provided with a sealing ring at the connection between it, the slide table 201, and the shaft 203. The purpose of this arrangement is to increase the sealing effect and thus prevent small particles of coating material from falling into the gaps at the connection.

[0018] Regarding the above examples, those skilled in the art should know that the implementation of the above technical solutions is not limited to the specific frame 101 described in the above embodiments. For example, the bottom of the frame 101 may be provided with casters. The purpose of this arrangement is to facilitate its movement and adjust its position.

[0019] Specifically, multiple shafts 203 are fixedly connected to the shaft center of the auxiliary gear 206, multiple auxiliary gears 206 are meshed with the shaft center gear 205, multiple auxiliary gears 206 are meshed with the gear ring 307, and the gear ring 307 is fixedly connected to the slide table 201.

[0020] Regarding the above examples, those skilled in the art should know that the implementation of the above technical solutions is not limited to the specific shaft gear 205 described in the above embodiments. For example, the diameter of the shaft gear 205 should be larger than the diameter of the secondary gear 206. The purpose of this arrangement is to facilitate the adjustment of its transmission ratio.

[0021] Specifically, a shaft 207 is fixedly connected to the center of the shaft gear 205, the shaft 207 is rotatably connected to the slide table 201, and a transmission gear 208 is fixedly connected to the shaft 207, the transmission gear 208 is meshed with the rack 301.

[0022] For the above examples, those skilled in the art should know that when implementing the above technical solutions, it is not limited to the specific shaft 207 described in the above embodiments. For example, a bearing ring should be provided at the connection between the shaft 207 and the slide table 201. The purpose of this arrangement is to reduce the damping of its rotation.

[0023] Specifically, the rack 301 is fixedly connected to the connecting plate 209, the connecting plate 209 is fixedly connected to the frame 101, and a plurality of electric heaters 306 are symmetrically fixedly connected to the top of the frame 101.

[0024] For the above examples, those skilled in the art should know that the implementation of the above technical solutions is not limited to the specific electric heater 306 described in the above embodiments. For example, the electric heater 306 should have multiple adjustable output power. The purpose of this setting is to facilitate the adjustment of its heat through this setting, thereby adjusting the evaporation rate of the coating material.

[0025] Specifically, the slide table 201 is slidably connected to the slide rod 302, the slide rod 302 is fixedly connected to the frame 101, and a sealing plate 305 is detachably and fixedly connected to the fixed opening at the top of the frame 101.

[0026] Regarding the above examples, those skilled in the art should know that the implementation of the above technical solutions is not limited to the specific slide bar 302 described in the above embodiments. For example, the slide bar 302 is provided with a damping rubber strip. The purpose of this setting is to increase the damping of the slide table 201 during sliding and to make it slide smoothly.

[0027] Specifically, the slide table 201 is threadedly connected to the lead screw 303, one end of the lead screw 303 is rotatably connected to the frame 101, and the other end of the lead screw 303 is fixedly connected to the output shaft of the motor 304, and the motor 304 is fixedly connected to the frame 101.

[0028] Regarding the above examples, those skilled in the art should know that the implementation of the above technical solutions is not limited to the specific lead screw 303 described in the above embodiments. For example, the lead screw 303 can be a reciprocating lead screw. The purpose of this arrangement is that when the slider connected to the thread on the reciprocating lead screw moves to one end, the slider can quickly change its direction of movement by continuing to control the rotation of the lead screw.

[0029] For the above examples, those skilled in the art should know that the implementation of the above technical solutions is not limited to the specific motor 304 described in the above embodiments. For example, the motor 304 may have a timed start and stop function. The purpose of this setting is to facilitate the timed sliding of the slide table 201 through this setting.

[0030] In this embodiment of the invention, the user activates the heater 306 to heat it up, thereby evaporating the coating material inside the frame 101 through heating and evaporation. Simultaneously, the user can activate the motor 304. At this time, the lead screw 303, fixedly connected to the output shaft of the motor 304, begins to rotate at a constant speed, driving the threaded slide 201 to move linearly along its connection with the slide rod 302. The slide 201 then drives the transmission gear 208 mounted on it to slide synchronously, causing the transmission gear 208 to roll on the rack 301 it meshes with. This drives the shaft 207, fixedly connected to its axis, to rotate synchronously, and drives the shaft gear 205, fixedly connected to it, to rotate synchronously. The shaft gear 205 then drives multiple meshing auxiliary gears 206 around it to rotate synchronously, and the auxiliary gears 206 mesh with the gear ring 301. With the cooperation of gear 7, the gear rotates on its own axis and revolves around the central gear 205. At this time, the shaft 203 fixedly connected to the axis of the secondary gear 206 rotates synchronously, driving the multiple cylinders 204 fixedly connected to it to start rotating at a uniform speed. During this rotation, the multiple cylinders 204 can enter the coating material in sequence and gradually come into contact with the bottom layer of coating material, thus filling it with coating material. During this process, the cylinders 204 continue to revolve and rotate, thus driving the bottom layer of coating material to rotate upward. When the opening on the cylinder 204 rotates downward, the coating material inside can fall onto the top layer of coating material, thereby adjusting the layering of the coating material and ensuring that the coating material is heated evenly. This prevents the coating material at the bottom layer from being underheated and unable to evaporate. During this process, the slide table 201 continues to slide, thereby uniformly stirring the coating material in the frame 101 and effectively preventing the coating material falling from the multiple cylinders 204 from repeatedly accumulating.

[0031] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0032] The term "fixed connection" as used in this application refers to a connection in which parts or components are fixed without any relative movement. This includes both detachable and non-detachable connections.

[0033] (1) Detachable connection: The components are fixed together using screws, splines, wedges, etc. This type of connection can be disassembled during maintenance without damaging the parts. However, the specifications of the connecting parts used must be correct (such as the length of the bolts, keys, wedges) and properly tightened.

[0034] (2) Non-removable connections: These mainly refer to welding, riveting, and tenon joints. Since disassembly requires forging, sawing, or oxyacetylene cutting for repair or replacement, the parts generally cannot be reused. At the same time, attention should be paid to process quality, technical inspection, and remedial measures (such as correction and polishing) during connection.

[0035] The sliding connection referred to in this application means that the component can slide along a linear trajectory, and the hinge referred to in this application means that the component can rotate along an axial constraint.

[0036] In some cases, the sliding connection and hinge referred to in this application may also be damped, enabling the component to maintain in the desired position.

[0037] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A protection device for the evaporation source of a roll-to-roll vacuum coating machine, comprising a frame (101), characterized in that, Also includes: A stirring component (2) is used to prevent the coating material from accumulating. The stirring assembly (2) includes a slide (201), a partition (202), a shaft (203), and a cylinder (204). The partition (202) is rotatably connected to the slide (201). Multiple shafts (203) are rotatably connected to the partition (202). Multiple cylinders (204) are fixedly connected to the shafts (203). Multiple shafts (203) are fixedly connected to the shaft center of the auxiliary gears (206). Multiple auxiliary gears (206) are meshed with the shaft gear (205). Multiple auxiliary gears (206) are meshed with the gear ring (307). The gear ring (307) is fixedly connected to the slide (201).

2. The evaporation source protection device for the roll-to-roll vacuum coating machine according to claim 1, characterized in that, A shaft (207) is fixedly connected to the center of the shaft of the central gear (205). The shaft (207) is rotatably connected to the slide (201). A transmission gear (208) is fixedly connected to the shaft (207). The transmission gear (208) is meshed with the rack (301).

3. The evaporation source protection device for the roll-to-roll vacuum coating machine according to claim 2, characterized in that, The rack (301) is fixedly connected to the connecting plate (209), the connecting plate (209) is fixedly connected to the frame (101), and a plurality of electric heaters (306) are symmetrically fixedly connected to the top of the frame (101).

4. The evaporation source protection device for the roll-to-roll vacuum coating machine according to claim 1, characterized in that, The slide table (201) is slidably connected to the slide rod (302), the slide rod (302) is fixedly connected to the frame (101), and a sealing plate (305) is detachably and fixedly connected to the top opening of the frame (101).

5. The evaporation source protection device for the roll-to-roll vacuum coating machine according to claim 1, characterized in that, The slide (201) is threaded onto the lead screw (303), one end of the lead screw (303) is rotatably connected to the frame (101), and the other end of the lead screw (303) is fixedly connected to the output shaft of the motor (304), and the motor (304) is fixedly connected to the frame (101).

6. The evaporation source protection device for a roll-to-roll vacuum coating machine according to claim 1, characterized in that, A sealing ring is provided at the connection between the partition (202), the slide (201), and the shaft (203).

7. The evaporation source protection device for the roll-to-roll vacuum coating machine according to claim 1, characterized in that, The frame (101) is equipped with casters at the bottom.

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