Exhaust device and single crystal furnace

Abstract

The utility model provides an exhaust device and a single crystal furnace. The exhaust device comprises an exhaust assembly, the exhaust assembly is provided with at least one exhaust channel, on an exhaust path of the exhaust channel, the exhaust channel comprises at least three connecting sections connected in sequence, an included angle larger than 0 degree is formed between any two adjacent connecting sections, one end of the exhaust channel communicates with the top face of the exhaust assembly, and the other end of the exhaust channel communicates with the top face of the exhaust assembly. The other end of the exhaust channel communicates with the bottom face of the exhaust assembly. The exhaust component solves the problem of poor usability of the exhaust component of the single crystal furnace in the prior art.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnace technology, and more specifically, to an exhaust device and a single crystal furnace. Background Technology

[0002] In the field of single crystal furnace thermal field technology, precise control of the thermal environment is crucial for the growth of high-quality single crystals. As a key component of the thermal field system, the design of the argon gas exhaust assembly at the bottom of the single crystal furnace directly affects the thermal field performance and the quality and efficiency of single crystal growth. Currently, the mainstream practice in the industry is to use direct argon gas exhaust, with the exhaust port vertically downwards, directly below the thermal crucible components. This conventional direct argon gas exhaust technology has the following drawbacks:

[0003] The bottom insulation performance is severely inadequate: Due to the direct argon gas flow, a large amount of heat from the bottom of the crucible is rapidly carried away. Heat radiation from above the exhaust vent enters the gas delivery tube without obstruction and is then quickly dissipated into the external environment through the pipes, resulting in significant heat loss. Even with conventional insulation methods such as adding insulation cotton and optimizing insulation materials, the heat loss problem remains difficult to effectively control due to this poorly designed exhaust system. To maintain a constant furnace temperature and silicon melt temperature, the heating components must continuously consume more energy, which undoubtedly increases energy consumption significantly and consequently raises production costs substantially. In actual production scenarios, energy consumption remains consistently high, greatly compressing the potential for production efficiency.

[0004] The risk of electrode arcing increases significantly: During the direct argon venting process, volatiles generated in the thermal field are blown directly towards the four electrodes located next to the gas guide hood. These volatiles are mostly conductive impurities such as metal vapors and graphite particles produced by sublimation or decomposition at high temperatures. Their presence can easily cause instantaneous discharge arcing between the electrodes and the graphite components. Arson not only seriously threatens production safety but can also directly damage expensive equipment, significantly increasing maintenance costs and production risks. Once equipment failure is caused by arcing, the production process will be forced to stop, resulting in incalculable economic losses for the company, including product loss, equipment repair costs, and order delay compensation due to production stoppage.

[0005] Therefore, existing technologies suffer from poor performance of single-crystal furnace exhaust components. Utility Model Content

[0006] The main objective of this invention is to provide an exhaust device and a single crystal furnace to solve the problem of poor performance of exhaust components in existing single crystal furnaces.

[0007] To achieve the above objectives, according to one aspect of the present invention, an exhaust device is provided, comprising an exhaust assembly having at least one exhaust channel. In the exhaust path of the exhaust channel, the exhaust channel includes at least three sequentially connected connecting segments, with an included angle greater than 0 degrees between any two adjacent connecting segments, and one end of the exhaust channel communicating with the top surface of the exhaust assembly, and the other end of the exhaust channel communicating with the bottom surface of the exhaust assembly.

[0008] Furthermore, there are three connecting sections, which are sequentially named the first connecting section, the second connecting section, and the third connecting section. The two ends of the second connecting section are connected to the first connecting section and the third connecting section, respectively. The end of the first connecting section away from the second connecting section is connected to the top surface of the exhaust assembly, and the end of the third connecting section away from the second connecting section is connected to the bottom surface of the exhaust assembly.

[0009] Furthermore, the axes of the first connecting section, the third connecting section, and the exhaust assembly are parallel to each other; and / or the extension direction of the second connecting section is parallel to the radial direction of the exhaust assembly; and / or the axis of the first connecting section relative to the second connecting section that is closer to the exhaust assembly, and the axis of the second connecting section relative to the third connecting section that is closer to the exhaust assembly.

[0010] Furthermore, the second connecting section is a tapered structure, and the second connecting section gradually tapers in the direction close to the first connecting section; and / or in the axial direction of the exhaust assembly, the height H3 of the third connecting section is greater than the height H2 of the second connecting section.

[0011] Furthermore, both the first connecting segment and the third connecting segment are cylindrical channels, and the diameter of the third connecting segment is larger than the diameter of the first connecting segment.

[0012] Furthermore, there are at least two exhaust channels, and the at least two exhaust channels are symmetrically arranged about the central hole of the exhaust assembly.

[0013] Furthermore, the exhaust assembly includes a first exhaust disc and a second exhaust disc stacked along the axial direction, the first exhaust disc being located above the second exhaust disc, the diameter of the first exhaust disc being equal to the diameter of the second exhaust disc, and the first exhaust disc having a first connecting section, and the second exhaust disc having a second connecting section and a third connecting section.

[0014] Furthermore, the exhaust assembly also includes: an air guide tube, which is disposed inside the first connecting section, and the circumferential inner sidewall of the first connecting section is in contact with the circumferential outer sidewall of the air guide tube; and a protective plate, which is provided on the bottom surface of at least the second connecting section in the axial direction of the exhaust assembly.

[0015] Furthermore, the first exhaust disc includes: an exhaust disc body; a protective disc pressing plate, the exhaust disc body and the protective disc pressing plate are stacked on top of each other, the side of the exhaust disc body away from the protective disc pressing plate is in contact with the second exhaust disc, and the protective disc pressing plate has a stepped surface at the periphery of the end corresponding to the second connecting section, and the end of the air guide tube has an overlapping flange that cooperates with the stepped surface.

[0016] According to another aspect of the present invention, a single crystal furnace is provided, including the exhaust device described above.

[0017] Applying the technical solution of this utility model, the exhaust device in this application includes an exhaust component, the exhaust component has at least one exhaust channel, and on the exhaust path of the exhaust channel, the exhaust channel includes at least three sequentially connected connecting segments, any two adjacent connecting segments have an included angle greater than 0 degrees, and one end of the exhaust channel is connected to the top surface of the exhaust component, and the other end of the exhaust channel is connected to the bottom surface of the exhaust component.

[0018] When using the exhaust device of this application, because the exhaust channel of the exhaust assembly includes at least three sequentially connected segments and there is an angle greater than 0 degrees between any two adjacent connected segments, the exhaust channel of the exhaust assembly in this application effectively improves the thermal environment during single crystal growth compared to the straight-up-down exhaust channels in the prior art. The arrangement of multiple connected segments, especially the non-linear connection between the three connected segments, makes the exhaust path more complex, thereby enabling better control of the gas flow direction, reducing direct heat loss from the bottom of the thermal field, and improving the heat preservation effect. Therefore, the exhaust device of this application effectively solves the problem of poor performance of single crystal furnace exhaust assemblies in the prior art. Attached Figure Description

[0019] The accompanying drawings, which form part of this application, are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an undue limitation of the present invention. In the drawings:

[0020] Figure 1 A schematic diagram of an exhaust device according to a specific embodiment of the present invention is shown;

[0021] Figure 2 It shows Figure 1 A schematic diagram of the structure of the exhaust disc body of the exhaust device in the diagram;

[0022] Figure 3 It shows Figure 1 A schematic diagram of the structure of the second exhaust disc of the exhaust device.

[0023] The above figures include the following reference numerals:

[0024] 10. Exhaust assembly; 11. First connecting section; 12. Second connecting section; 13. Third connecting section; 14. First exhaust disc; 141. Exhaust disc body; 142. Protective disc pressure plate; 1421. Stepped surface; 15. Second exhaust disc; 16. Air guide tube; 161. Overlapping flange; 17. Protective plate; 18. Central shaft hole. Detailed Implementation

[0025] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0026] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0027] In this utility model, unless otherwise stated, directional terms such as "upper," "lower," "top," and "bottom" are generally used in relation to the direction shown in the accompanying drawings, or in relation to the vertical, perpendicular, or gravitational direction of the component itself; similarly, for ease of understanding and description, "inner" and "outer" refer to the inner and outer contours of each component itself, but the above directional terms are not used to limit this utility model.

[0028] To address the problem of poor performance of exhaust components in existing single-crystal furnaces, this application provides an exhaust device and a single-crystal furnace.

[0029] Furthermore, the single crystal furnace in this application has the following exhaust device.

[0030] like Figures 1 to 3 As shown, the exhaust device in this application includes an exhaust assembly 10, which has at least one exhaust channel. On the exhaust path of the exhaust channel, the exhaust channel includes at least three sequentially connected connecting segments. Any two adjacent connecting segments have an included angle greater than 0 degrees. One end of the exhaust channel is connected to the top surface of the exhaust assembly 10, and the other end of the exhaust channel is connected to the bottom surface of the exhaust assembly 10.

[0031] When using the exhaust device of this application, since the exhaust channel of the exhaust assembly 10 includes at least three sequentially connected segments and there is an angle greater than 0 degrees between any two adjacent connected segments, the exhaust channel of the exhaust assembly 10 in this application effectively improves the thermal environment during single crystal growth compared to the straight-up-down exhaust channels in the prior art. The arrangement of multiple connected segments, especially the non-linear connection between the three connected segments, makes the exhaust path more complex, thereby enabling better control of the gas flow direction, reducing direct heat loss from the bottom of the thermal field, and improving the heat preservation effect. Therefore, the exhaust device of this application effectively solves the problem of poor performance of single crystal furnace exhaust assemblies in the prior art.

[0032] In one specific embodiment of this application, there are three connecting segments: a first connecting segment 11, a second connecting segment 12, and a third connecting segment 13. The two ends of the second connecting segment 12 are connected to the first connecting segment 11 and the third connecting segment 13, respectively. The end of the first connecting segment 11 furthest from the second connecting segment 12 is connected to the top surface of the exhaust assembly 10, and the end of the third connecting segment 13 furthest from the second connecting segment 12 is connected to the bottom surface of the exhaust assembly 10. That is, in this embodiment, when gas is discharged, it first enters the exhaust device through the end of the first connecting segment 11 furthest from the second connecting segment 12, and after passing through the second connecting segment 12, it exits the exhaust device through the end of the third connecting segment 13 furthest from the second connecting segment 12. This specific connection method allows argon gas to flow along a preset path when passing through the exhaust channel, forming a swirling exhaust effect. The principle is that by controlling the path and direction of gas flow, direct heat loss can be effectively reduced, and volatiles can be prevented from being directly blown onto the electrodes, thereby reducing the risk of sparking. The implementation results show that, in actual production, the thermal stability of the single crystal furnace is significantly enhanced, the electrode arcing accident rate is greatly reduced, and production efficiency and product quality are improved. Application scenarios include, but are not limited to, the growth process of single crystal silicon. Especially in the growth of high-purity single crystals, this design can provide a more stable and purer thermal environment, which is beneficial for improving the purity and uniformity of single crystal materials.

[0033] Optionally, the axes of the first connecting segment 11, the third connecting segment 13, and the exhaust assembly 10 are parallel to each other. Optionally, the extension direction of the second connecting segment 12 is parallel to the radial direction of the exhaust assembly 10. Therefore, in this application, the first connecting segment 11 and the third connecting segment 13 can extend vertically, while the second connecting segment 12 extends horizontally. This arrangement effectively reduces heat loss during the exhaust process. Optionally, the first connecting segment 11 is closer to the axis of the exhaust assembly 10 relative to the second connecting segment 12, and the second connecting segment 12 is closer to the axis of the exhaust assembly 10 relative to the third connecting segment 13. The principle of this design is to optimize the argon flow path by adjusting the axes and extension directions of the connecting segments to achieve the best exhaust effect. The implementation results in more uniform gas flow, a more reasonable heat distribution at the bottom of the thermal field, reduced local overheating or overcooling, and improved uniformity and quality of single crystal growth. Application scenarios include the thermal field design of single crystal furnaces, which is especially suitable for the production of high-end single crystal materials that require precise control of temperature distribution, such as single crystal silicon materials used to manufacture high-performance electronic components.

[0034] Optionally, the second connecting section 12 has a tapered structure, and the second connecting section 12 gradually tapers towards the first connecting section 11. Optionally, in the axial direction of the exhaust assembly 10, the height H3 of the third connecting section 13 is greater than the height H2 of the second connecting section 12. This tapering and height difference design is based on the principle that by changing the cross-sectional area and height of the connecting sections, the gas flow speed and direction can be effectively controlled, reducing energy loss during gas flow, while preventing the accumulation of volatiles near the electrodes and reducing the risk of sparking.

[0035] Preferably, both the first connecting section 11 and the third connecting section 13 are cylindrical channels, and the diameter of the third connecting section 13 is larger than the diameter of the first connecting section 11. The principle of this design is to optimize the gas flow path and improve the exhaust effect by adjusting the shape and size of the connecting sections. The implementation effect is that the gas flows more smoothly through the exhaust channel, reducing flow resistance. Simultaneously, the difference in diameter helps control the gas flow velocity and improves the thermal insulation performance of the thermal field. Furthermore, as... Figure 3 As shown, in this embodiment, the two sides of the second connecting segment 12 can be regarded as two gradually approaching sides that are approximately tangent to the periphery of the third connecting segment 13, thereby forming a tapered structure in the second connecting segment 12.

[0036] Specifically, there are at least two exhaust channels, and these at least two exhaust channels are symmetrically arranged about the central hole 18 of the exhaust assembly 10. The principle of this symmetrical design is to improve the uniformity and stability of the thermal field by balancing the gas flow and avoiding asymmetrical temperature distribution in the thermal field.

[0037] In one specific embodiment of this application, the exhaust assembly 10 includes a first exhaust disk 14 and a second exhaust disk 15 stacked axially. The first exhaust disk 14 is located above the second exhaust disk 15, and the diameters of the first exhaust disk 14 and the second exhaust disk 15 are equal. The first exhaust disk 14 has a first connecting section 11, and the second exhaust disk 15 has a second connecting section 12 and a third connecting section 13. The principle of this stacked structure is to achieve segmented gas flow through layered design, further optimizing the gas flow path and improving the flow effect. Furthermore, in this embodiment, the portion of the second exhaust disk 15 corresponding to the second connecting section 12 is actually a groove structure. After the first exhaust disk 14 and the second exhaust disk 15 are assembled, the first exhaust disk 14 covers the second exhaust disk 15, thereby covering the top of the groove structure and forming the second connecting section 12.

[0038] Optionally, the first exhaust disc 14 includes an exhaust disc body 141 and a protective disc plate 142, which are stacked on top of each other. The side of the exhaust disc body 141 away from the protective disc plate 142 is in contact with the second exhaust disc 15, and the protective disc plate 142 has a stepped surface 1421 at the periphery of the end corresponding to the second connecting section 12. The end of the air guide cylinder 16 has an overlapping flange 161 that mates with the stepped surface 1421. Furthermore, the exhaust assembly 10 also includes an air guide cylinder 16 and a protective plate 17. The air guide cylinder 16 is disposed inside the first connecting section 11, and the circumferential inner sidewall of the first connecting section 11 is in contact with the circumferential outer sidewall of the air guide cylinder 16. In the axial direction of the exhaust assembly 10, at least the bottom surface of the second connecting section 12 is provided with a protective plate 17. In this application, the gas guide tube 16 effectively prevents gas from escaping through the gap between the exhaust plate body 141 and the protective plate pressure plate 142, thereby effectively ensuring the sealing effect of the exhaust device. The protective plate 17 effectively protects the second exhaust plate 15.

[0039] Preferably, the bottom surface of the second connecting section 12 may be provided with a positioning groove that is the same as or similar in shape to the protective plate 17.

[0040] Furthermore, in this application, the diameter of the exhaust disc body 141 and the diameter of the protective disc pressure plate 142 can be equal, or the diameter of the exhaust disc body 141 can be larger than the diameter of the protective disc pressure plate 142.

[0041] As can be seen from the above description, the embodiments of this utility model achieve the following technical effects:

[0042] 1. Effectively solves the problem of poor performance of exhaust components in single crystal furnaces in existing technologies;

[0043] 2. Simple structure and stable performance.

[0044] Obviously, the embodiments described above are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0045] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0046] It should be noted that the terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in sequences other than those illustrated or described herein.

[0047] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. An exhaust device, characterized in that, Includes an exhaust assembly (10), the exhaust assembly (10) having at least one exhaust passage, the exhaust passage including at least three sequentially connected connecting segments on the exhaust path of the exhaust passage, any two adjacent connecting segments having an included angle greater than 0 degrees, and one end of the exhaust passage communicating with the top surface of the exhaust assembly (10), and the other end of the exhaust passage communicating with the bottom surface of the exhaust assembly (10).

2. The exhaust device according to claim 1, characterized in that, There are three connecting segments, which are sequentially named first connecting segment (11), second connecting segment (12), and third connecting segment (13). The two ends of the second connecting segment (12) are connected to the first connecting segment (11) and the third connecting segment (13) respectively. The end of the first connecting segment (11) away from the second connecting segment (12) is connected to the top surface of the exhaust assembly (10), and the end of the third connecting segment (13) away from the second connecting segment (12) is connected to the bottom surface of the exhaust assembly (10).

3. The exhaust device according to claim 2, characterized in that, The axes of the first connecting section (11), the third connecting section (13), and the exhaust assembly (10) are parallel to each other; and / or The extension direction of the second connecting section (12) is parallel to the radial direction of the exhaust assembly (10); and / or The first connecting segment (11) is closer to the axis of the exhaust assembly (10) relative to the second connecting segment (12), and the second connecting segment (12) is closer to the axis of the exhaust assembly (10) relative to the third connecting segment (13).

4. The exhaust device according to claim 2, characterized in that, The second connecting segment (12) has a tapered structure, and the second connecting segment (12) gradually tapers in the direction close to the first connecting segment (11); and / or In the axial direction of the exhaust assembly (10), the height H3 of the third connecting section (13) is greater than the height H2 of the second connecting section (12).

5. The exhaust device according to claim 2, characterized in that, Both the first connecting segment (11) and the third connecting segment (13) are cylindrical channels, and the diameter of the third connecting segment (13) is greater than the diameter of the first connecting segment (11).

6. The exhaust device according to claim 2, characterized in that, The exhaust passages are at least two, and at least two of the exhaust passages are symmetrically arranged about the central hole (18) of the exhaust assembly (10).

7. The exhaust device according to any one of claims 2 to 6, characterized in that, The exhaust assembly (10) includes a first exhaust disk (14) and a second exhaust disk (15) stacked along the axial direction. The first exhaust disk (14) is located above the second exhaust disk (15). The diameter of the first exhaust disk (14) and the diameter of the second exhaust disk (15) are equal. The first exhaust disk (14) has a first connecting section (11), and the second exhaust disk (15) has a second connecting section (12) and a third connecting section (13).

8. The exhaust device according to claim 7, characterized in that, The exhaust assembly (10) also includes: An air guide tube (16) is disposed inside the first connecting section (11), and the inner circumferential sidewall of the first connecting section (11) is in contact with the outer circumferential sidewall of the air guide tube (16). A protective plate (17) is provided on the bottom surface of at least the second connecting section (12) along the axial direction of the exhaust assembly (10).

9. The exhaust device according to claim 8, characterized in that, The first exhaust disc (14) includes: Exhaust disc body (141); The protective disc pressure plate (142) is stacked on top of the exhaust disc body (141) and the protective disc pressure plate (142). The side of the exhaust disc body (141) away from the protective disc pressure plate (142) is in contact with the second exhaust disc (15). The protective disc pressure plate (142) has a stepped surface (1421) at the periphery of the end of the second connecting section (12). The end of the air guide tube (16) has an overlapping flange (161) that cooperates with the stepped surface (1421).

10. A single crystal furnace, characterized in that, The exhaust device includes any one of claims 1 to 9.

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