Embedded anti-micro-vibration base for precision equipment

Abstract

The utility model discloses an embedded anti-micro-vibration base for precision equipment, which comprises a prefabricated equipment base, a rigid isolation wall surrounding the periphery of the prefabricated equipment base, and a bearing rigid base fixedly arranged at the bottoms of the prefabricated equipment base and the rigid isolation wall, the prefabricated equipment base, the rigid isolation wall and the bearing rigid base are all embedded in the mounting pit, and the upper surfaces of the prefabricated equipment base and the rigid isolation wall are both flush with the upper surface of the mounting pit. By designing the embedded micro-vibration-preventing base, the micro-vibration-preventing mounting requirement of precision equipment in a place with a weak micro-vibration-preventing grade is effectively met, the micro-vibration-preventing requirement of the precision equipment can be well met, good bearing rigidity is achieved, a good operation environment can be provided for the precision equipment, and the embedded micro-vibration-preventing base is low in manufacturing cost and high in practicability. The industrial realization is easy, and the application value is obvious.

Description

Technical Field

[0001] This utility model relates to an embedded anti-vibration base for precision equipment, belonging to the technical field of precision equipment bases. Background Technology

[0002] In the semiconductor industry, some precision equipment (such as lithography machines) has higher requirements for environmental vibration than usual. Excessive environmental vibration can directly affect the manufacturing process and yield of precision electronic products. For cleanrooms with single-story structures, precision equipment is placed directly on the factory floor. However, the existing single-story cleanroom floors have weak vibration resistance, which cannot meet the vibration resistance requirements of precision equipment and cannot provide a good operating environment for it. Utility Model Content

[0003] In view of the above-mentioned problems in the existing technology, the purpose of this utility model is to provide an embedded anti-micro-vibration base for precision equipment.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] An embedded anti-vibration base for precision equipment includes a prefabricated equipment base, a rigid isolation wall surrounding the prefabricated equipment base, and a load-bearing rigid base fixed to the bottom of the prefabricated equipment base and the rigid isolation wall. The prefabricated equipment base, the rigid isolation wall, and the load-bearing rigid base are all embedded in the installation pit, and the upper surfaces of the prefabricated equipment base and the rigid isolation wall are flush with the upper surface of the installation pit.

[0006] In one embodiment, a steel ring platform is provided between the prefabricated equipment base and the rigid isolation wall, and gaps are provided between the four sides of the prefabricated equipment base and the inner side of the steel ring platform, and between the outer side of the steel ring platform and the inner side of the rigid isolation wall.

[0007] In a preferred embodiment, a metal edge strip is laid on the upper surface of the gap.

[0008] In one embodiment, both the prefabricated equipment base and the steel-structured circular platform are fixedly connected to the load-bearing rigid base via an AB adhesive layer.

[0009] In one embodiment, the steel-structured annular platform includes a steel-structured annular frame and a tread fixed to the top of the steel-structured annular frame.

[0010] In one embodiment, the prefabricated equipment base is a load-bearing base or a vibration-damping base adapted to precision equipment.

[0011] In one embodiment, the rigid isolation wall is composed of a rectangular steel structure enclosure and a reinforced concrete wall formed by a first steel mesh and concrete, which is fixed around the outer perimeter of the rectangular steel structure enclosure.

[0012] In one embodiment, the first steel mesh is composed of multiple rows of first Y-direction steel bars respectively vertically fixed to the front and rear outer sides of the rectangular steel structure enclosure, several first Z-direction steel bars vertically fixed to the bearing rigid base, and multiple rows of second X-direction steel bars respectively parallel to the front and rear outer sides of the rectangular steel structure enclosure, which are mutually cross-fixed. It is also composed of multiple rows of first X-direction steel bars respectively vertically fixed to the left and right outer sides of the rectangular steel structure enclosure, several first Z-direction steel bars vertically fixed to the bearing rigid base, and multiple rows of second Y-direction steel bars respectively parallel to the left and right outer sides of the rectangular steel structure enclosure, which are mutually cross-fixed.

[0013] In a preferred embodiment, the length of the first Y-direction reinforcing bar is adapted to the distance between the front / rear sides of the rectangular steel structure enclosure and the corresponding inner wall of the installation pit; the length of the first X-direction reinforcing bar is adapted to the distance between the left / right sides of the rectangular steel structure enclosure and the corresponding inner wall of the installation pit; the length of the first Z-direction reinforcing bar is adapted to the height of the rectangular steel structure enclosure; the length of the second X-direction reinforcing bar is adapted to the length of the load-bearing rigid base; and the length of the second Y-direction reinforcing bar is adapted to the width of the load-bearing rigid base.

[0014] In one embodiment, the load-bearing rigid base is composed of a second steel mesh and concrete.

[0015] In one embodiment, the second steel mesh is composed of multiple rows of third Y-direction steel bars, multiple rows of third X-direction steel bars, and several vertically upward second Z-direction steel bars that are intersected and fixed together.

[0016] In a preferred embodiment, the length of the third Y-direction reinforcing bar is adapted to the spacing between the front and rear inner walls of the installation pit, the length of the third X-direction reinforcing bar is adapted to the spacing between the left and right inner walls of the installation pit, and the length of the second Z-direction reinforcing bar is adapted to the preset height of the rigid support base.

[0017] In a preferred embodiment, the inner wall of the installation pit is provided with a waterproof isolation layer.

[0018] In one embodiment, the waterproof isolation layer is composed of an inner concrete layer, an inner glass mesh layer, an ABS roll material layer, a polystyrene board layer, an outer glass mesh layer, and an outer concrete layer bonded together from the inside out.

[0019] In a preferred embodiment, the inner bottom surface of the installation pit is provided with a waterproof layer.

[0020] In one embodiment, the waterproof layer is formed by bonding a base layer, a first concrete mortar layer, an ABS roll material layer, and a second concrete mortar layer from bottom to top.

[0021] Compared with the prior art, the beneficial technical effects of this utility model are as follows:

[0022] This invention effectively solves the problem of anti-vibration installation for precision equipment in locations with weak anti-vibration levels by designing an embedded anti-vibration base. It not only meets the anti-vibration requirements of precision equipment well, but also has good load-bearing rigidity, providing a good operating environment for precision equipment. Furthermore, it has low manufacturing cost and is easy to industrialize. Therefore, this invention has significant application value. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of an embedded anti-vibration base for precision equipment provided in the embodiment;

[0024] Figure 2 yes Figure 1 The diagram shows the installation status of the embedded anti-vibration base.

[0025] Figure 3 yes Figure 2 Cross-sectional structural diagram;

[0026] Figure 4 This is an assembly structure diagram of the rigid isolation wall and the supporting rigid base described in the embodiment;

[0027] Figure 5 This is a schematic diagram of the assembly structure of the first steel mesh, the rectangular steel structure enclosure, and the load-bearing rigid base in the embodiment;

[0028] Figure 6 This is a schematic diagram of the structure of the second steel mesh in the embodiment;

[0029] Figure 7 This is a schematic diagram of the assembly structure of the second steel mesh and the installation pit in the embodiment;

[0030] Figure 8 This is a schematic diagram of the assembly structure of the rigid support base and the installation pit described in the embodiment;

[0031] Figure 9 This is a structural schematic diagram of the steel-structured annular platform described in the embodiment;

[0032] Figure 10 This is a cross-sectional view of the installation pit described in the embodiment;

[0033] Figure 11 This is a partial structural diagram of the waterproof isolation layer described in the embodiment;

[0034] Figure 12 This is a partial structural diagram of the waterproof layer described in the embodiment;

[0035] The labels in the diagram are as follows:

[0036] 1. Precast equipment base; 2. Rigid isolation wall; 2-1. Rectangular steel structure enclosure; 2-2. Reinforced concrete wall; 2-21. First steel mesh; 2-211. First Y-direction reinforcement; 2-212. First X-direction reinforcement; 2-213. First Z-direction reinforcement; 2-214. Second X-direction reinforcement; 2-215. Second Y-direction reinforcement; 2-22. Concrete in reinforced concrete wall 2-2; 3. Load-bearing rigid base; 3-1. Second steel mesh; 3-11. Third Y-direction reinforcement; 3-12. Third X-direction reinforcement; 3-13. Second Z-direction reinforcement; 3-2. 3. Concrete supporting the rigid base; 4. Steel ring platform; 4-1. Steel ring frame; 4-2. Pedal; 5. Metal edge strip; 6. Installation pit; 6-1. Waterproof isolation layer; 6-11. Inner concrete layer; 6-12. Inner glass mesh layer; 6-13. ABS roll material layer; 6-14. Polystyrene board layer; 6-15. Outer glass mesh layer; 6-16. Outer concrete layer; 6-2. Waterproof layer; 6-21. Base layer; 6-22. First concrete mortar layer; 6-23. ABS roll material layer; 6-24. Second concrete mortar layer; 7. AB adhesive layer. Detailed Implementation

[0037] The technical solution of this utility model will be further described in detail below with reference to the accompanying drawings and embodiments. Furthermore, it should be noted that the terminology used in this utility model is for the purpose of describing specific embodiments only and is not intended to limit the utility model. Unless otherwise defined, the technical or scientific terms used in this utility model should have the ordinary meaning understood by those skilled in the art. Terms such as "inner," "outer," "upper," "lower," "top," "bottom," "front," "rear," "left," and "right," indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In addition, the terms "set", "install", "connect", "fix" and other such terms should be interpreted broadly. For example, they can refer to a fixed connection or a detachable connection; they can refer to a direct connection or an indirect connection. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances. The terms "first", "second", etc. are used for descriptive purposes only and can refer to one or more of the features. In the description of this utility model, "multiple" means two or more, unless otherwise explicitly defined.

[0038] Example

[0039] Please combine Figures 1 to 3 As shown: This embodiment provides an embedded anti-micro-vibration base for precision equipment, including a prefabricated equipment base 1, a rigid isolation wall 2 surrounding the prefabricated equipment base 1, and a load-bearing rigid base 3 fixed to the bottom of the prefabricated equipment base 1 and the rigid isolation wall 2. This embodiment also includes a steel annular step 4 arranged between the prefabricated equipment base 1 and the rigid isolation wall 2. Gaps (not shown in the figure, covered by metal edge strips 5) are provided between the four sides of the prefabricated equipment base 1 and the inner side of the steel annular step 4, and between the outer side of the steel annular step 4 and the inner side of the rigid isolation wall 2. The upper surface of the gaps is covered with metal edge strips 5. Furthermore, the prefabricated equipment base 1, the rigid isolation wall 2, the load-bearing rigid base 3, and the steel annular step 4 are all embedded in the installation pit 6, and the upper surfaces of the prefabricated equipment base 1, the rigid isolation wall 2, and the steel annular step 4 are all flush with the upper surface of the installation pit 6.

[0040] Please see again. Figure 3 As shown, in this embodiment, the prefabricated equipment base 1 and the steel structure annular platform 4 are both fixedly connected to the load-bearing rigid base 3 through the AB adhesive layer 7.

[0041] Please see again. Figure 4 As shown, in this embodiment, the rigid isolation wall 2 is composed of a rectangular steel structure enclosure 2-1 and a reinforced concrete wall 2-2 formed by a first steel mesh 2-21 and concrete 2-22, which is fixed around the outer perimeter of the rectangular steel structure enclosure 2-1. In this embodiment, the rectangular steel structure enclosure 2-1 can be formed by welding angle steel or steel plates.

[0042] Please see again. Figure 5 As shown: In this embodiment, the first steel mesh 2-21 is composed of multiple rows of first Y-direction steel bars 2-211 that are vertically fixed to the front and rear outer surfaces of the rectangular steel structure enclosure 2-1, several first Z-direction steel bars 2-213 that are vertically fixed to the bearing rigid base 3, and multiple rows of second X-direction steel bars 2-214 that are parallel to the front and rear outer surfaces of the rectangular steel structure enclosure 2-1, which are mutually cross-fixed (here the fixing can be welding or binding). It is also composed of multiple rows of first X-direction steel bars 2-212 that are vertically fixed to the left and right outer surfaces of the rectangular steel structure enclosure 2-1, several first Z-direction steel bars 2-213 that are vertically fixed to the bearing rigid base 3, and multiple rows of second Y-direction steel bars 2-215 that are parallel to the left and right outer surfaces of the rectangular steel structure enclosure 2-1, which are mutually cross-fixed (here the fixing can be welding or binding).

[0043] As a preferred embodiment, the length of the first Y-direction reinforcing bar 2-211 is matched with the distance between the front / rear sides of the rectangular steel structure enclosure 2-1 and the corresponding inner wall of the installation pit 6; the length of the first X-direction reinforcing bar 2-212 is matched with the distance between the left / right sides of the rectangular steel structure enclosure 2-1 and the corresponding inner wall of the installation pit 6; the length of the first Z-direction reinforcing bar 2-213 is matched with the height of the rectangular steel structure enclosure 2-1; and the length of the second X-direction reinforcing bar 2-214 is matched with the length of the rigid support base 3. The dimensions are compatible, and the length of the second Y-direction reinforcing bar 2-215 is compatible with the width of the rigid support base 3. The compatibility means that an installation gap is reserved, and they are not completely equal. For example, the length of the first Y-direction reinforcing bar 2-211 is equal to the distance between the front / rear side of the rectangular steel structure enclosure 2-1 and the corresponding inner wall of the installation pit 6 minus the reserved installation gap. The installation gap is usually set to 10±2mm, but it is not specifically limited here and can be set according to the installation requirements.

[0044] Please see again. Figures 6 to 8 As shown, in this embodiment, the rigid support base 3 is composed of a second steel mesh 3-1 and concrete 3-2. The second steel mesh 3-1 is formed by multiple rows of third Y-direction steel bars 3-11, multiple rows of third X-direction steel bars 3-12, and several vertically upward second Z-direction steel bars 3-13 intersecting and fixing each other (the fixing here can be welding or binding).

[0045] As a preferred embodiment, the length of the third Y-direction reinforcing bar 3-11 is adapted to the spacing between the front and rear inner walls of the installation pit 6, the length of the third X-direction reinforcing bar 3-12 is adapted to the spacing between the left and right inner walls of the installation pit 6, and the length of the second Z-direction reinforcing bar 3-13 is adapted to the preset height of the rigid support base 3. The adaptation means that an installation gap is reserved, not that they are completely equal. For example, the length of the third Y-direction reinforcing bar 3-11 is equal to the length of the spacing between the front and rear inner walls of the installation pit 6 minus the reserved installation gap. The installation gap is usually set to 10±2mm, but it is not specifically limited here and can be set according to the installation requirements.

[0046] Please see again. Figure 3 and Figure 9 As shown, in this embodiment, the steel-structured annular platform 4 includes a steel-structured annular frame 4-1 and a footplate 4-2 fixed to the top of the steel-structured annular frame 4-1. The steel-structured annular platform 4 facilitates the installation and maintenance of the prefabricated equipment base 1 and the precision equipment located on the prefabricated equipment base 1.

[0047] Please see again. Figure 3 , Figure 10 and Figure 11As shown, in this embodiment, the inner wall of the installation pit 6 is provided with a waterproof isolation layer 6-1. The waterproof isolation layer 6-1 is formed by bonding together an inner concrete layer 6-11, an inner glass mesh layer 6-12, an ABS roll material layer 6-13, a polystyrene board layer 6-14, an outer glass mesh layer 6-15, and an outer concrete layer 6-16 from the inside to the outside.

[0048] Please see again. Figure 3 , Figure 10 and Figure 12 As shown, in this embodiment, the inner bottom surface of the installation pit 6 is provided with a waterproof layer 6-2. The waterproof layer 6-2 is formed by bonding a base layer 6-21, a first concrete mortar layer 6-22, an ABS roll material layer 6-23, and a second concrete mortar layer 6-24 from bottom to top.

[0049] Additionally, it should be noted that the prefabricated equipment base 1 described in this utility model refers to a load-bearing base or anti-vibration base adapted to precision equipment, which can be prefabricated using existing technologies (such as patents CN201020292561.0 or CN201721103915.0), and will not be specifically limited or elaborated here.

[0050] The method for manufacturing the embedded anti-vibration base described in this embodiment includes the following steps:

[0051] S1) First, a waterproof isolation layer 6-1 is made on the inner wall of the installation pit 6 and a waterproof layer 6-2 is made on the inner bottom surface of the installation pit 6.

[0052] The manufacturing process of the waterproof isolation layer 6-1 is as follows: First, glass mesh is hung on both sides of the polystyrene board, then putty is used to fill the gaps, and then ABS roll material is covered on the inner glass mesh layer 6-12. The whole thing is then placed in the installation pit 6, and concrete is placed in the installation pit 6 to pour into the template. Concrete is then poured into the template to form an inner concrete layer 6-11 and an outer concrete layer 6-16. Through the inner concrete layer 6-11 and the outer concrete layer 6-16, the inner glass mesh layer 6-12, the ABS roll material layer 6-13, the polystyrene board layer 6-14, and the outer glass mesh layer 6-15 are integrated with it to form the waterproof isolation layer 6-1.

[0053] The process of making the waterproof layer 6-2 is as follows: First, the inner bottom surface of the installation pit 6 is laid with rubble and soil to make a base layer 6-21. Then, the base layer 6-21 is leveled with concrete mortar to obtain the first concrete mortar layer 6-22. Then, ABS roll material is covered on the surface of the first concrete mortar layer 6-22 to form an ABS roll material layer 6-23. Finally, concrete mortar is used to cover and level the surface again to obtain the second concrete mortar layer 6-24, thus forming the waterproof layer 6-2.

[0054] S2) Construct a load-bearing rigid base 3 within the installation pit 6, consisting of a second steel mesh 3-1 and concrete 3-2;

[0055] The manufacturing process of the rigid support base 3 is as follows: the prefabricated second steel mesh 3-1 is placed into the installation pit 6, and then concrete 3-2 is poured into the second steel mesh 3-1;

[0056] S3) Place the prefabricated rectangular steel structure fence 2-1 at the center of the rigid support base 3, and then construct a reinforced concrete wall 2-2 formed by the first steel mesh 2-21 and concrete 2-22 on the outer periphery of the rectangular steel structure fence 2-1. The reinforced concrete wall 2-2 formed is fixed to the rectangular steel structure fence 2-1 as a whole to form a rigid isolation fence 2.

[0057] The process of constructing the reinforced concrete wall 2-2 is as follows: First, a first steel mesh 2-21 is constructed on the outer perimeter of the rectangular steel structure enclosure 2-1, and then concrete 2-22 is poured into the first steel mesh 2-21.

[0058] S4) Place the prefabricated steel ring platform 4 into the inner cavity of the rectangular steel enclosure 2-1, and after leveling (e.g., leveling with shims), fix the bottom surface of the steel ring platform 4 to the top surface of the load-bearing rigid base 3.

[0059] S5) Place the prefabricated equipment base 1 into the inner cavity of the steel structure ring platform 4, and fix the bottom surface of the prefabricated equipment base 1 to the top surface of the bearing rigid base 3 after leveling (e.g., leveling with shims).

[0060] Because an installation gap is reserved between the steel structure annular platform 4 and the rectangular steel structure enclosure 2-1, and an installation gap is reserved between the prefabricated equipment base 1 and the steel structure annular platform 4, a metal edge strip 5 is laid on the top surface of the installation gap for covering and sealing. This completes the process. Figure 2 The image shows the completed and installed embedded anti-vibration base. The installation gap mentioned here is typically set to 10±2mm, but this is not specifically limited and can be set according to installation requirements.

[0061] Additionally, please see Figure 3 As shown, in this embodiment, the bottom surface of the steel ring platform 4 is fixed to the top surface of the rigid support base 3 by an AB adhesive layer 7; the bottom surface of the prefabricated equipment base 1 is fixed to the top surface of the rigid support base 3 by an AB adhesive layer 7.

[0062] The location of the installation pit 6 described in this application is determined according to the location of the precision equipment to be installed. The inner size of the installation pit 6 is determined according to the size of the embedded anti-vibration base. Specifically, the inner size of the steel ring platform 4 is first determined according to the size of the prefabricated equipment base 1 (larger than the outer circumference of the prefabricated equipment base 1 by a preset installation gap, such as 10±2mm). Then, the inner size of the rectangular steel enclosure 2-1 is determined according to the outer circumference of the steel ring platform 4 (larger than the outer circumference of the steel ring platform 4 by a preset installation gap, such as 10±2mm). Finally, the inner size of the rigid partition is determined according to the size of the prefabricated equipment base 1. The inner cavity size of the waterproof isolation layer 6-1 is determined by the outer perimeter of the enclosure wall 2, and then the inner cavity size of the installation pit 6 is determined based on the outer perimeter size of the waterproof isolation layer 6-1. The depth of the installation pit 6 is the sum of the height of the prefabricated equipment base 1, the height of the load-bearing rigid base 3, and the thickness of the waterproof layer 6-2, thereby ensuring that the prefabricated equipment base 1, the rigid isolation wall 2, the load-bearing rigid base 3, and the steel ring platform 4 can all be embedded in the installation pit 6, and the upper surfaces of the prefabricated equipment base 1, the rigid isolation wall 2, and the steel ring platform 4 are all flush with the upper surface of the installation pit 6.

[0063] In summary, this utility model effectively solves the problem of anti-vibration installation for precision equipment in locations with weak anti-vibration levels by designing an embedded anti-vibration base. It not only meets the anti-vibration requirements of precision equipment well, but also has good load-bearing rigidity, providing a good operating environment for precision equipment. Furthermore, it has low manufacturing cost and is easy to industrialize. Therefore, this utility model has significant application value.

[0064] Finally, it should be pointed out that the above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present utility model should be included within the protection scope of the present utility model.

Claims

1. An embedded anti-vibration base for precision equipment, characterized in that: It includes a prefabricated equipment base, a rigid isolation wall surrounding the prefabricated equipment base, and a load-bearing rigid base fixed to the bottom of the prefabricated equipment base and the rigid isolation wall. The prefabricated equipment base, the rigid isolation wall, and the load-bearing rigid base are all embedded in the installation pit, and the upper surfaces of the prefabricated equipment base and the rigid isolation wall are flush with the upper surface of the installation pit.

2. The embedded anti-vibration base according to claim 1, characterized in that: A steel ring platform is provided between the prefabricated equipment base and the rigid isolation wall. Gaps are provided between the four sides of the prefabricated equipment base and the inner side of the steel ring platform, and between the outer side of the steel ring platform and the inner side of the rigid isolation wall. Metal edge strips are laid on the upper surface of the gaps.

3. The embedded anti-vibration base according to claim 2, characterized in that: The prefabricated equipment base and the steel circular platform are both fixedly connected to the load-bearing rigid base through AB adhesive layer.

4. The embedded anti-vibration base according to claim 1, characterized in that: The rigid isolation wall consists of a rectangular steel structure enclosure and a reinforced concrete wall formed by a first steel mesh and concrete, which is fixed around the outside of the rectangular steel structure enclosure.

5. The embedded anti-vibration base according to claim 4, characterized in that: The first steel reinforcement mesh is composed of multiple rows of first Y-direction steel bars that are vertically fixed to the front and rear outer sides of the rectangular steel structure enclosure, several first Z-direction steel bars that are vertically fixed to the bearing rigid base, and multiple rows of second X-direction steel bars that are parallel to the front and rear outer sides of the rectangular steel structure enclosure, which are mutually cross-fixed. It is also composed of multiple rows of first X-direction steel bars that are vertically fixed to the left and right outer sides of the rectangular steel structure enclosure, several first Z-direction steel bars that are vertically fixed to the bearing rigid base, and multiple rows of second Y-direction steel bars that are parallel to the left and right outer sides of the rectangular steel structure enclosure, which are mutually cross-fixed.

6. The embedded anti-vibration base according to claim 1, characterized in that: The load-bearing rigid base is composed of a second steel mesh and concrete.

7. The embedded anti-vibration base according to claim 6, characterized in that: The second steel mesh is composed of multiple rows of third Y-direction steel bars, multiple rows of third X-direction steel bars, and several vertically upward second Z-direction steel bars that are intersected and fixed together.

8. The embedded anti-vibration base according to claim 1, characterized in that: The inner wall of the installation pit is provided with a waterproof isolation layer.

9. The embedded anti-vibration base according to claim 8, characterized in that: The waterproof isolation layer is composed of an inner concrete layer, an inner glass mesh layer, an ABS roll material layer, a polystyrene board layer, an outer glass mesh layer, and an outer concrete layer bonded together from the inside out.

10. The embedded anti-vibration base according to claim 1, characterized in that: The bottom surface of the installation pit is provided with a waterproof layer.

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