Full-automatic ultra-pure helium and xenon gas purification equipment

Abstract

The utility model relates to the technical field of gas production equipment, in particular to full-automatic ultra-pure helium and xenon gas purification equipment, when the full-automatic ultra-pure helium and xenon gas purification equipment is used, a catalyst is respectively arranged in each group of lower tank bodies, and a worker operates gas to enter the first group of lower tank bodies to carry out purification operation through the catalyst; when the catalyst in the first group of lower tank body needs to be replaced, the gas can be continuously purified while the catalyst is replaced, so that the processing efficiency is improved; comprising a supporting seat, lower tank bodies, upper tank bodies and supporting legs, the supporting legs are arranged at the bottom end of the supporting seat, two groups of lower tank bodies are fixedly mounted on the supporting seat, one group of upper tank bodies is detachably arranged at the top end of each group of lower tank bodies, the device further comprises locking assemblies, an air inlet assembly and an air exhaust assembly, and the lower tank bodies and the upper tank bodies are connected through a plurality of groups of locking assemblies. The output ends of the two groups of lower tank bodies are respectively communicated with the exhaust assembly, and the input ends of the two groups of upper tank bodies are respectively communicated with the output end of the air inlet assembly.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of gas production equipment, in particular to a kind of full-automatic ultrapure helium xenon gas purification equipment. BACKGROUND

[0002] In semiconductor industry, hydrogen, nitrogen, inert gas (helium, neon, argon, krypton, xenon), reducing gas (arsine, phosphine, ammonia, hydrogen silicide, etc.) are often needed, and these gases need to have "ultrapurity", especially need to have extremely low levels of oxygen, water, carbon dioxide, carbon monoxide and other impurities.

[0003] In the prior art, the patent document with publication number CN216537814U discloses a mobile gas purification device, which includes an inlet pipe, an upper tank body, a lower tank body, a fixed sleeve plate, an exhaust pipe, support legs, a locking device, an upper locking sleeve ring, and a lower locking sleeve ring. The exhaust pipe is arranged below the lower tank body. The fixed sleeve plate is sleeved on the lower end of the lower tank body. The support legs are arranged on the outer side of the fixed sleeve plate. The upper tank body is detachably arranged on the top of the lower tank body. The inlet pipe is arranged on the top of the upper tank body. The upper locking sleeve ring is sleeved on the lower end opening of the upper tank body. The lower locking sleeve ring is sleeved on the upper end opening of the lower tank body. The locking device is sleeved on the upper locking sleeve ring and the lower locking sleeve ring.

[0004] During use, it is found that when the catalyst is replaced, the above-mentioned device cannot purify the gas, thereby affecting the subsequent production process. UTILITY MODEL CONTENTS

[0005] To solve the above technical problems, the utility model provides a kind of full-automatic ultrapure helium xenon gas purification equipment.

[0006] The full-automatic ultrapure helium xenon gas purification equipment of the utility model includes support seat, lower tank body, upper tank body and support leg, the support seat bottom end is provided with support leg, and two groups of lower tank bodies are fixedly installed on the support seat, and each group of lower tank body top is detachably provided with a group of upper tank body, further including locking assembly, inlet assembly and exhaust assembly, the lower tank body and the upper tank body are connected by multiple locking assemblies, the output end of the two groups of lower tank bodies is communicated with the exhaust assembly, and the input end of the two groups of upper tank bodies is communicated with the output end of the inlet assembly;When using, catalyst is arranged in each group of lower tank body respectively, and the worker operates gas to enter the first group of lower tank body and is purified by catalyst, when the catalyst in the first group of lower tank body needs to be replaced, the worker makes gas enter the second group of lower tank body through inlet assembly and is purified by corresponding catalyst, at this time, the worker removes the upper tank body on the first group of lower tank body to replace the internal catalyst, which ensures that the catalyst is replaced while ensuring that the gas is continuously purified, and improves processing efficiency.

[0007] Preferably, the locking assembly comprises a shaft pin, a screw rod, a butterfly nut, a fixed plate and a notch, the screw rod is hinged to the outer wall of the lower tank body through the shaft pin, the fixed plate is installed on the upper tank body, the fixed plate is provided with the notch, and the screw rod is in threaded connection with the butterfly nut; the upper tank body cover is installed at the top end of the lower tank body, then the screw rod is made to enter the inner side of the notch on the fixed plate under the cooperation of the shaft pin, and then the butterfly nut is rotated, so that the top end of the fixed plate is tightly pressed by the butterfly nut, and the connection of the upper tank body and the lower tank body is completed, and the connection firmness is improved.

[0008] Preferably, the exhaust assembly comprises an exhaust pipe, an exhaust valve and a No. 1 three-way pipe, the output ends of the two groups of lower tank bodies are respectively communicated with the input ends of a group of exhaust pipes, a group of exhaust valves are respectively arranged on the exhaust pipes, and the output ends of the two groups of exhaust pipes are respectively communicated with two groups of input ends of the No. 1 three-way pipe; in use, when the first group of lower tank bodies purify the gas, the exhaust valve on the exhaust pipe communicated with the first group of lower tank bodies is opened, so that the purified gas is discharged through the exhaust pipe and the No. 1 three-way pipe, when the catalyst of the first group of lower tank bodies is replaced, the first group of exhaust valves is closed and the second group of exhaust valves is opened, and the switching is completed, and the flexibility is improved.

[0009] Preferably, the gas inlet assembly comprises a No. 2 three-way pipe, a gas inlet pipe, a gas inlet valve and a corrugated pipe, two groups of output ends of the No. 2 three-way pipe are respectively communicated with the input ends of a group of gas inlet pipes, a group of gas inlet valves are respectively arranged on each group of gas inlet pipes, and the output ends of each group of gas inlet pipes are respectively communicated with the input ends of a group of corrugated pipes; when the first group of lower tank bodies is needed to purify the gas, the gas inlet valve on the gas inlet pipe communicated with the first group of lower tank bodies is opened, and the other group of gas inlet valves is closed, and when the two groups of lower tank bodies are needed to be switched, the two groups of gas inlet valves are switched, the flexibility is improved, and the convenience is improved.

[0010] Preferably, it further comprises an annular flat gasket, the screw rod is sleeved with the annular flat gasket; the butterfly nut increases the contact area with the top end of the fixed plate through the annular flat gasket, and the connection firmness is improved.

[0011] Preferably, it further comprises a reinforcing plate, the reinforcing plate is arranged between the support seat and the lower tank body; the support seat and the lower tank body are reinforced in connection through the reinforcing plate, and the connection firmness is improved.

[0012] Compared with the prior art, the beneficial effects of the utility model are that: when using, the catalyst is arranged in each group of lower jar body respectively, the staff operates the gas to enter the first group of lower jar body to carry out the purification operation through the catalyst, when the catalyst in the first group of lower jar body needs to be replaced, the staff makes the gas enter the second group of lower jar body through the air inlet assembly and carries out the purification operation through the corresponding catalyst, at this time, the staff removes the upper jar body on the first group of lower jar body to replace the internal catalyst, ensure that the catalyst is replaced and ensure that the gas continues to be purified, improve the processing efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 is the axonometric structure schematic diagram of the utility model;

[0014] Figure 2 is Figure 1 the partial enlarged structure schematic diagram of A part in the utility model;

[0015] Figure 3 is the explosion structure schematic diagram of the utility model;

[0016] Figure 4 is the enlarged structure schematic diagram of the structure such as no.

[0017] Figure 5 is the enlarged structure schematic diagram of the structure such as exhaust pipe and no.

[0018] Markings in the drawing: 1, support seat, 2, lower jar body, 3, upper jar body, 4, shaft pin, 5, lead screw, 6, butterfly nut, 7, fixed plate, 8, slot, 9, exhaust pipe, 10, exhaust valve, 11, no. DETAILED DESCRIPTION

[0019] In order to facilitate understanding the utility model, the utility model will be described more fully below with reference to the relevant drawings.The utility model can be realized in many different forms, and is not limited to the embodiments described herein.Contrarily, the purpose of providing these embodiments is to make the disclosure of the utility model more thorough and comprehensive.

[0020] Embodiment 1

[0021] As Figures 1 to 5As shown in the utility model, a kind of full-automatic ultra-pure helium xenon gas purification equipment, including support seat 1, lower jar 2, upper jar 3 and support leg 18, the support seat 1 bottom is provided with support leg 18, support seat 1 is fixedly installed with two groups lower jar 2, the top of each group lower jar 2 is respectively detachably provided with a group of upper jar 3, further include locking assembly, gas inlet component and exhaust component, the lower jar 2 and the upper jar 3 between it is connected by multiple locking assemblies, the output end of two groups lower jar 2 is respectively communicated with exhaust component, the input end of two groups upper jar 3 is respectively communicated with the output end of gas inlet component;

[0022] As Figure 1 And Figure 2 As shown, locking assembly includes shaft pin 4, lead screw 5, butterfly nut 6, fixed plate 7 and notch 8, lead screw 5 is hinged with lower jar 2 outer side wall by shaft pin 4, fixed plate 7 is installed on upper jar 3, fixed plate 7 is provided with notch 8, lead screw 5 is threadedly connected with butterfly nut 6.

[0023] In this embodiment, when using, catalyst is respectively arranged in each group lower jar 2, upper jar 3 cover is installed on the top of lower jar 2, then make lead screw 5 enter the inside of notch 8 on fixed plate 7 under the cooperation of shaft pin 4, then rotate butterfly nut 6, so that the top of fixed plate 7 is tightly pressed by butterfly nut 6, so that the connection of upper jar 3 and lower jar 2 is completed, the staff operates gas to enter first group lower jar 2 and carries out purification operation by catalyst, when catalyst in first group lower jar 2 needs to be replaced, the staff makes gas enter second group lower jar 2 by gas inlet component and carries out purification operation by corresponding catalyst, at this time, the staff removes upper jar 3 on first group lower jar 2 to replace internal catalyst, ensure that catalyst is replaced while ensuring that gas continues to be purified.

[0024] Embodiment 2

[0025] As Figures 1 to 5 As shown in the utility model, a kind of full-automatic ultra-pure helium xenon gas purification equipment, including support seat 1, lower jar 2, upper jar 3 and support leg 18, the support seat 1 bottom is provided with support leg 18, support seat 1 is fixedly installed with two groups lower jar 2, the top of each group lower jar 2 is respectively detachably provided with a group of upper jar 3, further include locking assembly, gas inlet component and exhaust component, the lower jar 2 and the upper jar 3 between it is connected by multiple locking assemblies, the output end of two groups lower jar 2 is respectively communicated with exhaust component, the input end of two groups upper jar 3 is respectively communicated with the output end of gas inlet component;

[0026] As Figure 1 And Figure 2As shown, the locking assembly comprises a shaft pin 4, a lead screw 5, a butterfly nut 6, a fixed plate 7 and a notch 8, the lead screw 5 is hinged to the outer side wall of the lower tank body 2 through the shaft pin 4, the fixed plate 7 is installed on the upper tank body 3, the notch 8 is arranged on the fixed plate 7, and the lead screw 5 is in threaded connection with the butterfly nut 6;

[0027] As shown in Figure 3 and Figure 5 As shown, the exhaust assembly comprises an exhaust pipe 9, an exhaust valve 10 and a No. 1 three-way pipe 11, the output ends of the two groups of lower tank bodies 2 are communicated with the input ends of a group of exhaust pipes 9 respectively, a group of exhaust valves 10 is arranged on each exhaust pipe 9 respectively, and the output ends of the two groups of exhaust pipes 9 are communicated with the two groups of input ends of the No. 1 three-way pipe 11 respectively;

[0028] As shown in Figure 3 and Figure 4 As shown, the air inlet assembly comprises a No. 2 three-way pipe 12, an air inlet pipe 13, an air inlet valve 14 and a corrugated pipe 15, the two groups of output ends of the No. 2 three-way pipe 12 are communicated with the input ends of a group of air inlet pipes 13 respectively, a group of air inlet valves 14 is installed on each air inlet pipe 13 respectively, the output ends of each air inlet pipe 13 are communicated with the input ends of a group of corrugated pipes 15 respectively, and the output ends of each group of corrugated pipes 15 are communicated with the input ends of a group of lower tank bodies 2 respectively;

[0029] Further comprising an annular flat washer 16 and a reinforcing plate 17, the annular flat washer 16 is sleeved on the lead screw 5, and the reinforcing plate 17 is arranged between the support seat 1 and the lower tank body 2.

[0030] In the embodiment, when in use, a catalyst is arranged in each group of lower tank bodies 2, the upper tank body 3 is covered on the top end of the lower tank body 2, then the lead screw 5 is arranged in the inner side of the notch 8 on the fixed plate 7 under the cooperation of the shaft pin 4, then the butterfly nut 6 is rotated, so that the top end of the fixed plate 7 is tightly pressed by the butterfly nut 6, thereby the connection between the upper tank body 3 and the lower tank body 2 is completed, the air inlet valve 14 on the air inlet pipe 13 communicated with the first group of lower tank bodies 2 is opened, and the other group of air inlet valves 14 is closed, and simultaneously the first group of exhaust valves 10 is opened, when the catalyst in the first group of lower tank bodies 2 needs to be replaced, the staff makes the gas enter the second group of lower tank bodies 2 through the air inlet assembly and is purified through the corresponding catalyst, at this time, the staff removes the upper tank body 3 on the first group of lower tank bodies 2 to replace the internal catalyst, so that the catalyst replacement is ensured and the gas continues to be purified.

[0031] The exhaust valve 10 and the air inlet valve 14 of the full-automatic ultrapure helium-xenon gas purification equipment are purchased on the market, and the technical personnel in the industry only need to install and operate according to the use instruction book attached thereto, without the creative labor of the technical personnel in the field.

[0032] The above merely is the preferred implementation manner of the present application, and it should be noted that, for the ordinary skilled in the art, without departing from the technical principles of the present application, a number of improvements and modifications can be made, and these improvements and modifications should also be considered as the protection scope of the present application.

Claims

1. A fully automatic ultra-pure helium xenon gas purification device, comprising a support seat (1), a lower tank body (2), an upper tank body (3) and a supporting leg (18), the bottom end of the support seat (1) is provided with a supporting leg (18), and two groups of lower tank bodies (2) are fixedly installed on the support seat (1), and the top end of each group of lower tank bodies (2) is respectively detachably provided with a group of upper tank bodies (3), characterized in that, Also include locking assembly, air intake assembly and exhaust assembly, the lower tank body (2) and the upper tank body (3) are connected by multiple sets of locking assembly, the output end of two sets of lower tank body (2) respectively communicate with exhaust assembly, the input end of two sets of upper tank body (3) respectively communicate with the output end of air intake assembly.

2. A fully automated ultrapure helium xenon gas purification apparatus as claimed in claim 1, characterized in that, Locking assembly includes shaft pin (4), lead screw (5), butterfly nut (6), fixed plate (7) and slot (8), lead screw (5) is hinged with the outside wall of lower tank body (2) through shaft pin (4), fixed plate (7) is installed on upper tank body (3), fixed plate (7) is provided with slot (8), lead screw (5) is threadedly connected with butterfly nut (6).

3. A fully automated ultrapure helium xenon gas purification apparatus as claimed in claim 2, characterized in that, Exhaust assembly includes exhaust pipe (9), exhaust valve (10) and one three-way pipe (11), the output end of two sets of lower tank body (2) respectively communicate with the input end of one set of exhaust pipe (9), one set of exhaust valve (10) is respectively arranged on each set of exhaust pipe (9), the output end of two sets of exhaust pipe (9) respectively communicate with two sets of input end of one three-way pipe (11).

4. A fully automated ultrapure helium xenon gas purification apparatus as claimed in claim 3, characterized in that, Air intake assembly includes two three-way pipe (12), air intake pipe (13), air intake valve (14) and corrugated pipe (15), two sets of output end of two three-way pipe (12) respectively communicate with the input end of one set of air intake pipe (13), one set of air intake valve (14) is respectively installed on each set of air intake pipe (13), the output end of each set of air intake pipe (13) respectively communicate with the input end of one set of corrugated pipe (15), the output end of each set of corrugated pipe (15) respectively communicate with the input end of one set of lower tank body (2).

5. A fully automated ultrapure helium-xenon gas purification apparatus as claimed in claim 2, wherein, Also include annular flat pad (16), the lead screw (5) is sleeved with annular flat pad (16).

6. A fully automated ultrapure helium xenon gas purification apparatus as claimed in claim 1, characterized in that, Also include reinforcing plate (17), the support seat (1) and lower tank body (2) are provided with reinforcing plate (17). Also include annular flat pad (16), the lead screw (5) is sleeved with annular flat pad (16).

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