Composite laser cleaning head and composite laser cleaning equipment

Abstract

The utility model provides a composite laser cleaning head and composite laser cleaning device.The composite laser cleaning head comprises a cleaning body, a locking piece and a lens module, the cleaning body is provided with a laser inlet, a laser outlet, a mounting cavity, a mounting groove, a fixing part and a first through hole, the laser inlet and the laser outlet both communicate with the mounting cavity, and the first through hole is formed in the mounting cavity in the first direction; the fixing part is connected to the groove wall of the mounting groove, a first groove is formed in the groove wall of one side of the mounting groove in the second direction, a second groove is formed in the fixing part, and the first groove and the second groove are oppositely arranged and define a mounting space; the lens module comprises a collimating lens penetrating through the installation space and the laser inlet, the first through hole is located in the side, away from the second groove, of the fixing part in the second direction, and the locking piece penetrates through the first through hole and abuts against the fixing part and is used for driving one part of the fixing part to be close to the first groove. And the collimating mirror is fixed by the groove walls of the first groove and the second groove together, so that the cleaning precision is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of laser cleaning, in particular to a composite laser cleaning head and a composite laser cleaning equipment. BACKGROUND

[0002] The composite laser cleaning head comprises a collimating mirror, which is used for compressing the divergence angle of laser, so that the laser is transmitted from a divergent state to a parallel state. Therefore, the stability and precision of the installation of the collimating mirror have a great influence on the transmission of the laser. The problem is that when the collimating mirror is installed, the axis of the collimating mirror and the axis of the laser inlet are prone to installation errors such as deviation and inclination, which affects the cleaning precision of the composite laser cleaning head. CONTENT OF THE UTILITY MODEL

[0003] The present application aims to at least solve one of the technical problems existing in the prior art. To this end, the present application provides a composite laser cleaning head, which can realize more stable and precise installation of the collimating mirror, and is beneficial to improve the cleaning precision of the composite laser cleaning head.

[0004] The present application also provides a composite laser cleaning equipment with the above-mentioned composite laser cleaning head.

[0005] The composite laser cleaning head according to the embodiments of the present application comprises a cleaning main body, a locking piece and a lens module.

[0006] The cleaning main body is provided with a laser inlet, a laser outlet, an installation cavity, an installation slot, a fixed part and a first through hole. The laser inlet and the laser outlet are both communicated with the installation cavity. In the first direction, the fixed part comprises opposite first and second ends, and the first end is connected with the slot wall of the installation slot.

[0007] In the second direction, one side slot wall of the installation slot is provided with a first groove, and the fixed part is provided with a second groove. The first groove is arranged towards the second groove, and the first groove and the second groove enclose an installation space. In the third direction, the installation space is located on one side of the laser inlet and is communicated with the laser inlet. The first direction, the second direction and the third direction are perpendicular to each other.

[0008] The lens module comprises a collimating mirror, which is arranged in the installation space and the laser inlet. The shapes of the first groove and the second groove are suitable for the shape of the outer peripheral wall of the collimating mirror.

[0009] In the second direction, the first through hole penetrates through the cleaning main body and is communicated with the installation slot. The first through hole is located on the side of the fixed part away from the second groove, and the first through hole is arranged towards the second end. The locking piece is arranged to penetrate through the first through hole and abut against the second end. In addition, the locking piece can move relative to the cleaning main body in the second direction to drive a part of the fixed part to approach or move away from the first groove.

[0010] According to the composite laser cleaning head provided by the embodiment of the present application, the following beneficial effects are achieved: the shapes of the first groove and the second groove are suitable for the shape of the outer peripheral wall of the collimating mirror, the groove wall of the first groove is used to fit the outer peripheral wall of the collimating mirror to achieve the reference positioning of the collimating mirror, and this is beneficial to avoiding the installation of the collimating mirror from being inclined. The locking member abuts against the second end of the fixing portion along the second direction, and under the abutment of the locking member, a part of the fixing portion can be elastically deformed to move towards the position of the first groove, so that the groove wall of the second groove can abut against and fit the outer peripheral wall of the collimating mirror to ensure the stability of the fixing of the collimating mirror. In this way, through the groove wall of the first groove and the groove wall of the second groove, the positioning and installation of the collimating mirror can be achieved, and the stability of the installation of the collimating mirror can be ensured, so that the matching precision between the laser inlet and the collimating mirror is avoided, and the cleaning precision of the composite laser cleaning head is improved.

[0011] According to some embodiments of the present application, the lens module further comprises a reflecting mirror, a galvanometer and a focusing mirror, the focusing mirror is arranged at the laser outlet, the reflecting mirror is located in the mounting cavity, at least a part of the galvanometer is located in the mounting cavity, and the collimating mirror, the reflecting mirror, the galvanometer and the focusing mirror are configured to be arranged in sequence along the transmission direction of the laser to jointly define the laser path.

[0012] According to some embodiments of the present application, the galvanometer comprises a first lens and a driving portion, the first lens is connected with the driving portion, the cleaning main body further comprises a second through hole, the second through hole penetrates through the cleaning main body, the galvanometer penetrates into the mounting cavity through the second through hole, the first lens is located in the mounting cavity, and the driving portion is located outside the mounting cavity.

[0013] According to some embodiments of the present application, the lens module further comprises a protective mirror, the protective mirror is installed at the laser outlet, and along the third direction, the protective mirror is located on the side of the focusing mirror away from the mounting cavity.

[0014] According to some embodiments of the present application, the composite laser cleaning head comprises two laser inlets, the lens module comprises a continuous collimating mirror and a pulse collimating mirror, along the third direction, the continuous collimating mirror is arranged in one of the laser inlets, and the pulse collimating mirror is arranged in the other laser inlet.

[0015] According to some embodiments of the present application, the cleaning main body is further provided with a cooling inlet, a cooling outlet and a first channel, the cooling inlet is in communication with the first channel, the cooling outlet is in communication with the first channel, the first channel is arranged adjacent to the mounting cavity, and the first channel and the mounting cavity are independent of each other.

[0016] According to some embodiments of the present application, the lens module further comprises a mounting seat, the mounting seat is located in the mounting cavity, the mounting seat is provided with a second channel, the first channel comprises a first channel segment and a second channel segment, one end of the first channel segment is in communication with the cooling inlet, the other end of the first channel segment is in communication with the second channel, one end of the second channel segment is in communication with the second channel, and the other end of the second channel segment is in communication with the cooling outlet.

[0017] According to some embodiments of this application, the first channel further includes a third segment, one end of which is connected to the first segment, and the other end of which is connected to the second segment.

[0018] According to some embodiments of this application, the composite laser cleaning head further includes an air path module, which is connected to the cleaning body. The air path module includes an air blowing component and a dust extraction component. The air blowing component is provided with a first air hole, and the dust extraction component is provided with a second air hole. Along a third direction, both the first air hole and the second air hole are arranged facing the side of the laser outlet away from the mounting cavity.

[0019] The composite laser cleaning device according to the embodiments of this application includes a laser source and a composite laser cleaning head as described in any of the above embodiments, wherein the laser source transmits laser light to the composite laser cleaning head via an optical fiber.

[0020] The composite laser cleaning equipment according to the embodiments of this application has at least the following beneficial effects: the composite laser cleaning head enables more stable and precise installation of the collimating lens, and higher precision cleaning operations can be achieved through the composite laser cleaning head. Therefore, using the composite laser cleaning equipment of this application for cleaning operations is beneficial to improving the cleanliness and cleaning efficiency of laser cleaning.

[0021] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0022] The present application will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0023] Figure 1 This is a schematic diagram of the structure of the composite laser cleaning head according to an embodiment of this application;

[0024] Figure 2 This is a partial structural schematic diagram of the composite laser cleaning head according to an embodiment of this application;

[0025] Figure 3 for Figure 2 A magnified view of a portion of point A in the middle;

[0026] Figure 4 This is a front view of the composite laser cleaning head according to an embodiment of this application;

[0027] Figure 5 This is a side view of the composite laser cleaning head according to an embodiment of this application;

[0028] Figure 6 This is a top view of the composite laser cleaning head according to an embodiment of this application;

[0029] Figure 7A front view of a cleaning main body of an embodiment of the present application;

[0030] Figure 8 A front view of a cleaning main body of an embodiment of the present application; Figure 7 A sectional view at A-A in the embodiment of the present application;

[0031] Figure 9 A structural schematic view of a mounting seat of an embodiment of the present application.

[0032] Reference signs:

[0033] cleaning main body 100, laser inlet 110, laser outlet 120, mounting cavity 130, mounting groove 140, first groove 141, fixing part 150, first end 151, second end 152, second groove 153, first through hole 160, locking piece 170, second through hole 180, cooling inlet 191, cooling outlet 192, first channel 193, first channel section 1931, second channel section 1932, third channel section 1933;

[0034] lens module 200, continuous collimating mirror 211, pulse collimating mirror 212, reflecting mirror 220, second lens 221, mounting seat 222, second channel 2221, galvanometer 230, first lens 231, driving part 232, focusing mirror 240;

[0035] gas path module 300, gas blowing piece 310, first gas hole 311. DETAILED DESCRIPTION

[0036] The embodiments of the present application are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar notations represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the accompanying drawings are exemplary, only for explaining the present application, and cannot be understood as a limitation to the present application.

[0037] In the description of the present application, it is understood that the orientation description, such as the orientation or position relationship indicated by up, down, front, back, left, right, etc. is based on the orientation or position relationship shown in the drawings, only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as a limitation to the present application.

[0038] In the description of the present application, the meaning of several is one or more, the meaning of multiple is two or more, greater than, less than, more than, etc. is understood as not including the number, above, below, etc. is understood as including the number. If it is described that the first, the second is only for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features or the sequence of indicated technical features.

[0039] In the description of the present application, the words such as arrangement, installation, connection and the like should be understood in a broad sense, and the specific meanings of the words in the present application can be determined by the person skilled in the art in combination with the specific content of the technical solutions.

[0040] In the description of the present application, the description of the terms "one embodiment", "some embodiments", "exemplary embodiment", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in combination with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the exemplary description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0041] The embodiments of the present application are described below in combination with the accompanying drawings:

[0042] Reference Figures 1 to 4 The composite laser cleaning head according to the embodiments of the present application comprises a cleaning main body 100, a locking piece 170 and a lens module 200. The cleaning main body 100 is provided with a laser inlet 110, a laser outlet 120 and a mounting cavity 130, the laser inlet 110 and the laser outlet 120 are both communicated with the mounting cavity 130, and the lens module 200 is used to define a laser passage to guide the laser to enter the mounting cavity 130 from the laser inlet 110 and then to be transmitted from the mounting cavity 130 to the laser outlet 120 to be emitted.

[0043] The cleaning main body 100 further comprises a mounting groove 140, a fixed part 150 and a first through hole 160. In a first direction, the fixed part 150 comprises opposite first and second ends 151 and 152, the first end 151 is connected with the side wall of the mounting groove 140, so that the part of the fixed part 150 outside the first end 151 is spaced apart from the groove wall of the mounting groove 140, to ensure that a part of the fixed part 150 can be elastically deformed on the basis of the connection of the fixed part 150 with the groove wall of the mounting groove 140. In a second direction, one side groove wall of the mounting groove 140 is provided with a first groove 141, and the fixed part 150 is provided with a second groove 153, the first groove 141 is arranged towards the second groove 153, and the first groove 141 and the second groove 153 enclose a mounting space. In a third direction, the mounting space is located on one side of the laser inlet 110, and the mounting space is communicated with the laser inlet 110. The first direction, the second direction and the third direction are perpendicular to each other.

[0044] The lens module 200 includes a collimating mirror which is arranged in the mounting space and the laser inlet 110 along the third direction, for example, along the third direction, the mounting space is located on the side of the laser inlet 110 away from the mounting cavity 130, and the collimating mirror needs to pass through the mounting space and the laser inlet 110 in sequence when being assembled with the cleaning main body 100. The shapes of the first groove 141 and the second groove 153 are matched with the shape of the outer peripheral wall of the collimating mirror, and the first groove 141 is used to provide a positioning reference for the installation of the collimating mirror. For example, the outer peripheral wall of the collimating mirror is in a cylindrical shape, and the groove walls of the first groove 141 and the second groove 153 are in a cylindrical curved surface which is matched with the shape of the outer peripheral wall of the collimating mirror. The groove walls of the first groove 141 and the second groove 153 can be attached to the outer peripheral wall of the collimating mirror, which is beneficial to improve the stability and accuracy of the installation of the collimating mirror.

[0045] Reference Figures 1 to 4 Specifically, along the second direction, the first through hole 160 penetrates the cleaning main body 100 and communicates with the mounting groove 140, the first through hole 160 is located on the side of the fixing part 150 away from the second groove 153, and the first through hole 160 is arranged towards the second end 152. The locking piece 170 is arranged to pass through the first through hole 160 and abut against the second end 152, and the locking piece 170 can move relative to the cleaning main body 100 along the second direction to drive a part of the fixing part 150 to approach or move away from the first groove 141. Through the driving of the locking piece 170, a part of the fixing part 150 is elastically deformed to approach the first groove 141, and the installation and fixation of the collimating mirror are realized through the abutment of the groove walls of the first groove 141 and the second groove 153 against the outer peripheral wall of the collimating mirror. The more stable and accurate installation of the collimating mirror can be realized. In addition, when the collimating mirror is installed, the size of the mounting space can be adjusted by the locking piece 170, which improves the adaptability of the installation of collimating mirrors with different diameters.

[0046] It should be noted that the locking piece 170 can be a bolt, and the locking piece 170 is connected with the cleaning main body 100 through threads. The two are relatively rotated about the second direction as the axis, so as to realize the movement of the locking piece 170 relative to the cleaning main body 100 along the second direction, and further drive a part of the fixing part 150 to elastically deform to fit the first groove 141 to fix the collimating mirror.

[0047] In addition, the part penetrating the laser outlet 120 represents the direction of laser transmission.

[0048] Reference Figures 1 to 4 In other embodiments, the cleaning main body 100 includes a main body part and an end cover, the main body part and the end cover are detachably connected, the main body part and the end cover jointly define the mounting cavity 130, at least a part of the lens module 200 is located in the mounting cavity 130, and the end cover is used to close the mounting cavity 130 to avoid dust and other impurities from invading the mounting cavity 130. The split arrangement of the main body part and the end cover facilitates the installation of the lens module 200.

[0049] With reference to Figures 1 to 4 In some embodiments, the lens module 200 further comprises a reflecting mirror 220, a galvanometer 230 and a focusing mirror 240, the focusing mirror 240 is arranged at the laser outlet 120, the reflecting mirror 220 and the galvanometer 230 are both located in the mounting cavity 130, and the collimating mirror, the reflecting mirror 220, the galvanometer 230 and the focusing mirror 240 are configured to be arranged in sequence along the transmission direction of the laser to jointly define a laser path, the collimating mirror is used to convert the divergent laser beam into a parallel light beam to ensure that the laser can be accurately transmitted to the reflecting mirror 220, the reflecting mirror 220 is used to reflect the laser from the collimating mirror to change the transmission direction of the laser and reflect the laser to the galvanometer 230, the galvanometer 230 is used to receive the laser reflected by the reflecting mirror 220 and can control the cleaning range of the laser by deflection vibration. The focusing mirror 240 is used to receive the light reflected by the galvanometer 230 and is used to further focus the laser so that the laser can produce a more intense thermal effect at the target position, which is beneficial to improve the laser cleaning efficiency. Therefore, through the arrangement of the above lenses, the overall performance of the composite laser cleaning head can be improved.

[0050] With reference to Figure 5 And Figure 6 In some embodiments, the galvanometer 230 comprises a first lens 231 and a driving part 232, the first lens 231 is connected with the driving part 232, and the cleaning main body 100 further comprises a second through hole 180, the second through hole 180 penetrates through the cleaning main body 100, that is, the second through hole 180 communicates with the mounting cavity 130. The galvanometer 230 penetrates into the mounting cavity 130 through the second through hole 180, the first lens 231 is located in the mounting cavity 130, and the driving part 232 is located outside the mounting cavity 130, which is beneficial to heat dissipation of the driving part 232. The driving part 232 can be a motor, which is used to drive the deflection vibration of the first lens 231, and the separation of the first lens 231 and the driving part 232 can avoid the accumulation of heat generated by the driving part 232 in the mounting cavity 130, reduce the influence of temperature on the first lens 231, and ensure the performance of the first lens 231.

[0051] With reference to Figure 1 And Figure 2 In some embodiments, the lens module 200 further comprises a protective lens, the protective lens is arranged at the laser outlet 120 and along a third direction, the protective lens is located on the side of the focusing mirror 240 away from the mounting cavity 130, the protective lens allows the laser to pass through and can block dust and other debris, so as to avoid the contamination of the focusing mirror 240, and the protective lens cooperates with the focusing mirror 240 to achieve double sealing at the laser outlet 120, which is beneficial to improve the sealing performance of the mounting cavity 130, avoid the contamination of the part of the lens module 200 in the mounting cavity 130, and is beneficial to ensure the accuracy of laser transmission.

[0052] With reference to Figures 1 to 4In some embodiments, the composite laser cleaning head comprises two laser inlets 110, the lens module 200 comprises a continuous collimating lens 211 and a pulse collimating lens 212, the continuous collimating lens 211 is arranged in one of the laser inlets 110 along the third direction, the pulse collimating lens 212 is arranged in the other laser inlet 110, the continuous collimating lens 211 is used to connect a continuous laser light source through an optical fiber, and the pulse collimating lens 212 is used to connect a pulse laser light source through an optical fiber, so that the composite laser cleaning head has a continuous cleaning mode and a pulse cleaning mode. For example, in the continuous cleaning mode, a continuous laser with high power can be used for large-area cleaning, and in the pulse cleaning mode, a pulse laser with low power can be used for further cleaning of a local area of the workpiece. According to different cleaning objects and cleaning conditions, different cleaning modes can be selected, which is beneficial to improve the flexibility and applicability of the cleaning operation of the composite laser cleaning head.

[0053] With reference to Figures 1 to 8 In some embodiments, the cleaning body 100 is further provided with a cooling inlet 191, a cooling outlet 192 and a first channel 193. The cooling inlet 191 is in communication with the first channel 193, and the cooling outlet 192 is in communication with the first channel 193. Cooling liquid can be introduced into the first channel 193 through the cooling inlet 191, and the cooling liquid flows along the extension direction of the first channel 193 until it flows out of the cooling outlet 192. The first channel 193 is arranged adjacent to the mounting cavity 130, and the first channel 193 and the mounting cavity 130 are independently arranged. When the cooling liquid flows in the first channel 193, it can carry away the heat accumulated in the mounting cavity 130 during the cleaning operation of the composite laser cleaning head, and prevent the cleaning liquid from invading the mounting cavity 130, which is beneficial to reduce the temperature of the composite laser cleaning head and avoid the influence of high temperature on the performance of the composite laser cleaning head.

[0054] With reference to Figures 1 to 9In some embodiments, the lens module 200 further comprises a mounting seat 222, which is used for mounting the second lens 221 of the mirror, and is located in the mounting cavity 130. The mounting seat 222 is provided with a second channel 2221. The first channel 193 comprises a first passage 1931 and a second passage 1932. One end of the first passage 1931 is communicated with the cooling inlet 191. The other end of the first channel 193 is communicated with the second channel 2221. One end of the second passage 1932 is communicated with the second channel 2221. The other end of the second passage 1932 is communicated with the cooling outlet 192. Thus, the cooling liquid can flow through the cooling inlet 191, the first passage 1931, the second channel 2221, the second passage 1932 and the cooling outlet 192 in sequence. The cooling inlet 191 and the cooling outlet 192 are used for connecting a water pump circulating device. The water pump circulating device can realize liquid cooling circulation. The circulating path passes through the mounting seat 222, which can improve the cooling effect of the composite laser cleaning head, directly take away the heat generated by the mirror, and further improve the cooling efficiency of the composite laser cleaning head.

[0055] Reference Figures 1 to 9 In some embodiments, the first channel 193 further comprises a third passage 1933. One end of the third passage 1933 is communicated with the first passage 1931. The other end of the third passage 1933 is communicated with the second passage 1932. On the basis of liquid cooling circulation, the third passage 1933 can realize the circulating path of the cooling inlet 191, the first passage 1931, the third passage 1933, the second passage 1932 and the cooling outlet 192. Thus, the composite laser cleaning head has two cooling circulating paths. At the end of the first passage 1931 away from the cooling inlet 191, part of the cooling liquid flows to the second channel 2221 for cooling the mounting seat 222. The other part of the cooling liquid flows to the third passage 1933 for increasing the cooling area, which can more quickly take away the heat generated by the composite laser cleaning head, and further improve the cooling efficiency of the composite laser cleaning head.

[0056] Reference Figures 1 to 9 In some embodiments, the composite laser cleaning head further comprises an air path module 300, which is connected with the cleaning main body 100. The air path module 300 comprises a blowing member 310 and a dust extraction member (not shown in the figure). The blowing member 310 is provided with a first air hole 311. The dust extraction member is provided with a second air hole. Along the third direction, the first air hole 311 and the second air hole are both arranged on the side of the laser outlet 120 away from the mounting cavity 130. The blowing member 310 is used for timely blowing away the debris generated by laser cleaning, so as to avoid that the debris shields the surface of the workpiece to be cleaned. The dust extraction member is used for sucking the debris generated by laser cleaning, which is beneficial to ensuring the neatness of the surface of the workpiece. The blowing member 310 blows the debris, which is also convenient for the suction of the dust extraction member.

[0057] It should be noted that the laser is emitted from the laser outlet 120 along the third direction, and the workpiece to be cleaned is placed on the side of the laser outlet 120 away from the mounting cavity 130, therefore, the first air hole 311 and the second air hole are both arranged on the side of the laser outlet 120 away from the mounting cavity 130, which is beneficial to more timely processing of the debris generated by the laser cleaning, and further improves the laser cleaning efficiency.

[0058] Reference Figures 1 to 9 According to the composite laser cleaning equipment, the laser source is used for emitting laser, and the laser is transmitted to the composite laser cleaning head through the optical fiber, and the composite laser cleaning head is used for guiding the laser to perform laser cleaning work on the workpiece.

[0059] The embodiments of the present application are described in detail above in combination with the drawings, but the present application is not limited to the above embodiments, and various changes can be made within the knowledge range of ordinary skilled in the art without departing from the purpose of the present application. In addition, the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

Claims

1. A composite laser cleaning head, characterized in that, include: The cleaning body is provided with a laser inlet, a laser outlet, a mounting cavity, a mounting groove, a fixing part, and a first through hole. The laser inlet and the laser outlet are both connected to the mounting cavity. Along the first direction, the fixing part includes a first end and a second end opposite to each other. The first end is connected to the groove wall of the mounting groove. Along the second direction, a first groove is provided on one side wall of the mounting groove, and a second groove is provided on the fixing part. The first groove is positioned facing the second groove, and the first groove and the second groove enclose the mounting space. Along the third direction, the mounting space is located on one side of the laser inlet and is connected to the laser inlet. The first direction, the second direction and the third direction are perpendicular to each other. Locking components; The lens module includes a collimating lens, which is disposed in the mounting space and the laser inlet. The shapes of the first groove and the second groove are adapted to the shape of the outer peripheral wall of the collimating lens. Wherein, along the second direction, the first through hole penetrates the cleaning body and connects to the mounting groove, the first through hole is located on the side of the fixing part away from the second groove, the first through hole is disposed towards the second end, the locking member is configured to pass through the first through hole and abut against the second end, and the locking member is movable relative to the cleaning body along the second direction to drive a portion of the fixing part closer to or away from the first groove.

2. The composite laser cleaning head according to claim 1, characterized in that, The lens module further includes a reflector, a galvanometer, and a focusing lens. The focusing lens is installed at the laser outlet, the reflector is located in the mounting cavity, and at least a portion of the galvanometer is located in the mounting cavity. The collimating lens, the reflector, the galvanometer, and the focusing lens are arranged sequentially along the laser transmission direction to jointly define the laser path.

3. The composite laser cleaning head according to claim 2, characterized in that, The galvanometer includes a first lens and a driving unit. The first lens is connected to the driving unit. The cleaning body also includes a second through hole. The second through hole penetrates the cleaning body. The galvanometer passes through the second through hole into the mounting cavity. The first lens is located inside the mounting cavity, and the driving unit is located outside the mounting cavity.

4. The composite laser cleaning head according to claim 2, characterized in that, The lens module also includes a protective lens, which is installed at the laser exit and along the third direction, on the side of the focusing lens away from the mounting cavity.

5. The composite laser cleaning head according to claim 1, characterized in that, The composite laser cleaning head includes two laser inlets, and the lens module includes a continuous collimating lens and a pulse collimating lens. Along the third direction, the continuous collimating lens passes through one of the laser inlets, and the pulse collimating lens passes through the other laser inlet.

6. The composite laser cleaning head according to claim 1, characterized in that, The cleaning body is also provided with a cooling inlet, a cooling outlet and a first channel. The cooling inlet is connected to the first channel, the cooling outlet is connected to the first channel, the first channel is arranged adjacent to the mounting cavity, and the first channel and the mounting cavity are independent of each other.

7. The composite laser cleaning head according to claim 6, characterized in that, The lens module also includes a mounting base located within the mounting cavity. The mounting base has a second channel. The first channel includes a first section and a second section. One end of the first section is connected to the cooling inlet, and the other end of the first section is connected to the second channel. One end of the second section is connected to the second channel, and the other end of the second section is connected to the cooling outlet.

8. The composite laser cleaning head according to claim 7, characterized in that, The first channel further includes a third segment, one end of which is connected to the first segment, and the other end of which is connected to the second segment.

9. The composite laser cleaning head according to claim 1, characterized in that, The composite laser cleaning head also includes an air path module, which is connected to the cleaning body. The air path module includes an air blowing component and a dust extraction component. The air blowing component has a first air hole, and the dust extraction component has a second air hole. Along a third direction, both the first air hole and the second air hole are arranged facing the side of the laser outlet away from the mounting cavity.

10. A composite laser cleaning device, characterized in that, include: Laser source; The composite laser cleaning head according to any one of claims 1 to 9, wherein the laser source transmits laser light to the composite laser cleaning head via an optical fiber.

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