Dust collection device and laser processing equipment applying dust collection device

Abstract

The utility model provides a dust collection device and laser processing equipment using the dust collection device, and the dust collection device comprises a dust collection main machine which is used for generating negative pressure gas; the pipeline is connected with the dust collection main machine, and negative pressure gas passes through the pipeline; the dust collecting cover is connected with the pipeline and comprises a hollow body and an eave part, the interior of the hollow body is communicated with the interior of the pipeline, the pipeline is located on the rear side of the hollow body, the eave part extends forwards from the top of the front side of the hollow body, so that a receiving notch is formed by the eave part and the front side of the hollow body, and the eave part is provided with a window facing the receiving notch; and the first window is connected with the eave part of the dust collection cover and comprises a first lens module positioned at the window. Therefore, dust spraying can be reduced, dust can be effectively sucked and removed, pollution is reduced, and the problem that a known dust suction device is prone to dust spraying and pollution is solved. The utility model further provides laser processing equipment using the dust collection device.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor process, especially a dust suction device and a laser processing equipment using the same. BACKGROUND

[0002] In the semiconductor or panel process, laser is often used to remove or cut materials. Under the melting action of laser, the materials are quickly carbonized or pulverized and splashed dust to the surrounding environment. Therefore, the product surface will be stained after laser action, and needs to be cleaned to maintain the cleanliness of the product.

[0003] Generally, the product will be moved to the cleaning process after the laser process is completed. In this way, the time of the stain remaining on the product surface increases and is easily adhered to the product, which increases the difficulty of cleaning or easily scratches the product.

[0004] The known dust suction device is not completely covered by the product, and the dust is still easily splashed, so there is still a problem of staining. Therefore, it needs to be improved. SUMMARY

[0005] In view of the above, the purpose of the utility model is to provide a dust suction device and a laser processing equipment using the same, which can more effectively suck dust to reduce stains and easily maintain and replace lenses to reduce laser light energy loss.

[0006] In order to achieve the above purpose, the dust suction device comprises a dust suction host for generating a negative pressure gas; a pipeline connected to the dust suction host and internally provided for the negative pressure gas to pass through; a dust collecting cover connected to the pipeline and comprising a hollow body and an eave portion, the hollow body is internally communicated with the inside of the pipeline, the pipeline is located at the rear side of the hollow body, the eave portion extends forward from the top of the front side of the hollow body to form a receiving notch with the front side of the hollow body, the eave portion has a window facing the receiving notch; and a first window connected to the eave portion of the dust collecting cover and comprising a first lens module located at the window.

[0007] By matching the product to be processed with the eave portion and the receiving notch, the dust splashing can be reduced, the dust can be more effectively sucked to reduce stains and reduce laser light energy loss; by connecting the dust collecting cover with the first window, maintenance and lens replacement are easy; therefore, the purpose of the utility model is achieved.

[0008] Preferably, the first window comprises a first window sill and a first pipe joint, the first lens module is connected to the first window sill and located at the top surface of the first window sill, a first gas passage towards the first lens module is formed between the bottom surface of the first window sill and the eave portion, and the first pipe joint is connected to the first window sill to provide a positive pressure gas to the first gas passage. In this way, the dust is blown away by the jet.

[0009] Preferably, the dust cover includes a receiving portion extending forwardly from a front bottom of the hollow body and spaced apart from the eave portion such that the receiving recess is formed between the eave portion, the receiving portion and a front side of the hollow body.

[0010] Preferably, the eave portion includes a top plate located at a top edge of the front side of the hollow body and a ring wall connecting the top plate and two side edges of the hollow body, the receiving portion has a connecting plate located at a bottom edge of the front side of the hollow body and a step wall connecting the connecting plate and two side edges of the front side of the hollow body, the step wall has two first step surfaces located between the two side edges of the front side of the hollow body and a second step surface higher than the two first step surfaces.

[0011] Preferably, the dust suction device further has a second window, wherein the receiving portion has a through opening facing the window, the second window is connected to the receiving portion and includes a second lens module located at the through opening.

[0012] Preferably, the second window includes a second window sill connected to the second lens module and located at a bottom surface of the second window sill, a top surface of the second window sill and the receiving portion form a second gas passage toward the second lens module, and a second pipe joint connected to the second window sill to provide a positive pressure gas to the second gas passage. Thus, dust is blown away by air jet.

[0013] To achieve the above object, the utility model provides a laser processing equipment, which comprises a machine table, a rotating table arranged on the machine table and used for carrying and rotating a product, a laser device arranged on the machine table and used for generating a laser beam, and a dust suction device as described arranged on the machine table, wherein the rotating table and part of the product are located in the receiving recess, and the laser beam passes through the first lens module of the first window to act on the product.

[0014] Preferably, the laser device is further used for generating another laser beam, wherein the other laser beam passes through the second lens module of the second window of the dust suction device as described to act on the product. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 FIG. 1 is a configuration schematic view of a laser processing equipment according to a preferred embodiment of the utility model;

[0016] Figure 2 FIG. 2 is a perspective assembly view of a dust suction device according to a preferred embodiment of the utility model;

[0017] Figure 3For a preferred embodiment of the utility model dust extraction device front view combination sectional view;

[0018] Figure 4 For a preferred embodiment of the utility model dust extraction device one solid exploded view;

[0019] Figure 5 For a preferred embodiment of the utility model dust extraction device another solid exploded view;

[0020] Figure 6 For a preferred embodiment of the utility model dust extraction device again solid exploded view;

[0021] Figure 7 For a preferred embodiment of the utility model dust extraction device yet another solid exploded view;

[0022] Figure 8 For a preferred embodiment of the utility model dust cover solid view;

[0023] Figure 9 For a preferred embodiment of the utility model first windowsill solid view;

[0024] Figure 10 For a preferred embodiment of the utility model second windowsill solid view;

[0025] Among them, the reference sign:

[0026] 100: laser processing equipment

[0027] 10: machine table

[0028] 30: rotary table

[0029] 50: laser device

[0030] 51: laser beam

[0031] 70: dust extraction device

[0032] 71: dust extraction host

[0033] 73: pipeline

[0034] 75: dust cover

[0035] 751: hollow body

[0036] 753: eave part

[0037] 7531: top plate

[0038] 7533: ring wall

[0039] 7535: window

[0040] 755: receiving recess

[0041] 757: receiving portion

[0042] 7571: connecting plate

[0043] 7573: stepped wall

[0044] 75731: first step surface

[0045] 75733: second step surface

[0046] 7575: through opening

[0047] 77: first window

[0048] 771: first window sill

[0049] 7711: first cover receiving portion

[0050] 7712: first window hole

[0051] 7713: first suction groove

[0052] 7714: first suction port

[0053] 7715: first pipe receiving portion

[0054] 773: first lens module

[0055] 7731: first lens frame

[0056] 7732: first lens

[0057] 775: first pipe joint

[0058] 79: second window

[0059] 791: second window sill

[0060] 7911: second cover receiving portion

[0061] 7912: second window hole

[0062] 7913: second suction groove

[0063] 7914: second suction port

[0064] 7915: second pipe receiving portion

[0065] 793: second lens module

[0066] 7931: second lens frame

[0067] 7932: second lens

[0068] 795: second pipe joint

[0069] 90: product

[0070] C1: first gas passage

[0071] C2: second gas passage DETAILED DESCRIPTION

[0072] The structure, method and effects of the present application will be described clearly and completely in combination with the embodiments and drawings, so as to fully understand the purpose, technology, scheme and effects of the present application. It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict.

[0073] Unless otherwise specified, when a certain technical feature is referred to as "fixed", "arranged", "connected" to another feature, it can be directly fixed, connected to the other feature, or indirectly fixed, arranged, connected to the other feature. In addition, the directional descriptions such as up, down, left, right, top, bottom, etc. used in the present application are only relative to the mutual positional relationship of the components of the present application in the drawings.

[0074] Although the terms first, second, third, etc. can be used in the present application to describe various technical features, these technical features should not be limited to these terms. These terms are only used to distinguish technical features of the same type from each other. For example, without departing from the scope of the present disclosure, the first technical feature can also be referred to as the second technical feature, and similarly, the second technical feature can also be referred to as the first technical feature.

[0075] As shown in Figure 1 The laser processing device 100 of the present application includes a machine table 10, a rotating table 30, a laser device 50, and a dust collection device 70.

[0076] As shown in Figure 1 The rotating table 30 is arranged on the machine table 10 and is used to carry a product 90 and drive the product 90 to rotate.

[0077] As shown in Figure 1 The laser device 50 is arranged on the machine table 10 and is used to generate two laser beams 51. In other embodiments, the laser device 50 can also generate only one laser beam 51, and is not limited to two laser beams 51.

[0078] The dust collection device 70 includes a dust collection main machine 71, a pipeline 73, a dust collection cover 75, a first window 77, and a second window 79.

[0079] The dust collection main machine 71 is arranged on the machine table 10 and is used to generate a negative pressure gas.

[0080] As shown in Figure 1 and Figure 2As shown, the pipeline 73 is connected to the dust collection host 71, and the interior thereof is used for the negative pressure gas to pass through.

[0081] The dust collecting cover 75 is connected to the pipeline 73, and includes a hollow body 751, an eave part 753, a receiving recess 755, and a receiving part 757.

[0082] The interior of the hollow body 751 is communicated with the interior of the pipeline 73, and the pipeline 73 is located at the rear side of the hollow body 751.

[0083] As shown, the eave part 753 includes a top plate 7531, a ring wall 7533, and a window 7535. The top plate 7531 is located at the top edge of the front side of the hollow body 751, the ring wall 7533 is connected to the two side edges of the hollow body 751 and the top plate 7531, and the window 7535 faces the receiving recess 755. Figure 8

[0084] As shown, the receiving part 757 extends forward from the bottom of the front side of the hollow body 751, and is spaced apart from the eave part 753 so that the receiving recess 755 is formed between the eave part 753, the receiving part 757, and the front side of the hollow body 751. Figure 8

[0085] As shown, the receiving part 757 has a connecting plate 7571, a stepped wall 7573, and a through opening 7575. The connecting plate 7571 is located at the bottom edge of the front side of the hollow body 751, the stepped wall 7573 is connected to the two side edges of the front side of the hollow body 751 and the connecting plate 7571, the stepped wall 7573 has two first step surfaces 75731 and a second step surface 75733, the two first step surfaces 75731 are located between the two side edges of the front side of the hollow body 751 and the second step surface 75733, and are higher than the second step surface 75733, and the through opening 7575 faces the window 7535. Figure 8

[0086] As shown, the first window 77 is connected to the eave part 753 of the dust collecting cover 75, and includes a first window sill 771, a first lens module 773, and a first pipe joint 775. The first window sill 771 is connected to the eave part 753, the first lens module 773 is connected to the first window sill 771 and is located at the top surface of the first window sill 771, and is located at the window 7535, a first gas passage C1 is formed between the bottom surface of the first window sill 771 and the eave part 753 towards the first lens module 773, and the first pipe joint 775 is connected to the first window sill 771 to provide a positive pressure gas to the first gas passage C1. Figures 3 to 8

[0087] Figure 6 Figure 7 ​​​​​​As shown, the first lens module 773 has a first lens frame 7731 and a first lens 7732, the first lens frame 7731 is connected to the first window sill 771, the first lens 7732 is installed on the first lens frame 7731, and the first lens 7732 is a high-transmittance lens for laser wavelength band.

[0088] As shown, Figure 9 As shown, the first window sill 771 includes a first cover portion 7711, a first window hole 7712, a first suction groove 7713, a plurality of first suction ports 7714, and a first pipe connection portion 7715. The first cover portion 7711 is fixed to the top plate 7531 by a plurality of bolts, the first window hole 7712 corresponds to the window 7535, the first suction groove 7713 is arc-shaped, the first suction ports 7714 connect the first window hole 7712 and the first suction groove 7713, and the first pipe connection portion 7715 connects the first suction groove 7713 and penetrates the upper portion. The first suction groove 7713, the first suction ports 7714, and the first pipe connection portion 7715 form a first gas passage C1, as shown. Figure 3

[0089] As shown, Figure 1 As shown, the rotating table 30 and part of the product 90 are located in the receiving recess 755, and the laser beam 51 passes through the first lens module 773 of the first window 77 to act on the product 90.

[0090] As shown, Figures 3 to 8 As shown, the second window 79 is connected to the receiving portion 757 and includes a second window sill 791, a second lens module 793, and a second pipe joint 795. The second window sill 791 is connected to the receiving portion 757, the second lens module 793 is connected to the second window sill 791 and located at the bottom surface of the second window sill 791, and located in the through hole 7575. A second gas passage C2 is formed between the top surface of the second window sill 791 and the receiving portion 757, and faces the second lens module 793, and the second pipe joint 795 is connected to the second window sill 791 to provide a positive pressure gas to the second gas passage C2.

[0091] As shown, Figure 6 and Figure 7 As shown, the second lens module 793 has a second lens frame 7931 and a second lens 7932, the second lens frame 7931 is connected to the second window sill 791, and the second lens 7932 is installed on the second lens frame 7931. The second lens 7932 is a high-transmittance lens for laser wavelength band.

[0092] As shown, Figure 10 ​As shown, the second window sill 791 includes a second cover portion 7911, a second window hole 7912, a second suction groove 7913, a plurality of second suction ports 7914, and a second connecting pipe portion 7915. The second cover portion 7911 is fixed to the connecting plate 7571 by a plurality of bolts, the second window hole 7912 corresponds to the through hole 7575, the second suction groove 7913 is arc-shaped, the second suction ports 7914 connect the second window hole 7912 and the second suction groove 7913, and the second connecting pipe portion 7915 connects the second suction groove 7913 and penetrates downward. The second suction groove 7913, the second suction ports 7914, and the second connecting pipe portion 7915 form a second gas passage C2.

[0093] The other laser beam 51 of the laser device 50 passes through the second lens module 793 of the second window 79 to act on the product 90 to remove the excess material on the product 90.

[0094] By covering the product 90 with the eave portion 753, covering the product 90 with the receiving portion 757, and matching the periphery of the product 90 with the receiving recess 755, dust is not easy to be dispersed and is easy to be sucked, the dust collection effect is increased, the dust is less likely to adhere to the first lens 7732 and the second lens 7932, and the loss of laser light energy is reduced. By the locking type of the first window 77 and the locking type of the second window 79, maintenance and lens replacement are easy to be performed. Therefore, the purpose of the utility model is achieved.

[0095] In addition, by matching the first pipe joint 775 and the first gas passage C1 with the air blower, and matching the second pipe joint 795 and the second gas passage C2 with the air blower, dust is blown away by air, and the surface of the first lens 7732 and the second lens 7932 is less dirty.

[0096] In addition, by matching the first pipe joint 775 and the first gas passage C1 with the air blower, and matching the second pipe joint 795 and the second gas passage C2 with the air blower, dust is blown away by air, and the surface of the first lens 7732 and the second lens 7932 is less dirty.

[0097] In addition to the above embodiments, the utility model can also be implemented as follows, and the purpose of the utility model is still achieved.

[0098] For example, the dust collection device 70 only needs to include the dust collection cover 75 and the first window 77 to achieve the purpose of the utility model, and is not limited to including the second window 79 as described above. In addition, the eave portion 753 extends forward from the top of the front side of the hollow body 751, so that the eave portion 753 and the front side of the hollow body 751 form the receiving recess 755.

[0099] Alternatively, the eave portion 753 is not limited to being above the dust collection cover 75, but can also be on each side or below the dust collection cover 75.

[0100] Or, the receiving portion 757 is not limited to be located below the dust collecting cover 75, but can be located at each side or above the dust collecting cover 75. That is, the receiving portion 757 is located in the other direction of the eave portion 753.

[0101] Alternatively, the first mirror frame 7731 is not limited to be installed on the first window hole 7712 of the first window sill 771 as described above, but can be installed on other parts of the first window sill 771; the second mirror frame 7931 is not limited to be installed on the second window hole 7912 of the second window sill 791 as described above, but can be installed on other parts of the second window sill 791.

[0102] Alternatively, the first mirror frame 7731 is not limited to be installed on the first window sill 771 as described above, but can be integrally formed on the first window sill 771; in other words, the first lens 7732 is installed on the first window sill 771.

[0103] Alternatively, the second mirror frame 7931 is not limited to be installed on the second window sill 791 as described above, but can be integrally formed on the second window sill 791; in other words, the second lens 7932 is installed on the second window sill 791.

Claims

1. A dust extraction device characterised in that: Comprising: a dust collection main body for generating a negative pressure gas; a pipeline connected to the dust collection main body and having an inner space for the negative pressure gas to pass through; a dust collection cover connected to the pipeline and comprising a hollow body and an eave, the hollow body having an inner space communicated with the inner space of the pipeline, the pipeline being located at a rear side of the hollow body, the eave extending forward from a top of a front side of the hollow body so that the eave and the front side of the hollow body form a receiving recess, the eave having a window facing the receiving recess; and a first window connected to the eave of the dust collection cover and comprising a first lens module located at the window.

2. The dust extraction device of claim 1, wherein: Wherein, the first window comprises a first window sill and a first pipe joint, the first lens module is connected to the first window sill and located at a top surface of the first window sill, a bottom surface of the first window sill and the eave form a first gas passage toward the first lens module, and the first pipe joint is connected to the first window sill to provide a positive pressure gas to the first gas passage.

3. The dust extraction device of claim 1, wherein: Wherein, the dust collection cover comprises a receiving portion extending forward from a bottom of the front side of the hollow body and spaced apart from the eave so that the receiving recess is formed between the eave, the receiving portion and the front side of the hollow body.

4. The dust extraction device of claim 3, wherein: Wherein, the eave comprises a top plate located at a top edge of the front side of the hollow body and a ring wall connected to the top plate and two side edges of the hollow body, the receiving portion has a connecting plate located at a bottom edge of the front side of the hollow body and a step wall connected to the connecting plate and two side edges of the front side of the hollow body, the step wall has two first step surfaces located between the two side edges of the front side of the hollow body and a second step surface higher than the two first step surfaces.

5. The dust extraction device of claim 3, wherein: Further comprising a second window, wherein the receiving portion has a through opening facing the window, the second window is connected to the receiving portion and comprises a second lens module located at the through opening.

6. The dust extraction device of claim 5, wherein: Wherein, the second window comprises a second window sill and a second pipe joint, the second lens module is connected to the second window sill and located at a bottom surface of the second window sill, a top surface of the second window sill and the receiving portion form a second gas passage toward the second lens module, and the second pipe joint is connected to the second window sill to provide a positive pressure gas to the second gas passage.

7. A laser machining apparatus, characterized by: Comprising: a machine table; a rotating table disposed on the machine table and configured to carry and rotate a product; a laser device disposed on the machine table and configured to generate a laser beam; and a dust collection device according to any one of claims 1 to 4 disposed on the machine table, wherein the rotating table and a portion of the product are located in the receiving recess, and the laser beam passes through the first lens module of the first window to act on the product.

8. The laser machining apparatus of claim 7, wherein: Wherein, the laser device is further configured to generate another laser beam, wherein the other laser beam passes through the second lens module of the second window of the dust collection device according to claim 5 or 6 to act on the product. Wherein, the laser device is further configured to generate another laser beam, wherein the other laser beam passes through the second lens module of the second window of the dust collection device according to claim 5 or 6 to act on the product.

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