Hole plugging device for electrostatic chuck

Abstract

The utility model discloses a hole plugging device for an electrostatic chuck, which belongs to the technical field of hole plugging devices and comprises a frame, a liftable turntable is arranged on the frame, a plurality of thimbles arranged according to hole sites of the electrostatic chuck are arranged on the turntable, plugs are placed on the thimbles, and the plugs are arranged on the thimbles. A containing base used for containing the electrostatic chuck to be subjected to hole blocking is arranged above the rotary disc, and the containing base is connected with the rack through a connecting rod. According to the hole plugging device for the electrostatic chuck, the liftable rotating disc is arranged, when the hole plugging device is used, plugs are placed on the ejector pins, the rotating disc is driven to ascend, the multiple plugs can be plugged into holes of the electrostatic chuck at a time, hole plugging is completed, the structure is simple, the hole plugging efficiency is high, and the positions and heights of the plugs in the holes are uniform after hole plugging.

Description

TECHNICAL FIELD

[0001] The utility model relates to a hole plugging device for electrostatic chuck. BACKGROUND

[0002] In the electrostatic chuck industry, especially in the ceramic substrate production industry of electrostatic chuck, some ceramic substrates need to be plugged before bonding. Currently, the plugging process is completed by manual operation. If the hole is not plugged, it will face the risk of hole plugging and discoloration. Therefore, hole plugging is an essential operation for electrostatic chuck. Manual plugging requires high technical requirements and has relatively low efficiency. SUMMARY

[0003] The utility model wants to solve the technical problem to provide a hole plugging device for electrostatic chuck, can enough quick hole plugging of electrostatic chuck ceramic substrate, promote the hole plugging work efficiency.

[0004] In order to solve the above technical problem, the technical scheme of the utility model is:

[0005] A hole plugging device for electrostatic chuck, comprising a rack, the rack is equipped with a liftable turntable, the turntable is equipped with a plurality of ejector pins arranged according to the hole position of electrostatic chuck, the ejector pin is placed with a plug, the upper portion of the turntable is equipped with a placing seat for placing the electrostatic chuck to be plugged, and the placing seat is connected with the rack through a connecting rod.

[0006] Preferably, an electric telescopic rod is arranged between the bottom of the turntable and the rack, a plurality of sleeves are arranged on the rack, and a plurality of guide rods matched with the sleeves are arranged on the bottom of the turntable.

[0007] Preferably, the turntable is disc-shaped, the connection between the electric telescopic rod and the turntable is located at the center of the turntable, and the plurality of guide rods are distributed along the circumference of the electric telescopic rod.

[0008] Preferably, the placing seat comprises a placing groove, the bottom of the placing groove is equipped with a through hole, the hole diameter of the through hole is smaller than the diameter of the placing groove, and a fixed cover that can be opened and closed is arranged on the placing groove.

[0009] Preferably, a positioning groove is arranged at the top of the placing groove, a positioning piece is matched and arranged in the positioning groove, and a positioning rod in vertical direction matched with the hole of the electrostatic chuck to be plugged is arranged at the bottom of the positioning piece.

[0010] Preferably, the ejector pin comprises a vertical ejector rod, and a conical top block is arranged at the top of the ejector rod.

[0011] Preferably, the plug comprises a conical positioning groove matched with the conical top block.

[0012] The technical scheme has the following beneficial effects:

[0013] By arranging the liftable rotating disc, the plug is placed on the thimble when in use, the rotating disc is lifted, and a plurality of plugs can be inserted into the holes of the electrostatic chuck at a time, the hole plugging is completed, the structure is simple, the hole plugging efficiency is high, and the positions and heights of the plugs in the holes are uniform after the hole plugging. BRIEF DESCRIPTION OF DRAWINGS

[0014] Fig. 1 It is a perspective structural schematic view of the hole plugging device for the electrostatic chuck.

[0015] Fig. 2 It is another perspective structural schematic view of the hole plugging device for the electrostatic chuck.

[0016] Fig. 3 It is a perspective structural schematic view of the connection between the rotating disc and the rack.

[0017] Fig. 4 It is an enlarged perspective structural schematic view of the plug. DETAILED DESCRIPTION

[0018] The specific embodiments of the utility model will be further described in combination with the drawings. It needs to be explained here that the description of the embodiments is used to help understanding the utility model, but does not constitute the limitation to the utility model. In addition, the technical features involved in each embodiment of the utility model described below can be combined with each other as long as they do not conflict with each other.

[0019] REFERENCE Figs. 1-4 A hole plugging device for an electrostatic chuck comprises a rack 1, the rack 1 is provided with a liftable rotating disc 2, the rotating disc 2 is provided with a plurality of thimbles 3 arranged according to the hole positions of the electrostatic chuck, the thimbles 3 are placed with plugs 4, the upper portion of the rotating disc 2 is provided with a placing seat 5 for placing the electrostatic chuck to be plugged, and the placing seat 5 is connected with the rack 1 through a connecting rod 6;

[0020] When in use, the electrostatic chuck to be plugged is placed on the placing seat 5, the position is adjusted, the hole to be plugged is aligned with the plug 4 below, the plug 4 is placed on the thimble 3 after the alignment, the rotating disc 2 is controlled to move upwards after the placement is completed, the plug 4 is inserted into the corresponding hole, then the rotating disc 2 is controlled to move downwards, the thimble 3 is separated from the plug 4, the hole plugging is completed, the rotating disc 2 returns to the initial position, and the next operation is waited;

[0021] The bottom portion of the rotating disc 2 and the rack 1 are provided with an electric telescopic rod 7, the rack 1 is provided with a plurality of sleeves 8, and the bottom portion of the rotating disc 2 is provided with a plurality of guide rods 9 matched with the sleeves 8;

[0022] The electric telescopic rod 7 is used for adjusting the height of the rotating disc 2, the number of sleeves 8 can be set to 3 or 4, the bottom of the rotating disc 2 is provided with a corresponding number of guide rods 9, by setting the guide rods 9 and the sleeves 8, the position of the rotating disc 2 is limited, and the rotating disc 2 moves along the direction of the sleeves 8, i.e. moves along the up-down direction;

[0023] The rotating disc 2 is disc-shaped, the connection between the electric telescopic rod 7 and the rotating disc 2 is located at the center of the rotating disc 2, and the guide rods 9 are distributed along the circumference of the electric telescopic rod 7;

[0024] Since the electrostatic chuck is generally disc-shaped, the rotating disc 2 can also be disc-shaped, the position where the electric telescopic rod 7 is connected with the rotating disc 2 is the center of the rotating disc 2, and the three or four guide rods 9 are evenly distributed along the circumference of the electric telescopic rod 7;

[0025] The placing seat 5 comprises a placing groove 10, the bottom of the placing groove 10 is provided with a through hole 11, the aperture of the through hole 11 is smaller than the diameter of the placing groove 10, and the placing groove 10 is provided with a fixed cover 18 which can be opened and closed;

[0026] The placing groove 10 is used for placing the electrostatic chuck to be plugged, the electrostatic chuck is placed in the placing groove 10, and the diameter of the electrostatic chuck is larger than the diameter of the through hole 11 at the bottom, i.e. the electrostatic chuck will not fall out of the through hole 11 after being placed, and by setting the through hole 11, the hole on the electrostatic chuck to be plugged can be exposed, so that the rotating disc 2 below can be raised to plug the hole;

[0027] The top of the placing groove 10 is provided with a positioning groove 15, the positioning groove 15 is provided with a positioning piece 16 in a matched mode, and the bottom of the positioning piece 16 is provided with a positioning rod 17 which is vertically matched with the hole of the electrostatic chuck to be plugged;

[0028] Since the hole to be plugged on the electrostatic chuck needs to be matched with the position of the plug 4 on the rotating disc 2, and the position of the plug 4 is fixed, the positioning groove 15 needs to be set to position the positioning piece 16, the correct position of the electrostatic chuck is determined by matching the positioning rod 17 with the hole on the electrostatic chuck, after the position is determined, the positioning piece 16 can be removed, then the fixed cover 18 is closed, and the hole can be plugged, the fixed cover 18 can be closed or opened, and the fixed cover 18 can be opened by pressing the button, which is the prior art;

[0029] Alternatively, after the positioning rod 17 is matched with the hole on the electrostatic chuck, the fixed cover 18 is directly closed, and then the hole can be plugged from below, at this time, the positioning rod 17 needs to be inserted shallowly and cannot affect the plugging of the plug 4, or the positioning rod 17 is matched with the hole on the electrostatic chuck which does not need to be plugged, so that the position of the electrostatic chuck can be more accurately ensured;

[0030] In other embodiments of the present embodiment, the connection between the rotating disc 2 and the electric telescopic rod 7 is detachable, that is, the plug matched with the electrostatic chuck to be plugged can be selected, or the rotating disc 2 with different plug position requirements can be selected according to the hole position;

[0031] The thimble 3 comprises a vertical thimble rod 12, and a conical thimble block 13 is arranged at the top of the thimble rod 12. By arranging the thimble block 13 in this shape, on one hand, the plug 4 can be placed conveniently and has a positioning function, and on the other hand, the thimble 3 can be separated from the plug 4 more smoothly;

[0032] The plug 4 comprises a conical positioning groove 14 matched with the conical thimble block 13, which facilitates the placement of the plug 4 and improves the placement efficiency, thereby improving the plugging efficiency of the electrostatic chuck;

[0033] By arranging the lifting rotating disc 2, the plug 4 is placed on the thimble 3, the rotating disc 2 is driven to rise, and a plurality of plugs 4 can be inserted into the holes of the electrostatic chuck at one time, thereby completing the plugging. The structure is simple, the plugging efficiency is high, and the positions and heights of the plugs 4 in the holes after plugging are relatively uniform.

[0034] The embodiments of the present application are described in detail above with reference to the drawings, but the present application is not limited to the described embodiments. For those skilled in the art, various changes, modifications, replacements and variations can be made to the embodiments without departing from the principles and spirits of the present application, and still fall within the protection scope of the present application.

Claims

1. A hole-plugging device for an electrostatic chuck, characterized by, The utility model relates to a kind of static chuck hole plugging device, including rack (1), the rack (1) is equipped with liftable turntable (2), the turntable (2) is equipped with several top pin (3) according to static chuck hole setting, the top pin (3) is placed with plug (4), the top of the turntable (2) is equipped with the placement seat (5) for placing the static chuck to be plugged hole, the placement seat (5) is connected with the rack (1) by connecting rod (6).

2. The hole-plugging device for an electrostatic chuck according to claim 1, wherein The bottom of the turntable (2) is equipped with electric telescopic rod (7) between the rack (1), the rack (1) is equipped with several sleeves (8), the bottom of the turntable (2) is equipped with several guide rods (9) with the sleeve (8) cooperation.

3. The hole-plugging device for an electrostatic chuck according to claim 2, wherein The turntable (2) is disc-shaped, the connecting place of the electric telescopic rod (7) and the turntable (2) is located in the center of the turntable (2), and several guide rods (9) are distributed along the edge circumference of the electric telescopic rod (7).

4. The hole-plugging device for an electrostatic chuck according to claim 1, wherein The placement seat (5) includes placement slot (10), the bottom of the placement slot (10) is equipped with through-hole (11), the aperture of the through-hole (11) is smaller than the diameter of the placement slot (10), and the placement slot (10) is equipped with openable and closable fixing cover (18).

5. A hole-plugging device for an electrostatic chuck as defined in claim 4, wherein The top of the placement slot (10) is equipped with positioning slot (15), the positioning slot (15) is equipped with positioning piece (16) cooperation, and the bottom of the positioning piece (16) is equipped with positioning rod (17) in vertical direction with static chuck hole to be plugged hole cooperation.

6. The hole-plugging device for an electrostatic chuck of claim 1, wherein The top pin (3) includes vertical top rod (12), and the top of the top rod (12) is equipped with conical top block (13).

7. A hole-plugging device for an electrostatic chuck as defined in claim 6, wherein The plug (4) includes conical positioning slot (14) cooperation with the conical top block (13).

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