Tablet moving device

Abstract

The utility model relates to a material sheet moving device, which belongs to the technical field of material sheet moving, and comprises a moving plate, the moving plate is connected with a moving system, an adsorption mechanism is arranged on the moving plate, the adsorption mechanism comprises two groups of mounting seats, the two groups of mounting seats are distributed front and back at intervals, and each group comprises two mounting seats. The two mounting seats in the same group are distributed in a left-right spaced mode, the mounting seats are detachably and fixedly connected with the moving plate, suction nozzles are mounted on the mounting seats and located below the moving plate, and a clamping mechanism is arranged on the moving plate; the clamping mechanism comprises a clamping air cylinder and two clamping rods, a cylinder body of the clamping air cylinder is fixedly arranged on the movable plate, and the two clamping rods are symmetrically arranged on the front side and the rear side of the clamping air cylinder. In the moving process that the suction nozzle adsorbs the material pieces, the material pieces are clamped and fixed through the clamping rods, the moving reliability of the material pieces is improved, and the material pieces are clamped and fixed through the clamping rods. And the material sheet is prevented from falling off from the suction nozzle.

Description

TECHNICAL FIELD

[0001] The utility model relates to a wafer moving device belongs to wafer moving technical field. BACKGROUND

[0002] The cutting process of the integrated circuit is one of the production processes of the integrated circuit, and the pins of the integrated circuit are connected with the ribs before the cutting process, so the independence of each pin can be restored only after the ribs are removed, so the cutting process is provided in the production process of the integrated circuit. The cutting is to cut the metal connecting the pins of the integrated circuit.

[0003] In the prior art, the suction nozzle is usually vacuum adsorbed, that is, the suction nozzle is adsorbed to the wafer and then moved to the cutting position. The utility model discloses a vacuum nozzle for rectifier bridge wafer, including fixed plate, be equipped with vacuum nozzle main part on the fixed plate, the side of vacuum nozzle main part is equipped with vacuum suction pipe interface, the bottom of vacuum nozzle main part is equipped with downward extending vacuum nozzle, vacuum nozzle and vacuum suction pipe interface intercommunication, the nozzle mouth of vacuum nozzle is horn-shaped and gradually expands outward. The utility model discloses a vacuum nozzle for rectifier bridge wafer, which changes the structure of the suction nozzle to increase the stability of the wafer adsorption, and the number of materials taken can be controlled by controlling the opening and closing of the suction nozzle, so that the equipment is more flexible. However, during the adsorption and movement of the suction nozzle, the wafer will fall off from the suction nozzle due to the vibration generated by the equipment operation, and the wafer will be deformed after falling off, which will cause deformation and scrap, and the reliability of wafer movement is reduced.

[0004] Therefore, a wafer moving device is needed to improve the reliability of wafer movement and avoid wafer falling off. UTILITY MODEL CONTENTS

[0005] The utility model solves the technical problems: in order to overcome the insufficient of prior art, provide a kind of wafer moving device that improves the reliability of wafer movement and avoids wafer falling off.

[0006] The utility model solves the technical problems: in order to overcome the insufficient of prior art, provide a kind of wafer moving device that improves the reliability of wafer movement and avoids wafer falling off.

[0007] The clamping mechanism comprises a clamping cylinder and two clamping rods, the cylinder body of the clamping cylinder is fixedly arranged on the moving plate, the two clamping rods are symmetrically arranged on the front and rear sides of the clamping cylinder, the two clamping rods are respectively connected with the two piston ends of the clamping cylinder, the two clamping rods correspond to the two groups of mounting seats, and the clamping rod is located between the two mounting seats in the same group.

[0008] As preferred, the side close to the clamping cylinder of the clamping rod is connected with a supporting block.

[0009] As preferred, the supporting block is provided with a chamfer.

[0010] As preferred, the supporting block is provided with a guide rod, the clamping rod is provided with a sliding groove, the sliding groove is vertically arranged, the sliding groove is matched with the guide rod, the guide rod is arranged in the sliding groove, and the guide rod is locked with the clamping rod through a locking piece.

[0011] As preferred, the sliding groove is a dovetail groove.

[0012] As preferred, the locking piece is a screw.

[0013] As preferred, the moving plate is provided with a cleaning mechanism, the cleaning mechanism is located above the suction nozzle, the cleaning mechanism comprises two cleaning assemblies, and the two cleaning assemblies correspond to the two clamping rods in one-to-one manner.

[0014] The cleaning assembly comprises a gas supply unit and two fixed pipes, the two fixed pipes correspond to the two suction nozzles in the same group in one-to-one manner, the fixed pipe is vertically arranged, the top end of the fixed pipe is sealingly and fixedly arranged at the bottom of the moving plate, the clamping rod and the fixed pipe are connected with the gas supply unit, and the gas supply unit is used for conveying air into the fixed pipe through the movement of the clamping rod.

[0015] As preferred, the gas supply unit comprises a cleaning pipe, one end of the cleaning pipe is sealed through a sealing plate, the cleaning pipe is provided with an extrusion plate, the extrusion plate is slidingly and sealingly connected with the cleaning pipe, a moving rod is movably arranged on the sealing plate, the moving rod is slidingly and sealingly connected with the sealing plate, the two ends of the moving rod are respectively connected with the clamping rod and the extrusion plate, the fixed pipe is communicated with the cleaning pipe through a connecting pipe, and the connecting position of the connecting pipe and the cleaning pipe is located between the extrusion plate and the sealing plate.

[0016] As preferred, the top of the suction nozzle is inserted into the fixed pipe, and a gap is arranged between the suction nozzle and the inner wall of the fixed pipe.

[0017] As preferred, the adsorption mechanism, the clamping mechanism and the cleaning mechanism are all provided with two, the two adsorption mechanisms are symmetrically arranged left and right, and the two adsorption mechanisms, the two clamping mechanisms and the two cleaning mechanisms correspond to each other in one-to-one manner.

[0018] Compared with the prior art, the material sheet moving device has the advantages that

[0019] The utility model discloses a material sheet moving device, through the suction nozzle adsorption material sheet moving process, through the clamping lever of material sheet's clamping fixed, improve the reliability of material sheet movement, avoid material sheet from the suction nozzle and fall, secondly, still through the support block support material sheet, play the effect of support material sheet to further avoid material sheet from the suction nozzle and fall, and, through the support block on the clamping lever's movement, can be applicable to the material sheet of different thickness, in addition, before the suction nozzle adsorption material sheet, through the air of fixed pipe and act on material sheet, make the impurity of material sheet and blow away, prevent the impurity and influence the effect of suction nozzle adsorption material sheet. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 It is a structure schematic diagram of the utility model one kind material sheet moving device;

[0021] Figure 2 It is the connecting structure schematic diagram of clamping lever and support block;

[0022] Figure 3 It is the connecting structure schematic diagram of mounting seat, suction nozzle, fixed pipe and connecting pipe;

[0023] Figure 4 It is the perspective view of the cleaning mechanism;

[0024] Figure 5 It is the sectional view of cleaning mechanism.

[0025] Among them:

[0026] Moving plate 1, mounting seat 2, suction nozzle 3, clamping cylinder 4, clamping lever 5, support block 6, guide rod 7, sliding slot 8, screw 9, fixed pipe 10, cleaning pipe 11, sealing plate 12, extrusion plate 13, moving rod 14, connecting pipe 15. DETAILED DESCRIPTION

[0027] As Figures 1-5 Shown, a material sheet moving device in the embodiment, including moving plate 1, the moving plate 1 with mobile system connection, here, mobile system can be mobile module, be provided with adsorption mechanism on the moving plate 1, the adsorption mechanism includes two groups of mounting seat 2, two groups of mounting seat 2 are distributed in front and back, and each group of mounting seat 2 is provided with two, and the two mounting seats 2 of same group are distributed in left and right, the mounting seat 2 is detachably fixedly connected with the moving plate 1, the suction nozzle 3 is installed on the mounting seat 2, the suction nozzle 3 is located below the moving plate 1, the moving plate 1 is provided with clamping mechanism;

[0028] The clamping mechanism includes a clamping cylinder 4 and two clamping rods 5. The cylinder body of the clamping cylinder 4 is fixedly mounted on the moving plate 1. The two clamping rods 5 are symmetrically arranged on the front and rear sides of the clamping cylinder 4. The two clamping rods 5 are respectively connected to the two piston ends of the clamping cylinder 4. The two clamping rods 5 correspond one-to-one with two sets of mounting seats 2. The clamping rods 5 are located between the two mounting seats 2 in the same set.

[0029] During operation, mounting base 2 is connected to the vacuum system. The moving system moves the moving plate 1, which in turn moves the suction nozzle 3 onto the material sheet. Then, the vacuum system is activated, causing the suction nozzle 3 to pick up the material sheet. After that, the moving plate 1 moves the suction nozzle 3 to move the material sheet to the cutting position. Then, the vacuum system stops, and the suction nozzle 3 stops picking up the material sheet. Finally, the moving plate 1 moves the suction nozzle 3 to separate from the material sheet, thus completing the material sheet movement.

[0030] When the suction nozzle 3 is adsorbing the material sheet and moving, the clamping cylinder 4 is activated, so that the two clamping rods 5 clamp and fix the material sheet, thereby improving the reliability of the material sheet movement and preventing the material sheet from falling off the suction nozzle 3.

[0031] The clamping rod 5 is detachably and fixedly connected to a support block 6 on the side near the clamping cylinder 4. When the clamping rod 5 clamps and fixes the material sheet, the top of the support block 6 fits against the bottom of the material sheet, thus supporting the material sheet and further preventing the material sheet from falling off the suction nozzle 3.

[0032] The support block 6 is provided with a chamfer;

[0033] The support block 6 is provided with a guide rod 7, and the clamping rod 5 is provided with a sliding groove 8. The sliding groove 8 is arranged vertically and matches the guide rod 7. The guide rod 7 is set in the sliding groove 8 and is locked to the clamping rod 5 by a locking component, which is a screw 9. The sliding groove 8 is a dovetail groove. When the thickness of the material sheet changes, the screw 9 is loosened, allowing the guide rod 7 to rise and fall within the sliding groove 8. The rising and falling distance depends on the change in the thickness of the material sheet. After the guide rod 7 has moved completely, the screw 9 is tightened.

[0034] The movable plate 1 is provided with a cleaning mechanism, which is located above the suction nozzle 3. The cleaning mechanism includes two cleaning components, which correspond one-to-one with two clamping rods 5.

[0035] The cleaning assembly comprises a gas supply unit and two fixed pipes 10 corresponding to two suction nozzles 3 in the same group, the fixed pipes 10 are vertically arranged, the top ends of the fixed pipes 10 are sealingly and fixedly arranged at the bottom of the moving plate 1, the top portions of the suction nozzles 3 are inserted into the fixed pipes 10, gaps are arranged between the suction nozzles 3 and the inner walls of the fixed pipes 10, the clamping rods 5 and the fixed pipes 10 are connected with the gas supply unit, and the gas supply unit is used for conveying air into the fixed pipes 10 through the movement of the clamping rods 5;

[0036] The gas supply unit comprises a cleaning pipe 11, one end of the cleaning pipe 11 is sealingly arranged through a sealing plate 12, the cleaning pipe 11 is provided with an extrusion plate 13, the extrusion plate 13 is slidingly and sealingly connected with the cleaning pipe 11, a moving rod 14 is movably arranged on the sealing plate 12, the moving rod 14 is slidingly and sealingly connected with the sealing plate 12, both ends of the moving rod 14 are connected with the clamping rod 5 and the extrusion plate 13 respectively, the fixed pipe 10 is communicated with the cleaning pipe 11 through a connecting pipe 15, and the connecting position of the connecting pipe 15 and the cleaning pipe 11 is located between the extrusion plate 13 and the sealing plate 12;

[0037] When the moving plate 1 drives the suction nozzle 3 to move to the material sheet, first, the suction nozzle 3 is moved above the material sheet, then, the two clamping rods 5 are driven to move away from each other in the front-rear direction through the clamping cylinder 4, the movement of the clamping rod 5 drives the extrusion plate 13 to move synchronously through the moving rod 14, and the distance between the extrusion plate 13 and the sealing plate 12 is reduced, that is, the air in the cleaning pipe 11 between the extrusion plate 13 and the moving plate 1 is extruded and conveyed from the connecting pipe 15 to the cleaning pipe 11, the air in the cleaning pipe 11 is discharged downward and acts on the material sheet, under the action of the air flow, the impurities on the material sheet are blown away, and the effect of the suction nozzle 3 on the material sheet is prevented from being affected by the impurities;

[0038] When the suction nozzle 3 abuts against the material sheet, the clamping cylinder 4 is used for driving the two clamping rods 5 to move close to each other, and the two clamping rods 5 are used for clamping and fixing the material sheet;

[0039] The suction mechanism, the clamping mechanism and the cleaning mechanism are both provided with two, the two suction mechanisms are arranged symmetrically left and right, and the two suction mechanisms, the two clamping mechanisms and the two cleaning mechanisms correspond one by one;

[0040] In summary, through the clamping and fixing of the material sheet by the clamping rod 5 during the movement of the material sheet by the suction nozzle 3, the reliability of the movement of the material sheet is improved, and the material sheet is prevented from falling off the suction nozzle 3, secondly, the material sheet is supported by the supporting block 6, the effect of supporting the material sheet is achieved, and the material sheet is further prevented from falling off the suction nozzle 3, and in addition, the movement of the supporting block 6 on the clamping rod 5 can be suitable for material sheets of different thicknesses, in addition, before the material sheet is sucked by the suction nozzle 3, the air discharged through the fixed pipe 10 acts on the material sheet, the impurities on the material sheet are blown away, and the effect of the suction nozzle 3 on the material sheet is prevented from being affected by the impurities.

[0041] In addition to the above-mentioned embodiments, the utility model also includes other implementation manners, and the technical scheme formed by using equivalent transformation or equivalent replacement should fall within the protection scope of the utility model claims.

Claims

1. A tablet moving device, comprising a moving plate (1) connected with a moving system, wherein an adsorption mechanism is arranged on the moving plate (1), the adsorption mechanism comprises two groups of mounting seats (2) which are spaced apart front and back, and each group of mounting seats (2) is provided with two mounting seats (2), and the two mounting seats (2) in the same group are spaced apart left and right, the mounting seat (2) is detachably fixedly connected with the moving plate (1), and a suction nozzle (3) is arranged on the mounting seat (2), and the suction nozzle (3) is located below the moving plate (1), characterized in that: The mobile plate (1) is provided with a clamping mechanism; ​ The clamping mechanism comprises a clamping cylinder (4) and two clamping rods (5), the cylinder body of the clamping cylinder (4) is fixedly arranged on the mobile plate (1), the two clamping rods (5) are symmetrically arranged on the front and rear sides of the clamping cylinder (4), the two clamping rods (5) are respectively connected with the two piston ends of the clamping cylinder (4), the two clamping rods (5) correspond to the two groups of mounting seats (2) one by one, and the clamping rod (5) is located between the two mounting seats (2) in the same group.

2. A web moving device according to claim 1, characterized in that The clamping rod (5) is connected with a supporting block (6) on the side close to the clamping cylinder (4).

3. A web moving device according to claim 2, wherein: The supporting block (6) is provided with a chamfer.

4. A web moving device according to claim 2, wherein: The supporting block (6) is provided with a guide rod (7), the clamping rod (5) is provided with a sliding groove (8), the sliding groove (8) is vertically arranged, the sliding groove (8) is matched with the guide rod (7), the guide rod (7) is arranged in the sliding groove (8), and the guide rod (7) is locked with the clamping rod (5) through a locking piece.

5. A web moving device according to claim 4, wherein: The sliding groove (8) is a dovetail groove.

6. A web moving device according to claim 4, wherein: The locking piece is a screw (9).

7. A web moving device according to claim 1 wherein: The mobile plate (1) is provided with a cleaning mechanism, the cleaning mechanism is located above the suction nozzle (3), the cleaning mechanism comprises two cleaning assemblies, and the two cleaning assemblies correspond to the two clamping rods (5) one by one. The cleaning assembly comprises a gas supply unit and two fixed pipes (10), the two fixed pipes (10) correspond to the two suction nozzles (3) in the same group one by one, the fixed pipe (10) is vertically arranged, the top end of the fixed pipe (10) is sealingly and fixedly arranged at the bottom of the mobile plate (1), and the clamping rod (5) and the fixed pipe (10) are connected with the gas supply unit. Air is delivered into the fixed pipe (10) by the gas supply unit through the movement of the clamping rod (5).

8. A web moving device according to claim 7, characterized in that The gas supply unit comprises a cleaning pipe (11), one end of the cleaning pipe (11) is sealed by a sealing plate (12), the cleaning pipe (11) is provided with an extrusion plate (13), the extrusion plate (13) is slidingly and sealingly connected with the cleaning pipe (11), a moving rod (14) is movably arranged on the sealing plate (12), the moving rod (14) is slidingly and sealingly connected with the sealing plate (12), the two ends of the moving rod (14) are connected with the clamping rod (5) and the extrusion plate (13) respectively, the fixed pipe (10) is communicated with the cleaning pipe (11) through a connecting pipe (15), and the connecting position of the connecting pipe (15) and the cleaning pipe (11) is located between the extrusion plate (13) and the sealing plate (12).

9. A web moving device according to claim 7, wherein: The top of the suction nozzle (3) is inserted into the fixed pipe (10), and a gap is arranged between the suction nozzle (3) and the inner wall of the fixed pipe (10).

10. A web moving device according to claim 1, wherein: The adsorption mechanism, the clamping mechanism and the cleaning mechanism are provided with two, the two adsorption mechanisms are arranged symmetrically left and right, and the two adsorption mechanisms, the two clamping mechanisms and the two cleaning mechanisms correspond one by one.

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