Online adjustable magnetic bar structure for magnetron sputtering equipment

Abstract

The utility model discloses an on-line adjustable magnetic bar structure for magnetron sputtering equipment. When the adjustable magnetic bar disclosed by the utility model is adopted, the uniformity of a target material deposition layer on the surface of a workpiece is observed, the magnetic field of the corresponding area of the adjustable magnetic bar is non-uniform when the deposition layer at a certain position on the surface of the workpiece is non-uniform, and at the moment, the micro motor in the corresponding area is controlled to work through a program under the condition that magnetron sputtering equipment is not stopped; the micro motor drives the threaded sleeve to rotate and enables the threaded rod in threaded connection with the threaded sleeve to move along the central axis, so that the deformation mounting plate in the area is driven to deform, and the distance between the magnetic block on the deformation mounting plate in the area and the target material is adjusted; and finally, observing the uniformity of the target material deposition layer on the surface of the next workpiece so as to realize the purpose of on-line adjustment of the magnetic field. Compared with an existing adjustable magnetic bar product, the adjustable magnetic bar has the advantages that the adjusting precision is higher, online adjustment can be achieved, waste of the target material is reduced, and the adjusting time is shortened.

Description

TECHNICAL FIELD

[0001] The utility model relates to magnetron sputtering technical field especially relates to a magnetron sputtering equipment is with online adjustable magnetic bar structure. BACKGROUND

[0002] Vacuum sputtering coating technology has been widely used in semiconductor, solar, optical and aerospace fields. Among them, the magnetron sputtering coating has the advantages of fast sputtering speed, simple equipment and easy control, and is suitable for long-term batch production. Magnetron sputtering coating refers to using argon ions to bombard the target material to produce cathode sputtering, and then sputtering the target material atoms to deposit on the workpiece to form a deposition layer.

[0003] At present, the film industry requires higher uniformity of the film layer, and the repeatability precision of the long-term stability and magnetic field adjustment is also getting higher and higher. Although the uniformity of the film deposition is affected by factors such as the uniformity of the process gas and the uniformity of the electric field of the coating equipment, the most critical factor is the uniformity of the magnetic field of the magnetic bar. Therefore, the rotating cathode magnetic bar not only requires very good magnetic field uniformity in the initial state of use, but also needs to continuously adjust the magnetic field strength during continuous coating process to ensure the continuity and uniformity of the film deposition.

[0004] The existing rotating cathode magnetic bar product has set an adjustment point to adjust the distance between the magnetic bar and the target material to change the magnetic field strength on the surface of the target material. However, the adjustment method is mostly to adjust the distance by increasing or decreasing the gasket as disclosed in patent No. CN115537748B. The disadvantages of this adjustment method are as follows: 1. The minimum adjustment distance is the thickness of a gasket each time. When the adjustment distance is less than the thickness, it is difficult to achieve effective and accurate adjustment; 2. Each adjustment needs to disassemble the magnetic bar and adjust the number of gaskets by manual operation, which requires higher operation personnel; 3. Since this adjustment method is not online adjustment, the adjustment result needs to be obtained after installation into the magnetron sputtering equipment and testing each time, so this method not only causes time-consuming and high cost in the adjustment process, but also causes a large amount of target material to be wasted in testing, resulting in high adjustment cost. SUMMARY

[0005] The utility model aims at providing a kind of magnetron sputtering equipment is with online adjustable magnetic bar structure, to solve the problem that the existing rotating cathode magnetic bar product cannot realize online adjustment magnetic field.

[0006] To solve the above technical problems, the utility model provides a kind of magnetron sputtering equipment is with online adjustable magnetic bar structure, including shell assembly, magnetic field component and multiple online adjustment components;

[0007] The magnetic field assembly is arranged on one side of the shell assembly and along the length direction thereof;

[0008] A plurality of the online adjustment assemblies are arranged between the shell assembly and the magnetic field assembly along the length direction, and each of the online adjustment assemblies is independently controlled and capable of independently adjusting the magnetic field assembly in the region.

[0009] Preferably, the online adjustment assembly comprises a micro motor and a linkage, the micro motor is fixedly arranged in the shell assembly through a motor support, one end of the linkage is connected with the micro motor, and the other end is connected with the magnetic field assembly through a mounting block; under the action of the micro motor, the magnetic field assembly is driven by the linkage to move, so as to adjust the distance between the magnetic rod and the target material in the region.

[0010] Preferably, the linkage comprises a threaded sleeve and a threaded rod, one end of the threaded rod is fixedly connected with the magnetic field assembly through the mounting block, and the other end is inserted into the threaded sleeve and threadedly connected with the threaded sleeve.

[0011] Preferably, the threaded sleeve and the micro motor are connected through a transmission gear set, under the driving of the micro motor, the threaded sleeve is driven to rotate, so that the threaded rod threadedly connected with the threaded sleeve drives the magnetic field assembly to move along the central axis.

[0012] Preferably, the transmission gear set comprises a bevel gear and a bevel gear plate which are engagedly connected; the bevel gear plate is sleevedly arranged on the threaded sleeve, and the bevel gear is sleevedly arranged on the output shaft of the micro motor, the bevel gear, the bevel gear plate and the threaded sleeve connected with the bevel gear plate are driven to rotate by the micro motor.

[0013] Preferably, the threaded rod is movably inserted into the mounting block and connected with the mounting block through a penetrating pin; and the mounting block is fixedly connected with the magnetic field assembly through a plurality of locking bolts.

[0014] Preferably, the magnetic field assembly comprises a deformed mounting plate, a plurality of groups of magnetic strips are arranged on the side of the deformed mounting plate away from the online adjustment assembly.

[0015] Preferably, three groups of magnetic strips are arranged on the deformed mounting plate, two groups of the magnetic strips are N-pole magnetic strips and are arranged on the two sides of the deformed mounting plate respectively, and the other group of the magnetic strip is an S-pole magnetic strip and is arranged between the two groups of N-pole magnetic strips.

[0016] Each group of magnetic strips is sequentially arranged by a plurality of magnetic blocks along the length direction of the deformed mounting plate.

[0017] The N-pole magnetic strips and the S-pole magnetic strips are provided with magnetic shoes outside.

[0018] A plurality of first deformation grooves are arranged on the mounting surface of the deformation mounting plate in a staggered manner with the plurality of online adjustment assemblies.

[0019] A plurality of second deformation grooves are arranged on the magnetic strip mounting surface of the deformation mounting plate in a staggered manner with the plurality of online adjustment assemblies.

[0020] Preferably, the shell assembly comprises a top cover and side plates movably mounted on both sides of the top cover, and each side plate is rotatably connected to the top cover by a plurality of buckles.

[0021] Compared with the prior art, the online adjustable magnetic rod has the following beneficial effects:

[0022] When the adjustable magnetic rod is used, the uniformity of the target material deposition layer on the surface of the workpiece is observed, and when the deposition layer at a certain position on the surface of the workpiece is observed to be uneven, it indicates that the magnetic field of the corresponding area of the adjustable magnetic rod is uneven. At this time, the micro motor of the corresponding area is controlled by the program without stopping the magnetic control sputtering equipment. The micro motor drives the threaded sleeve to rotate, and the threaded rod connected with the threaded sleeve moves along the center axis, thereby driving the deformation mounting plate in the area to deform, so as to adjust the distance between the magnetic block on the deformation mounting plate and the target material. Finally, the uniformity of the target material deposition layer on the surface of the next workpiece is observed to achieve the purpose of online adjustment of the magnetic field. Compared with the existing adjustable magnetic rod product, the adjustment accuracy is higher, and online adjustment can be realized, the waste of target material is reduced, and the adjustment time is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 is a structural schematic view of an online adjustable magnetic rod structure for a magnetic control sputtering equipment provided by the present application;

[0024] Figure 2 is a structural schematic view of an online adjustable magnetic rod structure for a magnetic control sputtering equipment provided by the present application;

[0025] Figure 3 is a structural schematic view of an online adjustable magnetic rod structure for a magnetic control sputtering equipment provided by the present application;

[0026] Figure 4 is a structural schematic view of an online adjustable magnetic rod structure for a magnetic control sputtering equipment provided by the present application;

[0027] Figure 5 is a structural schematic view of an online adjustable magnetic rod structure for a magnetic control sputtering equipment provided by the present application;

[0028] Figure 6 is a structural schematic view of an online adjustable magnetic rod structure for a magnetic control sputtering equipment provided by the present application;

[0029] In the drawings: 1, shell assembly; 101, top cover; 102, side plate;

[0030] 2, magnetic field assembly; 21, deformation mounting plate; 22, N-pole magnetic strip; 23, S-pole magnetic strip; 24, magnetic shoe; 211, first deformation groove; 212, second deformation groove;

[0031] 3, online adjustment assembly; 31, micro motor; 32, linkage; 33, motor support; 34, mounting block; 35, transmission gear set; 36, bolt; 37, locking bolt; 321, threaded sleeve; 322, threaded rod; 351, bevel gear; 352, bevel gear plate;

[0032] 4, buckle. DETAILED DESCRIPTION

[0033] The utility model will be made further detailed description in combination with the drawings and specific embodiment. According to the following description and claims, the advantages and features of the utility model will be more clear. It should be noted that the drawings all adopt very simplified form and all use non-precise proportion, just to facilitate, clear and assist the purpose of description of the embodiment of the utility model.

[0034] In the description of the utility model, it needs to be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model. In addition, the terms "first", "second" and the like are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first", "second" and the like can explicitly or implicitly include one or more features. In the description of the utility model, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0035] In the description of the utility model, it needs to be explained that, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected, it can be mechanically connected, or it can be electrically connected, it can be directly connected, or indirectly connected through an intermediate medium, it can be the communication inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood through specific circumstances.

[0036] In addition, features, operations, and functions described in the specification can be combined in any suitable manner in various embodiments. Similarly, various steps or actions described in methods can be performed in the sequence indicated, in other sequences, or concurrently. Accordingly, various sequences or order of actions within the specification, with respect to the specification, are not necessarily implemented in the order shown, but can be implemented in other orders. Additionally, certain features can be rendered in different phrases or passed out of the specification. Therefore, the specification is not a limitation as to the order in which certain operations are performed and / or described. Embodiments

[0037] The utility model provides a kind of online adjustable magnetic bar structure for magnetron sputtering equipment, please refer to Figures 1-3 Including shell assembly 1, magnetic field assembly 2 and multiple online adjustment components 3;The magnetic field assembly 2 is located in the shell assembly 1 side, and it is arranged along its length direction;Multiple online adjustment components 3 are installed between the shell assembly 1 and the magnetic field assembly 2 along the length direction interval;And each online adjustment component 3 is individually controlled, and the magnetic field assembly 2 of this area can be individually adjusted.

[0038] Wherein, please refer to simultaneously Figure 4 And Figure 5 The online adjustment component 3 includes micro motor 31 and linkage 32;The micro motor 31 is fixedly installed in the shell assembly 1 by motor support 33, one end of the linkage 32 is connected with the micro motor 31, and the other end is connected with the magnetic field assembly 2 by mounting block 34;Under the action of the micro motor 31, the magnetic field assembly 2 is driven by the linkage 32 to move, so as to adjust the distance between the magnetic bar and target material in this area.

[0039] Further, the linkage 32 includes threaded sleeve 321 and threaded rod 322, one end of the threaded rod 322 is fixedly connected with the magnetic field assembly 2 by mounting block 34, the other end is inserted into the threaded sleeve 321 and is threadedly connected with it.

[0040] Further, the threaded sleeve 321 and the micro motor 31 are connected by transmission gear set 35, under the drive of the micro motor 31, the threaded sleeve 321 is rotated, so that the threaded rod 322 threadedly connected with it drives the magnetic field assembly 2 to move along the central axis.

[0041] In the embodiment, the transmission gear set 35 includes bevel gear 351 and bevel gear plate 352 engagedly connected;The bevel gear plate 352 is sleeved and installed on the threaded sleeve 321, and the bevel gear 351 is sleeved and installed on the output shaft of the micro motor 31, and the bevel gear 351, the bevel gear plate 352 and the threaded sleeve 321 connected with the bevel gear plate 352 are driven to rotate by the micro motor 31.

[0042] The threaded rod 322 is movably inserted into the mounting block 34 and connected to the mounting block 34 through the inserted bolt 36; and the mounting block 34 is fixedly connected to the magnetic field assembly 2 through the locking bolts 37.

[0043] Specifically, as shown in Figure 6 The magnetic field assembly 2 includes a deformed mounting plate 21, and a plurality of groups of magnetic strips are installed on the side of the deformed mounting plate 21 away from the online adjustment assembly 3.

[0044] Further, three groups of magnetic strips are installed on the deformed mounting plate 21, two of which are N-pole magnetic strips 22 installed on both sides of the deformed mounting plate 21, and the other is an S-pole magnetic strip 23 installed between the two groups of N-pole magnetic strips 22.

[0045] In this embodiment, each group of magnetic strips is sequentially arranged along the length direction of the deformed mounting plate 21 by a plurality of magnetic blocks.

[0046] In this embodiment, the N-pole magnetic strips 22 and the S-pole magnetic strip 23 are both provided with magnetic shoes 24 outside.

[0047] Further, a plurality of first deformation grooves 211 are provided on the installation surface of the online adjustment assembly 3 of the deformed mounting plate 21, and the first deformation grooves 211 and the online adjustment assemblies 3 are staggered, so that the deformed mounting plates 21 on both sides of the online adjustment assembly 3 are more easily deformed; a plurality of second deformation grooves 212 are provided on the magnetic strip installation surface of the deformed mounting plate 21, and the second deformation grooves 212 are provided in groups of two on both sides of the online adjustment assembly 3, so that the deformed mounting plates 21 on both sides of the online adjustment assembly 3 are more easily deformed.

[0048] Specifically, please continue to refer to Figure 1 The shell assembly 1 includes a top cover 101 and side plates 102 movably installed on both sides of the top cover 101, and each side plate 102 is rotatably connected to the top cover 101 through a plurality of buckles 4, so that both side plates 102 can be opened to both sides, so that the internal components of the magnetic rod can be repaired.

[0049] The on-line adjusting method steps of the adjustable magnetic bar magnetic field are as follows: firstly, the uniformity of the target material deposition layer on the workpiece surface is observed, when the deposition layer at a certain place on the workpiece surface is observed to be uneven, it indicates that the magnetic field of the corresponding area of the adjustable magnetic bar is uneven, at this time, the micro motor 31 of the corresponding area is controlled by program under the condition that the magnetron sputtering equipment does not stop, the micro motor 31 drives the threaded sleeve 321 to rotate, and the threaded rod 322 which is in threaded connection with the threaded sleeve 321 moves along the central axis, thereby driving the deformation mounting plate 21 of the area to deform, so as to adjust the distance between the magnetic block on the deformation mounting plate 21 and the target material; finally, the uniformity of the target material deposition layer on the surface of the next workpiece is observed, so as to realize the purpose of on-line adjustment of the magnetic field.

[0050] The above description is only a description of the preferred embodiments of the utility model, and does not limit the scope of the utility model in any way, any change or modification of the utility model made by the ordinary skilled in the art according to the above disclosure is within the protection scope of the claims.

Claims

1. An online adjustable magnetic rod structure for a magnetron sputtering device, characterized in that, The shell assembly (1), the magnetic field assembly (2) and a plurality of online adjustment assemblies (3) are included. The magnetic field assembly (2) is arranged on one side of the shell assembly (1) and along the length direction thereof. A plurality of the online adjustment assemblies (3) are installed between the shell assembly (1) and the magnetic field assembly (2) along the length direction, and each of the online adjustment assemblies (3) is independently controlled and can independently adjust the magnetic field assembly (2) in the corresponding area.

2. The on-line adjustable magnet structure for a magnetron sputtering apparatus as defined in claim 1, wherein The online adjustment assembly (3) includes a micro motor (31) and a linkage (32). The micro motor (31) is fixedly installed in the shell assembly (1) through a motor support (33). One end of the linkage (32) is connected with the micro motor (31), and the other end is connected with the magnetic field assembly (2) through a mounting block (34). Under the action of the micro motor (31), the magnetic field assembly (2) is driven by the linkage (32) to move, so as to adjust the distance between the magnetic rod and the target material in the area.

3. A structure of on-line adjustable magnet bar for a magnetron sputtering apparatus as defined in claim 2, wherein The linkage (32) includes a threaded sleeve (321) and a threaded rod (322). One end of the threaded rod (322) is fixedly connected with the magnetic field assembly (2) through the mounting block (34), and the other end is inserted into the threaded sleeve (321) and is threadedly connected with the threaded sleeve (321).

4. The on-line adjustable magnet structure for a magnetron sputtering apparatus as defined in claim 3, wherein The threaded sleeve (321) and the micro motor (31) are connected through a transmission gear set (35). Under the driving of the micro motor (31), the threaded sleeve (321) is rotated, so that the threaded rod (322) which is threadedly connected with the threaded sleeve (321) drives the magnetic field assembly (2) to move along the central axis.

5. The on-line adjustable magnet structure for a magnetron sputtering apparatus as defined in claim 4, wherein The transmission gear set (35) includes a bevel gear (351) and a bevel gear plate (352) which are engagedly connected. The bevel gear plate (352) is sleeved and installed on the threaded sleeve (321), and the bevel gear (351) is sleeved and installed on the output shaft of the micro motor (31). The bevel gear (351), the bevel gear plate (352) and the threaded sleeve (321) connected with the bevel gear plate (352) are driven to rotate by the micro motor (31).

6. The on-line adjustable magnet structure for a magnetron sputtering apparatus as defined in claim 3, wherein The threaded rod (322) is movably inserted into the mounting block (34) and connected with the mounting block (34) through a penetrating pin (36). The mounting block (34) is fixedly connected with the magnetic field assembly (2) through a plurality of locking bolts (37).

7. The on-line adjustable magnet structure for a magnetron sputtering apparatus as defined in claim 1, wherein The magnetic field assembly (2) includes a deformed mounting plate (21). A plurality of groups of magnetic strips are installed on one side of the deformed mounting plate (21) away from the online adjustment assembly (3).

8. The on-line adjustable magnet structure for a magnetron sputtering apparatus as defined in claim 7, wherein Three groups of magnetic strips are installed on the deformed mounting plate (21). Two groups of the magnetic strips are N-pole magnetic strips (22) and are installed on two sides of the deformed mounting plate (21), respectively. The other group is an S-pole magnetic strip (23) and is installed between the two groups of N-pole magnetic strips (22). Each group of magnetic strips is sequentially arranged by a plurality of magnetic blocks along the length direction of the deformed mounting plate (21). The N-pole magnetic strips (22) and the S-pole magnetic strip (23) are both provided with magnetic shoes (24) outside.

9. The on-line adjustable magnet structure for a magnetron sputtering apparatus as defined in claim 7, wherein A plurality of first deformation grooves (211) are arranged on the mounting surface of the online adjustment assembly (3) of the deformation mounting plate (21) and staggered with the plurality of online adjustment assemblies (3); a plurality of second deformation grooves (212) are arranged on the magnetic strip mounting surface of the deformation mounting plate (21), and each two second deformation grooves (212) form a group and are arranged on both sides of the online adjustment assembly (3).

10. The on-line adjustable magnet structure for a magnetron sputtering apparatus as defined in claim 1, wherein The shell assembly (1) comprises a top cover (101) and side plates (102) movably mounted on both sides of the top cover (101), and each side plate (102) is rotatably connected with the top cover (101) through a plurality of buckles (4).

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