Special gas supply disc
By integrating components such as pressure sensors and pneumatic diaphragm valves into the gas supply plate, automated control of the gas supply plate and real-time gas monitoring are achieved, solving the problem of insufficient automation in existing gas supply plates, improving operating efficiency and gas cleanliness, and meeting the usage requirements of CVD equipment.
Patent Information
- Application Number
- CN202520640271.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-08
- Publication Date
- 2026-02-27
- Estimated Expiration
- 2035-04-08
AI Technical Summary
The existing air supply plate cannot automatically alert when it malfunctions, and its level of automation is insufficient, which cannot meet the usage requirements of CVD equipment.
A special gas supply plate was designed, which integrates a first pressure gauge, a pressure sensor, a pneumatic diaphragm valve, a pressure reducing valve, a second pressure gauge, and a low-pressure diaphragm valve. Through the linkage and monitoring of these components, automated control and real-time gas monitoring are achieved, and a precision filter is provided to ensure gas cleanliness.
It significantly improves operational efficiency, space utilization, safety, and compliance, and enables automated operation of the gas supply plate and real-time gas monitoring, ensuring that the gas cleanliness meets the production requirements of CVD equipment.
Smart Images
Figure CN223951171U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the field of gas supply disc, specifically a gas supply disc of special gas. BACKGROUND
[0002] Chemical vapor deposition equipment (CVD equipment) is a kind of common equipment, for preparing various types of thin films, need to adopt various equipment to assist, gas supply disc is a kind of device for assisting the work of CVD equipment.
[0003] Although the existing gas supply disc can supply gas for the work of CVD equipment, it cannot automatically remind when the gas supply disc fails, and the degree of automation cannot meet the use demand of people. UTILITY MODEL CONTENT
[0004] In order to achieve the above-mentioned purpose, the utility model aims at providing a gas supply disc of special gas, which can solve the problems in the background art. The utility model provides the following technical scheme:
[0005] A gas supply disc of special gas, including disc body, the both sides of disc body are symmetrically equipped with first pressure gauge, pressure sensor, pneumatic diaphragm valve, pressure reducing valve, second pressure gauge and low pressure diaphragm valve, one side of first pressure gauge is connected with pressure sensor, the other side of pressure sensor is connected with one side of pneumatic diaphragm valve, the other side of pneumatic diaphragm valve is connected with one side of pressure reducing valve, the other side of pressure reducing valve is connected with one side of second pressure gauge, the other side of second pressure gauge is connected with one side of low pressure diaphragm valve, first pressure gauge is used to show cylinder pressure in the product, pressure sensor is used to monitor cylinder pressure in real time, pneumatic diaphragm valve is used to control linkage PLC switch, pressure reducing valve is used to control the pressure inside pipeline, can stabilize the output of flow, second pressure gauge is used to show low pressure end gas pressure, low pressure diaphragm valve is used to control the output of rear end gas path, and the working process of the product is as follows: after opening the pneumatic diaphragm valve on both sides, gas is transported, then pressure reducing valve is adjusted, second pressure gauge is adjusted to use pressure, and low pressure diaphragm valve is used to control whether gas is transported to the rear end, so that real-time monitoring can be realized.
[0006] As a further scheme of the utility model: the disc body is also provided with a precision filter, the precision filter is connected with the other side of the low pressure diaphragm valve, and is used to maintain the use cleanliness of the rear end gas, so that the CVD equipment can be continuously supplied with gas.
[0007] As a further scheme of the utility model: a pressure sensor is also installed between the second pressure gauge and the low pressure diaphragm valve, which can monitor the low pressure end gas pressure in real time.
[0008] As a further scheme of the present application, the filtering precision of the precision filter is at least 0.003 μm, which can ensure the filtering effect and further ensure that the use cleanliness of the rear-end gas always meets the production requirement of the CVD equipment.
[0009] As a further scheme of the present application, the first pressure gauge, the pressure sensor, the pneumatic diaphragm valve, the pressure reducing valve, the second pressure gauge and the low-pressure diaphragm valve are all installed on the disc body in a VCR welding mode.
[0010] As a further scheme of the present application, the precision filter is installed on the disc body in a VCR (Vacuum Coupling Radius Seal) welding mode, which can ensure good connection firmness and excellent sealing performance.
[0011] Compared with the prior art, the present application has the following beneficial effects:
[0012] The present application can significantly improve the operation efficiency, space utilization, safety and compliance through the highly integrated design of the disc body, and can realize automation through the linkage of the pneumatic diaphragm valve, the concentration alarm of the pressure gauge and the pressure sensor. BRIEF DESCRIPTION OF DRAWINGS
[0013] Figure 1 Fig. 1 is a structural schematic view of a special gas supply disc in the present application.
[0014] In the figure, 1 is a first pressure gauge; 2 is a pressure sensor; 3 is a pneumatic diaphragm valve; 4 is a pressure reducing valve; 5 is a second pressure gauge; 6 is a low-pressure diaphragm valve; 7 is a precision filter; and 8 is a disc body. DETAILED DESCRIPTION
[0015] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.
[0016] The specific implementation of the present application will be described in detail below in combination with specific embodiments.
[0017] Please refer to Figure 1The utility model discloses a kind of gas supply disc of special gas, including disc body 8, the two sides symmetry of disc body 8 are equipped with first pressure gauge 1, pressure sensor 2, pneumatic diaphragm valve 3, pressure reducing valve 4, second pressure gauge 5 and low pressure diaphragm valve 6, first pressure gauge 1 is connected with one side of pressure sensor 2, the other side of pressure sensor 2 is connected with one side of pneumatic diaphragm valve 3, the other side of pneumatic diaphragm valve 3 is connected with one side of pressure reducing valve 4, the other side of pressure reducing valve 4 is connected with one side of second pressure gauge 5, the other side of second pressure gauge 5 is connected with one side of low pressure diaphragm valve 6, first pressure gauge 1 is used to show cylinder pressure in the product, pressure sensor 2 is used to monitor cylinder pressure in real time, pneumatic diaphragm valve 3 is used for linkage PLC control switch, pressure reducing valve 4 is used for the pressure inside pipe, can stabilize the output of flow, second pressure gauge 5 is used to show low pressure end gas pressure, low pressure diaphragm valve 6 is used to control the output of rear end gas path, the working process of the product is as follows: open the pneumatic diaphragm valve 3 of two sides, after gas is transported, adjust pressure reducing valve 4, cooperate second pressure gauge 5 and adjust to use pressure, then use low pressure diaphragm valve 6 to control whether gas is transported to rear end, can realize real-time monitoring.
[0018] As a further scheme of the utility model: disc body 8 is also equipped with precision filter 7, and the other side of precision filter 7 is connected with low pressure diaphragm valve 6, for keeping the use cleanliness of rear end gas, and can continuously supply gas for CVD equipment.
[0019] As a further scheme of the utility model: pressure sensor 2 is also installed between second pressure gauge 5 and low pressure diaphragm valve 6, and can monitor low pressure end gas pressure in real time.
[0020] In an embodiment of the utility model, the filtering precision of precision filter 7 is at least 0.003 μm, and such filtering precision can guarantee filtering effect, and further ensure that the use cleanliness of rear end gas always meets the production demand of CVD equipment.
[0021] In an embodiment of the utility model, pneumatic diaphragm valve 3 adopts high-pressure pneumatic diaphragm valve, and the component is easy to buy, has wide application range and long service life.
[0022] In an embodiment of the utility model, first pressure gauge 1, pressure sensor 2, pneumatic diaphragm valve 3, pressure reducing valve 4, second pressure gauge 5 and low pressure diaphragm valve 6 are all installed on disc body 8 in the mode of VCR welding, and firmness of connection is good.
[0023] In an embodiment of the utility model, precision filter 7 is installed on disc body 8 in the mode of VCR (Vacuum Coupling Radius Seal, vacuum connection radial seal) welding, and firmness of connection and excellent sealing property can be guaranteed.
[0024] It should be noted that in the utility model, unless another explicit provision and limitation, the term "fixed", "set" and other terms should be broad understanding, for example, can be welding connection, can also be bolted connection, or integrated; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through the intermediate medium, can be two elements inside the communication or the interaction relationship of two elements, unless otherwise explicitly limited. For those of ordinary skill in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.
[0025] In addition, it should be understood that although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description of the specification is only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that those skilled in the art can understand.
Claims
1. A special gas supply plate, comprising a plate body, wherein a first pressure gauge, a pressure sensor, a pneumatic diaphragm valve, a pressure reducing valve, a second pressure gauge, and a low-pressure diaphragm valve are symmetrically mounted on both sides of the plate body, characterized in that, The first pressure gauge is connected to one side of the pressure sensor, the other side of the pressure sensor is connected to one side of the pneumatic diaphragm valve, the other side of the pneumatic diaphragm valve is connected to one side of the pressure reducing valve, the other side of the pressure reducing valve is connected to one side of the second pressure gauge, and the other side of the second pressure gauge is connected to one side of the low-pressure diaphragm valve.
2. The special gas supply plate according to claim 1, characterized in that, A precision filter is also installed on the disc, and the precision filter is connected to the other side of the low-pressure diaphragm valve.
3. The special gas supply plate according to claim 2, characterized in that, The precision filter has a filtration accuracy of at least 0.003 μm.
4. The gas supply plate for special gases according to claim 2 or 3, characterized in that, The precision filter is mounted on the disc using VCR welding.
5. The special gas supply plate according to claim 1, characterized in that, A pressure sensor is also installed between the second pressure gauge and the low-pressure diaphragm valve.