Terminal air supply disc

Abstract

The utility model relates to the field of air supply discs, in particular to a terminal air supply disc which comprises a disc body, a pneumatic diaphragm valve and a manual diaphragm valve are installed on the disc body, one side of the pneumatic diaphragm valve is connected with one side of the manual diaphragm valve, a flow meter is further installed on the disc body, and the flow meter is located between the pneumatic diaphragm valve and the manual diaphragm valve. The flow meter is adopted to accurately control the flow used by the device, the rear end of the device is provided with the pneumatic diaphragm valve which can be linked with the device, and the use gas circuit of the device is automatically controlled.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of gas supply disc, and specifically relates to a terminal gas supply disc. BACKGROUND

[0002] Chemical vapor deposition equipment (CVD equipment) is a common device for preparing various types of thin films, which needs to be assisted by various devices, and the terminal gas supply disc is a common device for assisting the work of the CVD equipment.

[0003] The existing terminal gas supply disc can supply gas for the work of the CVD equipment, but the user controls the flow according to experience, which can meet the gas supply requirements of the CVD equipment, but the precision is not high. UTILITY MODEL CONTENTS

[0004] To achieve the above-mentioned purpose, the utility model aims at providing a terminal gas supply disc, which can solve the problems in the background art. The utility model provides the following technical scheme:

[0005] A terminal gas supply disc, comprising a disc body, a pneumatic diaphragm valve and a manual diaphragm valve are installed on the disc body, one side of the pneumatic diaphragm valve is connected with one side of the manual diaphragm valve, a flowmeter is also installed on the disc body, the flowmeter is located between the pneumatic diaphragm valve and the manual diaphragm valve, the manual diaphragm valve is used for manually controlling the gas circuit, the flowmeter is used for intelligently controlling the flow used in the gas circuit, and the pneumatic diaphragm valve is used for controlling the opening and closing of the gas circuit according to the equipment. The working process of the product is as follows: after the multi-way gas is input, the manual diaphragm valve is opened, the flow used in each gas circuit is accurately controlled through the flowmeter, the opening and closing of the pneumatic diaphragm valve are controlled through the PLC, and automatic control is realized.

[0006] As a further scheme of the utility model, the pneumatic diaphragm valve, the flowmeter and the manual diaphragm valve are all installed on the disc body in a VCR welding mode, so that the connection firmness is good.

[0007] As a further scheme of the utility model, the flowmeter is a mass flowmeter.

[0008] As a further scheme of the utility model, a precision filter is also installed on the disc body, so that the use cleanliness of the gas can be maintained.

[0009] As a further scheme of the utility model, the filtering precision of the precision filter is at least 0.003 microns, so that the filtering effect can be guaranteed, and the CVD equipment can be continuously supplied with gas.

[0010] As a further scheme of the utility model: the precision filter is installed on the disc body in a VCR (Vacuum Coupling Radius Seal) welding mode, and the connection firmness and the sealing performance can be guaranteed.

[0011] Compared with the prior art, the utility model has the beneficial effects that:

[0012] The product adopts the flow of the flowmeter to accurately control the equipment, and the product is provided with a pneumatic diaphragm valve at the rear end, can be linked with the equipment, and automatically controls the air path of the equipment. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 It is a structural schematic view of the terminal gas supply disc in the utility model embodiment.

[0014] In the drawing: 1-precision filter; 2-manual diaphragm valve; 3-flowmeter; 4-pneumatic diaphragm valve; 5-disc body. DETAILED DESCRIPTION

[0015] The technical scheme in the utility model embodiments will be clearly and completely described with reference to the drawings in the utility model embodiments, and apparently, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0016] The specific implementation of the utility model will be described in detail in combination with specific embodiments.

[0017] Please refer to Figure 1 The utility model embodiment provides a terminal gas supply disc, including disc body 5, pneumatic diaphragm valve 4 and manual diaphragm valve 2 are installed on disc body 5, one side of pneumatic diaphragm valve 4 is connected with one side of manual diaphragm valve 2, still install flowmeter 3 on disc body 5, flowmeter 3 is located between pneumatic diaphragm valve 4 and manual diaphragm valve 2, manual diaphragm valve 2 is used for manually controlling air path, flowmeter 3 is used for intelligently controlling the flow of air path, pneumatic diaphragm valve 4 is used for controlling air path switch according to equipment, and the working process of the product is as follows: after the admission of multiple air paths, open manual diaphragm valve 2, accurately control the flow of each air path through flowmeter 3, realize automatic control by the opening and closing of pneumatic diaphragm valve 4 controlled by PLC.

[0018] In one embodiment of the utility model, pneumatic diaphragm valve 4, flowmeter 3 and manual diaphragm valve 2 are installed on the disc body in a VCR welding mode, and the connection firmness can be guaranteed.

[0019] In one embodiment of the utility model, the flow meter 3 adopts a mass flow meter, is high in accuracy, and is more applicable to actual working scenes.

[0020] In one embodiment of the utility model, the disc body 5 is further provided with a precision filter 1, the multi-path gas passes through the precision filter 1 first, and then the manual diaphragm valve 2 is opened, so that the use cleanliness of the gas can be maintained.

[0021] In one embodiment of the utility model, the filtering precision of the precision filter 1 is at least 0.003 μm, the filtering effect can be guaranteed, and the CVD equipment can be continuously supplied with gas.

[0022] In one embodiment of the utility model, the precision filter 1 is installed on the disc body 5 in a VCR (Vacuum Coupling Radius Seal) welding mode, so that the connection firmness and the sealing performance can be guaranteed.

[0023] It should be noted that, in the utility model, unless otherwise explicitly specified and limited, the terms "fixed", "provided" and the like should be understood in a broad sense, for example, can be welded connection, can also be bolted connection, or integrated; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through an intermediate medium, can be the internal communication of two elements or the interaction relationship of two elements, unless otherwise explicitly limited. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0024] In addition, it should be understood that, although the present specification is described according to the embodiments, not every embodiment contains only one independent technical scheme, and the description manner of the specification is only for the sake of clarity, the skilled in the art should consider the specification as a whole, and the technical scheme in each embodiment can also be appropriately combined to form other embodiments that can be understood by the skilled in the art.

Claims

1. A terminal gas supply panel comprising a panel body, a pneumatic diaphragm valve and a manual diaphragm valve mounted on the panel body, one side of the pneumatic diaphragm valve being connected to one side of the manual diaphragm valve, characterized in that, A flow meter is also installed on the disc body, and the flow meter is located between the pneumatic diaphragm valve and the manual diaphragm valve.

2. The terminal gas panel of claim 1, wherein The pneumatic diaphragm valve, the flow meter and the manual diaphragm valve are all installed on the disc body by means of VCR welding.

3. The terminal gas panel of claim 1, wherein A precision filter is also installed on the disc body.

4. A terminal gas panel according to claim 3, wherein The precision filter has a filtering precision of at least 0.003 μm.

5. A terminal gas panel according to claim 3 or 4, c h a r a c t e r i z e d in that The precision filter is installed on the disc body by means of VCR welding.

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