Resonant cavity for high-speed growth of diamond

Abstract

The utility model relates to the field of diamond manufacturing devices, in particular to a resonant cavity for high-speed growth of diamond, which comprises a first component, a second component, a quartz cover and a microwave antenna, a reaction chamber of the resonant cavity is defined by the first part and the second part, and a deposition platform is arranged in the reaction chamber; the quartz cover is arranged at the top of the first part, the microwave antenna is arranged in the quartz cover, the quartz cover comprises a cylinder part with two open ends and an end plate arranged at the bottom of the cylinder part, and an outer space for the microwave antenna to extend into is defined between the end plate and the cylinder part; wherein the end plate is detachably connected to the bottom of the cylinder part, and the dismounting direction is the axial direction of the cylinder part; when the end plate is damaged by secondary plasma etching and needs to be replaced, only the end plate needs to be detached for replacement, the whole quartz cover does not need to be detached and replaced, the cost is saved, and operation is also facilitated.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of diamond manufacturing device, and particularly relates to a resonant cavity for high-speed growth of diamond. BACKGROUND

[0002] Microwave plasma chemical vapor deposition (MPCVD) is one of the commonly used methods for preparing diamond materials. The method mainly inputs microwaves into a resonant cavity of a device. The microwaves are reflected in the resonant cavity, and finally resonate at a deposition platform to form a microwave electric field region, so that diamond is deposited and grown at the deposition platform to obtain the required diamond material.

[0003] The resonant cavity inputs microwaves into the cavity through a microwave antenna. The microwave antenna needs to ensure that the microwaves output by the microwave antenna can enter the resonant cavity, and also needs to ensure the vacuum nature of the resonant cavity. Therefore, a quartz cover is usually arranged in the resonant cavity to isolate the microwave antenna and the internal cavity space of the resonant cavity.

[0004] However, the quartz cover is generally arranged above the deposition platform, so that the lower end surface of the quartz cover is relatively close to the deposition platform. Under the action of microwaves, a strong microwave electric field is finally formed above the deposition platform, and secondary plasma is excited in the region between the lower end surface of the quartz cover and the deposition platform. The secondary plasma can etch the lower end surface of the quartz cover, thereby easily damaging the lower end surface of the quartz cover. The quartz cover is generally integrally cast, so if the lower end surface is damaged, the entire quartz cover needs to be replaced. Therefore, there is room for improvement. CONTENT OF THE UTILITY MODEL

[0005] In order to solve at least one technical problem mentioned in the background, the purpose of the present application is to provide a resonant cavity for high-speed growth of diamond.

[0006] To achieve the above-mentioned purpose, the present application provides the following technical solutions.

[0007] A resonant cavity for high-speed growth of diamond, comprising a first component, a second component, a quartz cover, and a microwave antenna. The first component and the second component jointly form a reaction chamber of the resonant cavity, and a deposition platform is arranged in the reaction chamber. The quartz cover is arranged on the top of the first component, and the microwave antenna is arranged in the quartz cover. The quartz cover comprises a barrel portion with two open ends and an end plate arranged at the bottom of the barrel portion. An outer space for the microwave antenna to extend into is formed between the end plate and the barrel portion. The end plate is detachably connected to the bottom of the barrel portion, and the dismounting direction is along the axial direction of the barrel portion.

[0008] As an optional embodiment of the present application, a convex step is arranged inside the barrel portion, and the end plate is abutted on the convex step along the axial direction through a locking assembly.

[0009] As an optional embodiment of the present application, the locking assembly comprises a connecting seat and a screw rod, the connecting seat is arranged on the first component and is movable relative to the first component between a first position and a second position, in the first position, the connecting seat extends at least partially above the outer space for vertical screw connection of the screw rod, in the second position, the connecting seat is away from the outer space for avoiding the removal of the end plate, in the assembled state, the end plate is abutted against the convex step by the screw rod.

[0010] As an optional embodiment of the present application, the connecting seat is rotationally connected to the first component about a first axis, the first axis is parallel to the vertical direction, and the connecting seat is switched between the first position and the second position by rotation.

[0011] As an optional embodiment of the present application, the locking assembly further comprises a compression ring, the compression ring is abutted between the screw rod and the end plate.

[0012] As an optional embodiment of the present application, the force applying part of the screw rod is above the convex step.

[0013] As an optional embodiment of the present application, the convex step has a ring structure.

[0014] As an optional embodiment of the present application, a sealing ring is embedded between the convex step and the end plate.

[0015] As an optional embodiment of the present application, the inner peripheral wall of the first component has a circular arc structure.

[0016] Compared with the prior art, the present application has the following beneficial effects:

[0017] The present application forms the quartz cover by the combination of the barrel and the end plate, and the end plate is designed to be detachably connected to the barrel, so when the end plate is damaged by the secondary plasma etching and needs to be replaced, the end plate can be simply detached and replaced, without the need to disassemble and replace the entire quartz cover, thereby saving the cost and facilitating the operation.

[0018] It should be understood that the content described in this part is not intended to identify the key or important features of the embodiments of the present application, nor is it used to limit the scope of the present application. Other features of the present application will become apparent through the following description. BRIEF DESCRIPTION OF DRAWINGS

[0019] The above and other objects, features and advantages of the exemplary embodiments of the present application will be more apparent from the following detailed description taken in conjunction with the accompanying drawings, in which:

[0020] In the drawings, identical or corresponding reference signs refer to identical or corresponding parts.

[0021] Figure 1 is a structural schematic diagram of the present application;

[0022] Figure 2 is Figure 1 is an enlarged view of part A in the figure;

[0023] Figure 3 is a top view of the quartz cover of the present application (the connecting seat is in the first position state);

[0024] Figure 4 is a top view of the quartz cover of the present application (the connecting seat is in the second position state).

[0025] Explanation of figure labels:

[0026] 1, first component; 10, reaction chamber; 11, external support;

[0027] 2, second component; 21, deposition platform;

[0028] 3, quartz cover; 30, outer space; 31, barrel part; 311, convex step; 32, end plate;

[0029] 4, microwave antenna;

[0030] 5, locking assembly; 51, connecting seat; 52, screw rod; 53, rotating shaft; 54, compression ring;

[0031] 6, sealing ring. DETAILED DESCRIPTION

[0032] In order to make the purpose, features and advantages of the present application more obvious and easy to understand, the technical solutions in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0033] participate Figures 1-4 As shown, the present embodiment provides a resonant cavity for high-speed growth of diamond, which comprises a first component 1, a second component 2, a quartz cover 3, and a microwave antenna 4, wherein the microwave antenna 4 is mainly used for outputting microwaves. The microwave antenna 4 is fixed through an external support 11, wherein the microwave antenna 4 is installed on the external support 11 in a detachable manner (for example, in a bolted manner).

[0034] The first component 1 is arranged on top of the second component 2, and the first component 1 and the second component 2 jointly form a reaction chamber 10 of a resonance cavity, and a diamond deposition reaction process is performed in the reaction chamber 10, wherein a deposition platform 21 is arranged in the reaction chamber 10.

[0035] The quartz cover 3 is arranged on top of the first component 1 and extends to the inside of the first component 1, and the microwave antenna 4 is arranged in the quartz cover 3. In operation, the microwave antenna 4 outputs microwaves to the reaction chamber 10 through the quartz cover 3, and the microwaves entering the reaction chamber 10 are reflected between the inner side walls of the first chamber to form a microwave electric field at the deposition platform 21 to achieve subsequent diamond deposition.

[0036] In some embodiments, in order to enable the microwaves to be accumulated to a greater extent near the deposition platform 21, the inner peripheral wall of the first component 1 is designed as a circular arc structure, at this time, the inner peripheral wall of the first component 1 is equivalent to a concave mirror, so that the microwaves are reflected as much as possible to the vicinity of the deposition platform 21 to improve the diamond elongation efficiency.

[0037] In the present embodiment, the quartz cover 3 is arranged on top of the first component 1 and extends to the inside of the first component 1, and the microwave antenna 4 is arranged in the quartz cover 3. In operation, the microwave antenna 4 outputs microwaves to the reaction chamber 10 through the quartz cover 3, and the microwaves entering the reaction chamber 10 are reflected between the inner side walls of the first chamber to form a microwave electric field at the deposition platform 21 to achieve subsequent diamond deposition. Figure 2 As shown, the quartz cover 3 includes a barrel portion 31 and an end plate 32. The barrel portion 31 is in a columnar structure, preferably a cylindrical structure, and is open at both ends. The end plate 32 is arranged at the bottom of the barrel portion 31 to cover the lower end of the barrel portion 31. The end plate 32 and the barrel portion 31 jointly form an outer space 30 for the microwave antenna 4 to extend into. At this time, the barrel portion 31 is equivalent to the peripheral wall of the quartz cover 3, and the end plate 32 is equivalent to the bottom wall of the quartz cover 3. It can be understood that the barrel portion 31 and the end plate 32 are both made of quartz. The first component 1 and the second component 2 can be made of metal, such as stainless steel, aluminum, etc.

[0038] In addition, the end plate 32 is detachably connected to the bottom of the barrel portion 31, and the detachment direction is along the axial direction of the barrel portion 31, that is, the end plate 32 can be pulled out of the barrel portion 31 along the axial direction to achieve detachment. It is worth noting that the axial direction in the present embodiment can also be understood as the vertical direction.

[0039] At this time, the bottom surface of the quartz cover 3 composed of the end plate 32 is close to the deposition platform 21, so when the end plate 32 needs to be replaced due to damage caused by secondary plasma etching below, the connection between the end plate 32 and the barrel portion 31 can be released, and then the end plate 32 is pulled out upward from the barrel portion 31 along the axial direction to be replaced, so the entire quartz cover 3 does not need to be replaced.

[0040] In order to achieve the axial detachable connection between the end plate 32 and the barrel portion 31, in some embodiments, a convex step 311 is arranged inside the barrel portion 31. Preferably, the convex step 311 is in an annular structure and surrounds the inner peripheral wall of the barrel portion 31 once. The end plate 32 is abutted against the convex step 311 along the axial direction by a locking assembly 5.

[0041] The locking assembly 5 comprises a connecting seat 51 and a screw rod 52, the connecting seat 51 is arranged on the top outer side of the first part 1, and the connecting seat 51 is movable relative to the first part 1 between a first position and a second position.

[0042] In some embodiments, the connecting seat 51 is rotatably movable between the first position and the second position, specifically, the connecting seat 51 is rotatably connected to the first part 1 about a first axis, for example, a vertical rotating shaft 53 is fixed on the first part 1, and one end of the connecting seat 51 is rotatably connected to the rotating shaft 53, and the central axis of the rotating shaft 53 constitutes the first axis. The first axis is parallel to the vertical direction.

[0043] In the first position, as shown in Figure 2 and Figure 3 , the connecting seat 51 at least partially extends above the outer space 30 for vertical threaded connection of the screw rod 52, that is, the screw rod 52 is vertically extended and is threaded on the part of the connecting seat 51 extending to the upper side of the outer space 30.

[0044] In the second position, as shown in Figure 4 , the connecting seat 51 is away from the outer space 30 to avoid the removal of the end plate 32, in other words, in the second position, the connecting seat 51 does not form an obstruction on the upper end side of the outer space 30, so as to ensure that when the end plate 32 needs to be removed, the presence of the connecting seat 51 does not interfere with the upward extraction of the end plate 32 from the barrel part 31.

[0045] In the assembled state of the quartz cover 3, the end plate 32 is abutted on the convex step 311 by the screw rod 52, that is, the screw rod 52 abuts the end plate 32 downward on the convex step 311.

[0046] In order to improve the pressing effect on the end plate 32, in some embodiments, as shown in Figure 2 , the locking assembly 5 further comprises a pressing ring 54, the pressing ring 54 is abutted between the screw rod 52 and the end plate 32, that is, the pressing ring 54 is pressed downward by the screw rod 52, and then the end plate 32 is pressed on the convex step 311 by the pressing ring 54.

[0047] In addition, the force application part of the screw rod 52 is directly above the convex step 311, so the direct force application area of the screw rod 52 is directly above the convex step 311, and in this position, the end plate 32 is directly supported by the convex step 311, so the damage of the screw rod 52 to the end plate 32 can be reduced.

[0048] In addition, in order to ensure the sealing performance of the abutment between the end plate 32 and the convex step 311, in some embodiments, a sealing ring 6 is embedded between the convex step 311 and the end plate 32.

[0049] When the end plate 32 needs to be replaced, first, the microwave antenna 4 is detached from the external support 11, then the screw rod 52 is rotated and extracted from the connecting seat 51 to release the pressing force of the screw rod 52 on the end plate 32; then the connecting seat 51 is turned to the second position, so that the connecting seat 51 forms an avoidance on the upper end of the outer space 30, then the end plate 32 can be extracted upward from the barrel portion 31 to be replaced.

[0050] It should be understood that the various forms of flow shown above can be used to reorder, add or delete steps. For example, each step described in the present application can be executed in parallel, sequentially or in a different order, as long as the desired results of the technical solutions disclosed in the present application can be achieved, which is not limited herein.

[0051] In addition, the terms "first", "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Therefore, the features defined with "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise specifically limited.

[0052] The above is only a specific embodiment of the present application, but the protection scope of the present application is not limited thereto, any person skilled in the art can easily think of changes or replacements within the technical range disclosed in the present application, which should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A resonant chamber for high speed growth of diamond, comprising a first part, a second part, a quartz cover, and a microwave antenna; the first part and the second part enclosing a reaction chamber of the resonant chamber, a deposition platform being provided in the reaction chamber; the quartz cover being provided on top of the first part, and the microwave antenna being provided in the quartz cover, characterized in that, The quartz cover comprises a barrel part with two open ends, and an end plate arranged at the bottom of the barrel part, and an outer space for the microwave antenna to extend into is formed between the end plate and the barrel part; wherein the end plate is detachably connected at the bottom of the barrel part, and the dismounting direction is along the axial direction of the barrel part.

2. The resonant chamber for high velocity growth of diamond according to claim 1, wherein, A convex step is arranged inside the barrel part, and the end plate is abutted against the convex step along the axial direction by a locking assembly.

3. A resonant chamber for high velocity growth of diamond as claimed in claim 2, wherein, The locking assembly comprises a connecting seat and a screw rod, the connecting seat is arranged on the first part and can move relative to the first part between a first position and a second position, in the first position, the connecting seat at least partially extends above the outer space for the screw rod to be vertically screwed, in the second position, the connecting seat is away from the outer space to avoid the removal of the end plate, and in the assembled state, the end plate is abutted against the convex step by the screw rod.

4. A resonant chamber for high velocity growth of diamond as claimed in claim 3, wherein, The connecting seat is rotationally connected to the first part around a first axis, the first axis is parallel to the vertical direction, and the connecting seat is switched between the first position and the second position by rotation.

5. A resonant chamber for high velocity growth of diamond as claimed in claim 3, wherein, The locking assembly further comprises a pressing ring, which is abutted between the screw rod and the end plate.

6. A resonant chamber for high velocity growth of diamond as claimed in claim 3, wherein, The force applying part of the screw rod is above the convex step.

7. The resonant chamber for high velocity growth of diamond according to claim 2, wherein, The convex step is in a ring structure.

8. The resonant chamber for high velocity growth of diamond according to claim 6, wherein, A sealing ring is embedded between the convex step and the end plate.

9. The resonant chamber for high velocity growth of diamond according to claim 1, wherein, The inner circumferential wall of the first part is in a circular arc structure.

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