Device for testing acid-base substance eluate in organic film

Abstract

The utility model discloses a device for testing acid-base substance eluate in an organic membrane, which comprises a workbench, a support plate is fixedly mounted in the middle of the workbench, a mounting plate is fixedly mounted on the surface of one side of the support plate, and a plurality of groups of runner pipes arranged at equal intervals along the length are fixedly mounted on the surface of the mounting plate. The flow channel pipes are arranged along the length of the mounting plate at equal intervals, test ports are formed in the surfaces of the upper sides of the flow channel pipes, one end of each flow channel pipe downwards winds and is communicated with a water containing box, and the water containing boxes are placed at the top of the workbench. According to the invention, a plurality of flow channel pipes are arranged, so that relatively consistent solution flowing states and environmental conditions can be obtained at the test ports at different positions, and the accuracy and comparability of data when interaction between a wafer and a solution is tested at each test point can be ensured; and the wafer can be conveniently and accurately placed at a corresponding position for targeted testing.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing testing equipment technology, specifically a device for testing acidic and alkaline substances precipitated from organic membranes. Background Technology

[0002] In semiconductor photolithography, multiple complex processes are required to form the patterns needed for circuits, including multiple coating, exposure, development, and etching steps. During photolithography, organic films need to be coated on the wafer surface. These organic films, depending on their function, include photoresist, anti-reflective films, and hard masks. During the preparation of organic films, alkaline or acidic substances are used. These substances can precipitate onto the surface of the organic film, thus affecting its optical properties.

[0003] There is a need to research and design an efficient and accurate testing device to evaluate the precipitation of acidic and basic substances in organic membranes. Utility Model Content

[0004] The purpose of this invention is to provide a device for testing the precipitation of acidic and alkaline substances in organic membranes, in order to solve the problem mentioned in the background art that the precipitation of acidic and alkaline substances in organic membranes affects the optical properties of organic membranes. Therefore, an efficient and accurate testing device is needed to evaluate the precipitation of acidic and alkaline substances in organic membranes.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] An apparatus for testing the precipitate of acidic and alkaline substances in an organic membrane includes a workbench. A support plate is fixedly installed in the middle of the workbench. An mounting plate is fixedly installed on one side surface of the support plate. Several sets of flow channels arranged equidistantly along their length are fixedly installed on the surface of the mounting plate. Each flow channel has a test port on its upper surface. One end of each flow channel bends downward and connects to a water container, which is placed on top of the workbench. The other end of each flow channel is connected to a pumping assembly for delivering a solution into the flow channel. A moving assembly for moving a wafer coated with an organic membrane into the test port is provided on the surface of the mounting plate. A sampling assembly for sampling the solution in the flow channel is provided at the upper bend of the flow channel. An analysis assembly for analyzing the sample is provided on the top side of one side of the workbench.

[0007] Preferably, the moving component includes support columns fixedly installed on the top of both sides of the mounting plate. A set of mounting strips is slidably sleeved on the surface of the two sets of support columns. Sliding strips are slidably inserted into the surface of the mounting strips at positions corresponding to each set of test ports. Fixing members for fixing the sliding strips are provided on the front side of the mounting strips at positions corresponding to each set of sliding strips. A suction cup for adsorbing wafers is fixedly connected to the bottom of each sliding strip.

[0008] Preferably, the pumping assembly comprises conveying pumps mounted on the top of one side of the workbench and corresponding to the positions of each group of flow channel pipes, a water tank is fixedly mounted on the bottom of the one side of the workbench, the input ends of the conveying pumps are all communicated with connecting pipes, the other ends of the connecting pipes are communicated with the water tank, the output ends of the conveying pumps are all communicated with communicating pipes, the other ends of the communicating pipes are respectively communicated with the flow channel pipes corresponding to the positions, and one side surface of the water tank is communicated with a water inlet pipe.

[0009] Preferably, the sampling assembly comprises plug-in pipes communicated with the upside bending positions of each group of flow channel pipes, the inner cavities of the plug-in pipes are all plugged with samplers, and the sampling ends of the samplers extend to the interiors of the flow channel pipes.

[0010] Preferably, the analyzing assembly comprises an analysis instrument fixedly mounted on the top of the workbench.

[0011] Preferably, the fixing members comprise hand screws screwed on the front side of the mounting strip and corresponding to the positions of each group of sliding strips, and one end of each hand screw abuts against the surface of the sliding strip corresponding to the position.

[0012] Preferably, one side of the sliding strip is provided with a groove, and the groove is provided with a scale line.

[0013] Preferably, the top of the sliding strip is fixedly connected with a pull ring.

[0014] Preferably, the middle parts and the top parts of the two groups of supporting columns are all fixedly mounted with limiting discs.

[0015] Preferably, the middle part of the communicating pipe is provided with a valve.

[0016] Compared with the prior art, the utility model has the advantages that:

[0017] 1、The utility model discloses a flow channel pipe is set, and the flow channel pipe is equidistant along the length of the mounting plate, so that the solution flow state and environmental condition can be obtained at the test port of different positions, and the data accuracy and comparability when testing the interaction between the wafer and the solution at each test point are helped to guarantee, and the upside surface of each flow channel pipe is provided with a test port, the wafer is accurately placed to the corresponding position for targeted test, and a plurality of tests can be carried out at different flow channel pipe positions through a plurality of test ports, and more comprehensive test data is obtained, and the components are arranged on the workbench and the mounting plate, and the operation personnel is more convenient when carrying out each operation, and the state change of each part in the whole test process is convenient for observing, and it is favorable for discovering and handling possible problems in time.

[0018] 2. The utility model discloses a support column is provided with stable support and sliding rail for installation strip through the setting of mobile assembly, makes installation strip can slide flexibly in the length direction perpendicular to flow channel pipe, and the sliding strip corresponding with every test mouth on installation strip can slide in installation strip, cooperates fixed part, can realize the accurate adjustment and fixed position of sliding strip, makes the wafer that bottom sucking disc adsorbs can be positioned accurately above test mouth simultaneously, satisfies different test demand.

[0019] 3. The utility model discloses the setting of fixed part, tightens hand twist bolt, and one end abuts at sliding strip surface, can effectively prevent sliding strip from happening displacement in the test process because of vibration or other external force factor, guarantees the position stability of wafer above test mouth, ensures the accuracy and reliability of test result. DRAWINGS

[0020] Figure 1 It is the structural schematic diagram of the device of the utility model's organic membrane acid-base substance precipitation liquid test;

[0021] Figure 2 It is the structural schematic diagram of another view of the device of the utility model's organic membrane acid-base substance precipitation liquid test;

[0022] Figure 3 It is the structural schematic diagram of flow channel pipe of the utility model;

[0023] Figure 4 It is the structural schematic diagram of sliding strip of the utility model.

[0024] In the drawing: 100, workbench;101, support plate;102, installation plate;103, analysis instrument;200, water tank;201, inlet pipe;202, water containing box;300, flow channel pipe;301, plug-in pipe;302, sampler;303, communication pipe;305, valve;306, delivery pump;307, connecting pipe;308, test mouth;400, limit disc;401, installation strip;402, support column;403, hand twist bolt;404, sucking disc;405, sliding strip;407, pull ring;408, recess;409, scale line. DETAILED DESCRIPTION

[0025] The technical scheme in the embodiments of the utility model will be described clearly and completely below in conjunction with the drawings in the embodiments of the utility model, and obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the person skilled in the art without creative labor belong to the protection scope of the utility model.

[0026] Please refer to Figures 1-4The embodiment provides a device for testing organic film in acid and alkaline substance precipitation solution, which comprises a workbench 100, a supporting plate 101 fixedly installed in the middle of the workbench 100, an installation plate 102 fixedly installed on one side surface of the supporting plate 101, a plurality of groups of flow channel pipes 300 fixedly installed on the surface of the installation plate 102 and equidistantly arranged along the length, a test port 308 formed in the upper side surface of each flow channel pipe 300, a water containing box 202 communicated with one end of the flow channel pipe 300 and winding downward, the water containing box 202 being placed on the top of the workbench 100, a pumping assembly communicated with the other end of the flow channel pipe 300 and used for conveying solution into the flow channel pipe 300, a moving assembly arranged on the surface of the installation plate 102 and used for moving a wafer coated with an organic film into the test port 308, a sampling assembly arranged at the upper side bending part of the flow channel pipe 300 and used for sampling solution in the flow channel pipe 300, and an analysis assembly arranged on the top of one side of the workbench 100 and used for analyzing the sampling product. Through the arrangement of the flow channel pipe 300, the flow channel pipe 300 is equidistantly arranged along the length of the installation plate 102, so that the solution flow state and the environmental condition at different positions of the test port 308 can be relatively consistent, the data accuracy and comparability when the wafer and the solution interaction are tested at each test point can be ensured, the test port 308 is formed in the upper side surface of each flow channel pipe 300, the wafer can be accurately placed in the corresponding position for targeted testing, a plurality of tests can be carried out at different positions of the flow channel pipe 300 through the plurality of test ports 308, more comprehensive test data can be obtained, and the components are relatively concentrated and orderly arranged on the workbench 100 and the installation plate 102, so that the operator can be more convenient when performing each operation, the state change of each part in the whole test process can be observed, and problems that can occur can be found and handled in time.

[0027] Further, the moving assembly comprises supporting columns 402 fixedly installed on the top of both sides of the installation plate 102, a group of installation strips 401 slidably sleeved on the surface of the two groups of supporting columns 402, a sliding strip 405 slidably inserted into the surface of the installation strip 401 and located at a position corresponding to each group of test ports 308, a fixing piece arranged on the front side of the installation strip 401 and corresponding to each group of sliding strips 405 and used for fixing the sliding strip 405, and a suction disc 404 fixedly connected to the bottom of the sliding strip 405 and used for adsorbing the wafer. Through the arrangement of the moving assembly, the supporting columns 402 installed on the top of both sides of the installation plate 102 provide stable support and sliding tracks for the installation strip 401, so that the installation strip 401 can be flexibly slid in the length direction perpendicular to the flow channel pipe 300, the sliding strip 405 corresponding to each test port 308 on the installation strip 401 can slide in the installation strip 401, the position of the sliding strip 405 can be accurately adjusted and fixed through cooperation of the fixing piece, the wafer adsorbed by the suction disc 404 on the bottom can be accurately positioned above the test port 308, and different test requirements can be met.

[0028] Further, the pumping assembly comprises delivery pumps 306 installed on the top of one side of the workbench 100 and corresponding to each group of the flow channel pipes 300, a water tank 200 is fixedly installed on the bottom of one side of the workbench 100, the input ends of the delivery pumps 306 are all communicated with connecting pipes 307, the other ends of the connecting pipes 307 are communicated with the water tank 200, the output ends of the delivery pumps 306 are all communicated with communicating pipes 303, the other ends of the communicating pipes 303 are respectively communicated with the flow channel pipes 300 corresponding to the positions, one side surface of the water tank 200 is communicated with a water inlet pipe 201, wherein the delivery pumps 306 are microinjector pumps, through the setting of the pumping assembly, each flow channel pipe 300 is provided with a corresponding delivery pump 306, so that each flow channel pipe 300 can be independently provided with stable solution supply, the solution flow states in each flow channel pipe 300 are consistent, and experimental errors are reduced.

[0029] Preferably, the sampling assembly comprises plug-in pipes 301 communicated with the upper side bending positions of each group of the flow channel pipes 300, the inner cavities of the plug-in pipes 301 are all plugged with samplers 302, the sampling ends of the samplers 302 extend to the interiors of the flow channel pipes 300, through the setting of the sampling assembly, the upper side bending positions of the flow channel pipes 300 are communicated with the plug-in pipes 301, and the samplers 302 are plugged in the inner cavities of the plug-in pipes 301, so that the sampling ends of the samplers 302 extend to the interiors of the flow channel pipes 300, and solution samples can be accurately obtained when the solution flows through the positions.

[0030] Remarkably, the analysis assembly comprises an analysis instrument 103 fixedly installed on the top of the workbench 100, wherein the analysis instrument 103 is a mass spectrometer, which can perform qualitative and quantitative analysis on compounds, and can provide information about molecular structure and molecular weight of the compounds by ionizing the compounds and separating and detecting them according to mass-to-charge ratio. Since the use process and working principle of the mass spectrometer are prior art and are well known to those skilled in the art, they will not be described here.

[0031] Further, the fixing member comprises hand screws 403 threadedly connected to the front side of the mounting strip 401 and corresponding to each group of the sliding strips 405, one ends of the hand screws 403 respectively abut against the surfaces of the sliding strips 405 corresponding to the positions, through the setting of the fixing member, the hand screws 403 are tightened, and one ends thereof abut against the surfaces of the sliding strips 405, so that the sliding strips 405 can be effectively prevented from being displaced due to vibration or other external factors during the test, the position stability of the wafer above the test port 308 is ensured, and the accuracy and reliability of the test results are ensured.

[0032] Preferably, one side of the sliding bar 405 is provided with a groove 408, and the groove 408 is provided with a scale line 409. Through the arrangement of the scale line 409, the operator can accurately move the sliding bar 405 to the specified position according to the scale line 409, so as to realize high-precision positioning of the wafer above the test port 308.

[0033] Further, the top of the sliding bar 405 is fixedly connected with a pull ring 407. Through the arrangement of the pull ring 407, when the sliding bar 405 is moved to adjust the position of the wafer, the pull ring 407 provides a convenient force point, so that the operator can easily pull or push the sliding bar 405, reduces the operation difficulty, and improves the operation efficiency.

[0034] Further, the middle and top of the two groups of support columns 402 are fixedly installed with a limiting disc 400, and the mounting bar 401 is sleeved on the support column 402 and can slide. The limiting disc 400 can effectively prevent the mounting bar 401 from moving excessively upward or downward during sliding.

[0035] Preferably, the middle of the communication pipe 303 is provided with a valve 305. Through the arrangement of the valve 305, the flow of the solution can be flexibly adjusted to meet the requirements of the solution flow in different test scenes.

[0036] Working principle

[0037] First, the solution is injected into the water tank 200 through the water inlet pipe 201. Then, the hand screw bolt 403 is loosened, the sliding bar 405 is pulled upward, the wafer is adsorbed on the surface of the suction disc 404, and the organic film is coated on the surface of the wafer. When the coating is completed, the hand screw bolt 403 is tightened, and the mounting bar 401 is pushed downward, so that the wafer is immersed in the test port 308.

[0038] At this time, the delivery pump 306 is started, the solution in the water tank 200 is delivered into the delivery pump 306 through the connecting pipe 307, and the delivery pump 306 is pumped into the flow channel pipe 300 through the communication pipe 303, so that the solution flows through the wafer, and then flows out from the other end of the flow channel pipe 300 and flows into the water tank 202.

[0039] The plug-in pipe 301 of the sampling assembly is communicated at the upper side bending position of the flow channel pipe 300. The sampler 302 is inserted into the inner cavity of the plug-in pipe 301, and the sampling end extends into the inner part of the flow channel pipe 300. The operation end of the sampler 302 is pinched to adsorb the solution into the sampler 302. The sample taken is placed in the analysis instrument 103 for analysis of the solution.

[0040] Although the embodiments of the present application have been shown and described, it is to be understood that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present application, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An apparatus for testing the precipitate of acidic and alkaline substances in an organic membrane, characterized in that, The system includes a workbench (100), a support plate (101) fixedly mounted in the middle of the workbench (100), an mounting plate (102) fixedly mounted on one side surface of the support plate (101), and several sets of flow channel pipes (300) arranged equidistantly along the length fixedly mounted on the surface of the mounting plate (102). Each flow channel pipe (300) has a test port (308) on its upper surface. One end of each flow channel pipe (300) meanders downwards and connects to a water container (202). The wafer with the organic film coated on it is placed on the top of the workbench (100). The other end of the flow channel tube (300) is connected to a pumping assembly for conveying the solution into the flow channel tube (300). The surface of the mounting plate (102) is provided with a moving assembly for moving the wafer with the organic film coated on it into the test port (308). The upper bend of the flow channel tube (300) is provided with a sampling assembly for sampling the solution in the flow channel tube (300). The top of one side of the workbench (100) is provided with an analysis assembly for analyzing the sample.

2. The device for testing the elution of acidic or basic substances in an organic film according to claim 1, characterized in that; The moving component includes support columns (402) fixedly installed on the top of both sides of the mounting plate (102). A set of mounting strips (401) are slidably sleeved on the surface of the two sets of support columns (402). A sliding strip (405) is slidably inserted on the surface of the mounting strip (401) at the position corresponding to each set of test ports (308). A fixing member for fixing the sliding strip (405) is provided on the front side of the mounting strip (401) at the position corresponding to each set of sliding strips (405). A suction cup (404) for adsorbing wafers is fixedly connected to the bottom of each sliding strip (405).

3. The device for testing the elution of acidic or basic substances in an organic film according to claim 1, characterized in that: The pumping assembly includes a delivery pump (306) installed on the top side of the workbench (100) and at a position corresponding to each set of flow channel pipes (300). A water tank (200) is fixedly installed on the bottom side of the workbench (100). The input end of each delivery pump (306) is connected to a connecting pipe (307). The other end of the connecting pipe (307) is connected to the water tank (200). The output end of each delivery pump (306) is connected to a connecting pipe (303). The other end of the connecting pipe (303) is connected to the corresponding flow channel pipe (300). A water inlet pipe (201) is connected to one side surface of the water tank (200).

4. The device for testing the elution of acidic or basic substances in an organic film according to claim 1, characterized in that: The sampling assembly includes a connector (301) connected to the upper bend of each flow channel (300), and a sampler (302) is inserted into the inner cavity of each connector (301), with the sampling end of the sampler (302) extending into the interior of the flow channel (300).

5. The device for testing the elution of acidic or basic substances in an organic film according to claim 1, characterized in that: The analytical components include an analytical instrument (103) fixedly mounted on the top of the workbench (100).

6. The device for testing the elution of acidic or basic substances in an organic film according to claim 2, characterized in that: The fastener includes a hand-tightening bolt (403) threaded to the front side of the mounting strip (401) and corresponding to each set of sliding strips, one end of the hand-tightening bolt (403) abutting against the surface of the corresponding sliding strip (405).

7. The device for testing the elution of acidic or basic substances in an organic film according to claim 6, characterized in that: One side of the sliding bar (405) is provided with a groove (408), and the groove (408) is provided with a scale line (409).

8. The device for testing the elution of acidic or basic substances in an organic film according to claim 7, characterized in that: The top of the sliding bar (405) is fixedly connected with a pull ring (407).

9. The device for testing the elution of acidic or basic substances in an organic film according to claim 2, characterized in that: The middle and top of the two groups of support columns (402) are fixedly installed with a limiting disc (400).

10. The device for testing the elution of acidic or basic substances in an organic film according to claim 3, characterized in that: The middle of the communication pipe (303) is provided with a valve (305).

Images