Five-dimensional adjusting device for vacuum system

Abstract

The utility model discloses a five-dimensional adjusting device for a vacuum system, which comprises a first displacement module, a second displacement module, a third displacement module, a rotating module and a mounting flange, the first displacement module can move along a first direction, the second displacement module is connected to the first displacement module and can move along a second direction, and the third displacement module is connected to the rotating module. Wherein the second direction is perpendicular to the first direction, the third displacement module is connected to the second displacement module and can move along the third direction, the third direction is perpendicular to the first direction and the second direction, and the rotating module is connected to the third displacement module and can rotate around the first direction and the third direction. The mounting flange comprises a first part and a second part which are perpendicular to each other, the first part is arranged perpendicular to the first direction, and the second part is connected to the rotating module and used for mounting a sample to be adjusted. The five-dimensional adjusting device can accurately adjust displacement of a sample in X-axis, Y-axis and Z-axis directions and rotation angles in two out-of-plane directions, and can be applied to a vacuum system.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum device technical field, especially a five -dimensional adjusting device for vacuum system. BACKGROUND

[0002] In optical systems, in order to ensure that the sample can be accurately aligned with the optical system, thereby meeting the needs of experiment or measurement, it is usually necessary to finely adjust the position and angle of the sample. The adjustment of the sample mainly includes: by adjusting the position of the sample in three-dimensional space, ensure that the sample is in the focal point or measurement area of the optical system, thereby obtaining clear imaging or accurate measurement results, and by adjusting the inclination angle of the sample, ensure that the sample surface is perpendicular to the optical axis or reach the required angle, avoid the deviation of light path or imaging distortion caused by inclination. By accurately adjusting the position and angle of the sample, the collection efficiency of optical signals such as reflected light, transmitted light or fluorescence can be maximized, and the sensitivity and accuracy of the experiment can be improved. In addition, accurate adjustment can reduce the experimental error caused by deviation of sample position or angle, and improve the repeatability and reliability of the experiment.

[0003] However, the existing sample adjustment device is often difficult to realize the precise adjustment of five degrees of freedom at the same time, and most of the adjustment devices are designed for atmospheric environment, which is difficult to meet the requirements of vacuum optical system. UTILITY MODEL CONTENTS

[0004] In view of part or all of the problems in the prior art, the utility model provides a five-dimensional adjusting device for vacuum system, comprising:

[0005] The first displacement module can move along the first direction;

[0006] The second displacement module is connected to the first displacement module and can move along the second direction, wherein the second direction is perpendicular to the first direction;

[0007] The third displacement module is connected to the second displacement module and can move along the third direction, wherein the third direction is perpendicular to the first direction and the second direction;

[0008] The rotating module is connected to the third displacement module and can rotate around the first direction and the third direction; And

[0009] The mounting flange comprises a first part and a second part perpendicular to each other, wherein the first part is arranged perpendicular to the first direction, and the second part is connected to the rotating module, and the mounting flange is used for mounting the sample to be adjusted.

[0010] Further, the first displacement module comprises:

[0011] a first direction motion plate, which is arranged between the upper and lower limit plates and is provided with at least one first, second and third through holes in the first direction;

[0012] a guide rod, which is fixed at both ends to the upper and lower limit plates and passes through the first through hole;

[0013] a driven screw rod, which is fixed at a first end to the upper limit plate and connected at a second end to a driven gear after passing through the second through hole and the lower limit plate;

[0014] a screw nut, which is arranged on the driven screw rod and engaged with the driven screw rod, and is fixed to the first direction motion plate;

[0015] a driven gear, which is fixed to the second end of the driven screw rod;

[0016] a driving gear, which is engaged with the driven gear;

[0017] an operating hand wheel, which is connected to the driving gear through a driving shaft to drive the driving gear to rotate.

[0018] Further, the first displacement module further comprises:

[0019] a lubricating bushing, which is sleeved on the guide rod and located between the upper limit plate and the first direction motion plate.

[0020] Further, the second displacement module comprises:

[0021] a second direction motion plate, which is arranged below the first direction motion plate and comprises a first cavity formed by four edge frames, the lower surface of the first direction motion plate comprises at least one first fixing piece, the first fixing piece is attached to the inner surface of the first cavity, and the four edge frames comprise:

[0022] a first edge frame, which is parallel to the second direction and arranged on the side of the second direction motion plate away from the driven screw rod, and is provided with a first connecting block and a third direction limiting block, wherein the first connecting block is arranged at one end of the first edge frame close to the second edge frame, the upper surface of the first connecting block is flush with the first direction motion plate, and the lower surface of the third direction limiting block is not higher than the lower surface of the third displacement module;

[0023] a second edge frame, which is connected perpendicularly to the first edge frame and is provided with a second direction limiting block and a second connecting block, wherein the upper surface of the second direction limiting block is flush with the upper surface of the first direction motion plate, and the lower surface of the second connecting block is not higher than the lower surface of the third displacement module;

[0024] The first direction movement plate is flush, and the second connecting block is arranged on the lower surface of the second frame and extends outward along the second direction;

[0025] A third frame is arranged relative to the first frame; and

[0026] A fourth frame is arranged relative to the second frame, and a third connecting block is arranged on the fourth frame, wherein the third connecting block is arranged on the lower surface of the fourth frame and extends outward along the second direction;

[0027] Second direction guide shafts are respectively connected to the second frame and the fourth frame through the first fixed plate at both ends;

[0028] Second direction linear bearings are fixed on the first fixed plate and sleeved on both ends of the second direction guide shafts;

[0029] First ceramic balls are fixed on one side surface of the first direction movement plate close to the second direction limiting block and / or on the second direction movement plate;

[0030] A first micrometer head is arranged on the first ceramic ball through the second direction limiting block; and

[0031] A first tension spring is arranged parallel to the second direction, and both ends of the first tension spring are respectively connected to the first connecting block and the first direction movement plate.

[0032] Further, the third displacement module comprises:

[0033] A third direction movement plate is arranged below the second direction movement plate and comprises:

[0034] A fourth through hole along the first direction is arranged at the center of the third direction movement plate;

[0035] Protrusions are arranged at four corners of the third direction movement plate, wherein the two protrusions on the first side are respectively connected to the second connecting block and the third connecting block, and the two protrusions on the second side opposite to the first side are respectively attached to the second fixed plate arranged on the lower surface of the second direction movement plate, wherein the first side refers to the side parallel to the second direction and away from the driven lead screw;

[0036] Fourth connecting blocks are arranged at both ends of the second side of the third direction movement plate;

[0037] Third direction guide shafts are connected to the third direction movement plate through the second fixed plate at the first end and through the second connecting block or the third connecting block at the second end;

[0038] a third direction linear bearing fixed on the second fixed plate and / or the second connecting block and / or the third connecting block, and sleeved on the end of the third direction guide shaft;

[0039] a second ceramic ball fixed on the first side surface of the third direction movement plate;

[0040] a second micrometer head penetrating the third direction limiting block to the second ceramic ball; and

[0041] a second tension spring parallel to the third direction, and having two ends respectively connected to the fourth connecting block and the second connecting block or the third connecting block.

[0042] Further, the first ceramic ball is bonded on the first direction movement plate; and / or

[0043] the second ceramic ball is bonded on the third direction movement plate.

[0044] Further, the rotation module comprises:

[0045] a rotation angle adjusting plate having a first edge fixed on the third direction movement plate, a second edge and a third edge perpendicular to the first edge, and rotation angle limiting blocks arranged on the second edge and the third edge, and the edge of the second part of the mounting flange being arranged in the limiting groove of the rotation angle limiting blocks, wherein the first edge is parallel to the third direction and close to the side of the second direction movement plate;

[0046] at least one third tension spring arranged between the rotation angle adjusting plate and the second part of the mounting flange;

[0047] a ceramic ball arranged between the rotation angle adjusting plate and the second part of the mounting flange, and located on the side of the second edge of the rotation angle adjusting plate opposite to the first edge and close to the operating hand wheel, and the rotation angle adjusting plate and the second part of the mounting flange are both provided with grooves matched with the ceramic ball;

[0048] a third micrometer head penetrating the rotation angle adjusting plate and connected to the second part of the mounting flange, and located on the side of the first edge of the rotation angle adjusting plate close to the operating hand wheel;

[0049] a fourth micrometer head penetrating the rotation angle adjusting plate and connected to the second part of the mounting flange, and located on the side of the second edge of the rotation angle adjusting plate opposite to the first edge and away from the operating hand wheel; and

[0050] locking bolts arranged at the third micrometer head and the fourth micrometer head respectively, for locking after the angle adjustment is completed.

[0051] Further, the five-dimensional adjustment device further comprises:

[0052] A base flange is fixed at an opening of a target vacuum chamber for docking the target vacuum chamber, and the base flange is flexibly connected with the mounting flange.

[0053] Further, the mounting flange is connected with the base flange through a vacuum welding bellows which passes through the third through hole, the first cavity and the fourth through hole.

[0054] Further, at least one compression spring is arranged between the first part of the mounting flange and the third direction motion plate.

[0055] The five-dimensional adjusting device for a vacuum system can accurately adjust the displacement of the X-axis, Y-axis and Z-axis of a sample and the rotation angle of two out-of-plane directions, and can be applied to a vacuum system. BRIEF DESCRIPTION OF DRAWINGS

[0056] To further clarify the above and other advantages and features of the embodiments of the present application, a more particular description of embodiments of the application will be rendered by reference to specific drawings. It is appreciated that these drawings depict only typical embodiments of the application and are therefore not to be considered limiting of its scope. The drawings will be described with additional detail as follows. In the drawings:

[0057] Figure 1 FIG. 1 shows a structure schematic diagram of a five-dimensional adjusting device for a vacuum system according to an embodiment of the present application;

[0058] Figure 2 FIG. 2 shows a structure schematic diagram of a first displacement module of a five-dimensional adjusting device for a vacuum system according to an embodiment of the present application;

[0059] Figure 3 FIG. 3 shows a structure schematic diagram of a second displacement module of a five-dimensional adjusting device for a vacuum system according to an embodiment of the present application;

[0060] Figure 4 FIG. 4 shows a structure schematic diagram of a third displacement module of a five-dimensional adjusting device for a vacuum system according to an embodiment of the present application;

[0061] Figure 5 FIG. 5 shows a structure schematic diagram of a rotation module of a five-dimensional adjusting device for a vacuum system according to an embodiment of the present application;

[0062] Figure 6 FIG. 6 shows a connection schematic diagram of a rotation module and a mounting flange of a five-dimensional adjusting device for a vacuum system according to an embodiment of the present application; and

[0063] Figure 7A third displacement module of a five-dimensional adjusting device for a vacuum system is connected with a mounting flange according to an embodiment of the utility model. DETAILED DESCRIPTION

[0064] The utility model will be further explained below in connection with the specific embodiments with reference to the drawings. It should be pointed out that each component in each drawing can be exaggerated for illustration and is not necessarily in correct proportion. In each drawing, the same or functionally identical components are provided with the same reference numerals.

[0065] In the utility model, unless specifically indicated, "arranged on", "arranged above" and "arranged over" do not exclude the existence of an intermediate object between them. In addition, "arranged on or above" only indicates the relative position relationship between the two components, and in certain cases, such as after reversing the product direction, it can also be converted into "arranged below or below", and vice versa.

[0066] In the utility model, each embodiment is only intended to illustrate the scheme of the utility model and should not be understood as restrictive.

[0067] In the utility model, unless specifically indicated, the quantifier "one" does not exclude the scenario of multiple elements.

[0068] It should also be pointed out here that in the embodiments of the utility model, only a part of the components or assemblies can be shown for the sake of clarity and simplicity, but those skilled in the art can understand that under the guidance of the utility model, the required components or assemblies can be added according to the specific scene needs.

[0069] It should also be pointed out here that within the scope of the utility model, the words "same", "equal", "equal" and the like do not mean that the two values are absolutely equal, but allow a certain reasonable error, that is, the words also cover "basically the same", "basically equal", "basically equal". By analogy, in the utility model, the terms "perpendicular to", "parallel to" and the like also cover the meanings of "basically perpendicular to", "basically parallel to".

[0070] In order to realize the fine adjustment of the displacement of the sample in the X-axis, Y-axis and Z-axis directions of the vacuum system, and the rotation angle of the two out-of-plane directions, the utility model provides a five-dimensional adjusting device for a vacuum system.

[0071] The utility model will be further explained below in connection with the specific embodiments with reference to the drawings.

[0072] Figure 1 A structure schematic view of a five-dimensional adjusting device for a vacuum system according to an embodiment of the utility model is shown. As Figure 1As shown in the figure, a five-dimensional adjustment device for a vacuum system comprises a first displacement module 101, a second displacement module 102, a third displacement module 103, a rotating module 104, and a mounting flange 105, wherein the first displacement module 101 is movable along a first direction, the second displacement module 102 is connected to the first displacement module 101 and is movable along a second direction, wherein the second direction is perpendicular to the first direction, the third displacement module 103 is connected to the second displacement module 102 and is movable along a third direction, wherein the third direction is perpendicular to the first direction and the second direction, the rotating module 104 is connected to the third displacement module 103 and is rotatable around the first direction and the third direction, and the mounting flange 105 comprises a first part 151 and a second part 152 which are perpendicular to each other, wherein the first part 151 is arranged perpendicularly to the first direction, and the second part 152 is connected to the rotating module 104 and is used for mounting a sample to be adjusted.

[0073] As shown in the figure, Figure 1 In order to be suitable for a vacuum environment, in an embodiment of the present application, the five-dimensional adjustment device further comprises a base flange 106 which is fixed at an opening of a target vacuum chamber and is used for docking the target vacuum chamber, and the base flange 106 is flexibly connected to the mounting flange 105. In an embodiment of the present application, the mounting flange 105 is connected to the base flange 106 through a vacuum welding bellows 107, and the vacuum welding bellows 107 passes through the first displacement module 101, the second displacement module 102, and the third displacement module 103 in sequence. Figure 2 As shown in the figure,

[0074] Figure 2 As shown in the figure, a first displacement module of a five-dimensional adjustment device for a vacuum system in an embodiment of the present application is shown. As shown in the figure, Figure 2As shown, the first displacement module 101 comprises a first direction movement plate 111, a guide rod 112, a driven screw 113, a screw nut 114, a driven gear 115, a driving gear 116 and an operation hand wheel 117. The first direction movement plate 111 is arranged between an upper limiting plate and a lower limiting plate, and the first direction movement plate 111 is provided with at least one first through hole, a second through hole and a third through hole in a first direction. In an embodiment of the utility model, the base flange 106 can be used as the upper limiting plate, and the intermediate fixed plate 109 can be used as the lower limiting plate. The two ends of the guide rod 112 are fixed on the upper limiting plate and the lower limiting plate respectively, and pass through the first through hole. In an embodiment of the utility model, a lubricating bushing 118 is further sleeved on the guide rod 115 to maintain the guide rod 115, and the lubricating bushing 118 is located between the upper limiting plate and the first direction movement plate 111. The first end of the driven screw 113 is fixed on the upper limiting plate through a bearing and a snap spring, and the second end is connected with the driven gear 115 after passing through the second through hole and the lower limiting plate in sequence, and the driven screw 113 is fixed on the lower limiting plate through a bearing and a snap spring. The screw nut 114 is arranged on the driven screw 113 and engages with the driven screw 113, and the screw nut 114 is further fixed on the first direction movement plate 111 through a fastener such as a bolt. The driven gear 115 is arranged below the lower limiting plate and is fixed on the second end of the driven screw 113 through a fastener such as a bolt. The driving gear 116 is arranged on one side of the driven gear 115 and engages with the driven gear 115. The operation hand wheel 117 is connected with the driving gear 116 through a driving shaft 119 to drive the driving gear 116 to rotate, and the driving shaft 119 is fixed on the lower sealing plate 181 through a bearing and a snap spring.

[0075] The displacement principle of the first displacement module is as follows: the operation hand wheel 117 is operated, the rotary motion is transmitted to the driven screw 113 through the driving gear 116 and the driven gear 115, the driven screw 113 is limited by the upper limiting plate and the lower limiting plate in the up-down direction, only one degree of freedom of rotation is left, and the relative displacement between the screw nut 114 and the driven screw 113 is converted into the up-down displacement of the first direction movement plate 111 relative to the base flange 106 due to the rotation of the driven screw 113, so that the displacement of the mounting flange 105 relative to the cavity in the first direction (Z-axis direction) is realized.

[0076] Figure 3 The structure diagram of the second displacement module of the five-dimensional adjusting device for the vacuum system is shown. Figure 3As shown, the second displacement module comprises a second direction movement plate 121, a second direction guide shaft 122, a second direction linear bearing 123, a first ceramic ball 124, a first micrometer head 125 and a first tension spring 126. The second direction movement plate 121 is arranged below the first direction movement plate 111 and comprises a first cavity formed by four edge frames. The lower surface of the first direction movement plate 111 comprises at least one first fixing sheet 110 which is attached to the inner surface of the first cavity. The first edge frame of the second direction movement plate 121 is parallel to the second direction and is arranged on the side of the second direction movement plate 121 away from the driven lead screw 113. The first edge frame is provided with a first connecting block 301 and a third direction limiting block 302. The first connecting block 301 is arranged at one end of the first edge frame close to the second edge frame. The upper surface of the first connecting block 301 is flush with the first direction movement plate 111. The lower surface of the third direction limiting block 302 is not higher than the lower surface of the third displacement module 103. The second edge frame is connected perpendicularly to the first edge frame and is provided with a second direction limiting block 303 and a second connecting block 304. The upper surface of the second direction limiting block 303 is flush with the first direction movement plate 111. The second connecting block 304 is arranged on the lower surface of the second edge frame and extends outwardly along the second direction. The third edge frame is arranged relative to the first edge frame. The fourth edge frame is arranged relative to the second edge frame and is provided with a third connecting block 305. The third connecting block 305 is arranged on the lower surface of the fourth edge frame and extends outwardly along the second direction. The two ends of the second direction guide shaft 122 are connected to the second edge frame and the fourth edge frame through the first fixing sheet 110 and are fastened by bolts. The second direction linear bearing 123 is fixed on the first fixing sheet 110 and is sleeved on the two ends of the second direction guide shaft 122. The first ceramic ball 124 has two, one of which is fixed on the side surface of the first direction movement plate 111 close to the second direction limiting block 303, for example, by glue, and the other is fixed on the second direction movement plate 121. The first micrometer head 125 penetrates through the second direction limiting block 303 and stops on the first ceramic ball 124. The first tension spring 126 is arranged parallel to the second direction and its two ends are connected to the first connecting block 301 and the first direction movement plate 111 respectively.

[0077] The displacement principle of the second displacement module is as follows: When the first micrometer 125 extends forward, it pushes the first ceramic ball 124 and the second directional motion plate 121 forward, resulting in a displacement of the second directional motion plate 121 relative to the first directional motion plate 111 in one direction, with a displacement accuracy of no less than 0.02 mm. When the first micrometer 125 retracts backward, the tension generated by the first tension spring 126 moves the second directional motion plate 121 and the first ceramic ball 124 towards the micrometer direction, resulting in a displacement in another direction. Due to the presence of the first tension spring 126, the first micrometer 125 and the first ceramic ball 124 will always remain in close contact, minimizing the thread backlash.

[0078] Figure 4 This diagram illustrates the structure of the third displacement module of a five-dimensional adjustment device for a vacuum system according to an embodiment of the present invention. Figure 4 As shown, the third displacement module includes a third-direction motion plate 131, a third-direction guide shaft 132, a third-direction linear bearing 133, a second ceramic ball 134, a second micrometer head 135, and a second tension spring 136. The third-direction motion plate 131 is located below the second-direction motion plate 121. The center of the third-direction motion plate 131 includes a fourth through hole along the first direction, and each of the four corners of the third-direction motion plate 131 includes a protrusion 401. Two protrusions 401 on the first side are connected to the second connecting block 304 and the third connecting block 305, respectively. Two protrusions 401 on the second side, opposite to the first side, are respectively attached to a second fixing piece 120 disposed on the lower surface of the second-direction motion plate 121. The first side refers to the side parallel to the second direction and away from the driven lead screw 113. Fourth connecting blocks 402 are also provided at both ends of the second side of the third-direction motion plate 131. There are two third-direction guide shafts 132. The first end of the guide shaft passes through the second fixing plate 120 and connects to the third-direction motion plate 131. The second end passes through the second connecting block 304 or the third connecting block 305 and connects to the third-direction motion plate 131. Four third-direction linear bearings 133 may be included, respectively fixed to the second fixing plate 120, the second connecting block 304, and the third connecting block 305, and sleeved on the ends of the third-direction guide shafts 132. The second ceramic ball 134 may be fixed to the first side surface of the third-direction motion plate 131, for example, with glue. The second micrometer head 135 passes through the third-direction limiting block 302 and abuts against the second ceramic ball 134. The second tension spring 136 is arranged parallel to the third direction, and its two ends are respectively connected to the fourth connecting block 402 and the second connecting block 304 or the third connecting block 305.

[0079] The displacement principle of the third displacement module is similar to that of the second displacement module: when the second micrometer 135 is extended forward, it pushes the second ceramic ball 134 and the third-direction motion plate 131 forward, forming a displacement of the third-direction motion plate 131 relative to the second-direction motion plate 121 in one direction, with a displacement accuracy of no less than 0.02 mm. When the second micrometer 135 is retracted backward, the tension generated by the second tension spring 136 moves the third-direction motion plate 131 and the second ceramic ball 134 in the micrometer direction, forming a displacement in another direction. Due to the presence of the second tension spring 136, the second micrometer 135 and the second ceramic ball 134 will always remain in close contact, minimizing the thread backlash.

[0080] Figure 5 This diagram illustrates the structure of a rotating module of a five-dimensional adjustment device for a vacuum system according to an embodiment of the present invention. Figure 5 As shown, the rotating module includes an angle adjusting plate 141, a third tension spring 142, a ceramic ball 143, a third micrometer head 144, a fourth micrometer head 145, and a locking bolt 146. The ceramic ball 143, the third micrometer head 144, and the fourth micrometer head 145 form three support points between the mounting flange 105 and the angle adjusting plate 141. The first side of the angle adjusting plate 141 is fixed to the third-direction moving plate 131 by bolts 502. Angle limiting blocks 501 are respectively provided on the second and third sides perpendicular to the first side. The edge of the second part of the mounting flange 105 is disposed within the limiting groove 511 of the angle limiting block 501, wherein the first side refers to the side parallel to the third direction and close to the second-direction moving plate 121. Figure 6 As shown, the rotating module includes at least one third tension spring 142, which is disposed between the angle adjusting plate 141 and the second part of the mounting flange 105, providing a counter-tension between the mounting flange 105 and the angle adjusting plate 141. Figure 6As shown, the ceramic ball 143 is arranged between the corner adjusting plate 141 and the second part of the mounting flange 105, and is located on the side of the second edge of the corner adjusting plate 141 opposite to the first edge and close to the operating hand wheel 117, and the corner adjusting plate 141 and the second part of the mounting flange 105 are both provided with a groove matched with the ceramic ball 143, so as to ensure that the distance between the mounting flange 105 and the corner adjusting plate 141 at the fulcrum is unchanged, and the freedom of the rotation direction is ensured. The third micrometer head 144 is connected to the second part of the mounting flange 105 through the corner adjusting plate 141 and is located on the side of the first edge of the corner adjusting plate 141 close to the operating hand wheel 117, and when the third micrometer head 144 is operated, the distance between the mounting flange 105 and the corner adjusting plate 141 at the fulcrum is changed, so that the mounting flange 105 is rotated in the pitch direction relative to the cavity. The fourth micrometer head 145 is connected to the second part of the mounting flange 105 through the corner adjusting plate 141 and is located on the side of the second edge of the corner adjusting plate 141 opposite to the first edge and away from the operating hand wheel 117, and when the fourth micrometer head 145 is operated, the distance between the mounting flange 105 and the corner adjusting plate 141 at the fulcrum is changed, so that the mounting flange 105 is rotated in the flange axial direction relative to the cavity. In an embodiment of the present application, the third micrometer head 144 and the fourth micrometer head 145 are further provided with locking bolts 146 on one side, and after the angle adjustment in two dimensions is completed, the locking bolts 146 can be locked, so as to further enhance the stability of the mounting flange 105 during work.

[0081] As Figure 7 As shown, in an embodiment of the present application, at least one compression spring 701 is arranged between the first part of the mounting flange 105 and the third direction motion plate 131, so as to offset the atmospheric pressure generated by the vacuum welding bellows 107.

[0082] Although the above describes the embodiments of the present application, it should be understood that they are only presented as examples and are not as limitations. It is obvious for those skilled in the related art that various combinations, modifications and changes can be made without departing from the spirit and scope of the present application. Therefore, the width and scope of the present application disclosed herein should not be limited by the above disclosed exemplary embodiments, but should be defined only according to the appended claims and their equivalent replacements.

Claims

1. A five-dimensional adjustment device for a vacuum system, characterized in that The application relates to a sample adjusting device, which comprises: a first displacement module configured to be movable along a first direction; a second displacement module connected to the first displacement module and configured to be movable along a second direction, wherein the second direction is perpendicular to the first direction; a third displacement module connected to the second displacement module and configured to be movable along a third direction, wherein the third direction is perpendicular to the first direction and the second direction; a rotating module connected to the third displacement module and configured to be rotatable around the first direction and the third direction; and a mounting flange comprising a first part and a second part perpendicular to each other, wherein the first part is arranged perpendicularly to the first direction, and the second part is connected to the rotating module, and the mounting flange is configured to mount a sample to be adjusted.

2. The five-dimensional adjustment according to claim 1, wherein, The first displacement module comprises: a first direction movement plate arranged between an upper limiting plate and a lower limiting plate, and the first direction movement plate is provided with at least one first through hole, a second through hole and a third through hole along the first direction; a guide rod fixed at both ends to the upper limiting plate and the lower limiting plate and penetrating through the first through hole; a driven screw rod fixed at a first end to the upper limiting plate and connected at a second end to a driven gear after penetrating through the second through hole and the lower limiting plate; a screw nut arranged on the driven screw rod and engaged with the driven screw rod, and the screw nut is fixed to the first direction movement plate; a driven gear fixed to the second end of the driven screw rod; a driving gear engaged with the driven gear; an operating hand wheel connected to the driving gear through a driving shaft to drive the driving gear to rotate.

3. The five-dimensional adjustment according to claim 2, wherein, The first displacement module further comprises: a lubricating sleeve sleeved on the guide rod and located between the upper limiting plate and the first direction movement plate.

4. The five-dimensional adjustment according to claim 2, wherein, The second displacement module comprises: a second direction movement plate arranged below the first direction movement plate and comprising a first cavity formed by four edge frames, and a lower surface of the first direction movement plate comprises at least one first fixing piece adhered to an inner surface of the first cavity, and the four edge frames comprise: a first edge frame parallel to the second direction and arranged on a side of the second direction movement plate away from the driven screw rod, and the first edge frame is provided with a first connecting block and a third direction limiting block, wherein the first connecting block is arranged at one end of the first edge frame close to a second edge frame, an upper surface of the first connecting block is flush with the first direction movement plate, and a lower surface of the third direction limiting block is not higher than a lower surface of the third displacement module; a second edge frame connected perpendicularly to the first edge frame and provided with a second direction limiting block and a second connecting block, wherein an upper surface of the second direction limiting block is flush with the first direction movement plate, and the second connecting block is arranged on a lower surface of the second edge frame and extends outward along the second direction; a third edge frame arranged relative to the first edge frame; and a fourth edge frame arranged relative to the second edge frame and provided with a third connecting block, wherein the third connecting block is arranged on a lower surface of the fourth edge frame and extends outward along the second direction. a second-direction guide shaft, whose two ends are connected to the second and fourth side frames through the first fixed plate; a second-direction linear bearing fixed on the first fixed plate and sleeved on the two ends of the second-direction guide shaft; a first ceramic ball fixed on a side surface of the first-direction moving plate close to the second-direction limiting block; a first micrometer head penetrating the second-direction limiting block to the first ceramic ball; and a first tension spring parallel to the second direction, whose two ends are connected to the first connecting block and the first-direction moving plate, respectively.

5. The five-dimensional adjustment according to claim 4, wherein, The third displacement module comprises: a third-direction moving plate arranged below the second-direction moving plate and comprising: a fourth through hole in the first direction arranged at the center of the third-direction moving plate; protrusions arranged at the four top corners of the third-direction moving plate, wherein the first side two protrusions are connected to the second and third connecting blocks, respectively, and the second side two protrusions opposite to the first side are attached to the lower surface of the second-direction moving plate provided with the second fixed plate, wherein the first side refers to the side parallel to the second direction and away from the driven lead screw; and a fourth connecting block arranged at the two ends of the second side of the third-direction moving plate; a third-direction guide shaft, whose first end is connected to the third-direction moving plate through the second fixed plate, and whose second end is connected to the third-direction moving plate through the second or third connecting block; a third-direction linear bearing fixed on the second fixed plate and / or the second and / or third connecting block and sleeved on the end of the third-direction guide shaft; a second ceramic ball fixed on the first side surface of the third-direction moving plate; a second micrometer head penetrating the third-direction limiting block to the second ceramic ball; and a second tension spring parallel to the third direction, whose two ends are connected to the fourth connecting block and the second or third connecting block, respectively.

6. The five-dimensional adjustment according to claim 5, wherein, The first ceramic ball is bonded to the first-direction moving plate; and / or The second ceramic ball is bonded to the third-direction moving plate.

7. The five-dimensional adjustment according to claim 5, wherein, The rotation module comprises: a rotation angle adjusting plate, whose first edge is fixed to the third-direction moving plate, and whose second and third edges perpendicular to the first edge are provided with rotation angle limiting blocks, respectively, and the edge of the second part of the mounting flange is arranged in the limiting groove of the rotation angle limiting block, wherein the first edge refers to the edge parallel to the third direction and close to the second-direction moving plate; at least one third tension spring arranged between the rotation angle adjusting plate and the second part of the mounting flange; a ceramic ball arranged between the rotation angle adjusting plate and the second part of the mounting flange and located on the side of the second edge of the rotation angle adjusting plate opposite to the first edge and close to the operating hand wheel, and the rotation angle adjusting plate and the second part of the mounting flange are both provided with grooves matched with the ceramic ball; a third micrometer head penetrating the rotation angle adjusting plate to the second part of the mounting flange and located on the side of the first edge of the rotation angle adjusting plate close to the operating hand wheel; a fourth micrometer head connected to the second part of the mounting flange through the corner adjustment plate and located on the second edge of the corner adjustment plate opposite to the first edge and away from the side of the operation hand wheel; and locking bolts respectively arranged at the third micrometer head and the fourth micrometer head and configured to be locked after the angle adjustment is completed.

8. The five-dimensional adjustment according to claim 5, wherein, Further comprising: a base flange fixed at an opening of a target vacuum chamber and configured to be docked with the target vacuum chamber, the base flange being flexibly connected with the mounting flange.

9. The five-dimensional adjustment according to claim 8, wherein, The mounting flange is connected with the base flange through a vacuum welding bellows passing through the third through hole, the first cavity and the fourth through hole.

10. The five-dimensional adjustment apparatus of claim 5, wherein, At least one compression spring is further arranged between the first part of the mounting flange and the third direction motion plate. At least one compression spring is further arranged between the first part of the mounting flange and the third direction motion plate.

Images