PVD (Physical Vapor Deposition) coating experiment teaching instrument equipment for teaching

Abstract

The utility model provides PVD coating experiment teaching instrument equipment for teaching. The PVD coating experiment teaching instrument equipment comprises a simulation coating area, a real coating area, a student operation end, a teacher operation end and a mechanical arm, the simulated film coating area displays the motion trail of microscopic particles in the PVD film coating process through a projection assembly, and the real film coating area is equipped with a PVD film coating assembly to display the real film deposition process; the student operation end is electrically connected with the mechanical arm, so that wafer positioning and adjustment are realized, and the participation sense and the experiment operation capability of students are improved; the teacher operation end can send tasks in real time, adjust parameters and ask students, so that teaching interactivity is enhanced; besides, the equipment is provided with a simulation coating window and a real coating window which are used for respectively displaying a microscopic coating process and a macroscopic coating process, and is provided with a safety sudden stop function to ensure the experiment safety; according to the utility model, through a virtuality and reality combined experiment mode, the principle of the PVD technology is visually displayed, the immersion and effect of teaching are improved, and the teaching aid is suitable for teaching institutions to carry out theory and practice teaching of related technologies.

Description

Technical Field

[0001] This utility model relates to the field of low dew point dehumidification technology, specifically to a PVD coating experimental teaching instrument for teaching purposes. Background Technology

[0002] Physical vapor deposition (PVD) is an important thin film preparation technology widely used in semiconductors, optical films, hard coatings, and other fields. This technology uses physical means to vaporize a material source into gaseous atoms or molecules, which are then deposited onto a substrate surface to form a thin film. PVD processes are typically performed in a vacuum environment to avoid the influence of oxygen and water vapor on the deposited film; therefore, real PVD equipment is often large, complex, and requires operators with specific professional knowledge.

[0003] In traditional teaching, PVD equipment has strict environmental requirements, a complex operation process, and is difficult to demonstrate in teaching settings, making it hard for students to intuitively understand the working principles and practical operation of PVD technology. Furthermore, the high cost and high risk of traditional equipment also hinder its widespread application in schools and other teaching environments. For students, understanding the physical phenomena and microscopic particle motion laws in the PVD process is often challenging, especially without practical experience, resulting in limited learning outcomes.

[0004] Currently, there is a lack of teaching equipment on the market that can both demonstrate PVD principles and enable teacher-student interaction in a teaching environment. Existing technologies typically focus on theoretical teaching or the operation of high-end equipment in laboratories, lacking a teaching tool that allows students to explore and learn through hands-on practice.

[0005] To fill this gap and improve students' understanding and mastery of PVD technology, this invention proposes a PVD teaching device. This device can demonstrate the working principle of PVD through a combination of simulated and real coating methods; it can help students understand the macroscopic deposition process through a closed cavity, and can also demonstrate the movement of microscopic particles through a simulated coating window, thereby enhancing students' learning interest and depth of understanding. Utility Model Content

[0006] The purpose of this utility model is to provide a PVD teaching instrument for educational purposes, comprising:

[0007] The housing has a front simulated coating area and a rear real coating area. The simulated coating area is equipped with a projection component, and the real coating area is equipped with a PVD coating component.

[0008] A robotic arm, which is housed inside the housing;

[0009] A simulation coating window is arranged on the side of the outer shell and points to the simulation coating area, and is used for microscopically observing the coating of the wafer;

[0010] A real coating window is arranged on the front of the outer shell and points to the real coating area, and is used for macroscopically observing the coating of the wafer.

[0011] Preferably, the mechanical arm is located in the middle of the outer shell, and the real coating window is openable for placing the wafer at the mechanical arm.

[0012] Further, the PVD teaching instrument device further comprises a student operation end arranged on the front of the outer shell; the student operation end is electrically connected with the mechanical arm; the student operation end comprises a first operation interface, and the student controls the operation of the mechanical arm through the first operation interface.

[0013] Further, a teacher operation end is further arranged on the side of the outer shell; the teacher operation end comprises a second operation interface, and the first operation interface and the second operation interface are in communication connection, and the teacher sets a question through the second operation interface and sends the question to the first operation interface.

[0014] Preferably, the PVD teaching instrument device further comprises a keyboard tray, and the keyboard tray is arranged below the student operation end and the teacher operation end.

[0015] Further, the PVD teaching instrument device further comprises an emergency stop switch and a running indicator light, the emergency stop switch is arranged on the outer shell, and after the emergency stop switch is pressed, the red light of the running indicator light is on, and the PVD teaching instrument device stops running.

[0016] Preferably, the running indicator light comprises a first indicator light, a second indicator light and a third indicator light, the first indicator light and the second indicator light are cover-shaped and arranged on the front of the outer shell and adjacent to the emergency stop switch, and the third indicator light is columnar and arranged on the top surface of the outer shell.

[0017] Preferably, the PVD coating assembly further comprises a closed cavity, the outer shell of the closed cavity comprises a transparent material, and the wafer is transported into the closed cavity by the mechanical arm for PVD coating.

[0018] Further, the PVD teaching instrument device further comprises a rear door arranged on the rear side of the outer shell, and the rear door is used for overhauling and maintaining the PVD coating assembly.

[0019] Compared with the prior art, the above-mentioned at least one technical scheme adopted by the embodiment of the present application can achieve the beneficial effects at least including:

[0020] First, the utility model discloses a simulation coating area and real coating area can be shown to student PVD coating whole process in two levels of microcosmic and macroscopic, simulation coating area is directly shown the microcosmic particle movement and deposition process of PVD through projection component, helps student to understand how gaseous atom or molecule is deposited to form thin film on the surface of matrix, and real coating area shows actual PVD coating operation process, and student can understand the working principle of equipment and its application more clearly, through dual display mode, not only strengthen the intuitiveness of teaching, but also improve the learning effect of student.

[0021] Second, the utility model discloses student operation end and mechanical arm, so that student not only is passive watching experimental process, but also can actively participate in PVD operation, and student carries out experimental operation through the control mechanical arm and completes the placement of wafer, operation and adjustment, and further deepens the understanding of PVD technology and operating principle.

[0022] Third, the utility model discloses teacher operation end, and teacher can propose question or task to student end through the operation end, and according to the operation performance of student, guides, through interactive teaching mode, not only strengthen the communication and interaction between teacher and student, but also can help teacher to understand the knowledge of student, and adjusts teaching strategy in time, so that student understands the movement principle of PVD technology and its manufacturing process in actual operation process in depth, and teacher can also adjust the difficulty according to the learning progress of student, promotes the thinking and exploration of student. BRIEF DESCRIPTION OF DRAWINGS

[0023] In order to more clearly illustrate the technical scheme of the embodiment of the utility model, the following will be simply introduced to the drawing needed to be used in the embodiment, and obviously, the drawing in the following description is only some embodiments of the utility model, and for the ordinary skilled person in the art, under the premise of not paying the creative labor, still can obtain other drawings according to these drawings.

[0024] Figure 1 It is the structure diagram of PVD teaching instrument equipment of the utility model;

[0025] Figure 2 It is the front view of PVD teaching instrument equipment of the utility model;

[0026] Figure 3 It is the left view of PVD teaching instrument equipment of the utility model;

[0027] Figure 4 It is the rear view of PVD teaching instrument equipment of the utility model;

[0028] Figure 5It is the first sectional view of the PVD teaching equipment of the utility model.

[0029] Figure 6 It is the second sectional view of the PVD teaching equipment of the utility model.

[0030] Figure 7 It is the schematic view of sputtering cavity and closed cavity structure of the PVD teaching equipment of the utility model.

[0031] 1, shell; 2, first indicator light; 3, second indicator light; 4, third indicator light; 5, emergency stop switch; 6, teacher operation end; 7, keyboard tray; 8, real plating window; 9, student operation end; 10, back door; 11, simulated plating window; 12, mechanical arm; 13, closed cavity. DETAILED DESCRIPTION

[0032] The embodiments of the utility model will be described in detail below with reference to the drawings.

[0033] The embodiments of the utility model will be described in detail below with reference to the drawings.

[0034] The prior art usually focuses on theoretical teaching or high-end equipment operation in the laboratory, and lacks a teaching device capable of demonstrating PVD principles and realizing teacher-student interaction in a teaching environment; based on this, the embodiments of the present specification propose a solution: the solution uses a simulated plating area and a real plating area to realize the display of PVD plating principles in microcosm and macrocosm. Embodiment 1

[0035] As Figures 1-3As shown, this embodiment provides a PVD teaching device, which includes a housing 1, a robotic arm 12, a simulated coating window 11, and a real coating window 8. The housing 1 is divided into two areas: a simulated coating area and a real coating area. The simulated coating area is equipped with a projection component to display the movement of microscopic particles during the PVD process using virtual reality technology. The real coating area is equipped with a PVD coating component for actual thin film deposition. The robotic arm 12 is located inside the housing 1, which contains a middle layer plate. The lower end face of the robotic arm 12 contacts the upper end face of the middle layer plate, placing the robotic arm 12 in the center of the middle layer plate inside the housing 1 and fixing it to the middle layer plate with bolts. The simulated coating window 11 is located on the side of the housing 1 and points towards the simulated coating area, used for microscopic observation of the wafer coating. The real coating window 8 is located on the front of the housing 1 and points towards the real coating area, used for macroscopic observation of the wafer coating.

[0036] In this program, the deposition process of gaseous atoms or molecules on the substrate surface is presented in 3D video form using a projection component in the simulated coating area. Students can observe these animations to understand the particle trajectory, thin film formation process, and the influence of environmental factors (such as pressure and temperature) on the deposition effect during PVD. The actual coating area is equipped with PVD coating components to simulate the real coating process. The equipment includes a system for adjusting temperature, pressure, and gas flow rate, allowing students to adjust parameters via a control panel and observe changes in the coating effect under different conditions.

[0037] In a preferred embodiment, such as Figure 5 As shown, the robotic arm 12 is located in the middle of the equipment and can automatically feed the wafer into the real coating area and the simulated coating area for coating. Preferably, the front of the outer shell 1 is also provided with a student operation terminal 9, which is electrically connected to the robotic arm 12. The student operation terminal 9 includes a first operation interface, through which the student controls the operation of the robotic arm 12. The student controls the movement of the robotic arm 12 through the control interface of the student operation terminal 9 to position, adjust and place the wafer. The operation interface includes a touch screen and buttons, which the student can use to complete the operation.

[0038] In a preferred embodiment, the simulated coating window 11 is located on the left side of the housing 1, pointing towards the simulated coating area, and displays the microscopic coating situation on the wafer surface; students can use the simulated coating window 11 to view the movement of micro-particles and the formation process of the thin film during the deposition process in the simulated coating area; the real coating window 8 is located on the front of the device, pointing towards the real coating area, and is used to display the actual coating process of the wafer; students can directly observe the coating effect through the real coating window 8.

[0039] The operation procedure of the PVD teaching instrument in this embodiment is as follows:

[0040] S1, the student operation end 9 provides a start button. After the student presses the start button, the device enters the operation mode, the mechanical arm 12 starts to work, and the wafer is moved to the real coating area. At this time, the student can set the coating conditions by adjusting the temperature, pressure, gas flow and other parameters.

[0041] S2, the student can clearly see the coating process of the wafer in the real coating area through the real coating window 8, and at the same time, the student can view the micro-coating situation through the simulation coating window 11 to obtain a comprehensive understanding. The student can also adjust the experimental parameters in real time during the operation and observe the changes of the coating effect under different conditions. Embodiment 2

[0042] Compared with the first embodiment, the PVD teaching instrument device of the present embodiment further comprises a teacher operation end 6 arranged on the side of the shell 1; the teacher operation end 6 comprises a second operation interface, and the first operation interface and the second operation interface are in communication connection. The teacher sets the questions through the second operation interface and sends them to the first operation interface. The student operation end 9 and the teacher operation end 6 are connected through wireless network or wired communication. The teacher can remotely control and adjust the operation of the student end through his own operation interface. For example, the teacher can specify the student to perform certain specific operation tasks (such as adjusting the temperature, changing the gas type, etc.). The student operation end 9 comprises a touch screen, buttons and knobs for adjusting different parameters in the PVD teaching instrument device.

[0043] In a preferred embodiment, the PVD teaching instrument device further comprises a keyboard tray 7 arranged below the student operation end 9 and the teacher operation end 6.

[0044] Further, the PVD teaching instrument device further comprises an emergency stop switch 5 and a running indicator light. The emergency stop switch 5 is arranged outside the shell 1. After the emergency stop switch 5 is pressed, the red light of the running indicator light is on, and the PVD teaching instrument device stops running. The running indicator light comprises a first indicator light 2, a second indicator light 3 and a third indicator light 4. The first indicator light 2 and the second indicator light 3 are cover-shaped and arranged on the front surface of the shell 1 and adjacent to the emergency stop switch 5. The third indicator light 4 is columnar and arranged on the top surface of the shell 1.

[0045] In a preferred embodiment, as shown in Figure 6 and Figure 7As shown, the projection assembly includes a projection screen, a transparent glass plate and a sputtering cavity. The projection screen 14 is placed above the simulated coating window 11. The transparent glass plate 15 is arranged inside the simulated coating window 11 and forms a 45° angle with the lower horizontal surface. The simulated coating window 14 displays the sputtering principle particle image when powered on. Then the transparent glass plate 15 refracts the image to the sputtering cavity 16, so that the image on the projection screen coincides with the cross section of the sputtering cavity 16. The PVD coating assembly further includes a closed cavity 13. The outer shell 1 of the closed cavity 13 is made of transparent material. The wafer support 17 is fixedly connected to the lower end surface of the closed cavity 13 by screw threads. The mechanical hand 12 places the wafer on the upper end surface of the wafer support 17 through the left opening of the closed cavity 13. Then the target particles in the closed cavity 13 are uniformly impacted on the upper surface of the wafer under the action of the magnetic field in the closed cavity 13, thereby completing the wafer coating. Further, the PVD teaching device further includes a rear door 10 arranged on the rear side of the outer shell 1 for maintenance and repair of the PVD coating assembly.

[0046] The operation process of the PVD teaching device of the embodiment is as follows:

[0047] S1, the teacher first sets the experimental task and sends it to the student operation end 9 through the teacher operation end 6. The task can be to adjust the equipment parameters (such as temperature, pressure, material type, etc.) to carry out PVD coating experiments under different conditions. The student adjusts the parameters through the operation interface according to the teacher's guidance and starts the equipment.

[0048] S2, after the student completes the operation, the student observes and records the wafer coating process through the real coating window 8 and the simulated coating window 11. During the operation, the teacher adjusts the parameters of the student operation end 9 through remote operation or issues new task requirements for the student to adjust the experiment.

[0049] S3, the teacher asks questions through the teacher operation end 6, and the student inputs answers or selects corresponding operation steps to perform the experiment. Through this interactive teaching method, the student can deepen the understanding of PVD technology in practice.

[0050] S4, if any abnormal situation occurs during the experiment, the student can press the emergency stop switch 5 to immediately stop the equipment running. At this time, the running indicator light will light up red, reminding the operator that the equipment has entered the shutdown state. Through this design, the safety of the student during the experiment is ensured.

[0051] Through the above examples, the PVD teaching device of the present application can combine real and simulated operations in the teaching process, enhancing the students' sense of participation, interactivity and immersion. The design of the device not only helps students understand the basic principles of PVD technology, but also promotes interaction and cooperation between teachers and students, improving the quality and effectiveness of teaching. This teaching device provides students with a more intuitive, practical and safe learning environment, which can effectively promote the learning and application of PVD technology.

[0052] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited to this. Any skilled person in the art can easily think of changes or replacements within the technical scope disclosed by the present application, which should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A PVD coating experiment teaching instrument device for teaching, characterized in that, It comprises: a shell, which is internally provided with a simulated plating area and a real plating area, the simulated plating area is provided with a projection assembly, and the real plating area is provided with a PVD plating assembly; a mechanical arm, which is arranged inside the shell; a simulated plating window, which is arranged on the side of the shell and points to the simulated plating area, and is used for microscopically observing the plating condition of the wafer; a real plating window, which is arranged on the front of the shell and points to the real plating area, and is used for macroscopically observing the plating condition of the wafer.

2. The PVD coating experiment teaching instrument for teaching of claim 1, wherein, The mechanical arm is located in the middle of the shell, and the real plating window can be opened to place the wafer at the mechanical arm.

3. The PVD coating experiment teaching instrument for teaching of claim 1, wherein, It also comprises a student operation end, which is arranged on the front of the shell; the student operation end is electrically connected to the mechanical arm; the student operation end comprises a first operation interface, and the student controls the operation of the mechanical arm through the first operation interface.

4. The PVD coating experiment teaching instrument for teaching of claim 3, wherein, It also comprises a teacher operation end, which is arranged on the side of the shell; the teacher operation end comprises a second operation interface, and the first operation interface and the second operation interface are communicatively connected, and the teacher sets a question through the second operation interface and sends it to the first operation interface.

5. The PVD coating experiment teaching instrument for teaching of claim 4, wherein, It also comprises a keyboard tray, which is arranged below the student operation end and the teacher operation end.

6. The PVD coating experiment teaching instrument for teaching of claim 1, wherein, It also comprises an emergency stop switch and a running indicator light, the emergency stop switch is arranged on the outside of the shell; after the emergency stop switch is pressed, the red light of the running indicator light is on, and the PVD teaching instrument device stops running.

7. The PVD coating experiment teaching instrument for teaching of claim 6, wherein, The running indicator light comprises a first indicator light, a second indicator light and a third indicator light, the first indicator light and the second indicator light are cover-shaped, arranged on the front of the shell, and adjacent to the emergency stop switch; the third indicator light is columnar, arranged on the top of the shell.

8. The PVD coating experiment teaching instrument for teaching of claim 1, wherein, The PVD plating assembly further comprises a closed cavity, the shell of the closed cavity comprises a transparent material, and the wafer is transported into the closed cavity by the mechanical arm for PVD plating. 9.The PVD coating experiment teaching instrument for teaching of claim 8, wherein, It also comprises a rear door, which is arranged on the rear side of the shell, and is used for repairing and maintaining the PVD plating assembly.

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