Hollow anode ionization device

Abstract

The utility model discloses a hollow anode ionization device which comprises a first electrode, a second electrode and a third electrode which are sequentially installed in a laminated mode in the axial direction, a metal screw sequentially penetrates through the first electrode, the second electrode and the third electrode and then is locked to a preceding-stage connector, and a top cover is detachably assembled on the end face of the first electrode. A discharge region with an integrated structure is formed; the first electrode is provided with an air inlet, and the preceding-stage connector is provided with an air outlet I; the insulation cover is attached to the end face of the top cover, and a screw penetrates through the insulation cover and then is locked to the front-stage connector; through the arrangement of the top cover with the detachable structure in the discharge area and the combination of the insulation cover, the disassembly, replacement and cleaning operation of the discharge area are facilitated, the electron current density is effectively improved, and the efficiency and the safety are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to mass spectrum analysis technical field especially a hollow anode ionization device. BACKGROUND

[0002] Ion source technology is widely used in material surface modification research and microelectronic device manufacturing, so ion source technology is a very important application technology. Ion source is the core component of ion beam surface treatment, which is the source of generating ions. When various ions generated by the ion source obtain high energy through the electric field, the sample surface is treated with these high-energy ions to form a new structure, thereby achieving the purpose of material surface modification and new device formation.

[0003] Hollow anode ion source is an ion source technology widely used in mass spectrum analysis, particle accelerator, vacuum electronics, material processing and other fields. Its core principle is to excite current through the anode of hollow structure by using high voltage difference in low pressure vacuum environment, thereby realizing ionization of gas molecules or atoms and generating ion beam. This technology has been widely used in scientific research and industry because it can provide efficient ionization and high current density.

[0004] In the prior art, the hollow anode ion source is cumbersome to disassemble, which is not conducive to daily cleaning operation. At the same time, the electron current density also has room for improvement. UTILITY MODEL CONTENT

[0005] To solve the above problems, the present application provides a hollow anode ionization device with reasonable structure, which is convenient to disassemble, replace and clean, and helps to effectively improve the electron current density, improve efficiency and safety.

[0006] The technical scheme adopted by the utility model is as follows:

[0007] A hollow anode ionization device, comprising a first electrode, a second electrode and a third electrode installed in sequence along the axial direction, a metal screw passing through the first electrode, the second electrode and the third electrode in sequence and then locked to a front-stage connector, a top cover detachably assembled on the end face of the first electrode to form an integrated discharge area; the first electrode is provided with an air inlet, and the front-stage connector is provided with an air outlet one; further comprising an insulating cover attached to the end face of the top cover, and the screw passes through the insulating cover and is then locked to the front-stage connector.

[0008] As a further improvement of the above technical scheme:

[0009] Insulating spacers are arranged between the first electrode and the second electrode, between the second electrode and the third electrode, and between the third electrode and the front-stage connector, respectively; and an insulating ring is used to isolate the second electrode and the metal screw.

[0010] The top cover is a circular sheet structure, the top cover is threadedly fitted to the end surface of the first sheet electrode, a locking groove is formed in the middle of the side surface of the top cover away from the first sheet electrode, a pin is installed on the end surface of the top cover facing the insulating cover, and the insulating cover is fixed in position relative to the top cover through the pin.

[0011] The top cover is a metal circular sheet, the diameter of the top cover is smaller than that of the first sheet electrode, and the top cover is embedded into the internally threaded hole of the end surface of the first sheet electrode through the external thread on the circumferential wall surface.

[0012] The first sheet electrode, the second sheet electrode and the front-stage connector are all annular structures axially penetrating, a convex column is extended outwardly at the center of the side surface of the top cover facing the first sheet electrode, a tapered hole is formed at the axial center of the third sheet electrode, and the small end of the tapered hole faces the second sheet electrode; the diameters of the axial center holes of the first sheet electrode and the second sheet electrode are the same, and the diameter of the small end of the tapered hole is smaller than that of the axial center hole of the second sheet electrode.

[0013] The diameters of the insulating cover and the front-stage connector are greater than those of the first sheet electrode, the second sheet electrode and the third sheet electrode, and the screws are arranged outside the circumferences of the first sheet electrode, the second sheet electrode and the third sheet electrode.

[0014] A plurality of annular electrodes are axially stacked on the side surface of the front-stage connector away from the third sheet electrode, a rear-stage connector is attached to the outer end surface of the outermost annular electrode, thereby forming a transmission zone, a tapered hole is formed at the center of the rear-stage connector to form an outlet, and the small end of the tapered hole faces the annular electrode; and a support rod is supported and fixed between the front-stage connector and the rear-stage connector.

[0015] A sample inlet and a gas outlet are further formed on the annular electrodes in the transmission zone, the sample inlet is formed on the first annular electrode close to the front-stage connector, and the distance between the gas outlet and the front-stage connector is greater than the distance between the sample inlet and the front-stage connector.

[0016] Insulating spacers are arranged between the annular electrodes and the front-stage connector, between adjacent annular electrodes and between the annular electrodes and the rear-stage connector.

[0017] The first sheet electrode, the second sheet electrode, the third sheet electrode, the front-stage connector, the annular electrodes and the rear-stage connector are all made of conductive materials, which include but are not limited to stainless steel and gold-plated ceramic.

[0018] Compared with the prior art, the utility model has the following beneficial effects:

[0019] The top cover of the dismountable structure of the discharge zone is provided, combined with the insulating cover, the discharge zone is convenient to dismount, replace and clean, and the electronic flow density is effectively improved, and the efficiency and safety are improved.

[0020] The utility model still includes the following advantages:

[0021] The first electrode, the second electrode and the third electrode are locked to the front-stage connector through metal screws to form an electrode assembly with an integrated structure, which is convenient for disassembly of the insulating cover and the top cover for replacement and cleaning operation.

[0022] The setting of the insulating cover at the outer end of the top cover effectively ensures the safety and reliability of the ionization device.

[0023] The convex column is formed by extending outwardly in the middle of the top cover and extends into the ionization reaction cavity, and the setting of the convex column effectively improves the ionization efficiency and enhances the ion concentration.

[0024] The ionization device in the embodiment can be disassembled and replaced for quick and continuous use after long-time operation leading to efficiency decline. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 The utility model discloses an appearance structure diagram.

[0026] Figure 2 The utility model discloses a sectional view.

[0027] Figure 3 The utility model discloses a structure diagram of the top cover.

[0028] Figure 4 The utility model discloses a top view. Figure 3 The utility model discloses a top view.

[0029] Figure 5 The utility model discloses an electronic density simulation effect diagram compared with the traditional structure.

[0030] 1, discharge area; 2, transmission area; 3, first electrode; 4, second electrode; 5, third electrode; 6, top cover; 7, insulating gasket one; 8, insulating cover; 9, pin; 10, gas inlet; 11, screw; 12, front-stage connector; 13, gas outlet one; 14, sample inlet; 15, ring electrode; 16, insulating gasket two; 17, gas outlet two; 18, support rod; 19, rear-stage connector; 20, taper hole; 21, insulating ring; 22, metal screw; 61, locking groove; 62, convex column. DETAILED DESCRIPTION

[0031] The specific implementation of the utility model will be described below in combination with the drawings.

[0032] For example, Figure 1 And Figure 2As shown, the hollow anode ionization device of the embodiment comprises a first electrode 3, a second electrode 4, and a third electrode 5 which are sequentially stacked and mounted in the axial direction, a metal screw 22 is sequentially threaded through the first electrode 3, the second electrode 4, and the third electrode 5 and then locked to the front-stage connector 12, the first electrode 3 is detachably fitted with a top cover 6 at the end face, and the discharge area 1 is formed as an integrated structure; the first electrode 3 is provided with an air inlet 10, and the front-stage connector 12 is provided with an air outlet 13; and the ionization device further comprises an insulating cover 8 which is arranged in close contact with the end face of the top cover 6, and a screw 11 is threaded through the insulating cover 8 and then locked to the front-stage connector 12.

[0033] In the embodiment, the first electrode 3, the second electrode 4, and the third electrode 5 are locked to the front-stage connector 12 by the metal screw 22 to form an integrated electrode assembly, and the top cover 6 and the insulating cover 8 are detachable, which facilitates the disassembly, replacement, and cleaning operations.

[0034] In the embodiment, the setting of the top cover 6 and the insulating cover 8 at the outer end effectively ensures the safety and reliability of the ionization device; after a long time of work causes the efficiency to decrease, the ionization device can be quickly and continuously used through the disassembly and replacement of the top cover 6.

[0035] Insulating spacers 7 are arranged between the first electrode 3 and the second electrode 4, between the second electrode 4 and the third electrode 5, and between the third electrode 5 and the front-stage connector 12, respectively, to achieve mutual separation; and an insulating ring 21 is arranged between the second electrode 4 and the metal screw 22.

[0036] In the embodiment, the setting of the insulating spacers 7 makes the spacing between the first electrode 3, the second electrode 4, and the third electrode 5 the same, and the spacing is greater than 0.1 mm, for example, the spacing is set to 2 mm; and the thicknesses of the first electrode 3, the second electrode 4, and the third electrode 5 are all greater than 0.1 mm.

[0037] In actual use, the voltage of the first electrode 3 is the same as that of the third electrode 5, which is different from that of the second electrode 4.

[0038] As shown in Figs. 1 and 2, Figure 3 and Figure 4 The top cover 6 is a circular sheet structure, the top cover 6 is threadedly fitted to the end face of the first electrode 3, a locking groove 61 is formed in the middle of the side of the top cover 6 away from the first electrode 3, a pin 9 is mounted on the end face of the top cover 6 facing the insulating cover 8, and the position of the insulating cover 8 relative to the top cover 6 is fixed by the pin 9.

[0039] In the embodiment, the setting of the locking groove 61 facilitates the rotation of the top cover 6 relative to the first electrode 3 by using a tool, for example, a screwdriver is used to install or disassemble the top cover 6.

[0040] In the embodiment, the locking groove 61 can be a linear type, a cross type or a hexagonal structure.

[0041] The top cover 6 is a metal disc, the diameter of the top cover 6 is smaller than the diameter of the first electrode 3, and the top cover 6 is embedded into the inner threaded hole of the end surface of the first electrode 3 through the outer thread on the circumferential wall.

[0042] In the embodiment, the thickness of the top cover 6 is smaller than the thickness of the first electrode 3, and the diameter of the top cover 6 is smaller than the diameter of the first electrode 3, which effectively ensures that the top cover 6 is embedded into the first electrode 3, for example, the diameter of the top cover 6 is set to 22mm.

[0043] The first electrode 3, the second electrode 4 and the front-stage connector 12 are all annular structures axially penetrating to form an ionization reaction cavity; the convex column 62 is outwardly extended from the side surface center of the top cover 6 facing the first electrode 3, and the third electrode 5 is axially provided with a tapered hole with a small end facing the second electrode 4; the diameters of the axial center holes of the first electrode 3 and the second electrode 4 are the same, and the diameter of the small end of the tapered hole is smaller than the diameter of the axial center hole of the second electrode 4.

[0044] In the embodiment, the convex column 62 is outwardly extended from the middle of the top cover 6 and extends into the ionization reaction cavity; through the setting of the convex column 62, the ionization efficiency is effectively improved, and the ion concentration is improved.

[0045] In the embodiment, compared with directly processing the convex column on the insulating cover 8, it is more convenient and low-cost to process the convex column 62 on the top cover 6, and it is more convenient to disassemble, replace and higher in stability of the whole ionization device.

[0046] In the embodiment, the outer diameters of the first electrode 3, the second electrode 4 and the third electrode 5 are not less than 0.1mm, for example, the outer diameters are all set to 45mm, the inner diameters of the first electrode 3 and the second electrode 4 are set to 12mm, and the diameter of the small end of the tapered hole of the third electrode 5 is set to 1mm.

[0047] In the embodiment, the height of the convex column 62 on the top cover 6 is greater than 0.1mm, and the radius of the convex column 62 is greater than 0.1mm; for example, the height of the convex column 62 is set to 2mm, and the radius is set to 1mm.

[0048] The diameters of the insulating cover 8 and the front-stage connector 12 are greater than the diameters of the first electrode 3, the second electrode 4 and the third electrode 5, and the screw 11 is arranged outside the circumferences of the first electrode 3, the second electrode 4 and the third electrode 5; which effectively ensures the stability and reliability of the overall structure of the ionization device.

[0049] In one of the embodiments, the diameter of the insulating cover 8 is 70 mm, the diameter of the first electrode 3, the second electrode 4 and the third electrode 5 is 45 mm, and the diameter of the front connector 12 is 70 mm.

[0050] The front connector 12 side away from the third electrode 5 is axially stacked with a plurality of annular electrodes 15, and the outer end surface of the outermost annular electrode 15 is attached with a rear connector 19 to form a transmission area 2. A taper hole 20 is formed in the center of the rear connector 19 to form an outlet, and the small end of the taper hole 20 is arranged towards the annular electrode 15. It also includes a support rod 18 supported and fixed between the front connector 12 and the rear connector 19.

[0051] In this embodiment, the plurality of annular electrodes 15 are arranged in parallel, equidistant and coaxial.

[0052] It also includes a sample inlet 14 and a gas outlet two 17 formed on the annular electrode 15 in the transmission area 2. The sample inlet 14 is formed on the first annular electrode 15 close to the front connector 12, and the distance between the gas outlet two 17 and the front connector 12 is greater than the distance between the sample inlet 14 and the front connector 12.

[0053] In one of the embodiments, N annular electrodes 15 are provided, and the sample inlet 14 and the gas outlet two 17 are formed on the first annular electrode 15 and the N-2 annular electrode 15, respectively. For example, when N is ten, i.e. ten annular electrodes 15 are provided, the sample inlet 14 and the gas outlet two 17 are formed on the first and eighth annular electrodes 15, respectively.

[0054] In this embodiment, the inner diameter of a single annular electrode 15 is greater than 1 mm, the thickness is greater than 0.1 mm, and the distance between adjacent annular electrodes 15 is greater than 0.1 mm. For example, the outer diameter of a single annular electrode 15 is 46 mm, the inner diameter is 30 mm, the thickness is 8 mm, and the distance between adjacent annular electrodes 15 is 2 mm.

[0055] Insulating spacers two 16 are arranged between the annular electrode 15 and the front connector 12, between adjacent annular electrodes 15, and between the annular electrode 15 and the rear connector 19 to separate them from each other.

[0056] In this embodiment, the diameter of the rear connector 19 is greater than the diameter of the front connector 12, the inner diameter of the front connector 12 is smaller than the outer diameter of the first electrode 3, and the inner diameter of the rear connector 19 is smaller than the outer diameter of the annular electrode 15. The thickness of the front connector 12 and the rear connector 19 is greater than 1 mm, respectively. For example, the diameter of the front connector 12 is 70 mm, the inner diameter is 3 mm, and the thickness is 7 mm. The diameter of the rear connector 19 is 104 mm, the inner diameter is 12 mm, and the thickness is 6.5 mm.

[0057] The first electrode 3, the second electrode 4, the third electrode 5, the preamplifier connector 12, the ring electrode 15, and the postamplifier connector 19 are all made of conductive materials, including but not limited to stainless steel and gold-plated ceramic.

[0058] In this embodiment, the upper and lower cavities are fixed and connected by the front connector 12 and the rear connector 19; combined with the insulating cover 8, the overall stability of the ionization device structure is effectively guaranteed.

[0059] The method of using this utility model is as follows: water vapor enters the discharge zone 1 through the air inlet 10, a 700V DC voltage is applied to the first electrode 3, the third electrode 5 and the top cover 6, the second electrode 4 is grounded, water vapor is extracted from the air outlet 13, the sample enters the transmission zone 2 through the sample inlet 14 and moves toward the cone hole 20 under the action of the electric field, and at the same time, the transmission zone 2 is evacuated through the air outlet 17.

[0060] After prolonged use, the protrusions 62 on the top cover 6 will gradually wear, oxidize, or corrode due to the high temperature and strong current, resulting in losses. The ionization device can be kept running quickly and continuously by replacing the top cover 6. When replacing the top cover 6, first remove the insulating cover 8, then remove the top cover 6 from the first electrode 3, replace it with a new top cover 6, and install the insulating cover 8.

[0061] like Figure 5 The figure shown is a simulation diagram of the electron density of the ionization device in this embodiment compared with that of the conventional ionization device. It can be seen that by setting the protruding post 62 on the top cover 6, the electron density of the ionization device in this embodiment is significantly better than that of the conventional ionization device, with an increase of about 2 times.

[0062] This invention facilitates the disassembly, replacement, and cleaning of the discharge zone, and helps to effectively increase electron flow density, thereby improving efficiency and safety.

[0063] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0064] The above description is an explanation of the present utility model and not a limitation thereof. The scope of the present utility model is defined by the claims. Within the protection scope of the present utility model, any form of modification may be made.

Claims

1. A hollow anode ionization device, characterized by: The application relates to a discharge device, which comprises a first electrode (3), a second electrode (4) and a third electrode (5) which are sequentially stacked along the axial direction, a metal screw (22) sequentially penetrating through the first electrode (3), the second electrode (4) and the third electrode (5) and then being locked to a front-stage connector (12), a top cover (6) which is detachably arranged on the end surface of the first electrode (3) and forms an integrated discharge area (1), an air inlet (10) arranged on the first electrode (3), an air outlet (13) arranged on the front-stage connector (12), an insulating cover (8) arranged on the end surface of the top cover (6), and a screw (11) penetrating through the insulating cover (8) and then being locked to the front-stage connector (12).

2. A hollow anode ionization device as defined in claim 1, characterized in that: Insulating gaskets (7) are arranged between the first electrode (3) and the second electrode (4), between the second electrode (4) and the third electrode (5) and between the third electrode (5) and the front-stage connector (12), and an insulating ring (21) is arranged between the second electrode (4) and the metal screw (22).

3. A hollow anode ionization device as defined in claim 1, wherein: The top cover (6) is a circular sheet structure, the top cover (6) is threadedly arranged on the end surface of the first electrode (3), a locking groove (61) is formed in the middle of the side surface of the top cover (6) which is away from the first electrode (3), a pin (9) is arranged on the end surface of the top cover (6) which faces the insulating cover (8), and the position of the insulating cover (8) relative to the top cover (6) is fixed through the pin (9).

4. A hollow anode ionization device as defined in claim 3, wherein: The top cover (6) is a metal circular sheet, the diameter of the top cover (6) is smaller than that of the first electrode (3), and the top cover (6) is embedded into an inner threaded hole in the end surface of the first electrode (3) through outer threads on the circumferential wall surface.

5. A hollow anode ionization device as defined in claim 1, wherein: The first electrode (3), the second electrode (4) and the front-stage connector (12) are all annular structures which are axially penetrated, a convex column (62) is outwardly and convexly extended at the center of the side surface of the top cover (6) which faces the first electrode (3), a tapered hole is formed at the axial center of the third electrode (5), and the small end of the tapered hole faces the second electrode (4); the diameters of the axial center holes of the first electrode (3) and the second electrode (4) are the same, and the diameter of the small end of the tapered hole is smaller than that of the axial center hole of the second electrode (4).

6. A hollow anode ionization device as defined in claim 1, wherein: The diameters of the insulating cover (8) and the front-stage connector (12) are larger than those of the first electrode (3), the second electrode (4) and the third electrode (5), and the screw (11) is arranged outside the circumferences of the first electrode (3), the second electrode (4) and the third electrode (5).

7. A hollow anode ionization device as defined in claim 1, wherein: A plurality of annular electrodes (15) are axially stacked on the side surface of the front-stage connector (12) which is away from the third electrode (5), a rear-stage connector (19) is arranged on the outer end surface of the outermost annular electrode (15), a transmission area (2) is formed, a tapered hole (20) is formed at the center of the rear-stage connector (19) to form an outlet, the small end of the tapered hole (20) faces the annular electrode (15), and a supporting rod (18) is arranged between the front-stage connector (12) and the rear-stage connector (19).

8. A hollow anode ionization device as defined in claim 7, wherein: It also includes a sample inlet (14) and a second gas outlet (17) on the ring electrodes (15) in the transmission zone (2). The sample inlet (14) is on the first ring electrode (15) near the front connector (12), and the distance between the second gas outlet (17) and the front connector (12) is greater than the distance between the sample inlet (14) and the front connector (12).

9. A hollow anode ionization device as defined in claim 7, wherein: Insulating pads (16) are arranged between the ring electrodes (15) and the front connector (12), between adjacent ring electrodes (15), and between the ring electrodes (15) and the rear connector (19).

10. A hollow anode ionization device as defined in claim 7, wherein: The first electrode (3), the second electrode (4), the third electrode (5), the front connector (12), the ring electrode (15), and the rear connector (19) are all made of conductive material, including but not limited to stainless steel and gold-plated ceramic.

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