Multi-cavity continuous high-temperature heat treatment equipment

Abstract

The utility model discloses multi-chamber continuous high-temperature heat treatment equipment, which comprises a feeding chamber, a processing chamber and a discharging chamber which are sequentially and continuously arranged together, the processing chamber comprises at least one transfer section and a cooling section, and the top of the transfer section is connected with at least one high-temperature chamber; a material translation mechanism, a heat preservation isolation door mechanism and a material lifting mechanism are arranged in the processing cavity, and each high-temperature cavity is provided with a material keeping mechanism. The multiple high-temperature cavities are connected in series through the transfer sections, so that the whole high-temperature heat treatment equipment forms a three-dimensional space layout, the plane occupied area of the whole equipment is greatly reduced, and the space utilization rate is higher. By arranging at least one high-temperature chamber on the same transfer section, one or more high-temperature heat treatment processes can be performed on the same workpiece, and heat treatment can be performed on a plurality of workpieces at the same time, so that the requirements of the plurality of high-temperature heat treatment processes of the plurality of workpieces can be met at the same time, and the production efficiency is greatly improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor, especially to a kind of multi-chamber continuous high-temperature heat treatment equipment. BACKGROUND

[0002] With the rapid development of semiconductor industry, the demand for crystal materials is more and more prosperous, and the production efficiency and cost of high-temperature heat treatment are more and more valued by the industry. In the production process of crystal materials, continuous high-temperature heat treatment equipment is generally used for material processing. The existing continuous high-temperature heat treatment equipment is generally arranged in a plane, including a plurality of continuously arranged chambers, such as preheating chamber, transfer chamber, high-temperature chamber, annealing chamber, cooling chamber, etc. In order to facilitate the transfer of workpieces, the continuous chambers are usually arranged in a linear arrangement. This chamber arrangement has low space utilization and requires a large site for installation. In addition, this equipment can usually only be used for heat treatment process of single specification workpiece and cannot meet the demand of simultaneous heat treatment of multiple workpieces, which has large production application limitation and low production efficiency. At the same time, the transmission mechanism is arranged in the high-temperature heat treatment chamber, which has low running reliability and relatively high maintenance cost, and the dispersed feeding and discharging increases the labor intensity of workers. SUMMARY

[0003] The utility model solves the technical problem that the existing continuous high-temperature heat treatment equipment has low space utilization and cannot meet the simultaneous treatment of multiple workpieces, and provides a kind of multi-chamber continuous high-temperature heat treatment equipment.

[0004] The technical solution of the utility model is: a kind of multi-chamber continuous high-temperature heat treatment equipment is constructed, including the feeding chamber, processing chamber and discharging chamber that are sequentially and continuously arranged together, characterized in that the processing chamber includes a cooling section and at least one transfer section, and at least one high-temperature chamber is connected to the top of each transfer section;Each of the transfer section is provided with a feeding chamber, and a feeding isolation door mechanism is provided between the transfer section and the feeding chamber;A discharging isolation door mechanism is provided between the cooling section and the discharging chamber, and a partition isolation door is provided between the transfer section and the cooling section.

[0005] A material translation mechanism is provided in the processing chamber, which controls the material tray containing workpieces to translate from each transfer section to the cooling section according to a preset trajectory;A feeding port is provided at the top of each high-temperature chamber of the transfer section, and a heat preservation isolation door mechanism is provided at the feeding port to open and close the feeding port according to a preset process.

[0006] The bottom of each feeding port in the transfer section is provided with a material lifting mechanism, which lifts the material tray on the material translation mechanism into or lowers the material tray from the high-temperature chamber according to a preset process;

[0007] Each high-temperature chamber is provided with a material holding mechanism at the feeding port, which clamps or releases the material tray sent by the material lifting mechanism according to a preset process.

[0008] Further, the material translation mechanism is arranged at the inner bottom of the processing chamber, which includes a translation guide rail arranged according to a preset track, a plurality of rollers rotatably arranged on the translation guide rail, a chain driving the plurality of rollers to rotate synchronously, a translation motor driving the chain to rotate through a chain wheel shaft, and a material translation vehicle slidingly arranged on the plurality of rollers, and the material tray is arranged on the material translation vehicle; the material tray is placed on the material translation vehicle, facilitating the transfer of the workpiece.

[0009] Further, the material lifting mechanism includes a lifting hydraulic cylinder arranged at the outer bottom of the processing chamber, a lifting plate arranged inside the processing chamber below the guide rail, a lifting guide rod driven by the lifting hydraulic cylinder and fixedly connected to the bottom of the lifting plate through the bottom side wall of the processing chamber, and the lifting plate is opposite to the bottom of the feeding port; when the material translation vehicle slides directly above the lifting plate, the lifting hydraulic cylinder can drive the lifting guide rod to lift and drive the lifting plate to pass through the material translation vehicle, the lifting plate lifts the material tray on the material translation vehicle upward and passes through the corresponding feeding port into the corresponding high-temperature chamber; the workpiece to be processed can be sent into the corresponding high-temperature chamber according to a preset program.

[0010] Further, the material tray includes a heat preservation support plate made of heat preservation material, a heat preservation plate frame arranged outside the heat preservation support plate, and a crucible arranged above the heat preservation support plate, and the material tray is made of high-temperature resistant material such as graphite.

[0011] Further, the material holding mechanism includes a driving cylinder arranged at the outer side wall of the high-temperature chamber, a cylinder telescopic rod driven by the driving cylinder and extending into the high-temperature chamber through the side wall of the high-temperature chamber, and a plug plate fixed at the end of the cylinder telescopic rod, and the bottom of the material tray is provided with a notch matched with the plug plate; the material tray is conveniently held in the high-temperature chamber, so that the high-temperature environment in the high-temperature chamber is maintained after the heat preservation isolation door is closed, thereby saving the energy required for heating and reducing energy consumption.

[0012] Further, each high-temperature chamber comprises a high-temperature chamber furnace shell fixed on the top of the transfer section, a heat preservation assembly arranged in the high-temperature chamber furnace shell, and a heating body arranged in the heat preservation assembly and used for heating a workpiece; the bottom of the high-temperature chamber furnace shell is provided with an opening communicated with the corresponding feeding port.

[0013] Further, the heat preservation isolation door mechanism comprises a heat preservation guide rail horizontally arranged on the top of the transfer section, a heat preservation isolation door sealably covering the opening of the high-temperature chamber furnace shell, a guide roller fixedly arranged on the end surface of the heat preservation isolation door and slidingly arranged in the heat preservation guide rail, and a first driving mechanism driving the heat preservation isolation door to reciprocally slide.

[0014] Further, the inner side wall of the transfer section is provided with a processing heat preservation layer, and the partition isolation door is located above the material translation mechanism.

[0015] Further, the feeding chamber comprises a feeding chamber furnace shell and a feeding chamber furnace door; the feeding isolation door mechanism comprises a door shell arranged between the feeding chamber furnace shell and the transfer section, two heat preservation isolation doors vertically arranged in the door shell and capable of sliding up and down, and an isolation door lifting mechanism arranged outside the feeding chamber furnace shell.

[0016] The multi-chamber continuous high-temperature heat treatment equipment has the following beneficial effects: the high-temperature chambers are arranged on the top of the transfer section of the processing chamber, the multiple high-temperature chambers are connected by the transfer section, the entire high-temperature heat treatment equipment forms a three-dimensional space layout, the planar area occupied by the entire equipment is greatly reduced, and the space utilization rate is higher. At least one high-temperature chamber is arranged on the same transfer section, one or more high-temperature heat treatment processes (such as annealing, hydrogen permeation, groove sinking, etc.) can be performed on the same workpiece as needed, multiple workpieces can be simultaneously heat treated in the multiple high-temperature chambers, the multiple high-temperature heat treatment process requirements of the multiple workpieces can be simultaneously met, and the production efficiency is greatly improved. At least one transfer section is connected with the same cooling section, the multiple workpieces processed can be concentrated in the cooling section for cooling, centralized discharging is realized, and the work intensity of discharging is reduced. The heat preservation isolation door mechanism is arranged at the feeding port, the high-temperature process between the high-temperature chamber and the transfer section is isolated, the influence of high-temperature radiation in the high-temperature chamber on the feeding and discharging isolation door mechanism is avoided, and the stability of the entire equipment in operation is improved. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 Fig. 1 is a front view of a preferred embodiment of the multi-chamber continuous high-temperature heat treatment equipment;

[0018] Figure 2It is the whole structure schematic diagram of the preferred embodiment of the multi-chamber continuous high-temperature heat treatment equipment.

[0019] Figure 3 It is the structure schematic diagram of the feed isolation door mechanism in the preferred embodiment of the multi-chamber continuous high-temperature heat treatment equipment.

[0020] Figure 4 It is the structure schematic diagram of the material translation mechanism in the preferred embodiment of the multi-chamber continuous high-temperature heat treatment equipment.

[0021] Figure 5 It is the structure schematic diagram of another view of the material translation mechanism in the preferred embodiment of the multi-chamber continuous high-temperature heat treatment equipment.

[0022] Figure 6 It is the structure schematic diagram of the heat preservation isolation door mechanism in the preferred embodiment of the multi-chamber continuous high-temperature heat treatment equipment.

[0023] Figure 7 It is another structure schematic diagram of the heat preservation isolation door mechanism in the preferred embodiment of the multi-chamber continuous high-temperature heat treatment equipment.

[0024] Figure 8 It is the structure schematic diagram of the material lifting mechanism and the material holding mechanism after the material tray is lowered in the preferred embodiment of the multi-chamber continuous high-temperature heat treatment equipment.

[0025] Figure 9 It is the structure schematic diagram of the material lifting mechanism and the material holding mechanism after the material tray is lifted to the preset position in the preferred embodiment of the multi-chamber continuous high-temperature heat treatment equipment.

[0026] Figure 10 It is the I part enlarged view of Figure 9 . DETAILED DESCRIPTION

[0027] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiment or prior art description, and obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained according to these drawings without creative labor.

[0028] It should be noted that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0029] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the present application belongs. The terminology used in the specification of the present application herein is only for the purpose of describing specific embodiments and is not intended to limit the present application.

[0030] As shown in Figure 1 , 2 , 3, 4, 5, 6, 7, 8, 9, 10, in the preferred embodiment of the multi-chamber continuous high-temperature heat treatment equipment, the main part includes the feeding chamber 1, the processing chamber 10 and the discharging chamber 2 which are arranged in sequence, the processing chamber 10 includes a cooling section 12 and at least one transfer section 11, and at least one high-temperature chamber 20 is connected to the top of each transfer section 11; wherein the feeding isolation door mechanism 30 is arranged between the transfer section 11 and the feeding chamber 1, the discharging isolation door mechanism 40 is arranged between the cooling section 12 and the discharging chamber 2, and the partition isolation door 50 is arranged between the transfer section 11 and the cooling section 12. The material translation mechanism 60 is arranged in the processing chamber 10, the workpiece 4 is placed in the material tray 3, and the material tray 3 is controlled to translate according to the preset trajectory by the material translation mechanism 60.

[0031] As shown in Figure 1 , 2 , 3, in the preferred embodiment, the feeding chamber 1 can include a feeding chamber furnace shell 1a and a feeding chamber furnace door 1b, wherein the feeding chamber furnace door 1b can be arranged at the top or side of the feeding chamber furnace shell 1a. By opening the feeding chamber furnace door 1b, the workpiece 4 can be placed in the corresponding material tray 3. In the preferred embodiment, the feeding chamber 1 is preferably provided with a feeding translation mechanism 1c to send the material tray 3 containing the workpiece 4 into the processing chamber 10. Specifically, the feeding translation mechanism 1c can include a feeding guide rail arranged in the feeding chamber furnace shell 1a, a plurality of rollers arranged on the feeding guide rail, a chain driving all the rollers to rotate synchronously, a sprocket driving the chain to rotate, a sprocket shaft fixing the sprocket outside the feeding chamber furnace shell 1a, and a feeding drive motor driving the sprocket shaft to rotate. The drive motor drives the sprocket to rotate through the sprocket shaft, thereby driving the rollers on the chain to roll on the feeding guide rail. When the material tray 3 is placed on the rollers of the feeding translation mechanism 1c, the material tray 3 is sent into the processing chamber 10 along the guide rail direction.

[0032] As Figure 1 , 2 shown in the preferred embodiment, the processing chamber 10 is preferably provided with a processing chamber furnace shell 13, a partitioning door 50 provided in the processing chamber furnace shell 13, which divides the processing chamber into a transfer section 11 and a cooling section 12. The inner side of the processing chamber furnace shell 13 of the transfer section 11 is provided with a heat insulation layer 14, and a feeding port 15 is provided at the top of the transfer section 11 corresponding to each high-temperature chamber 20. A heat insulation partitioning door mechanism 70 is provided at each feeding port 15, and a material lifting mechanism 80 is provided at the bottom of the transfer section 11 corresponding to each feeding port 15, which is located below the material translation mechanism 60.

[0033] As Figure 1 , 2 shown in the preferred embodiment, the high-temperature chamber 20 includes a high-temperature chamber furnace shell 21 fixed at the top of the transfer section 11, a heat insulation assembly 22 provided in the high-temperature chamber furnace shell 21, and a heating body 23 provided in the heat insulation assembly 22. One end of the high-temperature chamber furnace shell is open 24, which is directly opposite the feeding port 15, and the heating body 23 is used to heat the workpiece 4 according to the process requirements. As Figure 1 , 2 , 7, the heat insulation partitioning door mechanism 70 is provided between the open end 24 of the high-temperature furnace shell and the feeding port 15 at the top of the transfer section. Specifically, the heat insulation partitioning door mechanism 70 can be provided to include a heat insulation guide rail 71 horizontally provided at the top of the transfer section 11, a heat insulation partitioning door 72 sealably covering the open end 24 of the high-temperature chamber furnace shell, a guide roller 73 fixed at the end face of the heat insulation partitioning door 72 and slidingly provided in the heat insulation guide rail 71, and a first driving mechanism for driving the heat insulation partitioning door 72 to reciprocally slide, such as a driving motor. The first driving mechanism can include a rack 74 fixed at the side of the heat insulation partitioning door 72, a gear shaft 75 rotatably provided at the top of the transfer section 11, a gear 76 sleeved and fixed on the gear shaft 75, a first motor 77 for driving the gear shaft 75 to rotate, and the gear 76 cooperates with the rack 74. When it is necessary to open or close the heat insulation partitioning door 72, the first motor 77 drives the gear shaft 75 to rotate in the opposite direction, which drives the heat insulation partitioning door 72 to reciprocally move through the cooperation of the gear 76 and the rack 74, thereby shielding or opening the open end 24 of the high-temperature chamber furnace shell.

[0034] In the preferred embodiment, a material lifting mechanism 80 is preferably arranged at the bottom of each feeding port 15 in the transfer section 11 to lift the material tray 3 from the material translation mechanism 60 into the high-temperature chamber 20 for high-temperature heat treatment process. The material lifting mechanism 80 preferably comprises a lifting hydraulic cylinder 81, a lifting plate 82, and a lifting guide rod 83. The lifting hydraulic cylinder 81 is arranged at the bottom of the processing chamber furnace shell 13 outside, the lifting plate 82 is arranged inside the processing chamber furnace shell 13 below the translation guide rail, and the lifting guide rod 83 is driven by the lifting hydraulic cylinder 81 and fixedly connected to the lifting plate 82 after passing through the bottom side wall of the processing chamber furnace shell 13. Specifically, the lifting plate 82 is directly opposite the feeding port 15. When the material translation vehicle slides directly above the lifting plate 82, the lifting hydraulic cylinder 81 drives the lifting guide rod 83 to lift and drive the lifting plate 82 to pass through the material translation vehicle, lifting the material tray 3 on the material translation vehicle upward, so that the material tray 3 passes through the corresponding feeding port into the high-temperature chamber 20. Specifically, the material tray 3 can be arranged to comprise a heat preservation support plate 3a made of heat preservation material, a heat preservation plate frame 3b arranged outside the heat preservation support plate 3a, and a crucible 3c arranged above the heat preservation support plate 3a, to ensure that the material tray 3 can withstand the high-temperature environment in the high-temperature chamber 20.

[0035] As shown in Figure 1 、 2 , 8, 9, and 10, in the preferred embodiment, a material holding mechanism 90 is arranged near the feeding port 15 of the high-temperature chamber 20. The material holding mechanism 90 preferably comprises a driving cylinder 91 arranged on the outer side wall of the high-temperature chamber furnace shell 21, a cylinder extension rod 92 passing through the side wall of the high-temperature chamber furnace shell 21 and extending into the high-temperature chamber 20, and a plug plate 93 fixed at the end of the cylinder extension rod 92. The heat preservation support plate 3a of the material tray is provided with a notch 3d matched with the plug plate. Preferably, at least two material holding mechanisms 90 are arranged on the high-temperature chamber 20 and are circumferentially symmetrically distributed around the opening 24 of the high-temperature chamber furnace shell.

[0036] In the preferred embodiment, the material translation mechanism 60 translates the material tray 3 from the transfer section 11 to the cooling section 12 along a predetermined trajectory. Specifically, as shown in Figure 4 、 5As shown, the material translation mechanism 60 preferably comprises a translation rail 61, a plurality of rollers 62 rotatably arranged on the translation rail 61, a chain 63 for driving the plurality of rollers 62 to rotate synchronously, a sprocket shaft 65 driven by a translation motor 64, a sprocket 66 arranged on the sprocket shaft 65, and a material translation vehicle 67 arranged on the rollers 62 and slidable along the translation rail 61, the sprocket 66 being engaged with the chain 63. The translation rail 61 extends from each transfer section 11 to the cooling section 12, the translation motor 64 drives the sprocket shaft 65 to rotate the sprocket 66, which in turn drives the rollers 62 to rotate via the chain 63, so as to drive the material translation vehicle 67 on the rollers 62 to move along the translation rail 61. Preferably, the sprocket shaft 65 and the translation motor 64 are arranged outside the processing chamber furnace shell 13, and the chain 63 extends to the inside of the processing chamber furnace shell 13, so that the translation motor 64 does not need to be placed in a high-temperature environment, thereby prolonging the service life of the entire material translation mechanism 60.

[0037] According to the need, a plurality of transfer sections 11 can be arranged in the processing chamber furnace shell 13, each of the plurality of transfer sections 11 being provided with the above-mentioned feeding chamber 1, and all of the transfer sections 11 being in communication with the cooling section 12. In this way, the processing of a plurality of workpieces 4 can be carried out simultaneously, further improving the production efficiency.

[0038] As shown in FIGS. Figure 1 , 2 , 3, in the preferred embodiment, the feeding isolation door mechanism 30 preferably comprises a feeding isolation door housing 31 arranged between the feeding chamber furnace shell 1a and the processing chamber furnace shell 13, two feeding isolation doors 32 vertically slidably arranged in the feeding isolation door housing 31, and a first hydraulic cylinder 33 for driving the feeding isolation doors 32 to move up and down. When it is necessary to open the feeding isolation doors 32, the first hydraulic cylinder 33 is controlled to drive the two feeding isolation doors 32 to slide away from each other, thereby opening the passage between the feeding chamber 1 and the processing chamber 10, so as to send the material tray 3 from the feeding chamber 1 into the processing chamber 10. When it is necessary to close the feeding isolation doors 32, the first hydraulic cylinder 33 is controlled to drive the two feeding isolation doors 32 to slide towards each other until the gap between the two feeding isolation doors 32 is closed, so that the passage between the feeding chamber 1 and the processing chamber 10 is closed.

[0039] In the above-mentioned embodiment, the discharge chamber 2 can be provided with a discharge chamber furnace shell 2a and a discharge chamber furnace door 2b, which can be arranged on the top or side of the discharge chamber furnace shell 2a. Preferably, the discharge chamber 2 further comprises a discharge translation mechanism 2c for sending the material tray 3 containing the workpieces 4 from the cooling section 12 into the discharge chamber 2. The discharge translation mechanism 2c can be arranged in the same manner as the above-mentioned feeding translation mechanism 1c.

[0040] In the above embodiment, the discharge isolation door mechanism 40 can also be arranged in reference to the above-mentioned feeding isolation door mechanism 30, that is, the discharge isolation door mechanism 40 is arranged to include a discharge isolation door housing arranged between the discharge chamber furnace shell and the processing chamber furnace shell 13, two discharge isolation doors vertically slidingly arranged in the discharge isolation door housing, and a second hydraulic cylinder driving the discharge isolation doors to ascend and descend.

[0041] As Figure 2 shown, in the use of the preferred embodiment of the multi-chamber continuous high-temperature heat treatment equipment, the following processing method can be used, including the following steps:

[0042] S10. Arranging the multi-chamber continuous high-temperature heat treatment equipment as described above;

[0043] S21. First loading, placing the first workpiece into the material tray of the feeding chamber;

[0044] S22. Transfer, opening the feeding isolation door mechanism, controlling the material translation mechanism to translate the material tray containing the first workpiece to be directly below the first feeding port of the corresponding transfer section; that is, transferring the first workpiece from the first station of the feeding chamber to the second station of the transfer section;

[0045] S23. Opening the corresponding heat preservation isolation door mechanism, the material lifting mechanism corresponding to the first feeding port lifts the corresponding material tray into the corresponding high-temperature chamber, the material holding mechanism in the high-temperature chamber clamps the material tray, the heat preservation isolation door mechanism is closed, and the high-temperature chamber is controlled to process the first workpiece according to the preset process; that is, transferring the first workpiece from the second station in the transfer section to the third station in the high-temperature chamber;

[0046] S31. Second loading, placing the second workpiece into the material tray of the feeding chamber;

[0047] S32. Transfer, opening the feeding isolation door mechanism, controlling the material translation mechanism to translate the material tray containing the second workpiece to be directly below the second feeding port of the corresponding transfer section; that is, transferring the second workpiece from the first station of the feeding chamber to the fourth station of the transfer section;

[0048] S33. Opening the corresponding heat preservation isolation door mechanism, the material lifting mechanism corresponding to the second feeding port lifts the corresponding material tray into the corresponding high-temperature chamber, the material holding mechanism in the high-temperature chamber clamps the material tray, the heat preservation isolation door mechanism is closed, and the high-temperature chamber is controlled to process the second workpiece according to the preset process; that is, transferring the second workpiece from the fourth station in the transfer section to the fifth station in another high-temperature chamber;

[0049] S40. When the first workpiece is finished, open the corresponding heat insulation door mechanism, control the corresponding material lifting mechanism to lift to below the material tray in the corresponding high-temperature chamber, control the corresponding material holding mechanism to release the material tray; control the material lifting mechanism to lower the material tray to the material translation mechanism, close the heat insulation door mechanism; open the partition isolation door, and translate the material tray containing the first workpiece to the cooling section through the material translation mechanism, close the partition isolation door; repeat the steps S21 to S23 synchronously;

[0050] S50. When the second workpiece is finished, open the corresponding heat insulation door mechanism, control the corresponding material lifting mechanism 80 to lift to below the material tray in the corresponding high-temperature chamber, control the corresponding material holding mechanism to release the material tray; control the material lifting mechanism to lower the material tray to the material translation mechanism, close the heat insulation door mechanism; open the partition isolation door, and translate the material tray containing the second workpiece to the cooling section through the material translation mechanism, close the partition isolation door; repeat the steps S31 to S33 synchronously;

[0051] S60. Repeat the steps S21 to S50 synchronously in other transfer sections;

[0052] S70. When the workpieces in the cooling section reach a preset number, open the discharge isolation door mechanism, control the material translation mechanism to transfer the workpieces completing the cooling process to the discharge chamber, and close the discharge isolation door mechanism.

[0053] Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without making creative labor, any modification, equivalent replacement, improvement, etc., should be included in the protection scope of the utility model.

Claims

1. A multi-chamber continuous high-temperature heat treatment device, comprising a feeding chamber, a processing chamber, and a discharging chamber arranged sequentially together, characterized in that, The processing chamber includes a cooling section and at least one transfer section, and at least one high-temperature chamber is connected to the top of each transfer section; a feeding chamber is provided for each transfer section, a feeding isolation door mechanism is provided between the transfer section and the feeding chamber, a discharging isolation door mechanism is provided between the cooling section and the discharging chamber, and a partition isolation door is provided between the transfer section and the cooling section; The processing chamber is equipped with a material translation mechanism, which controls the material tray containing the workpiece to be translated from each of the transfer sections to the cooling section according to a preset trajectory; the top of each transfer section is equipped with a feeding port corresponding to each of the high-temperature chambers, and the feeding port is equipped with a heat-insulating isolation door mechanism that opens and closes the feeding port according to a preset process. The bottom of each of the feeding ports in the transfer section is provided with a material lifting mechanism. The material lifting mechanism lifts the material tray on the material translation mechanism into the corresponding high-temperature chamber or lowers the material tray from the high-temperature chamber onto the material translation mechanism according to a preset process. Each of the high-temperature chambers is equipped with a material holding mechanism near the feeding port. The material holding mechanism clamps or releases the material tray fed in by the material lifting mechanism according to a preset process.

2. The multi-chamber continuous high-temperature heat treatment equipment according to claim 1, characterized in that, The material translation mechanism is located at the bottom inner side of the processing chamber. The material translation mechanism includes a translation guide rail arranged according to a preset trajectory, multiple rollers rotatably arranged on the translation guide rail, a chain that drives the multiple rollers to rotate synchronously, a translation motor that drives the chain to rotate through a sprocket shaft, and a material translation trolley slidably arranged on the multiple rollers. The material tray is mounted on the material translation trolley.

3. The multi-chamber continuous high-temperature heat treatment equipment according to claim 2, characterized in that, The material lifting mechanism includes a lifting hydraulic cylinder located at the bottom of the outer side of the processing chamber, a lifting plate located inside the processing chamber and below the translation guide rail, and a lifting guide rod driven by the lifting hydraulic cylinder and fixedly connected to the bottom of the lifting plate through the bottom side wall of the processing chamber. The lifting plate is directly opposite the feeding port. When the material transfer vehicle slides to directly above the lifting plate, the lifting hydraulic cylinder can drive the lifting guide rod to rise and fall, and move the lifting plate through the material transfer vehicle. The lifting plate lifts the material tray located on the material transfer vehicle upward and passes through the corresponding feeding port into the corresponding high-temperature chamber.

4. The multi-chamber continuous high-temperature heat treatment equipment according to claim 1, characterized in that, The material tray includes an insulated tray made of insulating material, an insulating board frame disposed on the outside of the insulated tray, and a crucible disposed above the insulated tray.

5. The multi-chamber continuous high-temperature heat treatment equipment according to claim 3, characterized in that, The material holding mechanism includes a drive cylinder disposed on the outer side wall of the high-temperature chamber, a cylinder extension rod driven by the drive cylinder and extending through the side wall of the high-temperature chamber into the high-temperature chamber, and an insert plate fixed to the end of the cylinder extension rod. The bottom of the material tray is provided with a notch that matches the insert plate.

6. The multi-chamber continuous high-temperature heat treatment equipment according to claim 1, characterized in that, Each of the high-temperature chambers includes a high-temperature furnace shell fixed to the top of the transfer section, a heat insulation component disposed within the high-temperature furnace shell, and a heating element disposed within the heat insulation component for heating the workpiece; the bottom of the high-temperature furnace shell is provided with an opening communicating with the corresponding feeding port.

7. The multi-chamber continuous high-temperature heat treatment equipment according to claim 6, characterized in that, The thermal insulation door mechanism includes a thermal insulation guide rail horizontally arranged at the top of the transfer section, a thermal insulation door that can seal and cover the opening of the high-temperature furnace shell, a guide roller fixedly arranged on the end face of the thermal insulation door and slidably arranged in the thermal insulation guide rail, and a first drive mechanism for driving the thermal insulation door to reciprocate.

8. The multi-chamber continuous high-temperature heat treatment equipment according to claim 6, characterized in that, The inner wall of the transfer section is provided with a processing insulation layer, and the partition isolation door is located above the material translation mechanism.

9. The multi-chamber continuous high-temperature heat treatment equipment according to claim 8, characterized in that, The feeding chamber includes a feeding chamber furnace shell and a feeding chamber furnace door; the feeding isolation door mechanism includes an isolation door shell disposed between the feeding chamber furnace shell and the transfer section, two vertically slidable heat-insulating isolation doors disposed inside the isolation door shell, and an isolation door lifting mechanism disposed outside the feeding chamber furnace shell.

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