Wafer turnover box and dumping machine

Abstract

The utility model relates to the field of wafer production, and particularly discloses a wafer turnover box and dumping machine which comprises supporting legs, a rotating bin is rotatably connected between the upper ends of the supporting legs, a cavity for placing wafers is arranged in the rotating bin, two sides of the rotating bin are fixedly connected with connecting hooks, and one side of each supporting leg is fixedly provided with a driving device for driving the rotating bin to rotate. A sliding rail is fixedly connected to one side of the interior of each supporting leg, a sliding bin is connected to the sliding rails in a sliding mode, a material box for containing inverted wafers is placed in the sliding bin, and the two sides of the sliding bin are located on the rotating path of the connecting hooks. According to the utility model, through the design of the rotating bin, when a wafer is placed in the rotating bin through a manipulator, the rotating bin drives the sliding bin to rotate together during rotation, so that the rotating bin aligns with a material box to be placed in the process of inverting the wafer, and the wafer can be placed in the material box simultaneously after being inverted; and the process of back-and-forth clamping through multiple manipulators is avoided, and the working efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer production field, concretely relates to a wafer box turning and wafer reversing machine. BACKGROUND

[0002] The wafer box turning and wafer reversing machine is an automatic device for semiconductor industry, mainly used for the process of taking out the wafer in the box, turning over the wafer to make its head and tail upside down, and then placing it into a new box.

[0003] The existing wafer reversing machine needs to take out the wafer from the box by the mechanical hand, place it in the reversing device to reverse, take out the reversed wafer from the reversing device by the mechanical hand again, and then place it into another box, which is a relatively complicated process and has low work efficiency. Therefore, the technical personnel in the field provide a wafer box turning and wafer reversing machine to solve the problems in the above background technology. SUMMARY

[0004] To solve the above technical problems, the utility model provides a wafer box turning and wafer reversing machine, which comprises support legs, rotating warehouses are rotatably connected between the upper ends of the support legs, cavities for placing wafers are arranged in the rotating warehouses, connecting hooks are fixedly connected to the two sides of the rotating warehouses, and drive devices for driving the rotation of the rotating warehouses are fixedly installed on one side of the support legs.

[0005] Sliding rails are fixedly connected to one side of the inside of the support legs, sliding warehouses are slidably connected to the sliding rails, material boxes for containing the wafers after reversing are arranged in the sliding warehouses, and the two sides of the sliding warehouses are located on the rotating paths of the connecting hooks.

[0006] A partition plate is arranged between the rotating warehouse and the sliding warehouse, and one side of the partition plate is arc-shaped and matched with one end of the rotating path of the rotating warehouse.

[0007] Preferably, the drive device is a motor, the rotating speed of the motor is adjustable, connecting shafts are fixedly connected to the two sides of the rotating warehouse, bearings are arranged at the upper ends of the support legs, and the connecting shafts are fixedly connected to the motor through the bearings.

[0008] Preferably, the sliding rail comprises an arc-shaped frame, the arc-shaped frame is arc-shaped, the center of the arc-shaped frame is the rotating shaft of the rotating warehouse, a support frame is fixedly installed on one side of the inside of the support leg, the arc-shaped frame is fixed on the support frame, an arc-shaped rod is fixedly connected to the inside of the arc-shaped frame, and springs are arranged on the outside of the arc-shaped rod.

[0009] Preferably, the sliding warehouse comprises a sliding box, the two ends of the sliding box are provided with openings penetrating through the inside, the material box is arranged in the sliding box, a movable plate is inserted into one end of the sliding box away from the partition plate, an extension rod is fixedly installed between the upper end of the movable plate and the sliding box, a plurality of connecting columns are fixedly connected to the two sides of the sliding box, one end of the connecting column is located in the inside of the arc-shaped frame, the arc-shaped rod penetrates through one end of the connecting column, and the connecting hook can be in contact with the connecting column through rotation.

[0010] Preferably, the arc-shaped frame is fixedly connected with a height increasing frame above the arc-shaped frame, and a connecting frame is fixedly connected with one end of the height increasing frame above the rotating bin and the sliding bin.

[0011] Preferably, the sliding box is longer on the lower side than on the other three sides.

[0012] Preferably, the supporting leg is longitudinally provided with an opening below the supporting leg, and a conveying mechanism is longitudinally installed in the opening.

[0013] The technical effects and advantages of the present application are as follows:

[0014] The rotating bin is designed, and when the wafer is placed in the rotating bin by the mechanical hand, the rotating bin drives the sliding bin to rotate together in the rotating process, so that the wafer is aligned with the material box to be placed in the process of being inverted by the rotating bin, and the wafer can be placed in the material box at the same time after being inverted, thereby avoiding the process of taking the wafer back and forth by multiple mechanical hands, and improving the work efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0015] Fig. 1 is a structural schematic view provided by the present application;

[0016] Fig. 2 is a structural schematic view of the side provided by the present application;

[0017] Fig. 3 is a structural schematic view of the sliding bin provided by the present application;

[0018] In the drawings:

[0019] 1, supporting leg;

[0020] 2, rotating bin; 21, connecting hook;

[0021] 3, driving device;

[0022] 4, sliding rail; 41, arc-shaped frame; 42, supporting frame; 43, arc-shaped rod; 44, spring;

[0023] 5, sliding bin; 51, sliding box; 52, telescopic rod; 53, movable plate; 54, material box; 55, connecting column;

[0024] 6, partition; 61, height increasing frame; 62, connecting frame. DETAILED DESCRIPTION

[0025] With reference to the drawings of the embodiments of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments of the present application, all the other embodiments obtained by a person of ordinary skill in the art without creative effort belong to the scope of protection of the present application.

[0026] Please refer to Figs. 1-3 In this embodiment, a wafer box turning and film reversing machine is provided, which comprises support legs 1, a rotating bin 2 rotatably connected between the upper ends of the support legs 1, a cavity for placing a wafer inside the rotating bin 2, connecting hooks 21 fixedly connected to the two sides of the rotating bin 2, and a driving device 3 fixedly installed on one side of the support legs 1 for driving the rotating bin 2 to rotate. The rotating bin 2 is driven to rotate by the driving device 3.

[0027] A sliding rail 4 is fixedly connected to one side inside the support legs 1, a sliding bin 5 is slidably connected to the sliding rail 4, a material box 54 for containing the inverted wafer is placed inside the sliding bin 5, and the two sides of the sliding bin 5 are located on the rotating path of the connecting hooks 21. The sliding path of the sliding bin 5 is limited by the sliding rail 4, the material box 54 is installed on the sliding rail 4 for receiving the inverted wafer, the sliding bin 5 is driven to rotate along the sliding rail 4 by the connecting hooks 21 rotating through the two sides of the sliding bin 5, and the sliding bin 5 thus drives the material box 54 to align with the rotating bin 2.

[0028] A partition 6 is provided between the rotating bin 2 and the sliding bin 5, one side of the partition 6 is arc-shaped and fits the rotating path of one end of the rotating bin 2. The wafer will not fall off the rotating bin 2 when the connecting hooks 21 start to rotate by the partition 6.

[0029] In this embodiment, specifically, the driving device 3 is a motor, the rotating speed of the motor is adjustable, connecting shafts are fixedly connected to the two sides of the rotating bin 2, bearings are provided at the upper ends of the support legs 1, and the connecting shafts are fixedly connected to the motor through the bearings. The rotating bin 2 is driven to rotate by the driving device 3 at a proper speed.

[0030] In this embodiment, specifically, the sliding rail 4 comprises an arc-shaped frame 41, the arc-shaped frame 41 is arc-shaped, the center of the arc-shaped frame 41 is the rotating axis of the rotating bin 2, a support frame 42 is fixedly installed on one side inside the support legs 1, the arc-shaped frame 41 is fixed on the support frame 42, an arc-shaped rod 43 is fixedly connected inside the arc-shaped frame 41, and springs 44 are provided on the outer side of the arc-shaped rod 43. The rotating bin 2 and the sliding bin 5 can be kept synchronous when the sliding bin 5 rotates, the sliding bin 5 also compresses the springs 44 when it rotates, and the sliding bin 5 can also be reset by the action of the springs 44 when the connecting hooks 21 are reset with the rotating bin 2.

[0031] In the embodiment, specifically, the sliding bin 5 comprises a sliding box 51, the sliding box 51 is provided with an opening penetrating through at both ends, the material box 54 is placed in the sliding box 51, the movable plate 53 is inserted into one end of the sliding box 51 away from the partition plate 6, the telescopic rod 52 is fixedly installed between the upper end of the movable plate 53 and the sliding box 51, a plurality of connecting columns 55 are fixedly connected on both sides of the sliding box 51, one end of the connecting column 55 is located in the arc-shaped frame 41, the arc-shaped rod 43 penetrates through one end of the connecting column 55, and the connecting hook 21 is rotatable to contact the connecting column 55. The connecting column 55 is moved in the arc-shaped frame 41 to limit the moving path of the sliding bin 5, the connecting hook 21 is rotated to drive the connecting column 55 to rotate, and the connecting column 55 drives the sliding box 51 and the material box 54 to rotate. When the material box 54 is placed in the sliding box 51, the one end of the movable plate 53 is inserted into the connecting column 55 to limit the material box 54 in the sliding box 51. When the material box 54 and the sliding box 51 are vertically downward, the one end of the movable plate 53 is moved out of the connecting column 55, so that the material box 54 containing the inverted wafer is unloaded for subsequent continuous work.

[0032] In the embodiment, specifically, the arc-shaped frame 41 is fixedly connected with a heightening frame 61 above, one side of the heightening frame 61 is fixedly connected with a connecting frame 62, one end of the connecting frame 62 is located between the rotating bin 2 and the sliding bin 5 above, and the partition plate 6 is fixedly connected below one end of the connecting frame 62. The heightening frame 61 and the connecting frame 62 support the partition plate 6, and avoid blocking the rotating path of the connecting hook 21, so that the rotating bin 2 can be smoothly rotated.

[0033] In the embodiment, specifically, the lower side of the sliding box 51 is longer than the other three sides. When the material box 54 is placed, one end is easy to be inserted into the sliding box 51, which improves the loading speed.

[0034] In the embodiment, specifically, the support leg 1 is provided with an opening longitudinally below, and a conveying mechanism can be longitudinally installed in the opening. The falling material box 54 can be conveyed away by the conveying mechanism.

[0035] Although the embodiments of the present application have been shown and described, it is to be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A wafer flipping and unloading machine comprising support legs (1), characterized in that, The upper end of the support leg (1) is rotatably connected with a rotating bin (2), the rotating bin (2) is internally provided with a cavity for placing a wafer, the two sides of the rotating bin (2) are fixedly connected with connecting hooks (21), and the side of the support leg (1) is fixedly installed with a driving device (3) for driving the rotating bin (2) to rotate. The inside of the support leg (1) is fixedly connected with sliding rails (4), the sliding rails (4) are slidably connected with sliding bins (5), the sliding bins (5) are internally provided with material boxes (54) for containing inverted wafers, and the two sides of the sliding bins (5) are located on the rotating paths of the connecting hooks (21). The rotating bin (2) and the sliding bin (5) are provided with a partition plate (6), one side of the partition plate (6) is arc-shaped and is attached to one end of the rotating path of the rotating bin (2).

2. A wafer flipping and unloading machine according to claim 1, wherein The driving device (3) is a motor, the rotating speed of the motor is adjustable, the two sides of the rotating bin (2) are fixedly connected with connecting shafts, the upper end of the support leg (1) is provided with a bearing, and the connecting shafts are fixedly connected with the motor in a penetrating mode.

3. A wafer flipping and unloading machine according to claim 1, wherein The sliding rail (4) comprises an arc-shaped frame (41), the arc-shaped frame (41) is arc-shaped, the center of the arc-shaped frame (41) is the rotating shaft of the rotating bin (2), the inside of the one side of the support leg (1) is fixedly installed with a support frame (42), the arc-shaped frame (41) is fixed on the support frame (42), the arc-shaped frame (41) is fixedly connected with an arc-shaped rod (43) internally, and the outer side of the arc-shaped rod (43) is provided with springs (44).

4. A wafer flipping and unloading machine according to claim 3, wherein The sliding bin (5) comprises a sliding box (51), the two ends of the sliding box (51) are provided with openings penetrating the inside, the material box (54) is placed in the sliding box (51), the end, away from the partition plate (6), of the sliding box (51) is inserted with a movable plate (53), the upper end of the movable plate (53) and the sliding box (51) are fixedly installed with telescopic rods (52), the two sides of the sliding box (51) are fixedly connected with a plurality of connecting columns (55), one end of the connecting column (55) is located in the arc-shaped frame (41), the arc-shaped rod (43) penetrates one end of the connecting column (55), and the connecting hook (21) can be in contact with the connecting column (55) in rotation.

5. A wafer flipping and unloading machine according to claim 3, wherein The arc-shaped frame (41) is fixedly connected with a heightening frame (61) above, the heightening frame (61) is fixedly connected with a connecting frame (62) on one side, one end of the connecting frame (62) is located between the rotating bin (2) and the sliding bin (5) above, and the partition plate (6) is fixedly connected below one end of the connecting frame (62).

6. A wafer flipping and unloading machine according to claim 4, wherein The lower side of the sliding box (51) is longer than the other three sides.

7. A wafer flipping and unloading machine according to claim 1, wherein The lower side of the sliding box (51) is longer than the other three sides. The lower side of the sliding box (51) is longer than the other three sides.

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