Light microscope sample adjusting gripper and semiconductor collaborative robot

Abstract

The utility model discloses a light microscope sample wafer adjusting gripper and a semiconductor collaborative robot, and relates to the technical field of semiconductor processing, and the light microscope sample wafer adjusting gripper comprises a carrier, an operating piece, a transmission assembly and a driving piece; one end of the carrier has an extension part; the operating piece is rotationally mounted at one end of the extension part away from the carrier; the driving piece is installed on the carrier, connected with the operating piece through the transmission assembly and used for driving the operating piece to rotate. The operating part is designed, and rotation control is realized through cooperation of the driving part and the transmission assembly, so that the angle of the turntable used for placing the wafer below the lens can be electrically adjusted through the operating part, the adjustment efficiency and precision are improved compared with manual adjustment, and the detection efficiency and reliability are further improved; and the requirements of the semiconductor manufacturing industry on high-efficiency and high-precision production are met.

Description

Technical Field

[0001] This application relates to the field of semiconductor processing technology, and in particular to a lens sample adjustment gripper and a semiconductor collaborative robot. Background Technology

[0002] The semiconductor device manufacturing process includes several key steps such as photolithography, etching, thin film deposition, polishing, cleaning, packaging, and inspection. Among these, inspection is a crucial step in ensuring product quality, requiring the precise placement of wafers from a carrier under a microscope stage for high-precision testing. However, in practice, wafer positioning may deviate, necessitating adjustments to meet inspection requirements. Currently, the existing adjustment method involves manual adjustment by workers after removing the wafers. This manual adjustment method not only reduces production efficiency but is also susceptible to human error, affecting the accuracy of the inspection results.

[0003] To address the aforementioned issues, a new solution is urgently needed that can precisely adjust the wafer position below the optical stage lens, thereby improving detection efficiency and reliability and meeting the semiconductor manufacturing industry's demand for efficient and high-precision production. Utility Model Content

[0004] In view of this, the purpose of this application is to provide a photomicroscope sample adjustment gripper and a semiconductor collaborative robot, which can perform precise adjustment of the wafer position under the lens of the photomicroscope stage, thereby improving inspection efficiency and reliability and meeting the semiconductor manufacturing industry's demand for efficient and high-precision production.

[0005] To achieve the above technical objectives, this application provides a lens sample adjustment gripper, including a carrier, an operating component, a transmission assembly, and a driving component;

[0006] One end of the carrier has an extension;

[0007] The operating component is rotatably mounted at the end of the extension that is away from the carrier.

[0008] The drive component is mounted on the carrier and connected to the operating component through the transmission assembly, and is used to drive the operating component to rotate.

[0009] Furthermore, a rotating connector is rotatably mounted on the extension;

[0010] The operating component is detachably connected to the rotating connecting component.

[0011] Furthermore, a bearing is mounted on the extension;

[0012] The rotating connector is fixed to the bearing, and one end extends out of one side of the extension portion for connecting the transmission assembly;

[0013] The other end of the rotating connector extends out from the other side of the extension portion for connecting the operating component.

[0014] Furthermore, the other end of the rotating connector is provided with a first spline portion;

[0015] The operating component is provided with a second spline portion that is coaxially connected to the first spline portion and magnetically attracted to it.

[0016] Furthermore, the other end of the rotating connector is provided with a first insertion portion;

[0017] The first insertion part is provided with a first pin hole;

[0018] The operating component is provided with a second plug-in portion that plugs into and mates with the first plug-in portion;

[0019] The second insertion part is provided with a second pin hole that is connected to the first pin hole;

[0020] The first pin hole and the second pin hole are fastened together by a pin.

[0021] Furthermore, the operating component includes at least one of the following: an internal hexagonal structure, an external hook structure, a cross-shaped structure, and a straight-line structure.

[0022] Furthermore, the transmission assembly includes a transmission belt, a driving pulley, and a driven pulley;

[0023] The drive wheel is fixedly connected to the output shaft of the drive component;

[0024] The driven wheel is fixedly connected to the operating component;

[0025] The transmission belt connects the driving wheel and the driven wheel, enabling the driving wheel and the driven wheel to rotate synchronously.

[0026] Furthermore, the transmission belt is a synchronous belt.

[0027] Furthermore, the driving component is a servo motor capable of forward and reverse rotation.

[0028] Furthermore, it also includes protective shields;

[0029] The protective cover is installed on the carrier and the extension to cover the transmission assembly and the drive component.

[0030] Furthermore, it also includes quick plate changing;

[0031] The quick-change disc is mounted on the carrier.

[0032] This application also discloses a semiconductor collaborative robot, including a multi-axis robotic arm and the aforementioned optical mirror sample adjustment gripper;

[0033] The end of the multi-axis robotic arm is connected to the optical mirror sample adjustment gripper.

[0034] Furthermore, it also includes a workbench;

[0035] The multi-axis robotic arm is mounted on the worktable;

[0036] A gripper support is installed on the workbench;

[0037] The gripper support is provided with multiple placement stations for placing the optical mirror sample adjustment gripper;

[0038] The optical mirror sample adjustment gripper consists of multiple grippers, each of which can be detachably connected to the end of the multi-axis robotic arm.

[0039] As can be seen from the above technical solutions, the optical mirror sample adjustment gripper designed in this application has the following beneficial effects:

[0040] 1. The extension section is designed to extend the length of the carrier, allowing it to flexibly extend under the lens of the optical stage. The end of the extension section is rotatably mounted with an operating component. The drive component drives the operating component to rotate through the transmission assembly, so that it does not need to be mounted on the extension section, thus avoiding excessively increasing the thickness of the extension section and affecting the flexibility of operation under the lens.

[0041] 2. The design of the operating component, along with the cooperation of the drive component and transmission assembly, enables rotation control. This allows for electric adjustment of the angle of the turntable below the lens used to place the wafer, compared to manual adjustment, improving adjustment efficiency and accuracy. This, in turn, enhances detection efficiency and reliability, meeting the semiconductor manufacturing industry's demand for efficient and high-precision production. Attached Figure Description

[0042] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0043] Figure 1 A perspective view of the adjustment gripper for the optical microscope sample provided in this application;

[0044] Figure 2 A perspective view of the adjustment gripper for the optical microscope sample provided in this application;

[0045] In the diagram: 1. Carrier; 11. Extension; 2. Operating component; 3. Driving component; 4. Transmission assembly; 41. Drive wheel; 42. Transmission belt; 43. Driven wheel; 5. Protective cover; 6. Quick change disc. Detailed Implementation

[0046] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the embodiments of this application.

[0047] In the description of the embodiments of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0048] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a replaceable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application based on the specific circumstances.

[0049] This application discloses an optical mirror sample adjustment gripper and a semiconductor collaborative robot.

[0050] Please see Figure 1 One embodiment of the optical mirror sample adjustment gripper provided in this application includes:

[0051] The carrier 1, the operating component 2, the transmission component 4, and the driving component 3; one end of the carrier 1 has an extension 11; the carrier 1 can be a plate structure, with an extension plate integrally extending from one end to form the extension 11.

[0052] The operating component 2 is rotatably mounted on the end of the extension 11 away from the carrier 1; the driving component 3 is mounted on the carrier 1 and connected to the operating component 2 through the transmission assembly 4, and is used to drive the operating component 2 to rotate.

[0053] The optical microscope sample adjustment gripper designed in this application has the following beneficial effects:

[0054] 1. The extension part 11 is designed to extend the length of the carrier 1 so that it can flexibly extend into the underside of the lens of the optical stage. The end of the extension part 11 is rotatably mounted with the operating component 2. The driving component 3 drives the operating component 2 to rotate through the transmission component 4, so that it does not need to be mounted on the extension part 11, thus avoiding excessively increasing the thickness of the extension part 11 and affecting the flexibility of operation under the lens.

[0055] 2. The design of the operating component 2, along with the cooperation of the driving component 3 and the transmission component 4, enables rotation control. This allows the angle of the turntable below the lens, used for placing wafers, to be electrically adjusted via the operating component 2. Compared to manual adjustment, this improves adjustment efficiency and accuracy, thereby enhancing detection efficiency and reliability, and meeting the semiconductor manufacturing industry's demand for efficient and high-precision production.

[0056] The above is Embodiment 1 of the optical microscope sample adjustment gripper provided in this application. The following is Embodiment 2 of the optical microscope sample adjustment gripper provided in this application. Please refer to the following for details. Figures 1 to 2 .

[0057] Based on the solution of Embodiment 1 above:

[0058] Furthermore, a rotating connector (not shown in the figure) is rotatably mounted on the extension 11, and the operating member 2 is detachably connected to the rotating connector.

[0059] By making the operating component 2 and the rotating connector detachable, the operating component 2 can be easily replaced according to different usage requirements. When adjusting different objects, the appropriate operating component 2 can be quickly replaced, enhancing versatility and applicability.

[0060] This detachable connection design also facilitates individual maintenance and repair of the operating component 2. Operating component 2 can be periodically disassembled for cleaning and other maintenance, ensuring smooth and precise rotation. Simultaneously, it makes inspection and repair of operating component 2 easier during maintenance, improving the equipment's lifespan and stability.

[0061] Furthermore, a bearing (not shown in the figure) is installed on the extension 11; a rotating connector is fixed to the bearing, and one end extends out of one side of the extension 11 for connecting the transmission assembly 4; the other end of the rotating connector extends out of the other side of the extension 11 for connecting the operating member 2.

[0062] This method of mounting the rotating connector using bearings makes the rotation of the connector smoother and more stable. The bearings effectively reduce friction during rotation, lower energy loss, and ensure that the power of the drive component 3 is efficiently transmitted to the operating component 2. At the same time, the bearings also support and position the rotating connector, ensuring that it does not shift or wobble during rotation, thereby improving the rotational accuracy of the operating component 2.

[0063] Furthermore, regarding the detachable connection between the rotating connector and the operating component 2, it can be one of the following methods:

[0064] The other end of the rotating connector is provided with a first spline portion (such as a spline hole); the operating component 2 is provided with a second spline portion (such as a spline shaft) that is coaxially connected to the first spline portion and magnetically attracted to it.

[0065] This design, where the first and second splined sections are coaxially connected and magnetically attracted to each other, makes the connection between the operating component 2 and the rotating connector more stable. The splined connection can accurately transmit torque, ensuring that the operating component 2 will not slip during rotation, thus enabling precise adjustment of the optical mirror sample. At the same time, the magnetic attraction facilitates the disassembly and installation of the operating component 2. When replacing the operating component 2, it can be easily removed by overcoming the magnetic force, and after replacement, it can be quickly and stably reconnected, greatly improving the efficiency of replacing the operating component 2.

[0066] In addition, for the detachable connection between the rotating connector and the operating component 2, the following second method can also be used:

[0067] The other end of the rotating connector is provided with a first insertion part (such as a cylindrical structure with an insertion cavity for the second insertion part to be inserted into); the first insertion part is provided with a first pin hole; the operating member 2 is provided with a second insertion part (such as a rod inserted into the first insertion part) that is inserted and engaged with the first insertion part; the second insertion part is provided with a second pin hole that is connected to the first pin hole; the first pin hole and the second pin hole are fastened together by a pin.

[0068] This plug-in connection method, secured with a pin, makes installation relatively simple and quick. Simply insert the second plug of the operating component 2 into the first plug of the rotating connector, aligning the first and second pin holes, and then insert the pin to complete the connection. For disassembly, simply pull out the pin to separate the operating component 2 from the rotating connector. Simultaneously, the pin effectively prevents the operating component 2 from detaching from the rotating connector during rotation, ensuring connection stability. The pin can be a quick-release pin; there are no specific limitations.

[0069] In practical applications, the two detachable connection methods mentioned above can be flexibly selected according to specific working scenarios and needs to better utilize the performance of the optical mirror sample adjustment gripper, meet different operational requirements, and further improve the efficiency and accuracy of optical mirror sample adjustment in semiconductor manufacturing processes. Of course, the design is not limited to the two detachable connection methods mentioned above; those skilled in the art can modify the design according to actual needs without restriction.

[0070] Furthermore, the operating component 2 includes at least one of the following: an internal hexagonal structure, an external hook structure, a cross-shaped structure, and a straight-line structure. Taking the internal hexagonal structure as an example, it can be used to adjust the height of the dial on the holder (the base for fixing the optical mirror); taking the external hook structure as an example, it can be used to adjust the angle of the dial on the holder.

[0071] Taking the internal hexagonal structure as an example, it can be fitted onto the hexagonal adjustment head used to adjust the height of the turntable. The height of the turntable is adjusted by rotating the adjustment head. Taking the external hook (L-shaped with a bent hook) as an example, its bent hook can be inserted into the adjustment knob with an adjustment hole used to adjust the angle of the turntable. When the bent hook is inserted into the adjustment hole, the rotation center of the operating part 2 coincides with the adjustment knob. By driving the external hook to rotate, the adjustment knob can be rotated to achieve adjustment.

[0072] Taking a cross-shaped structure as an example, such as a cross-shaped screwdriver head, and a flathead structure, such as a flathead screwdriver head, as an example, the structure can be used. Hexagonal, hook-shaped, and flathead structures can be respectively mounted on independent operating components 2, or two of them can be integrated onto the same operating component 2. Preferably, each operating component 2 is configured with one type of operating structure. Of course, in addition to the above-mentioned operating structures, other types of operating structures can also be included. The specific design can be varied according to the actual object being operated, and there are no restrictions.

[0073] Furthermore, the transmission assembly 4 includes a transmission belt 42, a drive pulley 41, and a driven pulley 43; the drive pulley 41 is fixedly connected to the output shaft of the drive member 3; the driven pulley 43 is fixedly connected to the operating member 2; the transmission belt 42 is connected to the drive pulley 41 and the driven pulley 43 to make the drive pulley 41 and the driven pulley 43 rotate synchronously.

[0074] This combination of transmission belt 42, drive pulley 41, and driven pulley 43 features a simple structure and smooth transmission. The transmission belt 42 effectively transmits the power of the driving component 3 from the drive pulley 41 to the driven pulley 43, enabling the rotation of the operating component 2. The driven pulley 43 can be fixed to a rotating connecting member, while the output shaft of the driving component 3 can be oriented downwards and fixed to the carrier 1 by a fixed bracket. The drive pulley 41 is then fixed to the output shaft.

[0075] Furthermore, the transmission belt 42 is a synchronous belt. The synchronous belt has a precise transmission ratio, ensuring the synchronous rotation of the driving pulley 41 and the driven pulley 43, preventing slippage, and thus ensuring the accuracy and stability of the rotation of the operating component 2. The synchronous belt operates with low noise, running quietly and without significantly interfering with the working environment. Moreover, the maintenance of the synchronous belt is relatively simple; it only requires periodic checks of its tension and wear, and adjustment or replacement as necessary.

[0076] Furthermore, the driving component 3 is a servo motor capable of forward and reverse rotation. Servo motors offer advantages such as high control precision and fast response speed. The ability to rotate in both directions allows the operating component 2 to turn clockwise or counterclockwise according to actual needs, enabling flexible adjustment of the optical mirror sample at multiple angles and heights. In semiconductor manufacturing, the adjustment of the optical mirror sample often requires precise angle control. The servo motor can accurately drive the operating component 2 to rotate to the designated position through precise control signals, meeting the high-precision requirements of the production process.

[0077] Furthermore, the optical mirror sample adjustment gripper also includes a protective cover 5. The protective cover 5 is installed on the carrier 1 and the extension 11 to cover the transmission assembly 4 and the drive component 3. The protective cover 5 prevents dust, debris, etc., from entering the transmission assembly 4 and the drive component 3, avoiding damage and affecting the normal operation of the equipment. At the same time, the protective cover 5 also provides a certain degree of protection, preventing operators from accidentally contacting the transmission assembly 4 and the drive component 3 during operation, thus avoiding safety accidents.

[0078] Furthermore, the optical mirror sample adjustment gripper also includes a quick-change tray 6. The quick-change tray 6 is mounted on the carrier 1. The design of the quick-change tray 6 allows the optical mirror sample adjustment gripper to be quickly replaced and connected to other equipment or tools. In the semiconductor manufacturing process, it may be necessary to quickly change different types of adjustment grippers or other tools according to different process requirements or production tasks. The quick-change tray 6 can greatly improve changeover efficiency, reduce equipment downtime, and increase production efficiency.

[0079] This application also discloses a semiconductor collaborative robot, including a multi-axis robotic arm and a lens sample adjustment gripper; the end of the multi-axis robotic arm is connected to the lens sample adjustment gripper.

[0080] Furthermore, it also includes a worktable; a multi-axis robotic arm is mounted on the worktable; a gripper bracket is mounted on the worktable; the gripper bracket has multiple placement stations for placing optical mirror sample adjustment grippers; there are multiple optical mirror sample adjustment grippers, and each can be detachably connected to the end of the multi-axis robotic arm.

[0081] This semiconductor collaborative robot design significantly enhances the automation and flexibility of the semiconductor manufacturing process. Multi-axis robotic arms (such as 3-axis or 6-axis arms) can move freely in three-dimensional space, reaching various positions on the optical microscope stage to perform adjustments on the optical microscope samples at different locations. Multiple optical microscope sample adjustment grippers can be quickly replaced according to actual needs, further improving work efficiency.

[0082] The multiple placement stations on the gripper support provide a safe and orderly storage location for the optical microscope sample adjustment grippers. When a gripper is not in use, it can be placed in the corresponding station, avoiding damage or loss caused by random placement. At the same time, the multi-axis robotic arm can easily grasp the required gripper from the placement station, enabling rapid switching between different grippers.

[0083] In actual semiconductor manufacturing production lines, this type of semiconductor collaborative robot can automatically complete the adjustment of optical mirror samples according to a preset program. The multi-axis robotic arm moves to the vicinity of the optical mirror stage according to a predetermined trajectory, selects a suitable optical mirror sample from the gripper support as needed, adjusts the gripper, and then drives the operating component 2 to rotate via the drive component 3 to precisely adjust the height or angle of the turntable.

[0084] The above provides a detailed description of the optical mirror sample adjustment gripper and semiconductor collaborative robot provided in this application. For those skilled in the art, based on the ideas of the embodiments of this application, there will be changes in the specific implementation methods and application scope. Therefore, the content of this specification should not be construed as a limitation of this application.

Claims

1. A light microscope sample adjustment handgrip, characterized in that The utility model relates to a light mirror sample adjusting hand claw, including carrier (1), operating part (2), transmission assembly (4) and drive part (3). One end of the carrier (1) has extension (11); The operating part (2) is rotatably installed at the end of the extension (11) away from the carrier (1); The drive part (3) is installed on the carrier (1) and connected with the operating part (2) through the transmission assembly (4) for driving the operating part (2) to rotate.

2. The optical lens sample adjustment handpiece of claim 1, wherein, A rotating connecting part is rotatably installed on the extension (11); The operating part (2) is detachably connected with the rotating connecting part.

3. The optical lens sample adjustment handpiece of claim 2, wherein, A bearing is installed on the extension (11); The rotating connecting part is fixed to the bearing, and one end extends out of one side of the extension (11) for connecting the transmission assembly (4); The other end of the rotating connecting part extends out of the other side of the extension (11) for connecting the operating part (2).

4. The optical lens sample adjustment handpiece of claim 3, wherein, The other end of the rotating connecting part is provided with a first spline part; The operating part (2) is provided with a second spline part coaxially connected with the first spline part and magnetically attracted.

5. The optical lens sample adjustment handpiece of claim 3, wherein, The other end of the rotating connecting part is provided with a first plug-in part; The first plug-in part is provided with a first pin hole; The operating part (2) is provided with a second plug-in part plug-in matched with the first plug-in part; The second plug-in part is provided with a second pin hole communicated with the first pin hole; The first pin hole and the second pin hole are fastened together by a pin.

6. The optical lens sample adjustment handpiece of claim 1, wherein, The operating part (2) includes at least one of an inner hexagonal structure, an outer hook structure, a cross structure, and a one-letter structure.

7. The optical lens sample adjustment handpiece of claim 1, wherein, The transmission assembly (4) includes a transmission belt (42), a driving wheel (41), and a driven wheel (43); The driving wheel (41) is fixedly connected with the output shaft of the drive part (3); The driven wheel (43) is fixedly connected with the operating part (2); The transmission belt (42) is connected between the driving wheel (41) and the driven wheel (43) for synchronously rotating the driving wheel (41) and the driven wheel (43).

8. The optical lens sample adjustment handpiece of claim 7, wherein, The transmission belt (42) is a synchronous belt.

9. The optical lens sample adjustment handpiece of claim 1, wherein, The drive part (3) is a servo motor capable of forward and reverse rotation.

10. The optical lens sample adjustment handpiece of claim 1, wherein, It also includes a protective cover (5); The protective cover (5) is installed on the carrier (1) and the extension (11) to cover the transmission assembly (4) and the drive part (3).

11. The optical lens sample adjustment handpiece of claim 1, wherein, It also includes a quick-change disc (6); The quick-change disc (6) is installed on the carrier (1).

12. A semiconductor co-botic robot, characterized by It includes a multi-axis mechanical arm and a light mirror sample adjusting hand claw according to any one of claims 1 to 11; The end of the multi-axis mechanical arm is connected to the light mirror sample adjusting hand claw.

13. The semiconductor co-botic robot of claim 12, wherein, It also includes a workbench; The multi-axis mechanical arm is installed on the workbench; A hand claw support is installed on the workbench; The hand claw support is provided with a plurality of placement stations for placing the light mirror sample adjusting hand claw; The light mirror sample adjusting hand claw is a plurality of, and each can be detachably connected with the end of the multi-axis mechanical arm.

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