Boat foot, carrier and coating equipment

Abstract

The utility model relates to the technical field of solar cell preparation, and discloses a boat foot which comprises a supporting assembly and an insulating part. The supporting assembly comprises a supporting seat, and the supporting seat is used for being arranged between the conductive boat body and the supporting electrode rod so that the supporting electrode rod can support the conductive boat body through the supporting assembly; and the insulating part is arranged on the supporting assembly and is used for insulating and separating the arcing boat page area of the conductive boat body from the rod section of the supporting electrode rod corresponding to the projection of the arcing boat page area. Therefore, potential difference between the graphite boat sheet and a thin film on the insulating layer can be effectively avoided, so that the stability of an electric field of a coating process is ensured, and the coating quality of a silicon wafer is further ensured. The utility model further discloses the carrier and coating equipment.

Description

Technical Field

[0001] This application relates to the field of solar cell fabrication technology, for example to a boat foot, carrier, and coating equipment. Background Technology

[0002] Currently, in the production of solar cells, plasma-enhanced chemical vapor deposition (PECVD) equipment is typically used to perform chemical reaction deposition on silicon wafers, which are then transported via graphite boats. Therefore, the structural design of graphene directly affects the yield of the coating produced through the participation of plasma discharge and process gases in the chemical reaction.

[0003] The graphite boat in the related technology is composed of multiple graphite boat sheets, which are separated by insulating components. A feeding foot is located at the bottom, and the feeding foot is electrically connected to the electrode rod. This not only creates a positive and negative electric field between adjacent graphite boat sheets, achieving the function of radio frequency discharge ignition, but also supports the graphite boat.

[0004] In the process of implementing the embodiments of this disclosure, at least the following problems were found in the related art:

[0005] After a period of time during PECVD coating, a thin film is deposited on the graphite boat, the silicon wafer, and the insulating layer of the electrode rods. Due to the strong electric field around the feed boat feet and the conductivity of the deposited film, a potential difference may form between the graphite boat and the film on the insulating layer in this area, leading to phenomena such as discharge and arcing. This affects the stability of the electric field in the coating process, and consequently, the quality of the coating.

[0006] It should be noted that the information disclosed in the background section above is only used to enhance the understanding of the background of this application, and therefore may include information that does not constitute prior art known to those skilled in the art. Utility Model Content

[0007] To provide a basic understanding of some aspects of the disclosed embodiments, a brief summary is given below. This summary is not intended as a general commentary, nor is it intended to identify key / important components or describe the scope of protection of these embodiments, but rather as a prelude to the detailed description that follows.

[0008] This disclosure provides a boat foot, carrier, and coating equipment that can effectively prevent the formation of a potential difference between the graphite boat sheet and the thin film on the insulating layer, thereby ensuring the stability of the electric field in the coating process and thus ensuring the coating quality of the silicon wafer.

[0009] In some embodiments, the boat foot includes a support assembly and an insulating member. The support assembly includes a support base disposed between the conductive boat body and the supporting electrode rod, so that the supporting electrode rod supports the conductive boat body via the support assembly; the insulating member is disposed on the support base for insulatingly separating the arc-forming boat section of the conductive boat body from the rod segment of the supporting electrode rod corresponding to its projection.

[0010] In some embodiments, the support assembly further includes: a conductor disposed on the support base and electrically connected to the conductive boat and the power supply bearing block of the support electrode rod; wherein the insulating member is disposed between the support base, the conductor, or both.

[0011] In some embodiments, when the insulating member is disposed on the support base, the support base has a fixing groove, and the insulating member is inserted into the fixing groove.

[0012] In some embodiments, the insulating element includes an insulating plate inserted into the fixing groove.

[0013] In some embodiments, the conductor includes a conductive block and a conductive post, and the support base also has a through hole; wherein the conductive block is disposed on the seat surface of the support base, and the conductive post passes through the through hole and is connected to the feed support block of the supporting electrode rod.

[0014] In some embodiments, when the insulating member includes an insulating plate, the through hole passes through the fixing groove, and a positioning hole corresponding to the through hole is provided on the insulating plate, so that the conductive post passes through the through hole and the positioning hole.

[0015] In some embodiments, the support base extends upward with a first positioning protrusion, which is used for positioning and inserting between two adjacent boats in the conductive boat body.

[0016] In some embodiments, the support base extends downward with a second positioning protrusion, which is used for limiting connection with the feed support block of the support electrode rod.

[0017] In some embodiments, the carrier includes a conductive boat body, an insulating support foot, and a power supply support foot. The insulating support foot is disposed at an insulating position below the conductive boat body; the power supply support foot is disposed at a power supply position below the conductive boat body, wherein the power supply support foot is the foot as described in the foregoing embodiments.

[0018] In some embodiments, the coating apparatus includes: a supporting electrode rod; and a carrier as described in the foregoing embodiments, disposed on the supporting electrode rod.

[0019] The boat foot, carrier, and coating equipment provided in this disclosure can achieve the following technical effects:

[0020] The support base of the support assembly can be positioned between the conductive boat and the support electrode rod, allowing the support electrode rod to support the conductive boat via the support assembly. Simultaneously, an insulating component is provided on the support base, which insulates and separates the arcing area of ​​the conductive boat from the rod end of the support electrode rod corresponding to its projection. This effectively blocks the potential difference formed between the arcing area and the support electrode rod. Therefore, to a certain extent, it can reduce phenomena such as discharge and arcing between the boat and the support electrode rod, thereby ensuring the stability of the electric field in the coating process and ultimately guaranteeing the coating quality of the silicon wafer.

[0021] The above general description and the description below are exemplary and illustrative only and are not intended to limit this application. Attached Figure Description

[0022] One or more embodiments are illustrated by way of example with reference to the accompanying drawings. These illustrations and drawings do not constitute a limitation on the embodiments. Elements having the same reference numerals in the drawings are considered similar elements. The drawings do not constitute a limitation of scale, and wherein:

[0023] Figure 1 This is a schematic diagram of the structure of a boat foot provided in an embodiment of this disclosure;

[0024] Figure 2 This is a schematic diagram of another boat foot structure provided in an embodiment of this disclosure;

[0025] Figure 3 This is a schematic diagram of the structure of a boat foot provided in an embodiment of this disclosure;

[0026] Figure 4 This is a schematic diagram of the structure of an insulating plate provided in an embodiment of this disclosure;

[0027] Figure 5 This is a schematic diagram of the structure of a coating device provided in an embodiment of this disclosure;

[0028] Figure 6 This is a side view of a coating apparatus provided in an embodiment of this disclosure;

[0029] Figure 7 yes Figure 6 Enlarged view of point A in the middle;

[0030] Figure 8 This is a side view of a coating apparatus provided in an embodiment of this disclosure.

[0031] Figure label:

[0032] 100: Conductive boat body; 101: Arc-forming boat blade area; 102: Boat blade; 103: Insulating support boat foot; 104: Power supply support boat foot;

[0033] 200: Support electrode rod; 201: Feeding support block;

[0034] 10: Support component; 11: Support base; 111: Fixing groove; 112: Through hole; 113: First positioning protrusion; 1131: First through hole; 114: Second positioning protrusion;

[0035] 12: Conductor; 121: Conductive block; 1211: Second through hole; 122: Conductive post;

[0036] 20: Insulating component; 21: Insulating board; 22: Positioning hole. Detailed Implementation

[0037] To provide a more detailed understanding of the features and technical content of the embodiments of this disclosure, the implementation of the embodiments of this disclosure will be described in detail below with reference to the accompanying drawings. The accompanying drawings are for illustrative purposes only and are not intended to limit the embodiments of this disclosure. In the following technical description, for ease of explanation, several details are used to provide a full understanding of the disclosed embodiments. However, one or more embodiments may still be implemented without these details. In other cases, well-known structures and devices may be simplified in their depiction to simplify the drawings.

[0038] The terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this disclosure are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate for the embodiments of this disclosure described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion.

[0039] In this disclosure, the terms "upper," "lower," "inner," "middle," "outer," "front," and "rear," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for better describing the embodiments of this disclosure and their implementations, and are not intended to limit the indicated devices, elements, or components to having a specific orientation, or to require them to be constructed and operated in a specific orientation. Furthermore, some of the aforementioned terms may be used to indicate other meanings besides orientation or positional relationship; for example, the term "upper" may in some cases indicate a dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this disclosure according to the specific circumstances.

[0040] Furthermore, the terms "set up," "connect," and "fix" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this disclosure according to the specific circumstances.

[0041] Unless otherwise stated, the term "multiple" means two or more.

[0042] In this embodiment of the disclosure, the character "" indicates that the preceding and following objects are in an "OR" relationship. For example, A / B means: A or B.

[0043] The term "and / or" describes an association between objects, indicating that three relationships can exist. For example, A and / or B means: A or B, or A and B.

[0044] It should be noted that, unless otherwise specified, the embodiments and features described in the present disclosure can be combined with each other.

[0045] Currently, PECVD equipment can prepare various deposited thin films, such as metal films, inorganic films, and organic films. The prepared deposited thin films can be applied in semiconductor manufacturing, solar cells, coatings, display panels, and other fields. Specifically, PECVD equipment, under the influence of plasma, causes gas to dissociate within a chamber, forming a highly reactive substance containing gas molecules, high-energy ions, electrons, and active free radicals. This substance then grows into a film under the combined action of chemical reactions.

[0046] In the production of solar cells, graphite boats serve as carriers for photovoltaic cells. Through electrode feeding, a positive and negative electric field is formed between adjacent graphite boat sheets. The flow field generated by the process gas reaches between the adjacent graphite boat sheets, thereby achieving radio frequency discharge ignition. Here, electrodes can be fed through a front boat foot (feeding foot) on the front side and a rear boat foot (feeding foot) on the rear side of the graphite boat; that is, different electrode rods located at the bottom of the graphite boat are connected to the front and rear boat feet respectively.

[0047] To ensure stable electrical contact of the graphite boat, an insulating sleeve is typically fitted onto the electrode rod. After a period of time during the coating process, a conductive thin film is deposited on the surface of the insulating sleeve. Due to the predetermined distance between the insulating sleeve and the graphite boat, and the strong electric field around the feed boat feet, a potential difference is created between the graphite boat around the feed boat feet and the conductive thin film on the insulating sleeve. This frequently causes discharge and arcing phenomena, affecting the stability of the electric field in the coating process and consequently impacting the coating quality.

[0048] Furthermore, the occurrence of discharge or arcing may cause the process to stop due to alarms, and may even require rework of the silicon wafers inside the cavity, i.e., washing away the thin film and re-coating. This increases the cost of silicon wafer coating and reduces production efficiency and yield.

[0049] Combination Figures 1 to 7 As shown, this embodiment of the present disclosure provides a boat foot, which, when applied to a graphite boat, can effectively prevent the formation of a potential difference between the graphite boat sheet and the thin film on the insulating layer of the electrode rod, thereby ensuring the stability of the electric field in the coating process and thus ensuring the coating quality of the silicon wafer. Specifically, the boat foot includes a support assembly 10 and an insulating member 20. The support assembly 10 includes a support base 11, which is disposed between the conductive boat body 100 and the supporting electrode rod 200 so that the supporting electrode rod 200 supports the conductive boat body 100 through the support assembly 10; the insulating member 20 is disposed on the support base 11 and is used to insulatingly separate the arc-forming boat sheet area 101 of the conductive boat body 100 from the rod segment of the supporting electrode rod 200 corresponding to its projection.

[0050] Using the boat foot provided in this embodiment, the support base 11 of the support assembly 10 can be disposed between the conductive boat body 100 and the support electrode rod 200. This allows the support electrode rod 200 to support the conductive boat body 100 via the support assembly 10. Simultaneously, an insulating member 20 is also provided on the support base 11, which insulatingly separates the arcing boat blade area 101 of the conductive boat body 100 from the rod segment of the support electrode rod 200 corresponding to its projection. This effectively blocks the potential difference formed between the arcing boat blade area 101 and the support electrode rod 200. Therefore, to a certain extent, it can reduce phenomena such as discharge and arcing between the boat blade and the support electrode rod 200, thereby ensuring the stability of the electric field in the coating process and thus ensuring the coating quality of the silicon wafer.

[0051] In this embodiment, the conductive boat 100 has several boat sheets 102 of a specific thickness and spacers disposed between each boat sheet 102. A boat foot is disposed below the conductive boat 100, and a support assembly 10 for the boat foot is disposed between the conductive boat 100 and the support electrode rod 200. In this way, the support electrode rod 200 supports the conductive boat 100 through the support assembly 10. Wherein, when a conductive thin film is deposited near the insulating layer of the support electrode rod 200 around the boat foot, there is a certain distance between the bottom of the boat sheet 102 (arc-forming boat sheet region 101) around the boat foot and the conductive thin film, and since the potential difference is positively correlated with the distance, the probability of discharge, arcing, and other phenomena occurring in this area is relatively high.

[0052] In this embodiment, an insulating member 20 is provided on the support base 11 of the support assembly 10. The insulating member 20 is disposed between the arc-forming boat area 101 and the rod segment of the arc-forming boat area 101 projected onto the support electrode rod 200. Thus, the insulating member 20 can shield the rod segment of the support electrode rod 200 located around the boat foot, i.e., the insulating member 20 insulates and separates the arc-forming boat area 101 from the conductive film. Therefore, it can effectively block the potential difference formed, thereby reducing the occurrence of discharge, arcing, and other phenomena in this area, and thus ensuring the stability of the electric field in the coating process.

[0053] In this embodiment, since the potential difference is positively correlated with distance, even if a conductive film is formed on the insulating member 20, the distance between the insulating member 20 and the arcing boat region 101 is less than the distance between the supporting electrode rod 200 and the arcing boat region 101. Therefore, the probability of phenomena such as discharge and arcing can also be reduced.

[0054] In this embodiment, to further reduce discharge and arcing phenomena between the insulating component 20 and the arcing boat area 101, the boat foot is disposed on the conductive boat body 100. This allows the film on the boat foot to be cleaned during periodic cleaning of the conductive boat body 100, enabling the conductive film on the insulating component 20 to be periodically removed and its insulation function restored.

[0055] Combination Figure 2 , Figures 5 to 7 As shown, in some embodiments, the support assembly 10 further includes: a conductor 12 disposed on the support base 11 and electrically connected to the conductive boat body 100 and the power supply bearing block 201 of the support electrode rod 200; wherein, an insulating member 20 is disposed between the support base 11, the conductor 12 or both.

[0056] In this embodiment, an insulating sleeve is fitted onto the supporting electrode rod 200. To enable electrode feeding into the supporting electrode rod 200, a power feeding support block 201 is also provided on the supporting electrode rod 200, and a conductor 12 connected to the power feeding support block 201 is provided on the support base 11. Thus, the conductive boat 100 can be powered through the power feeding support block 201 and the conductor 12.

[0057] In this embodiment, the conductor 12 has good conductivity. Specifically, it can be made of materials with conductive properties such as graphite, nickel alloy and carbon fiber, without any specific limitation.

[0058] In this embodiment, the support base 11 is also disposed on the feed support block 201 of the supporting electrode rod 200. Specifically, in conjunction with... Figure 3 and Figure 4As shown, in some embodiments, the support base 11 extends upward with a first positioning protrusion 113, which is used for positioning and insertion between two adjacent boats 102 in the conductive boat body 100; the support base 11 extends downward with a second positioning protrusion 114, which is used for limiting connection with the power supply support block 201 of the support electrode rod 200.

[0059] In this embodiment of the present disclosure, a spacer block is provided between two adjacent boat bodies 102 in the conductive boat body 100. The spacer block has a slot that mates with a first positioning protrusion 113. The slot and the first positioning protrusion 113 are adapted to each other. When installing the boat feet, the first positioning protrusion 113 can be inserted into the slot and limited to ensure the stability of the overall structure.

[0060] Furthermore, a first through hole 1131 is provided on the first positioning protrusion 113. The first through hole 1131 is correspondingly provided with the connection hole of the boat leaf 102. The connecting rod passes through each connection hole and the first through hole 1131 to connect and fix the support base 11 and the boat leaf 10.

[0061] In this embodiment, the conductive boat 100 is fixed to two support electrode rods 200 by multiple boat feet. For example, it is fixed to the two support electrode rods 200 by four boat feet. Here, the support base 11 has a second positioning protrusion 114 that is limitedly connected to the feed support boat block 201. When the support base 11 is placed on the feed support boat block 201, the second positioning protrusion 114 can be located inside or outside the two support electrode rods 200, thereby limiting the relative position of the conductive boat 100 and the feed support boat block 201. This avoids the problem of the conductive boat 100 tilting excessively on one side relative to the feed support boat block 201, which could lead to separation. Furthermore, during installation, the second positioning protrusion 114 can also provide coarse positioning for the conductive boat 100.

[0062] In this embodiment, the side of the second positioning protrusion 114 that connects to the supporting electrode rod 200 is an arc-shaped surface. Of course, in other embodiments, the specific structure of the second positioning protrusion 114 is not limited. For example, the second positioning protrusion 114 can also be set as a U-shaped structure, and in the installed state, the power supply support block 201 is located in the groove structure of the U-shaped structure.

[0063] In this embodiment, the support base 11 and the second positioning protrusion 114 are integrally formed structures.

[0064] In this embodiment, the potential difference can be blocked because the insulating member 20 is located between the conductive boat 100 and the supporting electrode rod 200. Therefore, the insulating member 20 can be fixedly disposed on the support base 11; or, the insulating member 20 can be fixedly disposed on the conductor 12; or, the insulating member 20 can be fixedly disposed between the conductor 12 and the insulating member 20.

[0065] Combination Figure 2 and Figure 3 As shown, in some embodiments, when the insulating member 20 is disposed on the support base 11, the support base 11 has a fixing groove 111, and the insulating member 20 is inserted into the fixing groove 111.

[0066] In this embodiment, to facilitate cleaning of the insulating component 20, the insulating component 20 is disposed on the support base 11. This allows the insulating component 20 to be cleaned in the same cycle as the arc-forming blade area 101 of the conductive boat body 100, meaning that the insulating component 20 can be cleaned while the conductive boat body 100 is being cleaned.

[0067] In this embodiment, a fixing groove 111 is provided on the support base 11, and the opening of the fixing groove 111 is along the side of the support base 11. In this way, when the insulating member 20 is inserted into the fixing groove 111, the insulating member 20 can partially block the conductive film on the supporting electrode rod 200.

[0068] Combination Figures 2 to 4 As shown, in some embodiments, the insulating member 20 includes an insulating plate 21, which is inserted into the fixing groove 111.

[0069] In this embodiment, the insulating member 20 is an insulating plate 21. Here, the insulating plate 21 can be an arc-shaped plate structure or a flat plate structure. After the insulating plate 21 is inserted into the fixing groove 111, the exposed part can cover part of the conductive film on the supporting electrode rod 200.

[0070] In this embodiment, the insulating plate 21 needs to have good insulation, high temperature resistance and high strength, etc. Specifically, it can be made of ceramic material or composite insulating material, which is not specifically limited here.

[0071] Combination Figure 3 As shown, in some embodiments, the conductor 12 includes a conductive block 121 and a conductive post 122, and the support base 11 is also provided with a through hole 112; wherein, the conductive block 121 is disposed on the seat surface of the support base 11, and the conductive post 122 passes through the through hole 112 and is electrically connected to the power supply support block 201 of the support electrode rod 200.

[0072] In this embodiment, the conductive block 121 is disposed on the seat surface of the support base 11, and the conductive block 121 is electrically connected to the corresponding leaf 102 of the conductive boat body 100. The conductive post 122 passes through the through hole 112 and is electrically connected to the power supply support block 201. In this way, the support base 11 can be guaranteed to have a certain strength, and the conductive boat body 100 can be powered.

[0073] In this embodiment, the conductive post 122 passes through the through hole 112 and contacts the power supply support block 201. Here, to ensure the conductive post 122 can achieve conductive connection and maintain electric field stability, the axial length of the conductive post 122 must be greater than the axial length of the through hole 112. Specifically, the difference between the axial length of the conductive post 122 and the axial length of the through hole 112 ranges from 0.5 mm to 1 mm, ensuring that the bottom end of the conductive post 122 can stably contact the power supply support block 201.

[0074] In this embodiment, the conductive block 121 is also provided with a second through hole 1211, which is correspondingly provided with the connection hole of the boat 102 and the first through hole 1131 of the first positioning protrusion 113. After the conductive block 121 and the boat 102 are electrically connected, the connecting rod passes through each connection hole, the second through hole 1211 and the first through hole 1131 to connect and fix the support base 11, the conductive block 121 and the boat 10.

[0075] In this embodiment, the conductive post 122 may be made of a conductive material such as graphite that has oxidation resistance, high temperature resistance, low coefficient of thermal expansion and excellent conductivity, or it may be made of conductive material such as tantalum, molybdenum, nickel alloy or carbon fiber.

[0076] Combination Figures 2 to 4 As shown, in some embodiments, when the insulating member 20 includes an insulating plate 21, the through hole 112 passes through the fixing groove 111, and a positioning hole 22 corresponding to the through hole 112 is provided on the insulating plate 21 so that the conductive post 122 passes through the through hole 112 and the positioning hole 22.

[0077] In this embodiment, to further simplify the structure of the support assembly 10 and the insulating component 20, and to further ensure the stability of the insulating plate 21 during installation, a through hole 112 passes through the fixing groove 111, meaning the central axis of the through hole 112 is perpendicular to the horizontal plane of the fixing groove 111. Furthermore, a positioning hole 22 corresponding to the through hole 112 is provided on the insulating plate 21. Thus, after the insulating plate 21 is inserted into the fixing groove 111, the conductive post 122 can pass through the through hole 112 and the positioning hole 22, thereby further fixing the insulating plate 21 and ensuring that the bottom end of the conductive post 122 can stably contact the power supply support block 201.

[0078] Combination Figures 5 to 8 As shown in the embodiments of this disclosure, a carrier is also provided, including: a conductive boat body 100, an insulating support boat foot 103, and a power supply support boat foot 104. The insulating support boat foot 103 is disposed at an insulating position below the conductive boat body 100; the power supply support boat foot 104 is disposed at a power supply position below the conductive boat body 100, wherein the power supply support boat foot 104 is the boat foot as described in the foregoing embodiments.

[0079] In this embodiment, the vehicle includes the aforementioned boat feet. Referring to the above embodiments, it at least has the beneficial effects brought about by the technical solutions of the above embodiments, which will not be elaborated further here.

[0080] In this embodiment, the carrier includes four supports, two of which are insulating support supports 103, and the other two are power supply support supports 104. Here, the bottom plane of the conductive boat 100 has a square structure. The two insulating support supports 103 are symmetrically arranged at two corners of the conductive boat 100, and the two power supply support supports 104 are symmetrically arranged at the other two corners of the conductive boat 100. The two insulating support supports 103 are made of an insulating material, such as ceramic. The two power supply support supports 104 are made of a conductive material, such as graphite. Thus, the two power supply support supports 104 can provide both positive and negative electrodes, making the conductive boat 100 conductive.

[0081] Combination Figures 5 to 8 As shown in the embodiments of this disclosure, a coating apparatus is also provided, including: a supporting electrode rod 200; and a carrier as described in the foregoing embodiments, disposed on the supporting electrode rod 200.

[0082] In this embodiment, the coating equipment includes the carrier described above. Referring to the above embodiments, it at least has the beneficial effects brought about by the technical solutions of the above embodiments, which will not be repeated here.

[0083] In the embodiments disclosed herein, the coating equipment includes, but is not limited to, etching equipment, chemical vapor deposition equipment, atomic layer deposition equipment, or physical vapor deposition equipment. However, it should be noted that the coating equipment in this application is not limited to these, and those skilled in the art, after reading the following technical solutions, will obviously be able to apply it to other process equipment.

[0084] The foregoing description and accompanying drawings fully illustrate embodiments of the present disclosure to enable those skilled in the art to practice them. Other embodiments may include structural and other changes. The embodiments represent only possible variations. Individual components and functions are optional unless explicitly required, and the order of operation may vary. Parts and features of some embodiments may be included or substituted for parts and features of other embodiments. Embodiments of the present disclosure are not limited to the structures described above and shown in the accompanying drawings, and various modifications and changes may be made without departing from its scope. The scope of the present disclosure is limited only by the appended claims.

Claims

1. A type of boat foot, characterized in that, include: A support assembly includes a support base, which is disposed between a conductive boat and a support electrode rod, such that the support electrode rod supports the conductive boat via the support assembly. An insulating element is disposed on the support base to insulate and separate the arc-forming leaf area of ​​the conductive boat body from the rod end of the support electrode rod corresponding to its projection.

2. The boat foot according to claim 1, characterized in that, The support components also include: A conductor is disposed on the support base and electrically connected to the conductive boat and the feed support block of the supporting electrode rod; wherein the insulating member is disposed between the support base, the conductor, or both.

3. The boat foot according to claim 2, characterized in that, When the insulating component is disposed on the support base, the support base has a fixing groove, and the insulating component is inserted into the fixing groove.

4. The boat foot according to claim 3, characterized in that, The insulating component includes an insulating plate, which is inserted into the fixing groove.

5. The boat foot according to claim 3, characterized in that, The conductor includes a conductive block and a conductive post, and the support base also has a through hole; wherein, the conductive block is disposed on the seat surface of the support base, and the conductive post passes through the through hole and is connected to the feed support block of the supporting electrode rod.

6. The boat foot according to claim 5, characterized in that, When the insulating component includes an insulating plate, the through hole passes through the fixing groove, and a positioning hole corresponding to the through hole is provided on the insulating plate so that the conductive post passes through the through hole and the positioning hole.

7. The boat foot according to any one of claims 1 to 6, characterized in that, The support base extends upward with a first positioning protrusion, which is used for positioning and insertion between two adjacent boats in the conductive boat body.

8. The boat foot according to any one of claims 1 to 6, characterized in that, The support base extends downwards with a second positioning protrusion, which is used for limiting connection with the power supply bearing block of the support electrode rod.

9. A vehicle, characterized in that, include: Conductive boat; Insulated support feet are provided at an insulated location below the conductive boat body; A power supply support foot is disposed at a power supply position below the conductive boat body, wherein the power supply support foot is the foot as described in any one of claims 1 to 8.

10. A coating apparatus, characterized in that, include: Support electrode rod; The carrier as described in claim 9 is mounted on the supporting electrode rod.

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