Positioning installation structure for ion source filament

Abstract

The utility model discloses a positioning installation structure for an ion source filament, which comprises an installation seat, the upper part of the installation seat is provided with a fixed plate, the fixed plate is fixedly connected with the installation seat, the upper part of the fixed plate is provided with a connecting rod, and the connecting rod is fixedly connected with the fixed plate. And an adjusting block is arranged on the surface of the connecting rod and is in threaded connection with the connecting rod. The fixing plate is arranged on the upper portion of the mounting seat and fixedly connected with the mounting seat, the connecting rod is arranged on the upper portion of the fixing plate and fixedly connected with the fixing plate, and the adjusting block is arranged on the surface of the connecting rod and in threaded connection with the connecting rod. The movable plate is arranged on the upper portion of the adjusting block and slidably connected with the connecting rod, the movable plate can be driven to move up and down by rotating the adjusting block, and therefore the distance between the movable plate and the fixed plate is adjusted, and ion source filaments of different models can be conveniently installed.

Description

Technical Field

[0001] This utility model relates to the field of ion source filament technology, and more specifically to a positioning and mounting structure for ion source filaments. Background Technology

[0002] An ion source filament, typically made of tungsten wire, is the component in an ion source used to emit electrons to generate ions. In an ion source, the filament is heated to a high temperature to emit electrons, which collide with gas atoms or molecules, ionizing them and producing ions. Ion source filaments are widely used in equipment such as mass spectrometers, ion accelerators, electromagnetic isotope separators, ion implanters, and ion beam etching devices.

[0003] The installation of the ion source filament requires maintaining a certain distance from the cathode, while also ensuring the stability of the ion source filament installation. Therefore, a new technical solution is needed to address this issue. Utility Model Content

[0004] To address the shortcomings of existing technologies, this invention provides a positioning and mounting structure for ion source filaments, thereby solving the problems mentioned in the background section.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a positioning and mounting structure for an ion source filament, comprising: a mounting base, a fixing plate fixedly connected to the upper part of the mounting base, a connecting rod fixedly connected to the upper part of the fixing plate, an adjusting block threadedly connected to the connecting rod on the surface of the connecting rod, a movable plate slidably connected to the connecting rod on the upper part of the adjusting block, mounting holes inside both the fixing plate and the movable plate, and a filament body inside the mounting holes, and fixing mechanisms corresponding to the mounting holes inside both the movable plate and the fixing plate.

[0006] In a preferred embodiment of this utility model, a limiting plate is provided on the upper part of the connecting rod, and the limiting plate is fixedly connected to the connecting rod.

[0007] In a preferred embodiment of this utility model, the mounting base has a through hole inside, and the through hole extends into the interior of the connecting rod.

[0008] In a preferred embodiment of this utility model, the mounting base is provided with rectangular locking blocks around its perimeter.

[0009] In a preferred embodiment of this utility model, the fixing mechanism includes a movable groove disposed inside the movable plate and the fixed plate. A plug-in rod is disposed inside the movable groove, and a movable column is disposed on the surface of the plug-in rod. A plug-in hole is disposed inside the movable column, and the plug-in rod is inserted into the plug-in hole. The movable column extends into the interior of the mounting hole and contacts the filament body. A spring column is disposed on the surface of the plug-in rod, and the spring column contacts the movable column.

[0010] In a preferred embodiment of the present invention, a fixing block is provided on the upper part of the movable column and the fixing block extends to the outside of the movable groove.

[0011] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0012] This invention features a fixed plate fixedly connected to the upper part of the mounting base, a connecting rod fixedly connected to the fixed plate, an adjusting block threadedly connected to the connecting rod, and a movable plate slidably connected to the connecting rod above the adjusting block. Rotating the adjusting block allows the movable plate to move up and down, adjusting the distance between it and the fixed plate, facilitating the installation of different types of ion source filaments. Both the fixed plate and the movable plate have mounting holes containing filament bodies. Both the movable plate and the fixed plate have fixing mechanisms corresponding to the mounting holes, which secure the filament bodies and prevent wobbling during installation, ensuring the correct distance between the filament and the cathode. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0014] Figure 2 This is a schematic cross-sectional view of the present invention.

[0015] Figure 3 This is an enlarged structural diagram of part A of the present invention;

[0016] Figure 4 This is a schematic diagram of the bottom structure of this utility model.

[0017] In the diagram: 1. Fixed plate; 2. Connecting rod; 3. Movable plate; 4. Limiting plate; 5. Mounting hole; 6. Fixing mechanism; 7. Filament body; 8. Mounting base; 9. Adjusting block; 10. Movable groove; 11. Plug-in rod; 12. Spring column; 13. Plug-in hole; 14. Movable column; 15. Fixed block; 16. Locking block; 17. Through hole. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0019] Please see Figure 1-4 This utility model provides a technical solution: a positioning and mounting structure for an ion source filament.

[0020] The problems to be solved are: the installation of the ion source filament needs to maintain a certain distance from the cathode, and the stability of the ion source filament installation needs to be ensured.

[0021] The solution is as follows: A positioning and mounting structure for an ion source filament includes: a mounting base 8, a fixing plate 1 fixedly connected to the upper part of the mounting base 8, a connecting rod 2 fixedly connected to the upper part of the fixing plate 1, an adjusting block 9 threadedly connected to the connecting rod 2, a movable plate 3 slidably connected to the connecting rod 2, mounting holes 5 inside both the fixing plate 1 and the movable plate 3, and a filament body 7 inside the mounting holes 5; fixing mechanisms 6 corresponding to the mounting holes 5 inside both the movable plate 3 and the fixing plate 1. The fixing plate 1 is fixedly mounted on the upper part of the mounting base 8. The fixed plate 1 has a connecting rod 2 fixedly connected to it. An adjusting block 9 is threadedly connected to the connecting rod 2 on its surface. A movable plate 3 is slidably connected to the connecting rod 2 above the adjusting block 9. Rotating the adjusting block 9 allows the movable plate 3 to move up and down, adjusting the distance between it and the fixed plate 1, facilitating the installation of different types of ion source filaments. Both the fixed plate 1 and the movable plate 3 have mounting holes 5, with filament bodies 7 installed inside each hole. Both the movable plate 3 and the fixed plate 1 have fixing mechanisms 6 corresponding to the mounting holes 5, which secure the filament bodies 7, preventing shaking during installation and ensuring the proper distance between them and the cathode.

[0022] Further improvements, such as Figure 1 As shown: The upper part of the connecting rod 2 is provided with a limiting plate 4 and the limiting plate 4 is fixedly connected to the connecting rod 2. The setting of the limiting plate 4 can limit the maximum movement distance of the movable plate 3 on the connecting rod 2, and prevent the movable plate 3 from falling off or being damaged due to excessive movement.

[0023] Further improvements, such as Figure 4 As shown: The mounting base 8 has a through hole 17 inside, and the through hole 17 extends into the interior of the connecting rod 2. The through hole 17 facilitates positioning and alignment during installation, improving installation efficiency and accuracy.

[0024] Further improvements, such as Figure 4 As shown: The mounting base 8 is provided with rectangular locking blocks 16 around its perimeter. The locking blocks 16 can provide additional fixing and support, and enhance the connection strength between the mounting base 8 and other components.

[0025] Further improvements, such as Figure 3 As shown: The fixing mechanism 6 includes a movable groove 10 disposed inside the movable plate 3 and the fixed plate 1. The movable groove 10 is provided with a plug rod 11 and the surface of the plug rod 11 is provided with a movable column 14. The movable column 14 is provided with a plug hole 13 and the plug rod 11 is inserted into the plug hole 13. The movable column 14 extends into the interior of the mounting hole 5 and contacts the filament body 7. The surface of the plug rod 11 is provided with a spring column 12 and the spring column 12 contacts the movable column 14. The movable column 14 can be finely adjusted according to different sizes of the filament body 7 to ensure tight contact and fixation of the filament body 7. The spring column 12 provides a certain degree of elasticity to adapt to the slight deformation of the filament body 7 caused by temperature changes.

[0026] Further improvements, such as Figure 3 As shown: The upper part of the movable column 14 is provided with a fixing block 15, and the fixing block 15 extends to the outside of the movable groove 10. The fixing block 15 can easily adjust the position of the movable column 14, and at the same time provide additional fixing points to enhance the connection strength between the movable column 14 and the movable groove 10.

[0027] Working principle: This utility model has a fixed plate 1 on the upper part of the mounting base 8, and the fixed plate 1 is fixedly connected to the mounting base 8. A connecting rod 2 is provided on the upper part of the fixed plate 1, and the connecting rod 2 is fixedly connected to the fixed plate 1. An adjusting block 9 is provided on the surface of the connecting rod 2, and the adjusting block 9 is threadedly connected to the connecting rod 2. A movable plate 3 is provided on the upper part of the adjusting block 9, and the movable plate 3 is slidably connected to the connecting rod 2. By rotating the adjusting block 9, the movable plate 3 can be driven to move up and down, thereby adjusting the distance between it and the fixed plate 1, which facilitates the installation of different types of ion source filaments. The fixed plate 1 and the movable plate 3 are both provided with mounting holes 5, and the filament body 7 is provided inside the mounting holes 5. The movable plate 3 and the fixed plate 1 are both provided with fixing mechanisms 6, and the fixing mechanisms 6 correspond to the mounting holes 5. The filament body 7 can be fixed by the mechanism to prevent shaking during installation and to ensure the distance between it and the cathode.

[0028] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0029] Finally, the following points should be noted: First, in the description of this application, it should be noted that, unless otherwise specified and limited, the terms "installation", "connection", and "linkage" should be interpreted broadly, and can refer to mechanical or electrical connections, or internal connections between two components, or direct connections. "Up", "down", "left", "right", etc., are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may change.

[0030] Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A positioning and mounting structure for an ion source filament, characterized by: Include: The mounting seat (8), the upper portion of the mounting seat (8) is provided with a fixed plate (1), and the fixed plate (1) is fixedly connected with the mounting seat (8), the upper portion of the fixed plate (1) is provided with a connecting rod (2), and the connecting rod (2) is fixedly connected with the fixed plate (1), the surface of the connecting rod (2) is provided with an adjusting block (9), and the adjusting block (9) is threadedly connected with the connecting rod (2), the upper portion of the adjusting block (9) is provided with a movable plate (3), and the movable plate (3) is slidably connected with the connecting rod (2), the inside of the fixed plate (1) and the movable plate (3) is provided with a mounting hole (5), and the inside of the mounting hole (5) is provided with a filament body (7), the inside of the movable plate (3) and the fixed plate (1) is provided with a fixing mechanism (6), and the fixing mechanism (6) corresponds to the mounting hole (5).

2. The positioning and mounting structure for a filament of an ion source according to claim 1, characterized by: The upper portion of the connecting rod (2) is provided with a limiting plate (4), and the limiting plate (4) is fixedly connected with the connecting rod (2).

3. The positioning and mounting structure for a filament of an ion source according to claim 1, characterized by: The inside of the mounting seat (8) is provided with a through hole (17), and the through hole (17) extends to the inside of the connecting rod (2).

4. The positioning and mounting structure for a filament of an ion source according to Claim 1, characterized by: The periphery of the mounting seat (8) is provided with a clamping block (16) arranged in a rectangular structure.

5. The positioning and mounting structure for a filament of an ion source according to Claim 1, characterized by: The fixing mechanism (6) includes an active slot (10) arranged in the inside of the movable plate (3) and the fixed plate (1), the inside of the active slot (10) is provided with a plug-in rod (11), and the surface of the plug-in rod (11) is provided with a movable column (14), the inside of the movable column (14) is provided with a plug-in hole (13), and the plug-in rod (11) is inserted into the plug-in hole (13), the movable column (14) extends to the inside of the mounting hole (5) and is in contact with the filament body (7), the surface of the plug-in rod (11) is provided with a spring column (12), and the spring column (12) is in contact with the movable column (14).

6. The positioning and mounting structure for a filament of an ion source according to claim 5, characterized by: The upper portion of the movable column (14) is provided with a fixed block (15), and the fixed block (15) extends to the outside of the active slot (10).

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