Ejector pin module capable of simply and accurately controlling speed

Abstract

The utility model discloses an ejector pin module capable of simply and accurately controlling speed, which comprises a driving ejector pin seat, and an ejector pin component is mounted at the top of the driving ejector pin seat; the driving ejector pin seat comprises a base, a first bearing, an extension spring, an Archimedes spiral cam and a servo motor, an ejector pin assembly fixing plate is fixed to the base, an original point sensor is fixedly arranged on one side of the upper end of the base, and a crossed roller guide rail is fixedly arranged on the base; the ejector pin assembly comprises a connecting seat and a step pin, the connecting seat is connected with the base through a crossed roller guide rail, the connecting seat is fixedly connected with a second bearing through the step pin, the second bearing is stretched through an extension spring to keep in contact with the Archimedes spiral cam all the time, an ejector rod is arranged above the connecting seat, and the ejector rod is fixed to the connecting seat; according to the utility model, the problem that when the speed of the ejector pin and the speed of the suction nozzle are difficult to accurately match, the suction nozzle cannot peel off a chip from a film material or the chip is crushed and damaged is solved.

Description

Technical Field

[0001] This application relates to the field of ejector pin module technology, and in particular to an ejector pin module with simple and precise speed control. Background Technology

[0002] In semiconductor devices, the separation of the chip from the film is a crucial step. To achieve this, ejector modules are typically used. Existing ejector modules generally employ a rotary motor, eccentric wheel, and bearings to drive the reciprocating motion of the ejector pins. However, this driving method has some problems.

[0003] First, the speed change of the eccentric wheel at different positions during rotation is not linear, which complicates the precise control of the ejector pin's ejection speed. When there are errors in the eccentric wheel's machining, the speed variation becomes even more complex. To match the ejector pin speed with the speed at which the nozzle picks up the chip, complex software algorithms are needed to control the drive motor's rotation speed. This not only consumes a significant amount of debugging time but is also prone to large deviations. When the ejector pin speed and nozzle speed are not precisely matched, the nozzle may fail to peel the chip from the film, or the chip may be damaged by pressure, severely impacting chip manufacturing efficiency and quality, increasing production costs and the defect rate.

[0004] Therefore, existing technologies have shortcomings and need to be improved. Summary of the Invention

[0005] This application provides a simple and precise speed control for the ejector module, addressing the more complex speed variations that occur when errors occur during eccentric wheel machining. To match the ejector speed with the speed at which the nozzle picks up the chip, complex software algorithms are needed to control the rotational speed of the drive motor. This not only consumes significant debugging time but is also prone to large deviations. When the ejector speed and nozzle speed are not precisely matched, the nozzle may fail to peel the chip from the film, or the chip may be damaged by pressure, severely impacting chip manufacturing efficiency and quality, and increasing production costs and defect rates.

[0006] In a first aspect, this application provides a simple and precise speed control ejector module, including a drive ejector seat, on the top of which an ejector assembly is mounted; the drive ejector seat includes a base, a first bearing, a tension spring, an Archimedean spiral cam, and a servo motor; a fixing plate for the ejector assembly is fixed on the base; an origin sensor is fixedly disposed on one side of the upper end of the base; and a cross roller guide is fixedly disposed on the base; the ejector assembly includes a connecting seat and a stepped pin; the connecting seat is connected to the base via the cross roller guide; a second bearing is fixedly connected to the connecting seat via the stepped pin; and the second bearing is connected via the... The tension spring remains in contact with the Archimedean spiral cam throughout its tension. A push rod is provided above the connecting seat, and the push rod is fixed to the connecting seat. The base is fixedly connected to the base of the ejector pin assembly. An Archimedean spiral cam is provided on one side of the base and is fixedly mounted on a rotating shaft. A driven synchronous wheel and a origin sensing plate are provided on the rotating shaft. A drive synchronous wheel is fixed on the servo motor. The drive synchronous wheel and the driven synchronous wheel are connected by a synchronous belt. The rotation of the servo motor drives the rotating shaft to rotate synchronously, thereby driving the Archimedean spiral cam to rotate, causing the ejector pin to move in the vertical direction.

[0007] Optionally, a bushing fixing seat is provided above the ejector pin assembly base, the bushing fixing seat is fixedly connected to the ejector pin assembly base, and a first sealing ring is provided between the bushing fixing seat and the ejector pin assembly base.

[0008] Optionally, an air pipe connector is fixedly provided on one side of the lower end of the bushing fixing seat, a ball bushing is fixedly provided on one side of the upper end of the air pipe connector, a pin cap is provided above the ball bushing, and the pin cap is fixedly provided on the bushing fixing seat.

[0009] Optionally, a push rod is installed on one side of the connecting seat, a second sealing ring is provided on the push rod, and a push pin is connected to the push rod through a push pin clamp.

[0010] Optionally, the ejector module further includes a vacuum system that holds the film material tightly against the ejector cap, the rotating shaft is assembled with the first bearing, and a bearing seat is fixedly provided on one side of the lower end of the base, with the first bearing installed inside the bearing seat.

[0011] Optionally, the ejector pin assembly further includes a guide mechanism for guiding the linear movement of the ejector pin, and the servo motor is connected to the base via the first bearing.

[0012] Optionally, the shape and size of the ejector cap are matched to the shape and size of the chip, and the drive ejector seat and ejector assembly are detachably connected.

[0013] Optionally, the ejector module further includes a control system, which is electrically connected to the servo motor and is used to control the rotation speed and rotation direction of the servo motor.

[0014] The technical solutions provided in this application have the following advantages compared with the prior art:

[0015] This application embodiment uses an Archimedes spiral cam to achieve a fixed proportional relationship between rotational speed and linear speed, which can accurately control the ejection speed of the ejector pin without complex software algorithms. This greatly simplifies the speed control process, shortens the debugging time, and avoids the risk that the nozzle may fail to peel the chip off the film or the chip may be damaged when the ejector pin speed and the nozzle speed are not accurately matched. Attached Figure Description

[0016] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.

[0017] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] One or more embodiments are illustrated by way of example with reference numerals in the accompanying drawings. These illustrations do not constitute a limitation on the embodiments. Elements with the same reference numerals in the drawings are denoted as similar elements. Unless otherwise stated, the figures in the drawings are not to be limited by scale.

[0019] Figure 1 This is a perspective view of the ejector pin module that allows for simple and precise speed control according to this utility model.

[0020] Figure 2 This is a schematic diagram of the exploded structure of the drive pin seat provided by this utility model.

[0021] Figure 3 This is a front view of the ejector pin assembly provided by this utility model.

[0022] Figure 4 This is a schematic diagram of the ejector pin assembly provided by this utility model.

[0023] Explanation of reference numerals in the attached figures:

[0024] 1. Drive pin holder; 101. Base; 102. Archimedes spiral cam; 103. First bearing; 104. Bearing housing; 105. Origin sensor plate; 106. Origin sensor; 107. Pin assembly fixing plate; 108. Cross roller guide; 109. Servo motor; 110. Drive synchronous pulley; 111. Synchronous belt; 112. Driven synchronous pulley; 113. Rotating shaft; 114. Tension spring; 2. Pin assembly; 201. Connecting seat; 202. Pin assembly base; 203. Stepped pin; 204. Second bearing; 205. Pin rod; 206. Air pipe connector; 207. First sealing ring; 208. Bushing fixing seat; 209. Second sealing ring; 210. Pin chuck; 211. Pin; 212. Pin cap; 213. Ball bushing. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0026] The following disclosure provides numerous different embodiments or examples for implementing various structures of this application. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the scope of this application. Furthermore, reference numerals and / or letters may be repeated in different examples. Such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed.

[0027] For ease of description, spatial relative terms may be used in the text to describe the relative position or movement of one element or feature relative to another element or feature, as shown in the figure. These relative terms include, for example, "inside," "outside," "middle," "outer," "below," "below," "above," "front," "back," etc. Such spatial relative terms are intended to include different orientations of the device in use or operation, other than those depicted in the figure. For example, if the device in the figure undergoes a positional flip, orientation change, or change of motion, these directional indications will change accordingly. For instance, an element described as "below other elements or features" or "below other elements or features" will subsequently be oriented "above other elements or features" or "above other elements or features." Therefore, the example term "below" can include both upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or in other directions), and the spatial relative descriptors used in the text will be interpreted accordingly.

[0028] To address the technical problems in the prior art, this application provides a simple and precise ejector module that can control the speed of the ejector pin. It can achieve a fixed proportional relationship between the rotational speed and the linear speed by using an Archimedean spiral cam and utilizing its characteristics. It can precisely control the ejection speed of the ejector pin without the need for complex software algorithms, which greatly simplifies the speed control process, shortens the debugging time, and avoids the risk that the nozzle may not be able to peel the chip off the film or the chip may be damaged when the ejector pin speed and the nozzle speed are not accurately matched.

[0029] Figure 1-4A simple and precise speed control ejector module provided in this application includes a drive ejector seat 1, with an ejector assembly 2 mounted on the top of the drive ejector seat 1. The drive ejector seat 1 includes a base 101, a first bearing 103, a tension spring 114, an Archimedean spiral cam 102, and a servo motor 109. An ejector assembly fixing plate 107 is fixed on the base 101, and an origin sensor 106 is fixedly installed on one side of the upper end of the base 101. A cross roller guide 108 is fixedly installed on the base 101. The ejector assembly 2 includes a connecting seat 201 and a stepped pin 203. The connecting seat 201 is connected to the base 101 via the cross roller guide 108. A second bearing 204 is fixedly connected to the connecting seat 201 via the stepped pin 203. The second bearing 204 is stretched by the tension spring 114 and kept in contact with the Archimedean spiral cam 102. A push rod 205 is installed above the connecting seat 201. Rod 205 is fixed to connecting seat 201, and base 101 is fixedly connected to ejector pin assembly base 202. An Archimedean spiral cam 102 is provided on one side of base 101. The Archimedean spiral cam 102 is fixedly mounted on rotating shaft 113. A driven synchronous wheel 112 and a origin sensing plate 105 are provided on rotating shaft 113. A drive synchronous wheel 110 is fixed on servo motor 109. The drive synchronous wheel 110 and the driven synchronous wheel 112 are connected by synchronous belt 111. The rotation of servo motor 109 drives rotating shaft 113 to rotate synchronously, thereby driving Archimedean spiral cam 102 to rotate, so that ejector pin 211 moves in the vertical direction. Ejector pin module also includes control system. Control system is electrically connected to servo motor 109 and is used to control the rotation speed and rotation direction of servo motor 109. This ejector pin module drives Archimedean spiral cam to rotate through servo motor, thereby realizing precise vertical movement of ejector pin.

[0030] As an improvement to the above technical solution, a bushing fixing seat 208 is provided above the ejector assembly base 202. The bushing fixing seat 208 is fixedly connected to the ejector assembly base 202. A first sealing ring 207 is provided between the bushing fixing seat 208 and the ejector assembly base 202. An air pipe connector 206 is fixedly provided on one side of the lower end of the bushing fixing seat 208. A ball bushing 213 is fixedly provided on one side of the upper end of the air pipe connector 206. An ejector cap 212 is provided above the ball bushing 213. The ejector pin assembly is fixedly mounted on the bushing fixing seat 208. A push rod 205 is installed on one side of the connecting seat 201. A second sealing ring 209 is provided on the push rod 205. An ejector pin 211 is connected to the push rod 205 through the ejector pin chuck 210. The first sealing ring 207 makes the ejector pin assembly more airtight, effectively preventing dust and other impurities from entering, improving the service life and reliability of the ejector pin assembly. At the same time, the setting of the ball bushing and ejector pin cap is conducive to the smooth movement of the ejector pin, further improving the accuracy and stability of the ejector pin module.

[0031] As an improvement to the above technical solution, the ejector module also includes a vacuum system. The vacuum system holds the film material tightly against the ejector cap 212. The rotating shaft 113 is assembled with the first bearing 103. A bearing seat 104 is fixedly installed on one side of the lower end of the base 101. The first bearing 103 is installed in the bearing seat 104. The ejector assembly 2 also includes a guide mechanism, which is used to guide the linear movement of the ejector 211. The servo motor 109 is connected to the base 101 through the first bearing 103. The addition of the vacuum system allows the film material to be tightly attached to the ejector cap, ensuring the stability and accuracy of the film material during processing. The setting of the guide mechanism further ensures the linear movement accuracy of the ejector and improves the overall performance and processing quality of the ejector module.

[0032] As an improvement to the above technical solution, the shape and size of the ejector cap 212 are matched with the shape and size of the chip. The ejector base 1 and the ejector assembly 2 are detachably connected. The ejector cap matches the shape and size of the chip, which can better adapt to the shape of the chip and also facilitate the replacement of the corresponding ejector cap according to the shape of different chips. The detachable connection of the ejector base and the ejector assembly facilitates the maintenance and replacement of the ejector module.

[0033] The working principle and usage of this utility model:

[0034] Working principle:

[0035] Servo motor drive: The servo motor 109 drives the driven synchronous pulley 112 to rotate through the synchronous pulley 110 and the synchronous belt 111, thereby causing the rotating shaft 113 to rotate synchronously. An Archimedean spiral cam 102 is fixed on the rotating shaft 113, and its rotational motion is transmitted to the ejector assembly 2 through the tension spring 114 and the second bearing 204.

[0036] Motion conversion of the Archimedean spiral cam: The rotational motion of the Archimedean spiral cam 102 is converted into the linear motion of the ejector pin 211 through its spiral characteristics. Due to the characteristics of the Archimedean spiral, the motion speed of the ejector pin 211 is in a fixed proportional relationship with the rotational speed of the servo motor 109, thereby achieving precise speed control.

[0037] Linear motion of the ejector pin assembly: The ejector pin assembly 2 is connected to the cross roller guide 108 via the connecting seat 201 to ensure smooth linear motion of the ejector pin 211 in the vertical direction. The ejector pin 211 is connected to the ejector rod 205 via the ejector pin chuck 210. A second sealing ring 209 is provided on the ejector rod 205 to further improve the sealing performance.

[0038] The function of the vacuum system: The vacuum system holds the film material tightly against the ejector cap 212 through the air pipe connector 206 and the ball bushing 213, ensuring the stability and precision of the film material during processing. The shape and size of the ejector cap 212 match the chip, facilitating chip peeling and processing.

[0039] Control system adjustment: The control system is electrically connected to the servo motor 109 and is used to control the rotational speed and direction of the servo motor, thereby achieving precise control over the movement speed and direction of the ejector pin 211. By adjusting the parameters of the servo motor, precise matching between the ejector pin speed and the nozzle speed can be achieved, avoiding problems such as chip damage or inability to peel off.

[0040] How to use:

[0041] Install the drive pin holder 1 and the pin assembly 2 in place according to the instructions, ensuring that all components are firmly connected. Check that the vacuum system is working properly and ensure that the film material can tightly adhere to the pin cap 212. Select the appropriate pin cap 212 according to the shape and size of the chip and install it on the bushing fixing seat 208. Set the rotation speed and direction of the servo motor 109 through the control system. Adjust the movement speed of the pin 211 according to the actual process requirements. Start the servo motor 109 and observe the movement of the pin 211 to ensure that its movement is smooth and the speed meets the requirements. During operation, check the connection of each component regularly to ensure that there is no looseness or damage. Check the sealing performance of the first sealing ring 207 and the second sealing ring 209 to prevent dust and other impurities from entering the pin assembly 2.

[0042] In the above embodiments, the descriptions of each embodiment have different focuses. For parts that are not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0043] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0044] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0045] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0046] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0047] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. The illustrative expressions of the above terms in this specification should not be construed as necessarily referring to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. In addition, those skilled in the art can combine and integrate the different embodiments or examples described in this specification.

[0048] Obviously, those skilled in the art can make various modifications and variations to this application without departing from the spirit and scope of this application. Since these modifications and variations fall within the scope of the claims and their equivalents, this application also intends to include these modifications and variations.

[0049] The above description describes specific embodiments of this application, but the scope of protection of this application is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this application, and these modifications or substitutions should all be covered within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A simple and accurate speed control ejector pin module, characterized in that, The drive thimble base is provided with a thimble assembly at the top; the drive thimble base comprises a base, a first bearing, a tension spring, an Archimedes spiral cam and a servo motor, the base is fixed with the thimble assembly fixing plate, the upper end of the base is fixedly provided with an origin sensor, and the base is fixedly provided with a cross roller guide; the thimble assembly comprises a connecting seat and a stepped pin, the connecting seat is connected with the base through the cross roller guide, the connecting seat is fixedly connected with a second bearing through the stepped pin, the second bearing is kept in contact with the Archimedes spiral cam through the tension spring, a top rod is arranged above the connecting seat, the top rod is fixed with the connecting seat, the base is fixedly connected with the thimble assembly base, the base is provided with an Archimedes spiral cam on one side, the Archimedes spiral cam is fixedly arranged on a rotating shaft, a driven synchronous wheel and an origin sensing sheet are arranged on the rotating shaft, a driving synchronous wheel is fixed on the servo motor, and the driving synchronous wheel and the driven synchronous wheel are connected through a synchronous belt.

2. The simple and accurate speed control ejector pin module according to claim 1, wherein: A bushing fixing seat is arranged above the thimble assembly base, the bushing fixing seat is fixedly connected with the thimble assembly base, and a first sealing ring is arranged between the bushing fixing seat and the thimble assembly base.

3. The simple and accurate speed control ejector pin module of claim 2, wherein: A gas pipe joint is fixedly arranged on one side of the lower end of the bushing fixing seat, a ball bushing is fixedly arranged on one side of the upper end of the gas pipe joint, a thimble cap is arranged above the ball bushing, and the thimble cap is fixedly arranged on the bushing fixing seat.

4. The simple and accurate speed control ejector pin module of claim 3, wherein: A top rod is arranged on one side of the connecting seat, a second sealing ring is arranged on the top rod, and a thimble is connected to the top rod through a thimble chuck.

5. The simple and accurate speed-controllable ejector pin module according to claim 4, wherein: The thimble module further comprises a vacuum system, the vacuum system sucks the film material to tightly adhere to the thimble cap, the rotating shaft is assembled with the first bearing, a bearing seat is fixedly arranged on one side of the lower end of the base, and the first bearing is arranged in the bearing seat.

6. The simple and accurate speed-controllable ejector pin module according to claim 5, characterized in that: The thimble assembly further comprises a guide mechanism for guiding the linear motion of the thimble, and the servo motor is connected with the base through the first bearing.

7. The simple and accurate speed-controllable ejector pin module according to claim 6, characterized in that: The shape and size of the thimble cap match the shape and size of the chip, and the drive thimble base and the thimble assembly are detachably connected.

8. The simple and accurate speed-controllable ejector pin module according to claim 7, characterized in that: The thimble module further comprises a control system, and the control system is electrically connected with the servo motor.

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