Fixed-point locking mechanism for forward and reverse rotation of FOUP outer tool

Abstract

The utility model discloses a fixed-point locking mechanism for forward and reverse rotation of an FOUP external tool, and relates to the technical field of wafer manufacturing, the fixed-point locking mechanism comprises a circular plate, the bottom of the circular plate is provided with a supporting seat, and the top of the supporting seat is provided with a first movable groove in a penetrating manner; and the positioning mechanism is arranged between the circular plate and the supporting seat, and the positioning mechanism is used for driving the FOUP outer tool above the circular plate to rotate. According to the FOUP outer tool, by adopting the front and rear plug pin mode, the fixing plug pin is pushed inwards, the spring is extruded, the clamping rod enters the inner side of the arc-shaped plate, and at the moment, the FOUP outer tool can be manually rotated. When the clamping rod is separated from the fixing position, the fixing plug pin does not need to be manually pushed, and when the FOUP outer tool rotates by 180 degrees to reach the fixing position on the opposite side, the clamping rod can pop out to be clamped at the fixing position by means of the elastic force of the spring. The problem of manual continuous pressing is solved, and manual operation is facilitated.

Description

Technical Field

[0001] This utility model belongs to the field of wafer manufacturing technology, specifically a fixed-point locking mechanism for the forward and reverse rotation of FOUP external tooling. Background Technology

[0002] FOUP external tooling refers to auxiliary devices or equipment used outside the FOUP. These tooling fixtures are designed to work with the FOUP to perform various operations on the wafer during manufacturing, inspection, storage, and transportation. The FOUP itself is a closed container used to store semiconductor wafers and to handle and transport them during manufacturing to protect them from contamination and damage from the external environment.

[0003] The specific functions and forms of FOUP external tooling may vary depending on application requirements. Some tooling allows the FOUP to rotate on external equipment and lock in a specific position. This helps with precise positioning and manipulation of the wafer during processing; however, existing equipment uses a press-and-position structure, requiring manual operation with one hand to hold it down while the other hand rotates the upper FOUP external tooling, which is inconvenient. Utility Model Content

[0004] The present invention aims to solve the technical problems existing in the prior art; to this end, the present invention proposes a fixed-point locking mechanism for the forward and reverse rotation of FOUP external tooling.

[0005] The objective of this utility model can be achieved through the following technical solutions:

[0006] A mechanism for locking the forward and reverse rotation of FOUP external tooling includes a circular plate, a support base at the bottom of the circular plate, and a first movable groove through the top of the support base.

[0007] A positioning mechanism is disposed between the circular plate and the support base, and the positioning mechanism is used to drive the FOUP external tooling above the circular plate to rotate.

[0008] As a further embodiment of this utility model: a tray for placing FOUP external tooling is fixedly connected to the top of the circular plate.

[0009] As a further embodiment of this utility model: the positioning mechanism includes an arc-shaped plate fixedly connected to the bottom of the circular plate, and a fixing pin set on the support seat through a reset component. There are two arc-shaped plates, and a fixing position is provided between the two arc-shaped plates. A locking rod that cooperates with the arc-shaped plate is fixedly connected to the fixing pin.

[0010] As a further embodiment of this utility model: the reset assembly includes a fixed plate fixedly connected to the support base, and a through groove through which the top of the fixed pin is opened. The top of the fixed plate is provided with a second movable groove. There are two fixed plates, and a connecting plate is fixedly connected between the two fixed plates. The connecting plate is slidably connected to the fixed pin. A vertical plate is fixedly connected in the through groove, and a spring is fixedly connected between the vertical plate and the connecting plate.

[0011] As a further embodiment of this utility model: a connecting block is fixedly connected to one side of the fixing pin, and a screw is threadedly connected to one side of the connecting block.

[0012] As a further embodiment of this utility model: a knob is fixedly connected to one end of the screw, and the connecting block is slidably connected to the fixing plate.

[0013] As a further embodiment of this utility model: a connecting column is fixedly connected to the bottom of the circular plate, a bearing is installed on the support base, and the connecting column is inserted into the bearing.

[0014] As a further embodiment of this utility model: one side of the first movable groove cavity is open, there are two first movable grooves, and the first movable groove is located directly below the fixed position.

[0015] Compared with the prior art, the beneficial effects of this utility model are:

[0016] 1. This application employs a front and rear pin design. Pushing the fixing pin inward compresses the spring, causing the locking bar to enter the inner side of the curved plate. At this point, the FOUP outer fixture can be manually rotated. When the locking bar disengages from its fixed position, manual pushing of the fixing pin is unnecessary. When the FOUP outer fixture rotates 180° to the opposite fixed position, the locking bar, relying on its own spring force, will pop outward and lock into the fixed position. This solves the problem of continuous manual pressing and facilitates manual operation.

[0017] 2. This application, through the combined use of connecting blocks, screws, and knobs, allows for free adjustment of the overall length of the fixing pin, avoiding the space-consuming nature of excessively long fixing pins. Attached Figure Description

[0018] Figure 1 This is a perspective view of the present utility model;

[0019] Figure 2 This is a three-dimensional sectional view of the present invention;

[0020] Figure 3 This is a perspective view of the circular plate of this utility model;

[0021] Figure 4 This is a perspective view of the reset component of this utility model.

[0022] In the diagram: 1. Circular plate; 2. Support base; 3. First movable groove; 4. Positioning mechanism; 41. Arc plate; 42. Reset assembly; 421. Fixing plate; 422. Second movable groove; 423. Connecting plate; 424. Through groove; 425. Vertical plate; 426. Spring; 43. Fixing pin; 44. Fixing position; 45. Clamping bar; 5. Connecting block; 6. Screw; 7. Knob; 8. Connecting column; 9. Bearing; 10. Tray. Detailed Implementation

[0023] The technical solution of this utility model will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0024] Example 1

[0025] Please see Figures 1-4 As shown, this application provides a fixed-point locking mechanism for forward and reverse rotation of FOUP external tooling, including a circular plate 1, a support base 2 provided at the bottom of the circular plate 1, and a first movable groove 3 through the top of the support base 2.

[0026] The positioning mechanism 4 is disposed between the circular plate 1 and the support base 2. The positioning mechanism 4 is used to drive the FOUP external tooling above the circular plate 1 to rotate.

[0027] The top of the circular plate 1 is fixedly connected to a tray 10 for placing FOUP external tooling.

[0028] The positioning mechanism 4 includes an arc-shaped plate 41 fixedly connected to the bottom of the circular plate 1, and a fixing pin 43 set on the support base 2 by a reset component 42. There are two arc-shaped plates 41, and a fixing position 44 is provided between the two arc-shaped plates 41. A locking rod 45 that cooperates with the arc-shaped plate 41 is fixedly connected to the fixing pin 43. Pushing knob 7 moves the locking bar 45 via screw 6, connecting block 5, and fixing pin 43. The movement of fixing pin 43 moves vertical plate 425, compressing spring 426. The locking bar 45 then moves out of fixing position 44. At this point, the FOUP external fixture can be manually rotated. Rotating tray 10 then rotates circular plate 1, allowing the locking bar 45 to move to the inside of arc plate 41. Releasing knob 7 locks the locking bar 45 inside arc plate 41. When the FOUP external fixture rotates 180° to the opposite fixing position 44, the locking bar 45 springs outward and locks in the fixing position due to the spring force of spring 426. This solves the problem of continuous manual pressing and facilitates manual operation.

[0029] The reset assembly 42 includes a fixing plate 421 fixedly connected to the support base 2, and a through groove 424 through which the top of the fixing pin 43 is opened. The top of the fixing plate 421 is provided with a second movable groove 422. There are two fixing plates 421, and a connecting plate 423 is fixedly connected between the two fixing plates 421. The connecting plate 423 is slidably connected to the fixing pin 43. A vertical plate 425 is fixedly connected in the through groove 424, and a spring 426 is fixedly connected between the vertical plate 425 and the connecting plate 423.

[0030] A connecting column 8 is fixedly connected to the bottom of the circular plate 1, and a bearing 9 is installed on the support base 2. The connecting column 8 is inserted into the bearing 9.

[0031] The first movable groove 3 has an opening on one side, and there are two first movable grooves 3. The first movable groove 3 is located directly below the fixed position 44.

[0032] Example 2

[0033] Based on Example 1, see Figure 1 , Figure 2 and Figure 4 As shown.

[0034] A connecting block 5 is fixedly connected to one side of the fixing pin 43, and a screw 6 is threadedly connected to one side of the connecting block 5.

[0035] A knob 7 is fixedly connected to one end of the screw 6, and the connecting block 5 is slidably connected to the fixing plate 421. Rotating the knob 7 causes the screw 6 to rotate, thereby moving the screw 6 off the connecting block 5 and increasing the overall length of the fixing pin 43. Through the combined use of the connecting block 5, the screw 6, and the knob 7, the overall length of the fixing pin 43 can be freely adjusted, preventing the fixing pin 43 from being too long and taking up too much space.

[0036] The working principle of this utility model is as follows: by rotating the knob 7, the screw 6 is driven to rotate, thereby causing the screw 6 to move out of the connecting block 5, and thus increasing the overall length of the fixing pin 43.

[0037] Next, push knob 7, which in turn drives the locking rod 45 to move via screw 6, connecting block 5, and fixing pin 43. The movement of fixing pin 43 drives vertical plate 425 to move, thereby compressing spring 426. Then, locking rod 45 will move out of fixing position 44. At this time, the FOUP outer tooling can be rotated manually. Then, by rotating tray 10, the circular plate 1 is rotated, which allows locking rod 45 to move to the inside of arc plate 41. Release knob 7, and locking rod 45 will be locked inside arc plate 41. When the FOUP outer tooling rotates 180° to the opposite fixing position 44, locking rod 45 will pop out and lock in the fixing position due to the elastic force of spring 426. This solves the problem of continuous manual pressing and facilitates manual operation.

[0038] The above embodiments are only used to illustrate the technical methods of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical methods of this utility model without departing from the spirit and scope of the technical methods of this utility model.

Claims

1. A mechanism for locking the forward and reverse rotation of an external tooling FOUP at a fixed point, comprising a circular plate (1), characterized in that: The bottom of the circular plate (1) is provided with a support base (2), and the top of the support base (2) is provided with a first movable groove (3). The positioning mechanism (4) is set between the circular plate (1) and the support base (2). The positioning mechanism (4) is used to drive the FOUP external tooling above the circular plate (1) to rotate. The positioning mechanism (4) includes an arc plate (41) fixedly connected to the bottom of the circular plate (1), and a fixing pin (43) set on the support base (2) by a reset component (42). There are two arc plates (41), and a fixing position (44) is provided between the two arc plates (41). A locking bar (45) that cooperates with the arc plate (41) is fixedly connected to the fixing pin (43). The reset assembly (42) includes a fixed plate (421) fixedly connected to the support base (2) and a through groove (424) through which the top of the fixed pin (43) is opened. The top of the fixed plate (421) is provided with a second movable groove (422). There are two fixed plates (421). A connecting plate (423) is fixedly connected between the two fixed plates (421). The connecting plate (423) is slidably connected to the fixed pin (43). A vertical plate (425) is fixedly connected in the through groove (424). A spring (426) is fixedly connected between the vertical plate (425) and the connecting plate (423).

2. The mechanism for fixed-point locking of forward and reverse rotation of FOUP external tooling according to claim 1, characterized in that, The top of the circular plate (1) is fixedly connected to a tray (10) for placing FOUP external tooling.

3. A mechanism for fixed-point locking of forward and reverse rotation of FOUP external tooling according to claim 1, characterized in that, A connecting block (5) is fixedly connected to one side of the fixed pin (43), and a screw (6) is threadedly connected to one side of the connecting block (5).

4. A mechanism for fixed-point locking of forward and reverse rotation of FOUP external tooling according to claim 3, characterized in that, A knob (7) is fixedly connected to one end of the screw (6), and the connecting block (5) is slidably connected to the fixing plate (421).

5. A mechanism for fixed-point locking of forward and reverse rotation of FOUP external tooling according to claim 1, characterized in that, The bottom of the circular plate (1) is fixedly connected to a connecting column (8), and a bearing (9) is installed on the support base (2). The connecting column (8) is inserted into the bearing (9).

6. A mechanism for fixed-point locking of forward and reverse rotation of FOUP external tooling according to claim 1, characterized in that, The first movable groove (3) has an opening on one side. There are two first movable grooves (3), and the first movable groove (3) is located directly below the fixed position (44).

Images