Foldable temporary wafer storage rack

Abstract

The utility model relates to the technical field of semiconductor manufacturing, and discloses a foldable temporary wafer storage rack which comprises a supporting bottom plate, a top plate and a supporting plate, the top of the supporting bottom plate is connected with a lifting assembly, the top of the supporting bottom plate is fixedly connected with a fixed cylinder, the fixed cylinder is internally connected with an extending assembly, and the side edge of the supporting plate is connected with an adjusting assembly. The top of the supporting plate is connected with a limiting assembly. Compared with the prior art, the foldable temporary wafer storage rack has the advantages that in the foldable temporary wafer storage rack, the distance between the supporting bottom plate and the top plate can be conveniently adjusted through the lifting assembly, so that the overall size and the occupied area are adjusted, and the foldable temporary wafer storage rack can be folded when not used; the position height of each group of supporting plates can be conveniently adjusted by using the adjusting assemblies, and the supporting plates can be adjusted according to different use or folding conditions of the storage rack; and by using the limiting assembly, the top of the wafer placed in the groove can be conveniently limited, and the wafer is prevented from falling out.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a foldable temporary wafer storage rack. Background Technology

[0002] In the processes of semiconductor wafer production, testing, and transportation, it is often necessary to temporarily store the wafers.

[0003] Existing temporary wafer storage racks are mostly of fixed volume and cannot be flexibly adjusted. They also occupy a lot of space when the racks are not needed, which is not conducive to space management. Furthermore, it is not convenient to adjust the position and height of each set of placement boards, and the position cannot be adjusted according to changes in the size of the storage rack. In addition, it is not convenient to limit and fix the top of the placed wafers, which makes the device have certain shortcomings. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a foldable temporary wafer storage rack.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a foldable temporary wafer storage rack, comprising a supporting base plate, a top plate and a supporting plate, wherein a lifting assembly is connected to the top of the supporting base plate, a fixing cylinder is fixedly connected to the top of the supporting base plate, an extension assembly is connected inside the fixing cylinder, an adjustment assembly is connected to the side of the supporting plate, and a limiting assembly is connected to the top of the supporting plate;

[0006] The lifting assembly includes a fixed block, and multiple sets of fixed blocks are provided. A fixed rod is rotatably connected inside the fixed block. A drive plate is fixedly connected to the outer wall of the fixed rod. A support block is rotatably connected to one end of the drive plate. A sliding groove is provided at the bottom of the top plate, and multiple sets of sliding grooves are provided. The support block slides in the sliding groove. A turntable is fixedly connected to one end of each of the two sets of fixed rods. A limit hole is provided in one set of the turntables. A threaded groove is provided on the side of one set of fixed blocks. A fixing bolt is threadedly connected to the threaded groove. One end of the fixing bolt passes through the limit hole.

[0007] As a further description of the above technical solution:

[0008] The adjusting component includes a fixing sleeve, which is fixedly connected to the side of the support plate and slides on the outside of the fixing cylinder. The support plate has multiple sets of fixing sleeves, and a connecting block is fixedly connected to the top of the support plate. A through hole is opened in the connecting block, and a threaded hole is opened on the outer wall of the fixing cylinder. Multiple sets of threaded holes are provided, and a limit bolt is threadedly connected in the threaded hole. One end of the limit bolt passes through the through hole.

[0009] As a further description of the above technical solution:

[0010] The extension assembly includes an extension rod that is slidably connected inside a fixed cylinder. A vertical groove is provided on the outer wall of the fixed cylinder, and a limiting block is slidably connected inside the vertical groove. The limiting block is fixedly connected to the outer wall of the extension rod.

[0011] As a further description of the above technical solution:

[0012] The limiting component includes a guide rod, which is fixedly connected to the top of the support plate, and a baffle is slidably connected to the outside of the guide rod.

[0013] As a further description of the above technical solution:

[0014] The support plate has grooves and through slots inside.

[0015] As a further description of the above technical solution:

[0016] The top plate has a positioning groove, and the fixing cylinder slides within the positioning groove.

[0017] As a further description of the above technical solution:

[0018] Both the support block and the slide are T-shaped.

[0019] This utility model has the following beneficial effects:

[0020] 1. In this utility model, the foldable wafer temporary storage rack uses a lifting component to facilitate the adjustment of the distance between the support base plate and the top plate, thereby adjusting the overall volume and occupied area, and can be folded up when not in use.

[0021] 2. In this utility model, in the foldable temporary wafer storage rack, an adjustment component is used to facilitate the adjustment of the position and height of each set of support plates, and the support plates can be adjusted according to the different uses or folding conditions of the storage rack.

[0022] 3. In this utility model, in the foldable temporary wafer storage rack, a limiting component is used to limit the top of the wafer placed in the groove, so as to prevent it from falling out. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the overall structure of a foldable temporary wafer storage rack proposed in this utility model;

[0024] Figure 2 This utility model proposes a foldable temporary wafer storage rack. Figure 1 Enlarged view of point A in the middle;

[0025] Figure 3 This is a partial structural diagram of a foldable temporary wafer storage rack proposed in this utility model. Figure 1 ;

[0026] Figure 4 This utility model proposes a foldable temporary wafer storage rack. Figure 3 Enlarged view at point B;

[0027] Figure 5 This is a partial structural diagram of a foldable temporary wafer storage rack proposed in this utility model. Figure 2 .

[0028] Legend:

[0029] 1. Support base plate; 2. Top plate; 3. Fixing block; 4. Fixing rod; 5. Turntable; 6. Limiting hole; 7. Threaded groove; 8. Fixing bolt; 9. Drive plate; 10. Support block; 11. Slide groove; 12. Fixing cylinder; 13. Extension rod; 14. Limiting block; 15. Threaded hole; 16. Vertical groove; 17. Support plate; 18. Groove; 19. Through groove; 20. Fixing sleeve; 21. Connecting block; 22. Through hole; 23. Limiting bolt; 24. Guide rod; 25. Baffle; 26. Positioning groove. Detailed Implementation

[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0031] Reference Figures 1-5 An embodiment of the present invention provides: a foldable temporary wafer storage rack, including a supporting base plate 1, a top plate 2 and a supporting plate 17. A lifting component is connected to the top of the supporting base plate 1, a fixed cylinder 12 is fixedly connected to the top of the supporting base plate 1, an extension component is connected inside the fixed cylinder 12, an adjustment component is connected to the side of the supporting plate 17, and a limiting component is connected to the top of the supporting plate 17.

[0032] The lifting assembly includes a fixed block 3, which has multiple sets. A fixed rod 4 is rotatably connected inside the fixed block 3. A drive plate 9 is fixedly connected to the outer wall of the fixed rod 4. A support block 10 is rotatably connected to one end of the drive plate 9. A sliding groove 11 is opened at the bottom of the top plate 2, which has multiple sets. The support block 10 slides in the sliding groove 11. A turntable 5 is fixedly connected to one end of each of the two sets of fixed rods 4. A limit hole 6 is opened in one set of turntables 5. A threaded groove 7 is opened on the side of one set of fixed blocks 3. A fixing bolt 8 is threadedly connected in the threaded groove 7. One end of the fixing bolt 8 passes through the limit hole 6 to facilitate fixing the turntable 5.

[0033] The adjusting assembly includes a fixing sleeve 20, which is fixedly connected to the side of the support plate 17 and slides on the outside of the fixing cylinder 12. The support plate 17 has multiple sets of fixing sleeves, and a connecting block 21 is fixedly connected to the top of the support plate 17. A through hole 22 is opened in the connecting block 21. A threaded hole 15 is opened on the outer wall of the fixing cylinder 12. Multiple sets of threaded holes 15 are provided, and a limit bolt 23 is threadedly connected in the threaded hole 15. One end of the limit bolt 23 passes through the through hole 22. The extension assembly includes an extension rod 13, which is slidably connected to the fixing cylinder. Inside the fixed cylinder 12, a vertical groove 16 is provided on the outer wall of the fixed cylinder 12. A limiting block 14 is slidably connected in the vertical groove 16. The limiting block 14 is fixedly connected to the outer wall of the extension rod 13. The limiting component includes a guide rod 24, which is fixedly connected to the top of the support plate 17. A baffle 25 is slidably connected to the outside of the guide rod 24. A groove 18 and a through groove 19 are provided in the support plate 17. A positioning groove 26 is provided in the top plate 2. The fixed cylinder 12 slides in the positioning groove 26. Both the support block 10 and the sliding groove 11 are T-shaped to make the top plate 2 more stable.

[0034] Working principle: In the foldable temporary wafer storage rack, the extension rod 13 slides upward from the fixed cylinder 12, while the limiting block 14 slides within the vertical groove 16. Rotating the turntable 5 drives the fixed rod 4 to rotate, which in turn drives the drive plate 9 to rotate. The drive plate 9 then drives the support block 10 to slide within the sliding groove 11. Simultaneously, the top plate 2 slides outside the fixed cylinder 12 and the extension rod 13, facilitating adjustment of the distance between the support base plate 1 and the top plate 2, thereby adjusting the overall volume and occupied area. It can be folded away when not in use. After the distance is opened, slide each set of support plates 17 along the fixed cylinder 12 and extension rod 13 to adjust to the required appropriate height. Use a limit bolt 23 to pass through the through hole 22 and thread it into the corresponding set of threaded holes 15 to facilitate the adjustment and fixation of the position and height of each set of support plates 17. The support plates 17 can be adjusted according to the use or folding of the storage rack. Slide the baffle 25 along the guide rod 24 and slide the baffle 25 above the groove 18 to facilitate the top limit of the wafer placed in the groove 18 and prevent it from falling out.

[0035] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A foldable wafer temporary storage rack comprising a support bottom plate (1), a top plate (2) and a support plate (17), characterized in that: The support bottom plate (1) top is connected with lifting assembly, the support bottom plate (1) top is fixedly connected with fixed cylinder (12), the fixed cylinder (12) is connected with extension assembly, the support plate (17) side is connected with adjusting assembly, the support plate (17) top is connected with limiting assembly; The lifting assembly includes a plurality of fixed blocks (3), the fixed block (3) is rotatably connected with a fixed rod (4), the fixed rod (4) is fixedly connected with a driving plate (9), the driving plate (9) is rotatably connected with a support block (10), the top plate (2) bottom is provided with a plurality of grooves (11), the support block (10) is slidably arranged in the groove (11), the two ends of the fixed rod (4) are fixedly connected with a rotary disc (5), the rotary disc (5) is provided with a limiting hole (6), the side of the fixed block (3) is provided with a threaded groove (7), the threaded groove (7) is threadedly connected with a fixed bolt (8), and the fixed bolt (8) passes through the limiting hole (6).

2. The temporary wafer storage rack of claim 1, wherein: The adjusting assembly includes a fixed sleeve (20), the fixed sleeve (20) is fixedly connected to the side of the support plate (17), the fixed sleeve (20) is slidably arranged outside the fixed cylinder (12), the support plate (17) is provided with a plurality of groups, the support plate (17) top is fixedly connected with a connecting block (21), the connecting block (21) is provided with a through hole (22), the outer wall of the fixed cylinder (12) is provided with a threaded hole (15), the threaded hole (15) is provided with a plurality of groups, the threaded hole (15) is threadedly connected with a limiting bolt (23), and the limiting bolt (23) passes through the through hole (22).

3. The temporary wafer storage rack of claim 1, wherein: The extension assembly includes an extension rod (13), the extension rod (13) is slidably connected in the fixed cylinder (12), the outer wall of the fixed cylinder (12) is provided with a vertical groove (16), the vertical groove (16) is slidably connected with a limiting block (14), and the limiting block (14) is fixedly connected to the outer wall of the extension rod (13).

4. The temporary wafer storage rack of claim 1, wherein: The limiting assembly includes a guide rod (24), the guide rod (24) is fixedly connected to the top of the support plate (17), and the outer side of the guide rod (24) is slidably connected with a baffle (25).

5. The temporary wafer storage rack of claim 1, wherein: The support plate (17) is provided with a recess (18) and a through groove (19).

6. The collapsible wafer temporary storage rack of claim 1 wherein: The top plate (2) is provided with a positioning groove (26), and the fixed cylinder (12) is slidably arranged in the positioning groove (26).

7. The temporary wafer storage rack of claim 1, wherein: The support block (10) and the groove (11) are both T-shaped.

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