Door closing system of vacuum cavity, vacuum coating machine and vacuum etching machine
By introducing pressure sensors and time-delay triggering devices into the vacuum chamber, the chamber door clamping mechanism is automatically controlled, solving the problem of inconvenient operation and achieving efficient and safe chamber door closure.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-13
- Publication Date
- 2026-03-06
AI Technical Summary
The existing vacuum chamber closing system is inconvenient to operate, requiring operators to apply considerable force to trigger the sensor, which is also far from the control panel, affecting both ease of operation and safety.
The system employs a pressure sensor, a time-delay triggering device, and a door clamping mechanism. The controller receives the door closing command and outputs a timing instruction. The time-delay triggering device receives the pressure sensor signal and sends the door closing command, controlling the door clamping mechanism to clamp the door, thus achieving automated door closing.
It improves the operational efficiency and safety of vacuum chamber doors, makes it easier for operators to close the doors, and reduces the need for repetitive operations.
Smart Images
Figure CN223974178U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of vacuum technology, and in particular to a vacuum chamber closing system, a vacuum coating machine, and a vacuum etching machine. Background Technology
[0002] In vacuum coating / etching machines, the vacuum chamber needs to be evacuated before the coating or etching process. Before evacuation, the chamber door must be closed and then the vacuum pump must be started to evacuate the chamber.
[0003] The current vacuum chamber closing system uses a sensor to detect the closed state of the chamber door and a chamber door clamping mechanism. When the control equipment detects that the sensor has generated a signal indicating that the chamber door is closed, the operator needs to input a closing command on the control panel, and the chamber door clamping mechanism will clamp the chamber door.
[0004] However, because the cavity door is equipped with a sealing ring, the operator needs to exert a lot of force to press the cavity door inward to trigger the sensor. Moreover, the control panel is far from the cavity door. If the operator does not exert enough force to trigger the sensor, the operation of pressing the cavity door will not be executed when the operator goes to the control panel to input the closing command. The operator needs to close the cavity door again to trigger the sensor, which greatly affects the convenience of operation. Utility Model Content
[0005] The purpose of this application is to address one of the aforementioned technical deficiencies by providing a vacuum chamber door closing system, a vacuum coating machine, and a vacuum etching machine, thereby improving the operational efficiency of closing the vacuum chamber door.
[0006] A vacuum chamber closing system includes: a controller, a time-delay triggering device, a pressure sensor, and a chamber door clamping mechanism; wherein the pressure sensor is connected to the time-delay triggering device, and the time-delay triggering device and the chamber door clamping mechanism are respectively connected to the controller;
[0007] The pressure sensor is installed on the vacuum chamber and is used to detect the closed state of the vacuum chamber door and output a trigger signal.
[0008] The cavity door clamping mechanism is connected to the cavity door and is used to clamp the cavity door of the vacuum cavity under the control of the controller;
[0009] The controller is used to receive the door closing command input by the operator and output the timing instruction to the delay triggering device, and to receive the door closing command from the delay triggering device and control the door pressing mechanism to press the door.
[0010] The delay trigger device is used to receive the timing command from the controller to start the timing, receive the trigger signal output by the pressure sensor, and send the door closing command to the controller.
[0011] In one embodiment, the delay triggering device is used to send a door closing command to the controller when it receives a trigger signal output by the pressure sensor before the timing period ends.
[0012] In one embodiment, the vacuum chamber closing system further includes: an operation panel connected to the controller for receiving closing commands input by the operator.
[0013] In one embodiment, the closing system of the vacuum cavity further includes: an audio playback device connected to the delay triggering device for playing a closing prompt voice.
[0014] In one embodiment, the delay triggering device is used to send a clear door-closing command to the controller when the timer ends, in order to clear the door-closing task.
[0015] In one embodiment, the closing system of the vacuum chamber further includes: an indicator light connected to the delay triggering device, used to indicate that the pressure sensor outputs a trigger signal.
[0016] In one embodiment, the closing system of the vacuum chamber further includes an LED display screen connected to the delay triggering device for displaying the timing time.
[0017] In one embodiment, the timing period is 10 seconds.
[0018] A vacuum coating machine includes: a vacuum chamber, and a door closing system for the vacuum chamber.
[0019] A vacuum etching machine includes: a vacuum chamber and a door closing system for the vacuum chamber.
[0020] The technical solution of this application has the following beneficial effects:
[0021] The controller receives the closing command input by the operator and outputs a timing instruction to the delay triggering device. The delay triggering device receives the timing instruction from the controller and starts timing. It receives the trigger signal output by the pressure sensor and sends a closing command to the controller. The controller receives the closing command from the delay triggering device and controls the cavity door clamping mechanism to clamp the cavity door. This technical solution can improve the operational efficiency of closing the cavity door of the vacuum cavity, facilitate the operator to close the cavity door conveniently, and improve operational safety.
[0022] Additional aspects and advantages of this application will be set forth in part in the description which follows, and will become apparent from the description or may be learned by practice of this application. Attached Figure Description
[0023] The above and / or additional aspects and advantages of this application will become apparent and readily understood from the following description of the embodiments taken in conjunction with the accompanying drawings, wherein:
[0024] Figure 1 This is a schematic diagram of an example vacuum chamber.
[0025] Figure 2 This is an electrical structure diagram of the door closing system of a vacuum cavity according to one embodiment;
[0026] Figure 3 This is an electrical diagram of the closing system of a vacuum chamber according to another embodiment. Detailed Implementation
[0027] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.
[0028] Those skilled in the art will understand that, unless otherwise stated, the singular forms “a,” “an,” “the,” and “the” used herein may also include the plural forms. It should be further understood that the word “comprising” as used in this application’s specification means the presence of the stated feature, integer, step, or operation, but does not preclude the presence or addition of one or more other features, integers, steps, or operations.
[0029] refer to Figure 1 As shown, Figure 1 This is a schematic diagram of an example vacuum chamber. As shown in the figure, the vacuum chamber 100 includes a chamber 11 and a door 12. The door 12 is connected to the chamber 11 via a hinge. The door 12 is opened and closed by rotation. A door clamping mechanism 14 is connected to the door 12. When the door 12 is closed, it clamps the door 12 and the chamber 11 together to form a sealed vacuum chamber 100. A pressure sensor 13 is installed on the chamber 11. When the door 12 is closed, it outputs a trigger signal to control the door clamping mechanism 14 to clamp the door 12. For example, the door clamping mechanism 14 can be powered by a hydraulic cylinder, an electric cylinder, or a pneumatic cylinder.
[0030] like Figure 2 As shown, Figure 2This is an electrical structure diagram of a vacuum chamber closing system according to one embodiment. The closing system of the vacuum chamber 100 includes: a controller 21, a time-delay triggering device 22, a pressure sensor 13, and a door clamping mechanism 14. The pressure sensor 13 is connected to the time-delay triggering device 22, and the time-delay triggering device 22 and the door clamping mechanism 14 are respectively connected to the controller 21. The pressure sensor 13 can be mounted on the vacuum chamber 100, such as... Figure 1 In this configuration, the chamber 11 can be positioned at the contact point with the door 12 to detect the closed state of the door 12. When the door 12 is closed, it is subjected to pressure and outputs a trigger signal. The door clamping mechanism 14 is connected to the door 12, such as... Figure 1 In the middle, it can be connected to the edge of the cavity door 12, and is used to press the cavity door 12 of the vacuum cavity 100 under the control of the controller 21, so that it is tightly attached to the cavity 11, thereby forming a sealed cavity.
[0031] The controller 21 and the time-delay trigger device 22 are two components located at the control end. The controller 21 receives the closing command input by the operator and then outputs a timing command to the time-delay trigger device 22. The time-delay trigger device 22 receives the timing command from the controller 21 and starts the timing. For example, the timing time can be set to 10 seconds, but other settings can be made according to actual needs. During the timing process, the time-delay trigger device 22 receives the output signal from the pressure sensor 13. Before the timing time ends, when the time-delay trigger device 22 receives the trigger signal output by the pressure sensor 13, it sends a closing command to the controller 21. When the controller 21 receives the closing command from the time-delay trigger device 22, it controls the cavity door clamping mechanism 14 to clamp the cavity door 12, thereby completing the closing process. At the same time, if the time-delay trigger device 22 does not receive a trigger signal when the timing ends, it sends a clear closing command to the controller 21 to clear the closing command. Even if a trigger signal is received again thereafter, the cavity door clamping mechanism 14 will not be controlled to clamp the cavity door 12, thereby ensuring safety.
[0032] As described in the above embodiment, the controller 21 receives the closing command input by the operator and outputs a timing command to the delay triggering device 22. The delay triggering device 22 receives the timing command from the controller 21 and starts timing. It receives the trigger signal output by the pressure sensor 13 and sends a closing command to the controller 21. The controller 21 receives the closing command from the delay triggering device 22 and controls the cavity door clamping mechanism 14 to clamp the cavity door 12. This technical solution can improve the operational efficiency of closing the cavity door 12 of the vacuum cavity 100, facilitate the operator to close the cavity door 12 conveniently, and improve operational safety.
[0033] To make the technical solution of this application clearer, more embodiments are described below with reference to the accompanying drawings.
[0034] like Figure 3 As shown, Figure 3 This is an electrical diagram of the closing system of a vacuum chamber according to another embodiment.
[0035] In one embodiment, the vacuum chamber's closing system may further include an operation panel 31 connected to the controller 21 for receiving closing commands input by the operator; for example, the operation panel 31 may be a touch screen display.
[0036] In one embodiment, the vacuum chamber closing system may further include an audio playback device 32 connected to the delay triggering device 22 for playing a timing sound or a closing prompt voice; for example, during the timing process, the audio playback device 32 can prompt the operator to close the chamber door 12.
[0037] In one embodiment, the vacuum chamber closing system may also include an indicator light 34 connected to the delay triggering device 22 to indicate that the pressure sensor 13 outputs a trigger signal; for example, when the pressure sensor 13 is subjected to force that meets the triggering condition, the indicator light 34 indicates to the operator that the current closing operation has successfully triggered the closing command, thereby enabling observation and prevention of being trapped.
[0038] In one embodiment, the vacuum chamber closing system may further include an LED display screen 33 connected to the delay triggering device 22 for displaying the timing, so that the operator can see the timing status of the current closing task.
[0039] In the above embodiments, the controller 21 and the delay triggering device 22 of the vacuum chamber door closing system can be located on the control terminal. For example, the delay triggering device 22 can be implemented by a connected filter circuit and a delay triggering circuit. The delay triggering circuit can use a counter or timer for timing. The filter circuit is connected to the pressure sensor 13 and can detect its output trigger signal. The delay triggering circuit can implement a delayed trigger output door closing command. The delay triggering device 22 starts timing when it receives the timing command input by the controller 21. The filter circuit can identify the trigger signal and output a door closing command (which can be a specific level signal) to the controller 21. After the timing time ends, it is reset to zero. The controller 21 can be implemented by an MCU (Microcontroller Unit) chip. Alternatively, the controller 21 and the delay triggering device 22 can also be implemented by an industrial control computer.
[0040] The vacuum chamber closing system of this application operates as follows: The operator inputs a closing command on the control panel 31. Upon receiving the command, the controller 21 sends a timing command to the delay trigger device 22 to start timing for 10 seconds, entering a standby state. The operator can close the chamber door 12 within 10 seconds. After closing the door 12, the pressure sensor 13 outputs a trigger signal. Upon receiving the trigger signal, the delay trigger device 22 outputs a closing command to the controller 21, which then controls the chamber door clamping mechanism 14 to clamp the door 12, completing the closing process. When the timing reaches 10 seconds, the delay trigger device 22 sends a clear closing command to the controller 21, which clears the closing task. Simultaneously, the timer of the delay trigger device 22 is also reset to zero. If the door 12 is closed after 10 seconds, the controller 21 will not control the chamber door clamping mechanism 14 to clamp the door 12, ensuring safety.
[0041] The following describes examples of vacuum coating machines and vacuum etching machines.
[0042] The vacuum coating machine provided in this application, such as Figures 1 to 3 As shown, it may include a vacuum chamber 100 and a door closing system for the vacuum chamber in any of the above embodiments; based on the above-described door closing system for the vacuum chamber, the operating efficiency of closing the door 12 of the vacuum chamber 100 can be improved before coating, making it easier for operators to close the door 12 and improving operational safety.
[0043] The vacuum etching machine provided in this application, such as Figures 1 to 3 As shown, it may include a vacuum chamber 100 and a door closing system for the vacuum chamber in any of the above embodiments; based on the above-described door closing system for the vacuum chamber, the operating efficiency of closing the door 12 of the vacuum chamber 100 can be improved before etching, making it easier for operators to close the door 12 and improving operational safety.
[0044] It will be understood by those skilled in the art that, unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains. It should also be understood that terms such as those defined in general dictionaries should be understood to have the same meaning as in the context of the prior art, and should not be interpreted in an idealized or overly formal sense unless specifically defined as herein.
[0045] The above description is only a partial embodiment of this application. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this application, and these improvements and modifications should also be considered within the scope of protection of this application.
Claims
1. A door closing system for a vacuum chamber, characterized in that, The system comprises a controller, a time-delay trigger device, a pressure sensor and a chamber door pressing mechanism, wherein the pressure sensor is connected to the time-delay trigger device, and the time-delay trigger device and the chamber door pressing mechanism are connected to the controller respectively. The pressure sensor is arranged on the vacuum chamber to detect the closed state of the chamber door and output a trigger signal. The chamber door pressing mechanism is connected to the chamber door to press the chamber door under the control of the controller. The controller is used to receive the door closing command input by the operator and output a timing instruction to the time-delay trigger device, and receive the door closing instruction from the time-delay trigger device and control the chamber door pressing mechanism to press the chamber door. The time-delay trigger device is used to start timing by receiving the timing instruction from the controller, receive the trigger signal output by the pressure sensor and send the door closing instruction to the controller. The time-delay trigger device is used to send the door closing instruction to the controller when the trigger signal output by the pressure sensor is received before the timing time ends.
2. The door closing system of a vacuum chamber according to claim 1, characterized in that, Further comprising:
3. The door closing system of a vacuum chamber according to claim 1, wherein, An operation panel connected to the controller to receive the door closing instruction input by the operator. Further comprising:
4. The door closing system of a vacuum chamber according to claim 1, wherein, An audio playing device connected to the time-delay trigger device to play the door closing prompt voice. The time-delay trigger device is used to send a door closing instruction to the controller to clear the door closing task when the timing ends.
5. The door closing system of a vacuum chamber according to claim 1, wherein, Further comprising:
6. The door closing system of a vacuum chamber according to claim 1, wherein, An indicator lamp connected to the time-delay trigger device to indicate the trigger signal output by the pressure sensor. Further comprising:
7. The door closing system of a vacuum chamber according to claim 1, wherein, An LED display screen connected to the time-delay trigger device to display the timing time. The timing time is 10s.
8. The door closing system of a vacuum chamber according to claim 2, wherein, The system comprises a vacuum chamber and the door closing system of the vacuum chamber according to any one of claims 1-8.
9. A vacuum coating machine, characterized in that The system comprises a vacuum chamber and the door closing system of the vacuum chamber according to any one of claims 1-8. 10. A vacuum etching machine, characterized by