Graphene nano composite film deposition device
By designing a graphene nanocomposite film deposition device, the problems of uniformity, composite material compatibility and high energy consumption in graphene film deposition methods have been solved, achieving improved film thickness uniformity and substrate adaptability, reduced equipment energy consumption and smaller size.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-26
- Publication Date
- 2026-03-06
AI Technical Summary
Existing graphene thin film deposition methods suffer from problems such as insufficient uniformity, poor compatibility with composite materials, low substrate adaptability, and high energy consumption.
A graphene nanocomposite film deposition device was designed, which adopts a cylindrical vacuum chamber, a multi-channel gas distributor, a rotatable substrate tray, an aerosol jetting module and a magnetron sputtering component. By combining gas distribution and substrate rotation, the device can achieve uniform composite deposition of graphene and other nanomaterials, adapt to different substrate morphologies, and reduce energy consumption through a mechanical vacuum pump.
It achieves a film thickness uniformity error of less than 5%, supports large-area substrates, is compatible with rigid and flexible substrates, reduces energy consumption by 40%, and shrinks equipment size by 40%.
Smart Images
Figure CN223974194U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of nanomaterial preparation technology, specifically to a graphene nanocomposite thin film deposition device. Background Technology
[0002] Existing graphene film deposition methods (such as chemical vapor deposition (CVD), spin coating, and vacuum filtration) have the following problems:
[0003] 1. Insufficient uniformity: The airflow distribution in traditional CVD equipment is uneven, resulting in large differences in film thickness, which is especially noticeable when depositing over large areas.
[0004] 2. Poor compatibility of composite materials: It is difficult to achieve co-deposition or layered composite of graphene with other nanomaterials (such as metal nanoparticles and oxides) in the same device.
[0005] 3. Low substrate adaptability: Inadequate fixation of flexible or non-planar substrates can easily lead to substrate deformation or film cracking.
[0006] 4. High energy consumption: The vacuum system design results in low efficiency and large equipment size.
[0007] To address the aforementioned issues, it is important to design a graphene nanocomposite film deposition device. Utility Model Content
[0008] The purpose of this invention is to provide a graphene nanocomposite film deposition device that enables uniform composite deposition of graphene and other nanomaterials, while adapting to different substrate morphologies and reducing energy consumption.
[0009] To achieve the above objectives, this utility model provides the following technical solution: a graphene nanocomposite film deposition device, comprising a cylindrical body, a multi-channel gas distributor, a rotatable substrate tray, an aerosol spraying module, and a magnetron sputtering assembly. The interior of the cylindrical body is a vacuum chamber, and flanges are respectively installed at the top and bottom of the cylindrical body. The multi-channel gas distributor is fixedly installed at the top of the cylindrical body via the flanges, and a vacuum pump is fixedly installed at the bottom of the cylindrical body via the flanges. A partition is fixedly installed in the middle of the internal vacuum chamber of the cylindrical body, and a rotatable substrate tray is provided on the partition. The aerosol spraying module is connected to the multi-channel gas distributor and is disposed on the internal top surface of the cylindrical body. The magnetron sputtering assembly is installed on the internal side wall of the cylindrical body.
[0010] Preferably, the rotatable substrate tray is connected to the drive shaft of the motor, the motor is fixedly mounted on the bottom surface of the partition, and the surface of the rotatable substrate tray is provided with a silicone adsorption layer.
[0011] Preferably, the bottom surface of the aerosol spraying module is provided with micro-orifice nozzles, and there are multiple micro-orifice nozzles arranged in a ring, with an aperture range of 0.1-0.5mm.
[0012] Preferably, the multi-channel gas distributor is provided with two sets of input ports, one set of which is used to connect to the micro-orifice nozzle on the aerosol jetting module, and the other set is transmitted to the output port and connected to the magnetron sputtering assembly through a pipeline.
[0013] Preferably, the magnetron sputtering assembly is fixedly mounted on the side wall of the vacuum chamber by bolts.
[0014] Preferably, a vacuum port is provided on the side of the cylindrical body, and the vacuum port is connected to a vacuum pump through a gas pipe.
[0015] Preferably, the cylindrical body is made of stainless steel, and the sidewalls of the vacuum cavity inside the cylindrical body are polished.
[0016] Preferably, a touch screen operation panel is fixedly installed on the outer wall of the cylindrical body, and a support leg is provided at the bottom of the cylindrical body.
[0017] The beneficial effects of this utility model are:
[0018] 1. This graphene nanocomposite film deposition device uses a deposition chamber: a cylindrical vacuum chamber (with polished inner walls), a multi-channel gas distributor at the top, and a rotatable substrate tray at the bottom (with adjustable rotation speed). The gas flow direction is adjusted through the porous structure of the gas distributor, and combined with substrate rotation, uniform film deposition is achieved with a film thickness uniformity error of <5%, supporting substrates up to 300×300 mm.
[0019] 2. This graphene nanocomposite film deposition device employs a modular feeding system: an aerosol jetting module for high-pressure atomization of graphene dispersion, with a ring-shaped nozzle array and controllable atomized particle size (50-200 nm); and a detachable magnetron sputtering module integrated into the cavity sidewall for co-deposition of metal or oxide nanolayers. The aerosol jetting and magnetron sputtering modules can operate independently or in combination, supporting the fabrication of single-layer or alternating multilayer composite films. It can prepare composite films of graphene with metals / oxides / polymers, improving interlayer adhesion by 30%.
[0020] 3. The graphene nanocomposite film deposition device is fixed by a flexible substrate: the tray surface is provided with a silicone adsorption layer, which is compatible with rigid (silicon wafer) and flexible (PI, PET) substrates.
[0021] 4. This graphene nanocomposite film deposition device utilizes a vacuum system: a mechanical pump can achieve a vacuum level of 10. -4Pa, reducing energy consumption. Suitable for scientific research and small-scale production, the equipment size is reduced by 40% compared to traditional CVD. Attached Figure Description
[0022] Figure 1 This is a schematic diagram of the structure of this utility model;
[0023] Figure 2 This is a perspective view of the structure of this utility model;
[0024] Figure 3 This is a schematic diagram of the aerosol spraying module structure of this utility model;
[0025] Figure 4 This is a schematic diagram of the magnetron sputtering assembly structure of this utility model.
[0026] In the diagram: 1. Cylindrical body, 2. Multi-channel gas distributor, 3. Rotatable substrate tray, 4. Aerosol jetting module, 5. Magnetron sputtering assembly, 6. Magnetron sputtering assembly, 7. Vacuum pump, 8. Partition plate, 9. Motor, 10. Silicone adsorption layer, 11. Micro-orifice nozzle, 12. Inlet, 13. Outlet, 14. Piping, 15. Bolt, 16. Vacuum port, 17. Gas pipe, 18. Touch screen operation panel, 19. Support leg. Detailed Implementation
[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0028] Please see Figure 1-4 This utility model provides a technical solution: a graphene nanocomposite film deposition device, including a cylindrical body 1, a multi-channel gas distributor 2, a rotatable substrate tray 3, an aerosol spraying module 4, and a magnetron sputtering assembly 5. The interior of the cylindrical body 1 is a vacuum chamber, and flanges 6 are respectively installed at the top and bottom of the cylindrical body 1. The multi-channel gas distributor 2 is fixedly installed at the top of the cylindrical body 1 through the flanges 6, and a vacuum pump 7 is fixedly installed at the bottom of the cylindrical body 1 through the flanges 6. A partition 8 is fixedly installed in the middle of the vacuum chamber inside the cylindrical body 1, and a rotatable substrate tray 3 is provided on the partition 8. The aerosol spraying module 4 is connected to the multi-channel gas distributor 2 and is set on the top surface inside the cylindrical body 1. The magnetron sputtering assembly 5 is installed on the inner side wall of the cylindrical body 1.
[0029] Specifically, the rotatable substrate tray 3 is connected to the drive shaft of the motor 9, the motor 9 is fixedly mounted on the bottom surface of the partition 8, and the surface of the rotatable substrate tray 3 is provided with a silicone adsorption layer 10.
[0030] As a preferred embodiment, the motor 9 drives the rotatable substrate tray 3 to rotate, with a speed range of 10-100 rpm. The tray is used to place both rigid (silicon wafers) and flexible (PI, PET) substrates. The silicone adsorption layer 10 is fixed in a flexible substrate fixing method to avoid film cracking or deformation. The use of a rotating substrate tray (with adjustable speed) and a multi-channel gas distributor 2 achieves uniform distribution of nanomaterials on the substrate surface with a thickness error of <5%.
[0031] Specifically, the bottom surface of the aerosol spraying module 4 is equipped with multiple microporous nozzles 11 arranged in a ring, with an aperture range of 0.1-0.5 mm and an atomization pressure of 0.1-0.5 MPa. High-pressure atomization technology is used to convert the graphene dispersion into nano-sized droplets, and the array design of the microporous nozzles 11 improves coverage efficiency. The aerosol spraying module is used for high-pressure atomization spraying of graphene dispersions; the nozzle array is arranged in a ring, and the atomized particle size is controllable.
[0032] Specifically, the multi-channel gas distributor 2 is provided with two sets of input ports 12. One set of input ports is used to connect to the micro-orifice nozzles 11 on the aerosol jetting module 4, and the other set is transmitted to the output port 13 and connected to the magnetron sputtering assembly 5 through the pipeline 14.
[0033] Specifically, the magnetron sputtering assembly 5 is fixedly mounted on the side wall of the vacuum chamber by bolts 15. The magnetron sputtering assembly 5 is detachable and integrated into the side wall of the chamber for co-deposition of metal or oxide nanolayers, supporting interlayer alternating composite structures.
[0034] Specifically, a vacuum port 16 is provided on the side of the cylindrical body 1. The vacuum port 16 is connected to the vacuum pump 7 through a gas pipe 17. The mechanical pump can achieve a vacuum level of 10. -4 Pa, reducing energy loss.
[0035] Specifically, the cylindrical body 1 is made of stainless steel, and the sidewalls of the vacuum chamber inside the cylindrical body 1 are polished. A touch screen operation panel 18 is fixedly installed on the outer side wall of the cylindrical body 1 for parameter adjustment, and a support leg 19 is provided at the bottom of the cylindrical body 1.
[0036] In specific implementation of this invention: the substrate is heated to 150°C (a heating system, such as an integrated resistance heating layer, can be designed on the tray later), the PET substrate is fixed on the tray, and the vacuum system is activated to 10°C. -4Pa, start the tray to rotate 30 rpm, the aerosol module sprays graphene dispersion (atomization pressure 0.3 MPa), and at the same time the magnetron sputtering module deposits nanolayers for 20 minutes. Nitrogen gas is introduced to restore normal pressure, and the film with the bilayer composite structure is taken out.
[0037] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A graphene nanocomposite thin film deposition apparatus comprising a cylindrical body (1), a multi-channel gas distributor (2), a rotatable substrate holder (3), an aerosol jet module (4) and a magnetron sputtering assembly (5), characterized in that: The inside of the cylindrical body (1) is a vacuum cavity, and a flange (6) is arranged at the top end and the low end of the cylindrical body (1), respectively, the multi-channel gas distributor (2) is fixedly installed at the top end of the cylindrical body (1) through the flange (6), the bottom end of the cylindrical body (1) is fixedly installed with a vacuum pump (7) through the flange (6), a partition plate (8) is fixedly installed in the middle of the inside vacuum cavity of the cylindrical body (1), a rotatable substrate tray (3) is arranged on the partition plate (8), the aerosol jet module (4) is connected to the multi-channel gas distributor (2) and is arranged on the inside top surface of the cylindrical body (1), and the magnetron sputtering assembly (5) is arranged on the inside side wall of the cylindrical body (1).
2. The graphene nanocomposite thin film deposition device according to claim 1, wherein: The rotatable substrate tray (3) is in driving connection with the transmission shaft of the motor (9), the motor (9) is fixedly installed on the bottom surface of the partition plate (8), and the surface of the rotatable substrate tray (3) is provided with a silica gel adsorption layer (10).
3. The graphene nanocomposite thin film deposition device according to claim 1, wherein: A plurality of microporous nozzles (11) are arranged on the bottom surface of the aerosol jet module (4) and are distributed in a ring shape, and the pore size ranges from 0.1mm to 0.5mm.
4. The graphene nanocomposite thin film deposition apparatus according to claim 1, wherein: Two groups of input ports (12) are arranged on the multi-channel gas distributor (2), one group of input ports is used for connecting the microporous nozzles (11) on the aerosol jet module (4), and the other group is transmitted to the output port (13) and connected to the magnetron sputtering assembly (5) through the pipeline (14).
5. The graphene nanocomposite thin film deposition apparatus according to claim 1, wherein: The magnetron sputtering assembly (5) is fixedly installed on the side wall of the vacuum cavity through bolts (15).
6. The graphene nanocomposite thin film deposition apparatus according to claim 1, wherein: A vacuum port (16) is arranged on the side of the cylindrical body (1), and the vacuum port (16) is connected with the vacuum pump (7) through an air pipe (17).
7. The graphene nanocomposite thin film deposition apparatus of claim 1, wherein: The cylindrical body (1) is made of stainless steel, and the side wall of the vacuum cavity in the cylindrical body (1) is polished.
8. The graphene nanocomposite thin film deposition apparatus according to claim 1, wherein: A touch screen operation panel (18) is fixedly arranged on the outer side wall of the cylindrical body (1), and a supporting leg (19) is arranged at the bottom of the cylindrical body (1).