Lower anode box and electroplating device

Abstract

The embodiment of the utility model discloses a lower anode box and an electroplating device. The lower anode box comprises a frame; the anode piece is arranged on the frame; the pressing plate is detachably arranged on the frame; the ionic membrane is arranged on the pressing plate, is positioned between the pressing plate and the anode piece, and is used for removing oxygen generated by the anode piece; and the press-fit mechanism is detachably connected to the frame and / or the press-fit plate, and the press-fit mechanism is used for fixing the ionic membrane on the press-fit plate. According to the lower anode box provided by the embodiment of the invention, the whole lower anode box does not need to be dismounted from the electroplating device in the process of mounting and replacing the ionic membrane, and the ionic membrane can be mounted and replaced only by dismounting the pressing plate, so that the difficulty of mounting and maintaining the ionic membrane is reduced, and the maintenance efficiency of the electroplating device is improved.

Description

Technical Field

[0001] This application relates to the field of electroplating technology, and more particularly to a lower anode box and an electroplating apparatus. Background Technology

[0002] In existing horizontal electroplating equipment, the workpiece to be plated moves horizontally within the electroplating tank. Anode components are positioned above and below the workpiece. These anode components, when energized, promote the deposition of copper ions from the electroplating solution onto the surface of the workpiece, thus completing the electroplating process. An ion exchange membrane is installed above the lower anode. During electroplating, oxygen generated by the reaction at the lower anode is expelled along the ion exchange membrane, preventing oxygen from forming bubbles in the plating solution and adhering to the surface of the electroplated film, which would affect the electroplating effect.

[0003] However, existing horizontal electroplating equipment requires the entire lower anode box to be removed when installing and dismantling the ion exchange membrane. The process of replacing and maintaining the ion exchange membrane is complicated, time-consuming, and labor-intensive, which can affect the operating efficiency of the production line. Utility Model Content

[0004] This application discloses a material shearing device that can shear and crush materials, solving the problem of uneven material distribution in subsequent production caused by incomplete material crushing.

[0005] To achieve the above objectives, embodiments of this application provide a lower anode box, comprising: a frame; an anode element disposed on the frame; a pressing plate detachably disposed on the frame; an ion exchange membrane disposed on the pressing plate, the ion exchange membrane being located between the pressing plate and the anode element, the ion exchange membrane being used to block oxygen generated by the anode element; and a pressing mechanism detachably connected to the frame and / or the pressing plate, the pressing mechanism being used to fix the ion exchange membrane to the pressing plate.

[0006] As an alternative implementation, the pressing plate and the frame are detachably connected by bolts.

[0007] As an optional implementation, the pressing mechanism includes: a first pressing component detachably connected to the frame and / or the pressing plate, the first pressing component being used to press the edge region of the ion membrane; and a second pressing component detachably disposed on the pressing plate, the second pressing component being used to press the middle region of the ion membrane.

[0008] As an optional implementation, the first pressing assembly further includes: two first pressing members, the first pressing members extending in a vertical direction and detachably disposed on the pressing plate, the two first pressing members being spaced apart in a first horizontal direction; and two second pressing members, the second pressing members extending in the first horizontal direction and detachably disposed on the frame, the two second pressing members being spaced apart in the vertical direction.

[0009] As an optional implementation, the second pressing assembly extends along the first horizontal direction, the second pressing assembly is located between the two second pressing members, and the distance between the second pressing assembly and the two second pressing members is equal.

[0010] As an optional implementation, the pressing mechanism is detachably connected to the pressing plate and / or the frame by bolts.

[0011] As an optional implementation, the press plate includes: a plurality of through holes arranged in a vertical direction, with adjacent through holes staggered in a first horizontal direction.

[0012] As an optional implementation, the lower anode box further includes a partition disposed on the anode member, the partition being used to divide the anode member into multiple independent regions.

[0013] As an optional implementation, there are multiple partitions, which are arranged at intervals along a first horizontal direction, with an included angle between adjacent partitions.

[0014] A second aspect of this application provides an electroplating apparatus including a lower anode box.

[0015] Compared with the prior art, the beneficial effects of this application are:

[0016] The lower anode box provided in this application embodiment can remove the pressing plate from the frame, thereby separating the ion exchange membrane from the frame and the anode components. This enables easy installation, removal, and replacement of the ion exchange membrane, reduces downtime of the electroplating equipment, improves the utilization rate and overall production efficiency of the electroplating equipment, and also ensures the consistency of electroplating quality and electroplating effect on the parts to be plated. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is one of the structural schematic diagrams of the lower anode box provided in the embodiments of this application;

[0019] Figure 2 This is the second schematic diagram of the lower anode box provided in the embodiments of this application;

[0020] Figure 3 This is the third schematic diagram of the lower anode box provided in the embodiments of this application;

[0021] Figure 4 for Figure 3 A cross-sectional view along the AA direction.

[0022] Explanation of reference numerals in the attached figures:

[0023] 100-Lower anode box; 1-Frame; 2-Anode component; 3-Pressure plate; 31-Through hole; 4-Ion membrane; 5-Pressure mechanism; 51-First pressure assembly; 511-First pressure component; 512-Second pressure component; 52-Second pressure assembly; 6-Separator. Detailed Implementation

[0024] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0025] In this application, the terms "upper," "lower," "top," "bottom," "inner," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily used to better describe this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0026] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0027] Furthermore, the terms "installation," "setup," "equipped with," "connection," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0028] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, components, or parts (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, components, or parts. Unless otherwise stated, "a plurality of" means two or more.

[0029] In existing horizontal electroplating process systems, the workpiece to be plated is placed inside the electroplating tank and maintained in a horizontally moving state. During this process, anodes are positioned above and below the workpiece. After the power is turned on, current flows through the electrolyte solution to the two anodes, causing oxidation and reduction reactions to occur at the anode and cathode, respectively. During electroplating, oxidation occurs at the anode, releasing copper ions which dissolve into the electroplating solution; while reduction occurs at the cathode (i.e., the workpiece), causing copper ions to precipitate from the electroplating solution and deposit onto the surface of the workpiece.

[0030] To further optimize the electroplating effect, an ion exchange membrane is installed above the lower anode assembly. During the electroplating process, the ion exchange membrane guides the oxygen generated by the lower anode reaction to be smoothly discharged along a specific path, preventing oxygen from forming bubbles in the electroplating solution and adhering to the surface of the electroplated film, thus affecting the electroplating effect. The ion exchange membrane reduces the potential impact of bubbles on electroplating quality, further improving the surface quality and overall performance of the electroplated film.

[0031] However, existing horizontal electroplating equipment has certain shortcomings in the installation and removal of ion exchange membranes. Specifically, when it is necessary to install or remove the ion exchange membrane, operators need to remove the entire lower anode box and then remove the ion exchange membrane from it, increasing the complexity of replacing and maintaining the ion exchange membrane. Frequent disassembly and reassembly of the lower anode box in the electroplating equipment directly affects the operating efficiency of the production line and may even cause production interruptions.

[0032] To address the aforementioned issues, the inventors investigated the limitations of existing lower anode boxes and electroplating equipment, and improved upon them. They designed an electroplating device that allows for the maintenance and installation of ion exchange membranes without dismantling the entire lower anode box, thereby preventing the difficulties and time-consuming nature of ion exchange membrane maintenance and installation. This achieves the goal of improving the maintenance efficiency of the electroplating device and the production efficiency of the parts to be plated.

[0033] Based on this, the present application discloses a lower anode box and an electroplating apparatus, which solves the problem of the time and manpower required for the maintenance and installation of ion exchange membranes.

[0034] The technical solution of this application will be further described below with reference to the embodiments and accompanying drawings.

[0035] Please see Figure 1 and Figure 2 , Figure 1 This is one of the structural schematic diagrams of the lower anode box 100 provided in the embodiments of this application. Figure 2 This is a second structural schematic diagram of the lower anode box 100 provided in this application embodiment. The lower anode box 100 includes: a frame 1; an anode element 2 disposed on the frame 1; a pressing plate 3 detachably disposed on the frame 1; an ion exchange membrane 4 disposed on the pressing plate 3, the ion exchange membrane 4 being located between the pressing plate 3 and the anode element 2, the ion exchange membrane 4 being used to block oxygen generated by the anode element 2; and a pressing mechanism 5, the pressing mechanism 5 being detachably connected to the frame 1 and / or the pressing plate 3, the pressing mechanism 5 being used to fix the ion exchange membrane 4 to the pressing plate 3.

[0036] Frame 1 is the basic structure of the lower anode box 100, used to support other components inside the lower anode box 100 and connect the lower anode box 100 to the electroplating apparatus. Optionally, frame 1 can be a one-piece structure or it can be divided into several sub-frames 1 that are spliced ​​together. In this embodiment, the form of frame 1 is not limited.

[0037] It is understood that the frame 1 can detachably connect other components in the lower anode box 100 to the electroplating device. The connection method between the frame 1 and the electroplating device can be bolt connection, snap-fit ​​connection and locking mechanism connection, etc., which can fix the frame 1 to the electroplating device and realize the detachable connection between the frame 1 and the electroplating device.

[0038] Anode 2 is disposed on frame 1. During the electroplating process, anode 2 releases electrons through a reaction. These electrons form a current in the electroplating solution disposed in the lower anode box 100, driving metal ions in the electroplating solution toward the cathode, i.e., the workpiece to be plated, and reducing and depositing them on the cathode to form the desired coating. At the same time, metal atoms on anode 2 lose electrons and become metal ions, entering the electroplating solution, thereby maintaining the concentration balance of metal ions in the electroplating solution to ensure the continuous progress of the electroplating process.

[0039] Optionally, the material of the anode 2 can be copper, stainless steel, titanium, etc. The material of the anode 2 can be determined according to the properties of the electroplating solution, the requirements of the electroplating process, and the production cost. This application embodiment does not limit this.

[0040] The pressing plate 3 is detachably mounted on the frame 1, allowing it to be separated from the frame 1 and the anode component 2. This detachable design of the pressing plate 3 improves the flexibility of the lower anode box 100. When deposits or contaminants accumulate on the pressing plate 3 or the anode component 2 during electroplating, the pressing plate 3 can be removed for cleaning and maintenance, thereby extending the service life of the pressing plate 3 and the anode component 2. It also ensures the stability of the electroplating process and the consistency of electroplating quality.

[0041] Meanwhile, when the anode box 100 malfunctions during the electroplating process, such as unstable current or poor electroplating effect, disassembling the pressing plate 3 can easily check the anode part 2 and the connection between the anode part 2 and the frame 1, thereby quickly locating the problem and repairing it.

[0042] Optionally, the surface of the laminating plate 3 may be provided with a conductive coating and a corrosion-resistant coating. The conductive coating can enhance the conductivity of the laminating plate 3 to ensure uniform current distribution during the electroplating process. The corrosion-resistant coating can protect the laminating plate 3 from corrosion by the electroplating solution, extending its service life. At the same time, the corrosion-resistant coating can also reduce the penetration of the electroplating solution into the laminating plate 3 and reduce the adhesion of deposits on the laminating plate 3.

[0043] The ion exchange membrane 4 helps manage the bubbles generated during the reaction, preventing them from accumulating on the surface of the workpiece and affecting the uniformity and efficiency of electroplating or electrolysis. Simultaneously, the ion exchange membrane 4 also blocks oxygen generated by the reaction at the anode 2 from reaching the lower anode box 100 and the outside of the electroplating apparatus, preventing oxygen accumulation near the anode 2 and thus avoiding potential chemical reactions or degradation of electrical performance.

[0044] An ion exchange membrane 4 is disposed on the pressing plate 3, and the ion exchange membrane 4 is located between the pressing plate 3 and the anode 2. The pressing plate 3 is detachably connected to the frame 1, so that the pressing plate 3 can be removed from the frame 1. The ion exchange membrane 4 is disposed on the pressing plate 3, and when the pressing plate 3 is removed from the frame 1, the ion exchange membrane 4 can also be removed from the frame 1 along with the pressing plate 3.

[0045] Thus, when the ion exchange membrane 4 needs to be replaced due to aging, contamination, or damage, it can be removed and replaced simply by disassembling the pressing plate 3, without disassembling the entire lower anode box 100. The removable pressing plate 3 design makes it easier and faster for operators to install, remove, or replace the ion exchange membrane 4, reducing downtime of the electroplating unit and improving the utilization rate and overall production efficiency of the electroplating unit.

[0046] Furthermore, by simplifying the installation, disassembly, or replacement procedures for ion exchange membrane 4, the skill requirements for operators are reduced. Even operators without specialized training can perform the replacement and maintenance of ion exchange membrane 4.

[0047] The pressing mechanism 5 is detachably connected to the frame 1 and / or the pressing plate 3, and is used to fix the ion exchange membrane 4 to the pressing plate 3. By providing sufficient pressure and stability, the pressing mechanism 5 ensures that the ion exchange membrane 4 will not shift or detach during the electroplating process, thereby maintaining the continuity and reliability of the ion exchange membrane 4's function. By ensuring the accurate position and stability of the ion exchange membrane 4, the pressing mechanism 5 maintains the chemical balance in the electroplating solution, prevents oxygen from adversely affecting the electroplating process, and improves the consistency of electroplating quality and the electroplating effect on the workpiece.

[0048] It is understandable that when disassembling the ion exchange membrane 4, the pressing plate 3 is first removed from the frame 1, thereby removing the ion exchange membrane 4 and the pressing mechanism 5 from the frame 1. Then, the pressing mechanism 5 is removed from the pressing plate 3, thus achieving the disassembly of the ion exchange membrane 4. The installation process of the ion exchange membrane 4 is the reverse of the disassembly process, and will not be described in detail here.

[0049] Optionally, the pressing mechanism 5 can be connected to the frame 1, or to the pressing plate 3, or it can be partially set on the frame 1 and partially set on the pressing plate 3. The setting position of the pressing mechanism 5 can be determined according to the actual production situation.

[0050] Thus, the lower anode box 100 provided in this application embodiment can remove the pressing plate 3 from the frame 1, thereby causing the ion membrane 4 to separate from the frame 1 and the anode 2, realizing easy installation, disassembly and replacement of the ion membrane 4, reducing the downtime of the electroplating equipment, improving the utilization rate of the electroplating equipment and the overall production efficiency, while also ensuring the consistency of electroplating quality and electroplating effect of the workpiece.

[0051] Please see Figure 1 and Figure 2In some embodiments, the pressing plate 3 and the frame 1 are detachably connected by bolts. In the connection between the pressing plate 3 and the frame 1, the bolts penetrate pre-drilled holes in the pressing plate 3 and engage with nuts or threaded holes in the frame 1 to form a locking structure. This bolted connection method can withstand large working loads to ensure effective pressing of the ion exchange membrane 4 by the pressing plate 3 during electroplating, preventing displacement or leakage of the ion exchange membrane 4 during the electroplating process.

[0052] The bolted connection allows for easy disassembly, simplifying the separation of the pressing plate 3 from the frame 1. When cleaning, inspection, or replacement of the ion exchange membrane 4 is required, operators can simply loosen the bolts using appropriate tools to remove the pressing plate 3 from the frame 1, eliminating the need for complex disassembly. The bolted connection not only saves maintenance time and reduces labor intensity but also minimizes the risk of damage to the lower anode box 100 components due to improper disassembly.

[0053] Meanwhile, the bolted connection offers flexibility. By adjusting the tightness of the bolts, the clamping force between the pressing plate 3 and the frame 1 can be controlled, thus adapting to different specifications and materials of the ion exchange membrane 4 and different electroplating process requirements. Furthermore, the bolted connection also provides convenient disassembly and reinstallation when it is necessary to replace the pressing plate 3 or the frame 1 with different sizes.

[0054] Please see Figure 1 and Figure 2 In some embodiments, the pressing mechanism 5 includes: a first pressing component 51, detachably connected to the frame 1 and / or the pressing plate 3, the first pressing component 51 being used to press the edge region of the ion membrane 4; and a second pressing component 52, detachably disposed on the pressing plate 3, the second pressing component 52 being used to press the middle region of the ion membrane 4.

[0055] The first pressing assembly 51 is detachably connected to the frame 1 or the pressing plate 3. The first pressing assembly 51 can be adjusted according to different pressing requirements or the size of the ion membrane 4. The first pressing assembly 51 is used to press the edge area of ​​the ion membrane 4 to ensure the sealing and stability of the ion membrane 4 during the electroplating process.

[0056] It is understandable that when the first pressing assembly 51 is mounted on the pressing plate 3, the process of disassembling the pressing plate 3 from the frame 1 will cause the first pressing assembly 51 to separate from the frame 1 along with the pressing plate 3. Subsequently, simply removing the first pressing assembly 51 from the pressing plate 3 will cancel the pressing of the edge region of the ion membrane 4. When the first pressing assembly 51 is mounted on the frame 1, the process of disassembling the pressing plate 3 from the frame 1 will cause the first pressing assembly 51 to separate from the pressing plate 3, thereby achieving the purpose of canceling the pressing of the edge region of the ion membrane 4.

[0057] The second pressing component 52 is disposed on the pressing plate 3. The second pressing component 52 can press the middle area of ​​the ion membrane 4. When rinsing the ion membrane 4, the second pressing component 52 can reduce the impact force of water on the ion membrane 4, and prevent the impact force of water flow from damaging the ion membrane 4, causing damage or destruction to the ion membrane 4.

[0058] The first pressing component 51 and the second pressing component 52 work together to press the ion membrane 4, making the position of the ion membrane 4 on the pressing plate 3 more stable and accurate, and preventing the position of the ion membrane 4 from shifting during the electroplating process of the electroplating device, which would affect the electroplating effect.

[0059] Optionally, the surfaces of the first pressing component 51 and the second pressing component 52 that come into contact with the ion membrane 4 may be provided with flexible pressing surfaces (e.g., flexible membranes or elastic pads) to ensure that the first pressing component 51 and the second pressing component 52 do not cause damage to the ion membrane 4 when they come into contact with it.

[0060] Please see Figure 3 and Figure 4 , Figure 3 This is the third schematic diagram of the structure of the lower anode box 100 provided in the embodiments of this application. Figure 4 for Figure 3 A cross-sectional view along the AA direction. In some embodiments, the first pressing assembly 51 further includes: two first pressing members 511, which extend vertically and are detachably disposed on the pressing plate 3, and are spaced apart along a first horizontal direction; and two second pressing members 512, which extend horizontally and are detachably disposed on the frame 1, and are spaced apart along a vertical direction.

[0061] Two first pressing members 511 extend vertically, that is, they extend along the width of the pressing plate 3, so that the first pressing members 511 can act on the short edge of the ion membrane 4 to provide a stable pressing force. The first pressing members 511 are detachably disposed on the pressing plate 3, and the two first pressing members 511 are arranged at intervals along the first horizontal direction, so that the edges of the two sides of the ion membrane 4 arranged along the first horizontal direction can be pressed by the first pressing members 511, ensuring the stability of the two sides of the ion membrane 4 arranged along the first horizontal direction.

[0062] Optionally, the first pressing component 511 may include multiple pressing parts, which are arranged at intervals along the vertical direction to reduce the pressing area of ​​the first pressing component 51 while ensuring the pressing effect, thereby reducing the cost of the first pressing component 51.

[0063] Two second pressing members 512 extend along the first horizontal direction, that is, along the length of the pressing plate 3, so that the second pressing members 512 can act on the long edge of the ion membrane 4 to provide a stable pressing force. The second pressing members 512 are detachably disposed on the frame 1, and the two second pressing members 512 are arranged at intervals in the vertical direction, so that the edges of the two sides of the ion membrane 4 arranged in the vertical direction can be pressed by the second pressing members 512, ensuring the stability of the two sides of the ion membrane 4 arranged in the vertical direction.

[0064] Please see Figure 4 In some embodiments, the second pressing assembly 52 extends along a first horizontal direction and is located between two second pressing members 512, with the distance between the second pressing assembly 52 and the two second pressing members 512 being equal.

[0065] The second pressing assembly 52 extends along the first horizontal direction, further enhancing the stability and pressing effect of the ion membrane 4 in the first horizontal direction. The second pressing assembly 52 is located between the two second pressing members 512 to ensure that the second pressing assembly 52 can provide an additional horizontal pressing between the pressing of the two second pressing members 512, thereby forming a more stable and comprehensive pressing system.

[0066] The distance between the second pressing assembly 52 and the two second pressing members 512 is equal to ensure that the ion membrane 4 is subjected to uniform pressure distribution during the pressing process, thereby reducing the possibility of deformation or damage to the ion membrane 4 due to uneven pressure.

[0067] Please see Figure 1 and Figure 2 In some embodiments, the pressing mechanism 5 is detachably connected to the pressing plate 3 and / or frame 1 by bolts. In the connection between the pressing mechanism 5 and the pressing plate 3 and / or frame 1, the bolts penetrate pre-drilled holes in the pressing mechanism 5 and engage with nuts or threaded holes in the pressing plate 3 and / or frame 1 to form a locking structure. This bolted connection method can withstand large working loads to ensure effective pressing of the ion exchange membrane 4 by the pressing mechanism 5 during electroplating, preventing displacement or leakage of the ion exchange membrane 4 during the electroplating process.

[0068] The bolted connection provides detachability, simplifying the separation of the pressing mechanism 5 from the pressing plate 3 and / or frame 1. When cleaning, inspection, or replacement of the ion exchange membrane 4 is required, operators can simply loosen the bolts using appropriate tools to remove the pressing mechanism 5 from the pressing plate 3 and / or frame 1, eliminating the need for complex disassembly. The bolted connection not only saves maintenance time and reduces labor intensity but also reduces the risk of damage to the lower anode box 100 components due to improper disassembly.

[0069] Meanwhile, the bolted connection offers flexibility. By adjusting the tightness of the bolts, the clamping force between the pressing mechanism 5 and the pressing plate 3 and / or frame 1 can be controlled, thus adapting to different specifications and materials of ion exchange membranes 4 and different electroplating process requirements. Furthermore, the bolted connection also provides convenient disassembly and reinstallation when it is necessary to replace the pressing plate 3 or frame 1 of different sizes.

[0070] Please see Figure 1 and Figure 2 In some embodiments, the pressing plate 3 includes: a plurality of through holes arranged in a vertical direction, with adjacent through holes staggered in a first horizontal direction.

[0071] Specifically, the pressing plate 3 has several through holes 31, which allow current to pass through for electroplating of the workpiece. The several through holes 31 can be combined to form multiple through hole systems. Each through hole system includes multiple through holes 31 arranged at intervals along a first horizontal direction, with adjacent through hole systems staggered along the first horizontal direction.

[0072] It can be understood that the through holes 31 in one through hole system and the through holes 31 in another adjacent through hole system are arranged vertically and staggered along the first horizontal direction and located between two through holes 31 in another through hole system, so that the through holes 31 on the press plate 3 form a mesh cross pattern.

[0073] In this way, the cross-shaped perforation layout 31 allows for smoother and more uniform flow of the electroplating solution on the pressing plate 3, thereby improving electroplating efficiency. Due to the increased uniformity of current distribution, the electroplating quality is also improved, reducing defects and the rate of defective products during the electroplating process. Optionally, the perforation layout 31 on the pressing plate 3 can be adjusted and optimized according to actual needs to adapt to different electroplating requirements and workpiece shapes.

[0074] Please see Figure 1 In some embodiments, the lower anode box 100 further includes a partition 6 disposed on the anode member 2, the partition 6 being used to divide the anode member 2 into multiple independent regions.

[0075] The partition 6 divides the anode component 2 into multiple independent regions, each of which can be electroplated independently to avoid current interference and mixing of plating solutions between different regions, thereby improving the uniformity and consistency of electroplating. By separating the anode regions, the partition 6 can optimize the current distribution on the anode component 2, prevent current edge effects, reduce overly dense or sparse current conditions, and improve electroplating efficiency and quality. By separating the anode regions and optimizing the current distribution, the lower anode box 100 can improve the precision and consistency of electroplating, and reduce defects and the rate of defective products during the electroplating process.

[0076] The design of the separator 6 can be adjusted according to electroplating requirements to adapt to different workpiece shapes and electroplating requirements, thereby further improving the electroplating effect and meeting diverse customer needs. Optionally, the separator 6 can be made of microporous plastic, rubber, glass fiber, or other composite materials to ensure that each area of ​​the anode 2 receives a uniform and appropriate current distribution.

[0077] Please see Figure 1 In some embodiments, there are multiple partitions 6, which are arranged at intervals along a first horizontal direction, with an included angle between adjacent partitions 6. By adjusting the included angle between adjacent partitions 6, electroplating areas with different shapes and sizes can be created to achieve a more uniform current distribution and reduce defects and defect rates during the electroplating process.

[0078] The second aspect of this application discloses an electroplating apparatus including a lower anode box 100. Since the electroplating apparatus provided in the embodiments of this application includes the lower anode box 100 provided in the first aspect of this application, the electroplating apparatus has the beneficial effects of any of the aforementioned lower anode boxes 100, which will not be repeated here.

[0079] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A down anode box characterized by, The lower anode box comprises: a frame; an anode member arranged on the frame; a pressing plate detachably arranged on the frame; an ion film arranged on the pressing plate, the ion film being located between the pressing plate and the anode member, and the ion film being used to block oxygen generated by the anode member; a pressing mechanism detachably connected to the frame and / or the pressing plate, the pressing mechanism being used to fix the ion film to the pressing plate.

2. The lower anode can according to claim 1, characterized in that The pressing plate and the frame are detachably connected through bolts.

3. The lower anode can according to claim 1, characterized in that, The pressing mechanism comprises: a first pressing assembly detachably connected to the frame and / or the pressing plate, the first pressing assembly being used to press the edge region of the ion film; a second pressing assembly detachably arranged on the pressing plate, the second pressing assembly being used to press the middle region of the ion film.

4. The lower anode can according to claim 3, characterized in that The first pressing assembly further comprises: two first pressing members extending in a vertical direction, the first pressing members being detachably arranged on the pressing plate, and the two first pressing members being arranged in a first horizontal direction with a spacing therebetween; two second pressing members extending in the first horizontal direction, the second pressing members being detachably arranged on the frame, and the two second pressing members being arranged in the vertical direction with a spacing therebetween.

5. The lower anode can according to claim 4, characterized in that The second pressing assembly extends in the first horizontal direction, the second pressing assembly being located between the two second pressing members, and the distance between the second pressing assembly and the two second pressing members being equal.

6. The lower anode can of claim 1, wherein, The pressing mechanism is detachably connected to the pressing plate and / or the frame through bolts.

7. The lower anode can according to claim 1, wherein, The pressing plate comprises: a plurality of through hole systems, the plurality of through hole systems being arranged in a vertical direction, and adjacent two through hole systems being staggered in a first horizontal direction.

8. The lower anode can according to claim 1, wherein, The lower anode box further comprises: a partition plate arranged on the anode member, the partition plate being used to divide the anode member into a plurality of independent regions.

9. The lower anode box according to claim 8, wherein: the number of the partition plates is a plurality, the plurality of partition plates being arranged in the first horizontal direction with a spacing therebetween, and adjacent two partition plates having an included angle therebetween.

10. An electroplating apparatus characterized by comprising: The lower anode box comprises any one of claims 1-9.

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