Container airtightness detection device

Abstract

The utility model provides a container air tightness detection device. The container air tightness detection device comprises a bottom frame, a fixing support, a containing box, a first fixing piece, a second fixing piece, a first telescopic mechanism and a working assembly. The fixing supports are arranged on two opposite sides of the top of the underframe. The containing box is arranged in the bottom frame. Two ends of the first fixing piece are connected with the fixing support. And the second fixing piece is fixed on the first fixing piece. The first telescopic mechanism is connected to the second fixing piece, and the movable end of the first telescopic mechanism is connected with the working assembly. The working assembly comprises a fixing plate, a connecting rod, a pressing plate, a workbench and a second telescopic mechanism. The fixing plate is connected with the movable end of the first telescopic mechanism. One end of the connecting rod is connected with the fixing plate. The pressing plate is provided with a through hole and movably arranged on the connecting rod in a sleeving mode through the through hole. The workbench is arranged at the other end of the connecting rod, located below the pressing plate and located above the bottom frame. The second telescopic mechanism is connected to the fixing plate, and the movable end of the second telescopic mechanism is connected with the pressing plate. According to the technical scheme, the detection efficiency is improved.

Description

Technical Field

[0001] This application relates to the technical field of container airtightness testing in the semiconductor industry, and more specifically, to a container airtightness testing device. Background Technology

[0002] In the semiconductor industry, the airtightness requirements for waste gas treatment equipment are extremely high. These equipment uses containers to hold the waste gas, and these containers must not leak. Therefore, airtightness testing of these containers is essential to ensure that no waste gas leaks occur during use. Currently, container airtightness testing is primarily done manually. Inspectors inject water into the container under test and then visually inspect the outer surface for water seepage to confirm whether a leak exists. Since the containers are manufactured using welding, there may be weld seams that could cause leaks.

[0003] The inventors of this application have discovered that the aforementioned manual inspection method has at least the following problems. The container being tested is small in volume and holds relatively little water, resulting in low internal water pressure. When the weld leak point in the container is small and the internal water pressure is low, the water droplets seeping from the outer surface of the container are small, which may prevent visual inspection and lead to false positives. Furthermore, the manual inspection process requires filling, emptying, and drying each container. The inspection cycle for a single container can take 25-40 minutes, and the water consumption for a single container can reach 5-8 liters, resulting in low inspection efficiency and water waste.

[0004] The content in the background section is merely technology known to the public and does not necessarily represent existing technology in this field. Summary of the Invention

[0005] This application provides a container airtightness testing device to solve at least one of the above-mentioned technical problems.

[0006] According to one aspect of this application, a container airtightness testing device is provided, including a base frame, a fixed support, a container box, a first fixing member, a second fixing member, a first telescopic mechanism, and a working assembly. The fixed support is disposed on opposite sides of the top of the base frame. The container box has an open top and is disposed inside the base frame for containing liquid. Both ends of the first fixing member are connected to the fixed support. The second fixing member is fixed to the first fixing member. The first telescopic mechanism is connected to the second fixing member, and its movable end is connected to the working assembly. The working assembly includes a fixed plate, a connecting rod, a pressure plate, a worktable, and a second telescopic mechanism. The fixed plate is connected to the movable end of the first telescopic mechanism. One end of the connecting rod is connected to the fixed plate. The pressure plate has a through hole and is movably sleeved onto the connecting rod through the through hole, located below the fixed plate. The worktable is disposed at the other end of the connecting rod, below the pressure plate, and above the base frame, for placing the container to be tested. The second telescopic mechanism is connected to the fixed plate, and its movable end is connected to the pressure plate, for driving the pressure plate to move, thereby fixing the container to be tested onto the worktable. The first telescopic mechanism is used to drive the working component to move and place the container under test into the liquid for airtightness testing.

[0007] According to some embodiments of this application, the first telescopic mechanism is a pneumatic cylinder, and the second telescopic mechanism is an electric cylinder.

[0008] According to some embodiments of this application, the electric cylinder is connected to an external control mechanism. The electric cylinder includes a first detection unit disposed at its movable end, which detects and transmits pressure information. The external control mechanism is used to generate and transmit a first control command based on the received pressure information, so that the electric cylinder controls the movement of its movable end in response to the first control command.

[0009] According to some embodiments of this application, the working component further includes at least one set of clamping mechanisms disposed on opposite sides of the worktable and adjacent to the fixed bracket, for clamping the container to be tested.

[0010] According to some embodiments of this application, the clamping mechanism includes a clamping plate and a clamping plate transmission component. The clamping plate transmission component is connected to the clamping plate and is used to control the movement of the clamping plate.

[0011] According to some embodiments of this application, the working component also includes a pushing mechanism disposed on one side of the workbench for pushing the container to be tested.

[0012] According to some embodiments of this application, the pushing mechanism includes a pushing plate and a pushing plate transmission component. The pushing plate transmission component is connected to the pushing plate and is used to control the movement of the pushing plate to push the container to be tested.

[0013] According to some embodiments of this application, the container airtightness testing device further includes: a second testing unit, disposed on the opposite side of the fixed support, for detecting whether a container to be tested is placed above the workbench.

[0014] According to some embodiments of this application, the container airtightness detection device further includes a liquid level regulating device disposed in the container and connected to an external control mechanism. The liquid level regulating device includes a third detection unit disposed on top of the container, which detects and transmits liquid level information. Based on the received liquid level information, the external control mechanism generates and sends a second control command, causing the liquid level regulating device to adjust the liquid level in response to the second control command.

[0015] Beneficial effects

[0016] The technical solution of this application, by setting up a container, places liquid into the container. A first telescopic mechanism controls the placement of the test container in the liquid within the working assembly. Utilizing the large amount of liquid in the container and the resulting high hydraulic pressure, the test container can withstand higher hydraulic pressure, preventing water droplets from failing to seep out through small leaks in the weld seams of the test container, thus avoiding false detections. Furthermore, the airtightness inspection process reduces human intervention and lowers labor costs. The testing process involves applying pressure and testing the test container with external liquid, reducing the testing time for a single container to five minutes, thereby improving testing efficiency. The testing process eliminates the need for water injection, pumping, and drying of the test container, avoiding water waste. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 A schematic diagram of the airtightness testing device according to an embodiment of this application is shown;

[0019] Figure 2 A schematic diagram of the clamping mechanism according to an embodiment of this application is shown;

[0020] Figure 3 A schematic diagram of the push mechanism according to an embodiment of this application is shown.

[0021] Explanation of reference numerals in the attached figures:

[0022] Air tightness testing device 1; base frame 11; fixed bracket 12; container 13; first fixing component 14; second fixing component 15; first telescopic mechanism 16; fixed plate 17; connecting rod 18; pressure plate 19; worktable 20; second telescopic mechanism 21; clamping mechanism 22; pushing mechanism 23; liquid level regulating device 24; second testing unit 25; container to be tested 26; clamping plate 221; clamping plate transmission component 222; pushing plate 231; pushing plate transmission component 232. Detailed Implementation

[0023] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, they are provided so that this application will be thorough and complete, and will fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar parts, and therefore repeated descriptions of them will be omitted.

[0024] The described features, structures, or characteristics can be combined in any suitable manner in one or more embodiments. Numerous specific details are provided in the following description to give a full understanding of embodiments of this disclosure. However, those skilled in the art will recognize that the technical solutions of this disclosure can be practiced without one or more of these specific details, or other methods, components, materials, devices, etc. In these cases, well-known structures, methods, devices, implementations, materials, or operations will not be shown or described in detail.

[0025] Furthermore, the terms “comprising” and “having”, and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units is not limited to the steps or units listed, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to such process, method, product, or apparatus.

[0026] The terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish different objects, not to describe a specific order.

[0027] The technical solutions of this application will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some, not all, of the embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0028] According to one aspect of this application, a container airtightness testing device is provided. Figure 1A schematic diagram of the airtightness testing device 1 of this application is shown.

[0029] According to the example embodiment, such as Figure 1 As shown, the airtightness testing device 1 includes a base frame 11, a fixed bracket 12, a housing box 13, a first fixing member 14, a second fixing member 15, a first telescopic mechanism 16, and a working component (not shown in the figure).

[0030] For example, such as Figure 1 As shown, the fixing brackets 12 are disposed on opposite sides of the top of the base frame 11. The container 13 has an open top and is disposed inside the base frame 11 for containing liquid. For example, the liquid can be water. The base frame 11 can be a hollow square structure. The container 13, the base frame 11, and the fixing brackets 12 can be made of materials with high structural strength, such as metals, iron, aluminum, stainless steel, etc. For example, the container 13 can be fixedly connected to the base frame 11 by welding. The upper edge of the container 13 can be flush with the upper edge of the base frame 11, and the bottom can be flush with the bottom of the base frame 11. The fixing brackets 12 can be arranged parallel to opposite sides of the base frame 11.

[0031] According to the example embodiment, such as Figure 1 As shown, the first fixing member 14 is connected to the fixing bracket 12 at both ends. The second fixing member 15 is fixed to the first fixing member 14. The first telescopic mechanism 16 is connected to the second fixing member 15, and the movable end of the first telescopic mechanism 16 is connected to the working component.

[0032] For example, the first telescopic mechanism 16 may include at least one cylinder. The first fixing member 14 may consist of multiple fixing rods, with both ends of the multiple fixing rods connected to the fixing bracket 12. The second fixing member 15 may include at least one fixing seat, with each fixing seat connected to at least one cylinder.

[0033] According to the example embodiment, such as Figure 1 As shown, the working assembly includes a fixed plate 17, a connecting rod 18, a pressure plate 19, a worktable 20, and a second telescopic mechanism 21. The fixed plate 17 is connected to the movable end (not shown) of the first telescopic mechanism 16. One end of the connecting rod 18 is connected to the fixed plate 17. The pressure plate 19 has a through hole and is movably sleeved on the connecting rod 18 through the through hole, located below the fixed plate 17. The worktable 20 is located at the other end of the connecting rod 18, below the pressure plate 19, and above the base frame 11, for placing the container 26 to be tested. The second telescopic mechanism 21 is connected to the fixed plate 17, and the movable end (not shown) of the second telescopic mechanism 21 is connected to the pressure plate 19, for driving the pressure plate 19 to move, thereby fixing the container 26 to be tested onto the worktable 20.

[0034] For example, the fixing plate 17, connecting rod 18, pressure plate 19, and worktable 20 can all be made of materials with high structural strength, such as metals like iron, aluminum, and stainless steel. The fixing plate 17, pressure plate 19, and worktable 20 can be arranged perpendicularly to the connecting rod 18. The connecting rod 18 can be four vertical rods, which simultaneously connect the fixing plate 17, pressure plate 19, and worktable 20. The second telescopic mechanism 21 can be an electric cylinder. The movable end of the electric cylinder is connected to the pressure plate 19. The electric cylinder controls the movement of the pressure plate 19 to apply pressure to the container 26 to be tested, thereby fixing the container 26 to the worktable 20.

[0035] For example, the first telescopic mechanism 16 can be used to drive the working component to move and place the container to be tested 26 into the liquid in order to perform an airtightness test on the container to be tested 26.

[0036] For example, the user can immerse the test container 26, which is immersed in liquid, for a preset time. After the test container 26 is immersed, it can be taken out. The airtightness of the test container 26 can be determined by judging whether there is liquid leakage into the interior of the test container 26, so as to complete the airtightness test of the test container 26.

[0037] In the above embodiment, by setting up a container, liquid is placed inside the container. The test container in the working assembly is placed into the liquid through the first telescopic mechanism. Utilizing the large amount of liquid in the container and the resulting high hydraulic pressure, the hydraulic pressure that the test container can withstand is increased. This avoids situations where water droplets cannot seep out through small leaks in the welds of the test container, thus preventing false detections. Furthermore, the airtightness inspection process reduces human intervention and lowers labor costs. The testing process involves pressurizing and testing the test container with external liquid, reducing the testing time for a single container to five minutes, thereby improving testing efficiency. The testing process does not require water injection, pumping, or drying of the test container, avoiding water waste.

[0038] According to an example embodiment, the electric cylinder is connected to an external control mechanism (not shown in the figure). The electric cylinder includes a first detection unit (not shown in the figure), disposed at the movable end of the electric cylinder (not shown in the figure), which detects and transmits pressure information. The external control mechanism is used to generate and transmit a first control command based on the received pressure information, so that the electric cylinder controls the movement of its movable end in response to the first control command.

[0039] For example, the pressure information may include the pressure applied to the pressure plate 19 by the moving end of the electric cylinder. The first detection unit may be a pressure sensor. The pressure sensor can detect the pressure applied to the pressure plate 19 by the electric cylinder, and thus determine the magnitude of the pressure exerted by the pressure plate 19 on the container 26 under test.

[0040] Through the above embodiments, the pressure sensor can send pressure information to an external control mechanism. The external control mechanism can control the movement of the moving end of the electric cylinder according to the user's needs to change the pressure applied to the pressure plate, thereby adjusting the pressure applied to the container under test.

[0041] According to the example embodiment, such as Figure 1 As shown, the working assembly also includes at least one set of clamping mechanisms 22, which are disposed on opposite sides of the workbench 20 and adjacent to the fixed bracket 12, for clamping the container 26 to be tested.

[0042] For example, the clamping surface of the clamping mechanism 22 can be parallel to the surface of the container 26 to be tested, so as to achieve uniform pressure on the container 26 to be tested.

[0043] In the above embodiment, the clamping mechanism further fixes the container to be tested on both sides of the worktable, preventing the container to be tested from moving on the worktable due to vibration or other reasons.

[0044] According to the example embodiment, such as Figure 2 As shown, the clamping mechanism 22 includes a clamping plate 221 and a clamping plate transmission component 222. The clamping plate transmission component 222 is connected to the clamping plate 221 and is used to control the movement of the clamping plate 221.

[0045] For example, a first sealed cavity (not shown in the figure) may be provided in the clamping plate transmission component 222. A movable button or a movable hand valve may be provided on the outside of the first sealed cavity. A cylinder may be provided on the clamping plate 221, and the cylinder is inserted into the first sealed cavity. The user controls the air pressure in the first sealed cavity by pressing the button or hand valve, controls the movement of the cylinder, and thus controls the movement of the clamping plate 221.

[0046] Through the above embodiments, the clamping plate transmission component changes the pressure applied by the clamping plate to the container under test by controlling the movement of the clamping plate, thereby achieving the effect of changing the clamping force of the clamping plate on the container under test.

[0047] According to the example embodiment, such as Figure 1 The working components shown also include a pushing mechanism 23, which is located on one side of the workbench 20 and is used to push the container 26 to be tested.

[0048] For example, the pushing end of the pushing mechanism 23 can be parallel to the surface of the container 26 under test in order to apply pressure evenly to the container 26 under test.

[0049] Through the above embodiments, by setting up a push mechanism, the container to be tested can be pushed to an area where it is convenient for users to collect the container. This process does not require human intervention, thereby reducing labor costs.

[0050] According to the example embodiment, such as Figure 3 As shown, the pushing mechanism 23 includes a pushing plate 231 and a pushing plate transmission component 232. The pushing plate transmission component 232 is connected to the pushing plate 231 and is used to control the movement of the pushing plate 231 to push the container 26 to be tested.

[0051] For example, a second sealed cavity (not shown in the figure) may be provided in the push plate transmission component 232. A movable button or a movable hand valve may be provided on the outside of the second sealed cavity. A cylinder may be provided on the push plate 231, and the cylinder is inserted into the second sealed cavity. The user controls the air pressure in the second sealed cavity by pressing the button or hand valve, controls the movement of the cylinder, and thus controls the movement of the clamping plate 221.

[0052] Through the above embodiments, the push plate transmission component changes the pressure applied by the push plate to the container under test by controlling the movement of the push plate, which can push the container under test to an area that is convenient for the user to collect the container under test. This process does not require human intervention, thereby reducing labor costs.

[0053] According to the example embodiment, the container airtightness testing device 1 further includes: a second testing unit 25, which is disposed on the opposite side of the fixed bracket 12, for detecting whether the container 26 to be tested is placed above the workbench 20.

[0054] For example, the second detection unit 25 can be a pair of through-beam photoelectric sensors disposed on opposite sides of the fixed bracket 12. The pair of through-beam photoelectric sensors detect whether the container 26 to be tested is placed above the worktable 20 based on the principle of light blocking and reflection.

[0055] Through the above embodiments, by setting up a second detection unit, it is possible to detect whether a container to be tested is placed above the workbench, avoiding the process of manually judging whether a container to be tested is placed above the workbench, improving the efficiency of judgment, thereby improving the efficiency of detection and increasing the degree of automation of the detection process.

[0056] According to an example embodiment, the container airtightness detection device 1 further includes a liquid level regulating device 24, disposed in the container 13 and connected to an external control mechanism. The liquid level regulating device 24 includes a third detection unit disposed on the container 13, which detects and transmits liquid level information. Based on the received liquid level information, the external control mechanism generates and sends a second control command, causing the liquid level regulating device 24 to adjust the liquid level of the liquid contained in the container in response to the second control command.

[0057] For example, the liquid level regulating device 24 can be a float system. The third detection unit can be a liquid level sensor. The second control command can be a command issued by an external control mechanism to adjust the liquid level contained in the container 13. The float system can adjust the liquid level according to the second control command.

[0058] Through the above embodiments, by setting up a liquid level adjustment device, the function of adjusting the liquid level in the container is realized, thereby making it convenient for users to adjust the liquid level according to the size and volume of the container to be tested.

[0059] Finally, it should be noted that the above description is merely a preferred embodiment of this application and is not intended to limit this application. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions of the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A container airtightness detection device characterized by comprising: The container airtightness detection device comprises: a base frame, opposite sides of a top of the base frame being provided with fixing supports; a containing box, a top of the containing box being open, the containing box being arranged in the base frame and being used for containing liquid; a first fixing member, two ends of the first fixing member being connected with the fixing supports; a second fixing member, the second fixing member being fixed on the first fixing member; a first telescopic mechanism, the first telescopic mechanism being connected with the second fixing member, a movable end of the first telescopic mechanism being connected with a working assembly; the working assembly comprising: a fixing plate, the fixing plate being connected with the movable end of the first telescopic mechanism; a connecting rod, one end of the connecting rod being connected with the fixing plate; a pressing plate, the pressing plate being provided with a through hole, the pressing plate being movably arranged on the connecting rod through the through hole and being located below the fixing plate; a workbench, the workbench being arranged on the other end of the connecting rod, the workbench being located below the pressing plate and above the base frame and being used for placing a to-be-tested container; a second telescopic mechanism, the second telescopic mechanism being connected with the fixing plate, a movable end of the second telescopic mechanism being connected with the pressing plate, the second telescopic mechanism being used for driving the pressing plate to move so as to fix the to-be-tested container on the workbench; the first telescopic mechanism being used for driving the working assembly to move, the to-be-tested container being placed in the liquid, and the to-be-tested container being subjected to airtightness detection.

2. The container tightness testing apparatus according to claim 1, wherein The first telescopic mechanism is a pneumatic cylinder, and the second telescopic mechanism is an electric cylinder.

3. The container tightness testing apparatus according to claim 2, wherein The electric cylinder is connected with an external control mechanism. The electric cylinder comprises: a first detection unit, the first detection unit being arranged at the movable end of the electric cylinder and being used for detecting and sending pressure information; the external control mechanism being used for generating and sending a first control instruction based on the received pressure information, so that the electric cylinder controls the movable end of the electric cylinder to move in response to the first control instruction.

4. The apparatus of any one of claims 1-3, wherein The working assembly further comprises: at least one set of clamping mechanisms, the clamping mechanisms being arranged on opposite sides of the workbench and being arranged adjacent to the fixing supports, the clamping mechanisms being used for clamping the to-be-tested container.

5. The container tightness testing apparatus of claim 4, wherein The clamping mechanism comprises: a clamping plate; a clamping plate transmission component, the clamping plate transmission component being connected with the clamping plate and being used for controlling the clamping plate to move.

6. The apparatus of any one of claims 1-3, wherein The working assembly further comprises: a pushing mechanism, the pushing mechanism being arranged on one side of the workbench and being used for pushing the to-be-tested container.

7. The container tightness testing apparatus of claim 6, wherein The pushing mechanism comprises: a pushing plate; a pushing plate transmission component, the pushing plate transmission component being connected with the pushing plate and being used for controlling the pushing plate to move so as to push the to-be-tested container.

8. The apparatus of any one of claims 1-3, wherein The container airtightness detection device further comprises: a second detection unit, the second detection unit being arranged on opposite sides of the fixing supports and being used for detecting whether the to-be-tested container is placed above the workbench.

9. The apparatus of any one of claims 1-3, wherein The container airtightness detection device further comprises: a liquid level adjusting device, the liquid level adjusting device being arranged in the containing box and being connected with an external control mechanism; the liquid level adjusting device comprising: a third detection unit, the third detection unit being arranged on the containing box and being used for detecting and sending liquid level information of the liquid; the external control mechanism being used for generating and sending a second control instruction based on the received liquid level information, so that the liquid level adjusting device adjusts the liquid level of the liquid in response to the second control instruction.

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