Device arrangement device and device surface detection equipment
The placement assembly, composed of electrostatic and gas adsorption components, solves the problem of cumbersome manual position adjustment in the surface inspection of micro-devices, realizing automatic positioning and accurate detection of devices on the tray, thus improving detection efficiency and reliability.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-26
- Publication Date
- 2026-03-06
AI Technical Summary
In existing technologies, the position of a micro-device needs to be manually adjusted before surface inspection, which is a cumbersome process that cannot achieve precise positioning, resulting in poor reliability of the inspection results.
The placement assembly, composed of electrostatic adsorption and gas adsorption components, enables automatic positioning of devices on the tray. The devices are fixed in the vertical and horizontal directions by electrostatic adsorption and gas adsorption, respectively. Combined with the static elimination component and the detection component, the positioning efficiency and accuracy are improved.
It enables automatic and precise positioning of micro-devices on the tray, improving testing efficiency and result reliability, simplifying the preparation process, and reducing the need for manual intervention.
Smart Images

Figure CN223977092U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the technical field of material surface detection, specifically to a device placement device and a device surface detection equipment. Background Technology
[0002] When performing surface imaging inspection on tiny devices, it is usually necessary to place the device on a tray, rotate the tray so that the device passes through cameras with different shooting angles, and determine the condition of the device surface through the images captured by the cameras.
[0003] Currently, before surface imaging inspection, the device's position on the tray needs to be manually adjusted so that it enters the camera's field of view after the tray rotates. However, this manual adjustment process is cumbersome and time-consuming. Furthermore, it cannot achieve precise positional adjustment, which can easily lead to poor reliability of the inspection results. Summary of the Invention
[0004] In order to at least partially solve the problems existing in the prior art, according to one aspect of the present invention, a device placement device is provided.
[0005] The device placement device includes a tray and a placement assembly. The tray is rotatable about a rotation center and is used to place the devices to be tested. The tray has at least one placement position in the direction of rotation. The placement assembly has an electrostatic adsorption element and a gas adsorption element, both positioned at the placement positions. The electrostatic adsorption element is located below the tray to apply an adsorption force to the device to be tested, causing it to adhere to the tray. The gas adsorption element is located above the tray and around the outer edge of the device to be tested. A placement surface is provided on the gas adsorption element near the device to apply a force to the device to be tested by drawing gas, causing it to move towards the outer edge of the tray and contact the placement plate, thus placing it in place.
[0006] This utility model's device placement device, when the tray rotates and drives the device to be tested to the placement component's position, allows the electrostatic adsorption component to generate electrostatic attraction between itself and the device, firmly fixing the device to the tray and thus achieving vertical positioning. The gas adsorption component allows the device to be adsorbed and moved radially on the tray, achieving horizontal positioning. This device placement device enables automatic positioning of the device on the tray, effectively improving positioning efficiency and accuracy.
[0007] For example, the tray also has an antistatic position in the rotation direction, the antistatic position is located downstream of the return position, and an antistatic component is provided at the antistatic position.
[0008] For example, the tray also has a detection position in the rotation direction, the detection position is located between the accumulator position and the destatic position, and a detection component is provided at the detection position above or below the tray to detect the position of the device to be tested.
[0009] For example, the gas adsorption element has an air intake port and an air exhaust port. The air intake port is located on the side of the gas adsorption element facing the material tray and is at a predetermined distance in the vertical direction from the upper surface of the device to be tested. The air exhaust port is located on the lower side of the gas adsorption element.
[0010] For example, the gas adsorption element includes a fixed base and a body, the body being disposed on the fixed base and movable relative to the fixed base in a first direction and / or a second direction, and the air intake being disposed on the body.
[0011] For example, a sliding part is provided on one of the fixed base and the body, and an arc-shaped groove is provided on the other of the fixed base and the body, with the sliding part slidably disposed in the arc-shaped groove.
[0012] According to another aspect of the present invention, a device surface inspection device is also provided, including a cleaning component, a feeding component, an image acquisition component, and a device placement device as described above, wherein the placement component, the image acquisition component, the feeding component, and the cleaning component are arranged sequentially along the rotation direction of the material tray.
[0013] For example, the cleaning assembly includes a rotating cleaning component and a driving component. The driving component drives the rotating cleaning component to rotate the upper surface of the cleaning tray. The rotating cleaning component has rotating brushes, a portion of which contacts the upper surface of the tray when rotating, and another portion of which is located outside the outer edge of the tray when rotating.
[0014] For example, the feeding assembly includes an air blowing component and a receiving box, which are respectively disposed on two opposite sides of the device to be tested. The air blowing component blows air in the direction of the receiving box to blow the device to be tested into the receiving box.
[0015] For example, the image acquisition component has a shooting module, a fixing module and a flipping mechanism. The shooting module and the fixing module are connected by the flipping mechanism, which has a fixed state and a flipped state. When the flipping mechanism is in the fixed state, the shooting module and the fixing module are positioned on opposite sides of the material tray, respectively. When the flipping mechanism is in the flipped state, the one of the shooting module and the fixing module located above the material tray flips to the outside of the material tray.
[0016] The above description is merely an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of this utility model more obvious and understandable, specific embodiments of this utility model are given below. Attached Figure Description
[0017] The above and other objects, features, and advantages of this utility model will become more apparent from the more detailed description of the embodiments thereof in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this utility model and form part of the specification. They are used together with the embodiments of this utility model to explain the utility model and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.
[0018] Figure 1 A top view of a device placement apparatus according to an exemplary embodiment of the present invention is shown;
[0019] Figure 2 A perspective view of a device placement apparatus according to an exemplary embodiment of the present invention is shown;
[0020] Figure 3 A perspective view of a gas adsorption element according to an exemplary embodiment of the present invention is shown;
[0021] Figure 4 A top view of a device surface inspection apparatus according to an exemplary embodiment of the present invention is shown;
[0022] Figure 5 A front view of a cleaning assembly according to an exemplary embodiment of the present invention is shown;
[0023] Figure 6 A perspective view of a feeding assembly according to an exemplary embodiment of the present invention is shown;
[0024] Figure 7 A front view of an image acquisition component according to an exemplary embodiment of the present invention is shown.
[0025] The components indicated by the reference numerals in the figures are as follows:
[0026] 1. Material tray; 2. Placement assembly; 21. Electrostatic adsorption component; 22. Gas adsorption component; 231. Air intake port; 232. Air exhaust port; 233. Fixing base; 234. Body; 235. Arc-shaped slide; 3. Static elimination assembly; 4. Detection assembly; 5. Cleaning assembly; 51. Rotary cleaning component; 52. Drive component; 6. Unloading assembly; 61. Air blowing component; 62. Receiving box; 7. Image acquisition assembly; 71. Shooting module; 72. Fixing module; 73. Tilting mechanism; 8. First pushing part; 9. Second pushing part. Detailed Implementation
[0027] To make the objectives, technical solutions, and advantages of this utility model more apparent, exemplary embodiments according to this utility model will be described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are merely some embodiments of this utility model, and not all embodiments of this utility model. It should be understood that this utility model is not limited to the exemplary embodiments described herein. Based on the embodiments of this utility model described herein, all other embodiments obtained by those skilled in the art without inventive effort should fall within the protection scope of this utility model.
[0028] In the following description, numerous details are provided to enable a thorough understanding of the present invention. However, those skilled in the art will appreciate that the following description merely illustrates preferred embodiments of the present invention, which may be practiced without one or more of these details. Furthermore, to avoid confusion with the present invention, some technical features well-known in the art have not been described in detail.
[0029] To fully understand the embodiments of this utility model, a detailed structure will be presented in the following description. Obviously, the implementation of the embodiments of this utility model is not limited to the specific details familiar to those skilled in the art. Preferred embodiments of this utility model are described in detail below; however, in addition to these detailed descriptions, this utility model may have other embodiments.
[0030] One embodiment of this utility model provides a device placement apparatus that can automatically position the device to be tested on the material tray 1. The device placement apparatus according to an embodiment of this utility model will be described in detail below with reference to the accompanying drawings.
[0031] like Figure 1 and Figure 2 As shown, the device placement device includes a tray 1 and a placement assembly 2. The tray 1 is rotatable about a rotation center and is used to place the device to be tested. The tray 1 has at least a placement position in the rotation direction of the tray 1. The placement assembly 2 has an electrostatic adsorption element 21 and a gas adsorption element 22. Both the electrostatic adsorption element 21 and the gas adsorption element 22 are located at the placement position. The electrostatic adsorption element 21 is located below the tray 1 to apply a force to the device to be tested to adsorb onto the tray 1. The gas adsorption element 22 is located above the tray 1 and is located on the outer ring of the device to be tested. The gas adsorption element 22 has a placement surface near the device to be tested, so that by drawing gas, a force is applied to the device to be tested to move towards the outer ring of the tray 1 and contact the placement surface to place it.
[0032] The device to be tested can be placed on the upper surface of the tray 1 and rotated clockwise or counterclockwise under the drive of the tray 1.
[0033] The placement position can be represented as the position where the device to be tested on the tray 1 can be moved to the outer ring of the tray 1 under the action of the placement component 2.
[0034] The electrostatic adsorption component 21 can apply electrostatic adsorption force to the device under test, so as to firmly adsorb the device under test onto the tray 1, thereby avoiding the situation where the centrifugal force generated when the tray 1 rotates will throw the device under test off the tray 1.
[0035] The gas adsorption element 22 can draw in gas to create a negative pressure between the gas adsorption element 22 and the device to be tested, thereby adsorbing the device to be tested onto the outer ring of the material tray 1 and bringing it into contact with the placement surface of the gas adsorption element 22.
[0036] The device placement device of this invention, when the tray 1 rotates and drives the device to be tested to the position of the placement component 2, allows the electrostatic adsorption component 21 to generate electrostatic adsorption between itself and the device, thus firmly fixing the device to the tray 1 and achieving vertical positioning of the device. The gas adsorption component 22 allows the device to be adsorbed and moved radially on the tray 1, thus achieving horizontal positioning of the device. This device placement device enables automatic positioning of the device on the tray 1 and effectively improves the efficiency and accuracy of positioning.
[0037] In some embodiments, such as Figure 1 and Figure 2 As shown, the material tray 1 also has an antistatic position in the rotation direction. The antistatic position is located downstream of the return position, and an antistatic component 3 is provided at the antistatic position.
[0038] After the device to be tested is placed under the action of the electrostatic adsorption component 21, the device to be tested can be rotated to the static elimination position by the material tray 1. The static elimination component 3 located at the static elimination position can neutralize the static electricity on the surface of the device to be tested, so as to reduce the influence of static electricity on the device to be tested and other devices in the device placement device.
[0039] The static eliminator 3 can be an ion gun or an electrostatic precipitator, etc. This application does not specifically limit the type of static eliminator 3. Any device that can eliminate static electricity on the surface of the device to be tested is acceptable.
[0040] In the above embodiments, the static eliminator 3 located at the static eliminator position can eliminate the static charge carried by the device under test. This not only avoids the impact of the device under test carrying static electricity for a long time, but also prevents the device under test carrying static electricity from interfering with and affecting other devices when it rotates to other positions under the drive of the tray 1. This effectively improves the safety and reliability of the device placement device.
[0041] In some embodiments, such as Figure 1 and Figure 2 As shown, the material tray 1 also has a detection position in the rotation direction. The detection position is located between the accumulator position and the static elimination position. A detection component 4 is provided at the detection position above or below the material tray 1 to detect the position of the device to be tested.
[0042] After being positioned by the electrostatic adsorption component 21 and the gas adsorption component 22, the device to be tested can be rotated to the testing position by the material tray 1. The testing component 4 located at the testing position can detect whether the position of the device to be tested meets the requirements.
[0043] The detection component 4 can capture an image when the device under test rotates to the detection position, and determine the specific position of the device under test based on the image information. The detection component 4 can also emit a laser beam or infrared beam towards the device under test when it rotates to the detection position to determine the distance between the detection component 4 and the device under test, thereby determining the specific position of the device under test. This application does not specifically limit the type of detection component 4 or the detection method; any device capable of acquiring and determining the specific position of the device under test is acceptable.
[0044] like Figure 2 As shown, the detection component 4 can be located above the material tray 1. When the detection component 4 is located below the material tray 1, the material tray 1 is preferably made of a transparent material, such as glass or transparent plastic, to facilitate the detection by the detection component 4 and improve the accuracy of the detection results.
[0045] In the above embodiments, the detection component 4 can detect the specific position of the device to be tested on the tray 1 after the electrostatic adsorption component 21 and the gas adsorption component 22 have completed the placement, thereby determining the placement effect of the electrostatic adsorption component 21 and the gas adsorption component 22, and further improving the reliability of the device placement device.
[0046] In some embodiments, such as Figure 3 As shown, the gas adsorption component 22 has an air intake port 231 and an exhaust port 232. The air intake port 231 is located on the side of the gas adsorption component 22 facing the material tray 1 and has a preset distance in the vertical direction from the upper surface of the device to be tested. The exhaust port 232 is located on the lower side of the gas adsorption component 22.
[0047] The gas adsorption component 22 can be connected to the gas exhaust port 232. The gas between the gas adsorption component 22 and the device under test can flow into the gas adsorption component 22 through the gas adsorption port 231 and then be discharged through the gas exhaust port 232.
[0048] The shape of the air intake 231 can be flat. The height of the flat air intake 231 in the vertical direction can be less than the height of the device under test, thereby avoiding the situation where the device under test is sucked into the gas adsorption component 22, and effectively reducing the wear of the device under test.
[0049] The suction port 231 can be at a preset distance in the vertical direction from the upper surface of the device under test to further prevent the gas adsorption component 22 from being sucked into the device under test. The preset distance can be determined according to the height of the device under test, and the preset distance can be no more than 0.1 mm, so as to avoid the distance between the suction port 231 and the device under test being too far, which would affect the placement effect.
[0050] In the above embodiments, airflow can be drawn into the gas adsorption member 22 through the air intake 231 and discharged through the exhaust port 232, effectively simplifying the structure of the gas adsorption member 22. Furthermore, the air intake 231 can be at a predetermined vertical distance from the upper surface of the device under test, ensuring that the device under test cannot be drawn into the gas adsorption member 22, effectively reducing the wear and tear on the device under test, and further improving the reliability and practicality of the gas adsorption member 22.
[0051] In some embodiments, such as Figure 2 As shown, the gas adsorption component 22 includes a fixed base 233 and a body 234. The body 234 is disposed on the fixed base 233 and can move relative to the fixed base 233 along a first direction and / or a second direction. The air intake 231 is disposed on the body 234.
[0052] The first direction can be represented as the X-axis direction in a Cartesian coordinate system, and the second direction can be represented as the Y-axis direction in a Cartesian coordinate system.
[0053] One end of the main body 234 can be connected to the fixed base 233, and the air intake 231 is provided at the other end of the main body 234. A first pushing part 8 and a second pushing part 9 can be provided on the main body 234 respectively. By pushing and pulling the first pushing part 8 and the second pushing part 9, the main body 234 can be moved relative to the fixed base 233 in a first direction and a second direction respectively.
[0054] In the above embodiments, the air intake 231 can move relative to the fixed base 233 in the first direction and / or the second direction under the drive of the main body 234, so that the distance between the air intake 231 and the device to be tested can be adjusted according to actual usage needs and conditions, effectively ensuring the placement effect of the gas adsorption component 22 and improving the flexibility and practicality of the gas adsorption component 22.
[0055] In some embodiments, such as Figure 2As shown, a sliding part (not shown in the figure) is provided on one of the fixed base 233 and the body 234, and an arc-shaped groove 235 is provided on the other of the fixed base 233 and the body 234, and the sliding part is slidably disposed in the arc-shaped groove 235.
[0056] In the above embodiment, the sliding engagement between the sliding part and the arc-shaped groove 235 allows the body 234 to deflect at an angle relative to the fixed seat 233 in the horizontal direction, thereby further adjusting the distance between the air intake 231 and the device to be tested, further ensuring the placement effect of the gas adsorption component 22, and improving the flexibility and practicality of the gas adsorption component 22.
[0057] According to another aspect of this utility model, such as Figure 4 and Figure 5 As shown, a device surface inspection device is also provided, including a cleaning component 5, a feeding component 6, an image acquisition component 7, and a device placement device as described above. The placement component 2, the image acquisition component 7, the feeding component 6, and the cleaning component 5 are arranged sequentially along the rotation direction of the material tray 1.
[0058] Image acquisition component 7 can acquire images from all six sides of the device under test after it has been categorized. Unloading component 6 can collect and store the devices under test after categorization and image acquisition. Cleaning component 5 can clean the surface of tray 1 after unloading to prevent residual debris on tray 1 from affecting the next batch of devices under test.
[0059] The device surface inspection equipment of this utility model includes the device placement device as described above. Since the device placement device has the beneficial effects described above, the device surface inspection equipment including the device placement device as described above must also have the beneficial effects described above.
[0060] In some embodiments, such as Figure 5 As shown, the cleaning assembly 5 includes a rotating cleaning component 51 and a driving component 52. The driving component 52 is used to drive the rotating cleaning component 51 to rotate the upper surface of the cleaning tray 1. The rotating cleaning component 51 has rotating brushes. When the rotating brushes rotate, part of them are in contact with the upper surface of the tray 1, and the other part of them are located outside the outer edge of the tray 1.
[0061] The cleaning component 5 can be understood as cleaning the material tray 1 by rotating the rotating cleaning component 51 to make the rotating brush rub against the upper surface of the material tray 1. Furthermore, during the rotation cleaning process, part of the rotating brush can be located outside the outer edge of the material tray 1 to sweep away debris directly from the material tray 1.
[0062] In the above embodiment, the driving member 52 can drive the rotating cleaning member 51 to rotate circumferentially around its rotation center. When the rotating cleaning member 51 is used to clean the material tray 1, the rotating brush can sweep off the residual debris on the material tray 1, effectively ensuring the cleaning effect of the cleaning component 5.
[0063] In some embodiments, such as Figure 6 As shown, the unloading assembly 6 includes an air blowing component 61 and a receiving box 62. The air blowing component 61 and the receiving box 62 are respectively disposed on two opposite sides of the device to be tested. The air blowing component 61 blows air in the direction of the receiving box 62 to blow the device to be tested into the receiving box 62.
[0064] The device under test can be located between the air blower 61 and the receiving box 62; in other words, the device under test can be located in the air blowing path of the air blower 61. The device under test can have a small size or light weight, so that it can be blown into the receiving box 62 by the air blower 61.
[0065] The material tray 1 may have an outer edge and an inner edge, the receiving box 62 is set corresponding to the outer edge, and the air blowing component 61 is set corresponding to the inner edge. Through the coordinated arrangement of the material tray 1, the air blowing component 61 and the receiving box 62, the air blowing component 61 can blow the device to be tested on the material tray 1 into the receiving box 62.
[0066] In the above embodiment, by cooperating with the material tray 1, the air blowing component 61 and the receiving box 62, the air blowing component 61 can blow the device to be tested on the material tray 1 into the receiving box 62, effectively reducing the loss of the device to be tested during the transfer process, and further improving the feeding efficiency of the feeding component 6 and the material loss during the feeding process.
[0067] In some embodiments, such as Figure 7 As shown, the image acquisition component 7 has a shooting module 71, a fixing module 72, and a flipping mechanism 73. The shooting module 71 and the fixing module 72 are connected by the flipping mechanism 73. The flipping mechanism 73 has a fixed state and a flipped state. When the flipping mechanism 73 is in the fixed state, the shooting module 71 and the fixing module 72 are respectively positioned on the upper and lower opposite sides of the material tray 1. When the flipping mechanism 73 is in the flipped state, the one of the shooting module 71 and the fixing module 72 located above the material tray 1 flips to the outside of the material tray 1.
[0068] In the above embodiments, when the flipping mechanism 73 is in a fixed state, the image acquisition device can take a picture of the device to be inspected. When the flipping mechanism 73 is in a flipped state, one of the imaging module 71 and the fixing module 72 located above the tray 1 can be flipped away from the tray 1. This allows the tray 1 to have upward lifting space, enabling the user to directly remove and replace the tray 1 from above the device surface inspection equipment. This effectively improves the convenience of replacing the tray 1 and thus enhances the practicality of the device surface inspection equipment.
[0069] Although exemplary embodiments have been described herein with reference to the accompanying drawings, it should be understood that the above exemplary embodiments are merely illustrative and are not intended to limit the scope of the invention. Various changes and modifications can be made therein by those skilled in the art without departing from the scope and spirit of the invention. All such changes and modifications are intended to be included within the scope of the invention as claimed in the appended claims.
[0070] For ease of description, the term "connection" may be used herein to describe the relationship between one or more elements or features shown in the figure and other elements or features. It should be understood that "connection" may include direct connections or indirect connections via other elements or features, and this document is intended to encompass all such cases.
[0071] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, parts, components, and / or combinations thereof.
[0072] It should be noted that the terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in sequences other than those illustrated or described herein.
[0073] This utility model has been described through the above embodiments. However, it should be understood that the above embodiments are for illustrative purposes only and are not intended to limit the utility model to the described embodiments. Furthermore, those skilled in the art will understand that this utility model is not limited to the above embodiments, and many more variations and modifications can be made based on the teachings of this utility model, all of which fall within the scope of protection claimed by this utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.
Claims
1. A device homing apparatus, characterized by, The device setting device comprises: a tray rotatable around a rotation center, the tray being used for placing a device to be detected, the tray having at least a setting position in the rotation direction of the tray; and a setting assembly having an electrostatic suction member and a gas suction member, the electrostatic suction member and the gas suction member being arranged at the setting position, the electrostatic suction member being arranged below the tray to apply a force of suction on the device to be detected on the tray; the gas suction member being arranged above the tray and outside the device to be detected, the gas suction member being provided with a setting surface at a position close to the device to be detected to apply a force of suction on the device to be detected to move towards the outer edge of the tray and be in contact with the setting surface.
2. The device positioning apparatus of claim 1, wherein The tray further has a de-electrification position in the rotation direction of the tray, the de-electrification position being downstream of the setting position, and a de-electrification assembly being arranged at the de-electrification position.
3. The device positioning apparatus of claim 2, wherein, The tray further has a detection position in the rotation direction of the tray, the detection position being between the setting position and the de-electrification position, and a detection assembly being arranged above or below the tray at the detection position to detect the device to be detected.
4. The device positioning apparatus of claim 1, wherein The gas suction member has a gas suction port and a gas discharge port, the gas suction port being arranged at a side of the gas suction member facing the tray and having a preset distance from the upper surface of the device to be detected in the vertical direction, and the gas discharge port being arranged at the lower side of the gas suction member.
5. The device positioning apparatus of claim 4, wherein, The gas suction member comprises a fixed seat and a body, the body being arranged on the fixed seat and being movable relative to the fixed seat in a first direction and / or a second direction, and the gas suction port being arranged on the body.
6. The device positioning apparatus of claim 5, wherein, One of the fixed seat and the body is provided with a sliding portion, and the other of the fixed seat and the body is provided with an arc-shaped sliding groove, the sliding portion being slidingly arranged in the arc-shaped sliding groove.
7. A device surface inspection apparatus characterized by comprising: The device setting device comprises a cleaning assembly, a discharging assembly, an image acquisition assembly and any one of the device setting devices according to claims 1 to 6, the setting assembly, the image acquisition assembly, the discharging assembly and the cleaning assembly being arranged in sequence in the rotation direction of the tray.
8. The device surface inspection apparatus according to claim 7, wherein The cleaning assembly comprises a rotating cleaning member and a driving member, the driving member being used for driving the rotating cleaning member to rotate and clean the upper surface of the tray, the rotating cleaning member having rotating brushes, a part of the rotating brushes being in contact with the upper surface of the tray when rotating, and another part of the rotating brushes being outside the outer edge of the tray when rotating.
9. The device surface inspection apparatus according to claim 7, wherein The discharging assembly comprises a gas blowing member and a receiving box, the gas blowing member and the receiving box being arranged at two opposite sides of the device to be detected respectively, the gas blowing member blowing gas to the direction of the receiving box to blow the device to be detected into the receiving box.
10. The device surface inspection apparatus according to claim 7, wherein The image acquisition assembly has a shooting module, a fixing module and a turnover mechanism, the shooting module and the fixing module are connected through the turnover mechanism, the turnover mechanism has a fixed state and a turnover state, when the turnover mechanism is in the fixed state, the shooting module and the fixing module are respectively positioned on the upper and lower two opposite sides of the tray, when the turnover mechanism is in the turnover state, one of the shooting module and the fixing module located above the tray is turned over to the outside of the tray.