Beam channel opening control device for ion implanter

Abstract

The utility model discloses a beam channel opening control device for an ion implanter, which comprises a mounting plate, two groups of beam baffle assemblies are arranged on one side of the mounting plate, and a driving assembly and a water cooling joint are arranged on the other side of the mounting plate; each group of beam baffle assembly comprises a beam baffle, a moving water-cooling shaft and a water inlet pipe; the moving water-cooling shaft is of a hollow structure, the water inlet pipe is arranged in the moving water-cooling shaft, and a gap is formed between the inner wall of the moving water-cooling shaft and the outer side wall of the water inlet pipe; one end of the moving water-cooling shaft is connected with the beam baffle, the other end of the moving water-cooling shaft penetrates through the mounting plate to be connected with the water-cooling connector, a water inlet and a water outlet are formed in the water-cooling connector, one end of the water inlet pipe is connected with the water inlet, the other end of the water inlet pipe is communicated with an internal water channel in the beam baffle, and the water outlet is communicated with the gap. In the utility model, the moving water-cooling shaft has multiple functions, the integrated function of water inlet and outlet is realized in one pipe, the space is saved, and the moving water-cooling shaft also has the function of transmitting movement.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor ion implantation device technology, and more specifically, to a beam channel opening control device for an ion implanter. Background Technology

[0002] Precise control of the ion beam is essential during ion implantation. Various structural devices are used along the beam's transmission path from generation to implantation onto the wafer surface to achieve functions such as ion screening, purification, and detection.

[0003] Currently, the beam channel opening control device of an ion implanter typically includes a beam baffle assembly and a drive assembly for controlling the movement of the beam baffle assembly. The beam baffle assembly forms the beam channel for the ion beam to pass through. To effectively manage the heat generated during ion implantation and ensure stable operation of the equipment and precise control of the implantation process, cooling of the beam baffle assembly is usually required. Existing technologies use conventional water-cooling layouts for cooling the beam baffle assembly, which occupies a considerable amount of space. Utility Model Content

[0004] In view of this, the purpose of this utility model is to provide a beam channel opening control device for an ion implanter to solve the problems existing in the prior art.

[0005] To achieve the above objectives, the technical solution of this utility model is as follows:

[0006] A beam channel opening control device for an ion implanter includes a mounting plate installed on the ion implanter. Two sets of beam baffle assemblies are provided on one side of the mounting plate, and a drive assembly and a water-cooling connector are provided on the other side of the mounting plate.

[0007] Each beam baffle assembly includes a beam baffle, a moving water-cooled shaft, and a water inlet pipe. The distance between two beam baffles forms a beam channel opening. An internal water channel is provided inside the beam baffle. The moving water-cooled shaft has a hollow internal structure. The water inlet pipe is located inside the moving water-cooled shaft, and a gap is formed between the inner wall of the moving water-cooled shaft and the outer wall of the water inlet pipe. One end of the moving water-cooled shaft is connected to the beam baffle, and the other end passes through the mounting plate and connects to the water-cooling connector. The water-cooling connector has an inlet and an outlet. One end of the water inlet pipe is connected to the inlet, and the other end communicates with the internal water channel inside the beam baffle. The outlet communicates with the gap.

[0008] The drive assembly is connected to the two water-cooled connectors and is used to drive the two water-cooled connectors to move closer or further apart from each other. In turn, the two moving water-cooled shafts drive the two beam baffles to move closer or further apart from each other, thereby adjusting the size of the beam channel opening.

[0009] Furthermore, the drive assembly includes a mounting bracket on which a motor, a guide rail, and a ball screw are mounted. The output end of the motor is connected to the ball screw. The two sides of the ball screw are respectively configured with left-hand threads and right-hand threads. Water-cooled connector seats are threadedly connected to the left-hand threads and the right-hand threads of the ball screw. Two sliders are slidably mounted on the guide rail. The bottom of the two water-cooled connector seats is connected to the corresponding sliders, and the top end is connected to the corresponding water-cooled connectors.

[0010] The motor drives the ball screw to rotate, thereby causing the two water-cooled connector seats to move simultaneously toward the center or to both sides. In turn, the water-cooled connectors and the moving water-cooled shaft drive the two beam baffles to move closer or further apart, thereby adjusting the size of the beam channel opening.

[0011] Furthermore, it also includes a tooling plate located on one side of the beam baffle and detachably connected to the mounting plate;

[0012] The water-cooling connector has an opening, and a locking screw is provided at the opening. Loosening the locking screw allows the moving water-cooling shaft to rotate relative to the water-cooling connector.

[0013] Rotating the beam baffle allows the bottom of the beam baffle to fit into contact with the tooling plate.

[0014] Furthermore, the mounting plate is disposed on the outer wall of the ion implanter. One side of the mounting plate is the vacuum side inside the ion implanter, and the other side is the external atmospheric side. Both sets of beam baffle assemblies are located on the atmospheric side, and the drive assembly and water-cooling connector are also located on the atmospheric side.

[0015] Furthermore, it also includes two corrugated sealing tubes disposed on the atmospheric side, the corrugated sealing tubes being connected to the mounting plate, and each of the moving water-cooled shafts passing through the mounting plate and the corrugated sealing tubes via the vacuum side and then being connected to the corresponding water-cooling connector.

[0016] Furthermore, two limit switches are also provided on the guide rail.

[0017] Furthermore, a potentiometer is also provided on the slider, and the potentiometer is connected to the motor signal.

[0018] Furthermore, a scale is provided along the length of the guide rail, and a pointer is provided on the slider.

[0019] Compared with the prior art, this utility model has the following advantages:

[0020] The beam channel opening control device provided by this utility model has multiple functions, and the moving water-cooled shaft integrates the functions of water inlet and outlet in one pipe. Compared with the traditional two pipes for water inlet and outlet, it saves space and also has the function of transmitting motion. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other embodiments can be obtained based on these drawings.

[0022] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0023] Figure 2 This is a partial structural schematic diagram of the beam baffle assembly in this utility model.

[0024] Figure 3 This is a structural schematic diagram of the drive component in this utility model.

[0025] Figure 4 This is a partial structural schematic diagram of the flow baffle assembly in this utility model from another perspective.

[0026] Figure 5 This is a schematic diagram of the connection between the water-cooled connector and the moving water-cooled shaft in this utility model.

[0027] Explanation of reference numerals in the attached figures:

[0028] 1. Mounting plate; 2. Beam baffle assembly; 21. Beam baffle; 22. Moving water-cooled shaft; 23. Water inlet pipe; 24. Beam channel opening; 25. Gap; 26.

[0029] 3. Tooling plate; 4. Corrugated sealing pipe; 5. Water-cooled connector; 51. Water inlet; 52. Water outlet; 53. Locking screw; 54. Opening;

[0030] 6. Drive assembly; 61. Mounting bracket; 62. Motor; 63. Guide rail; 64. Ball screw; 65. Water-cooled connector; 66. Slider; 67. Limit switch; 68. Potentiometer; 69. Pointer;

[0031] 7. Ruler. Detailed Implementation

[0032] The structure provided by this utility model will be explained and described in detail below with reference to the accompanying drawings.

[0033] refer to Figures 1 to 5As shown, this embodiment specifically discloses a beam channel opening control device for an ion implanter, including a mounting plate 1 installed on the ion implanter. Two sets of beam baffle assemblies 2 are provided on one side of the mounting plate 1, and a drive assembly 6 and a water-cooling connector 5 are provided on the other side of the mounting plate 1.

[0034] Each beam baffle assembly 2 includes a beam baffle 21, a moving water-cooled shaft 22, and a water inlet pipe 23. The distance between two beam baffles 21 forms a beam channel opening 24. The beam baffle 21 has an internal water channel (not shown in the figure). The moving water-cooled shaft 22 has a hollow internal structure. The water inlet pipe 23 is located inside the moving water-cooled shaft 22, and a gap 25 is formed between the inner wall of the moving water-cooled shaft 22 and the outer wall of the water inlet pipe 23. One end of the moving water-cooled shaft 22 is connected to the beam baffle 21, and the other end passes through the mounting plate 1 and is connected to the water-cooled connector 5. The water-cooled connector 5 is provided with an inlet 51 and an outlet 52. One end of the water inlet pipe 23 is connected to the inlet 51, and the other end is connected to the internal water channel inside the beam baffle 21. The outlet 52 is connected to the gap 25. The water-cooled connector 5 has a sealing structure inside, so that the inlet 51 and the outlet 52 are not directly connected.

[0035] The drive assembly 6 is connected to two water-cooled connectors 5 and is used to drive the two water-cooled connectors 5 to move closer or further away from each other. In turn, the two moving water-cooled shafts 22 drive the two beam baffles 21 to move closer or further away from each other, thereby adjusting the size of the beam channel opening 24.

[0036] In this embodiment, when the two beam baffles 21 approach each other, the beam channel opening 24 gradually decreases, and vice versa. In some embodiments, only one beam baffle 21 can be driven to move, which can also achieve the adjustment of the size of the beam channel opening 24. In this embodiment, driving both beam baffles 21 to move at the same time can improve the adjustment efficiency.

[0037] Combination Figure 2 As shown, in this embodiment, cooling water enters the pipe from the inlet pipe 23, then enters the internal water channel of the beam baffle 21, and then flows out to the outlet 52 through the gap 25 between the moving water cooling shaft 22 and the inlet pipe 23. In this way, a single shaft serves as both the inlet and outlet water channel for cooling, which can remove the heat caused by the beam obstruction, and as the moving shaft connecting the beam baffle 21, achieving multiple uses of a single shaft and saving space.

[0038] It should be noted that in some embodiments, the mounting plate 1 can be directly installed inside the ion implanter, and the beam baffle assembly 2, drive assembly 6, and water-cooled connector 5 on both sides can all be located inside the ion implanter. In this case, the corresponding drive assembly 6 can be selected as a device that can adapt to the vacuum environment inside the ion implanter, thereby ensuring the overall sealing of the device.

[0039] In the illustrated embodiment, the mounting plate 1 is disposed on the outer wall of the ion implanter. One side of the mounting plate 1 is the vacuum side inside the ion implanter, and the other side is the external atmospheric side. Both sets of beam baffle assemblies 2 are located on the atmospheric side, and the drive assembly 6 and the water-cooling connector 5 are also located on the atmospheric side. By placing the drive assembly 6 and the water-cooling connector 5 on the external atmospheric side, conventional components can be selected.

[0040] Combination Figure 3 As shown, in this embodiment, the drive assembly 6 includes a mounting bracket 61, on which a motor 62, a guide rail 63, and a ball screw 64 are mounted. The output end of the motor 62 is connected to the ball screw 64. The two sides of the ball screw 64 are respectively configured with left-hand threads and right-hand threads. Water-cooled connector seats 65 are threadedly connected to the left-hand threads and right-hand threads of the ball screw 64. Two sliders 66 are slidably mounted on the guide rail 63. The bottom of the two water-cooled connector seats 65 is connected to the corresponding sliders 66, and the top end is connected to the corresponding water-cooled connectors 5.

[0041] The drive motor 62 can drive the ball screw 64 to rotate, thereby driving the two water-cooled connector seats 65 to move towards the middle or towards both sides at the same time. In turn, the water-cooled connector 5 and the moving water-cooled shaft 22 drive the two beam baffles 21 to move closer or further away from each other, thus realizing the adjustment of the size of the beam channel opening 24.

[0042] In this embodiment, by adopting a ball screw structure, the rigidity and precision of the drive component are significantly improved compared to traditional belt pulley transmission.

[0043] In some embodiments, combined with Figure 1 and Figure 4 As shown, it also includes a tooling plate 3 located on one side of the beam baffle 21 and detachably connected to the mounting plate 1;

[0044] The water-cooled connector 5 is provided with an opening 54, and a locking screw 53 is provided at the opening 54. Loosening the locking screw 53 allows the moving water-cooled shaft 22 to rotate relative to the water-cooled connector 5.

[0045] Rotating the beam baffle 21 allows the bottom of the beam baffle 21 to fit into the tooling plate 3.

[0046] In traditional solutions, the beam baffle 21 is positioned by pins, but due to processing errors, the beam baffles 21 often cannot be parallel or perpendicular to the beam. In this embodiment, after the moving water-cooling shaft 22 of the beam baffle assembly 2 is inserted into the water-cooling connector 5, the beam baffle assembly 2 is rotated to make the beam baffle 21 fit with the tooling plate 3. The tooling plate 3 is used as the standard position, which can ensure both the parallelism of the two beam baffles 21 and the perpendicularity of the beam baffles 21 to the beam direction.

[0047] Of course, after the beam baffle 21 and the tooling plate 3 are attached, tighten the screws 53 to ensure that the adjusted position does not change, and then remove the tooling plate 3.

[0048] Furthermore, when the drive component 6 and other related components are set on the atmospheric side, in order to ensure the vacuum level on the vacuum side, two corrugated sealing pipes 4 are also set on the atmospheric side. The corrugated sealing pipes 4 are connected to the mounting plate 1. Each moving water-cooled shaft 22 passes through the mounting plate 1 and the corrugated sealing pipes 4 via the vacuum side and is connected to the corresponding water-cooling connector 5. By setting the corrugated sealing pipes 4, the sealing performance can be effectively guaranteed and the risk of vacuum leakage can be reduced.

[0049] Continue to combine Figure 3 As shown, two limit switches 67 are also provided on the guide rail 63, and a potentiometer 68 is provided on the slider 66. Both the limit switches 67 and the potentiometer 68 are connected to the motor 62 for signal control of the motor 62's start or rotation direction. The limit switches 67 effectively prevent the slider 66 from exceeding the predetermined travel range. When the slider 66 contacts the limit switch 67, the motor 62 can be stopped to avoid equipment damage or accidents and ensure overall safety. The potentiometer 68 can convert the displacement information of the slider 66 into an electrical signal, thereby realizing real-time monitoring and feedback of the slider 66's position, and thus controlling the operation of the motor 62 to achieve high-precision control and adjustment.

[0050] Furthermore, a scale 7 is provided along the length of the guide rail 63, and a pointer 69 is provided on the slider 66. The scale 7 and pointer 69 provide intuitive position feedback, allowing operators to quickly read the specific position of the slider 66 on the guide rail 63 and thus determine the distance between the two beam baffles 21, i.e., the size of the beam channel opening 24. This makes it convenient to visually view the size of the beam channel opening 24 during debugging.

[0051] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0052] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0053] In the description of this specification, the references to terms such as "this embodiment," "an embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any at least one embodiment or example. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0054] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0055] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and simple improvements made on the substantive content of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A beam channel opening control device for an ion implanter, characterized in that, The application relates to an installation plate (1) installed on an ion implanter, one side of the installation plate (1) being provided with two groups of beam baffle assemblies (2), and the other side of the installation plate (1) being provided with a driving assembly (6) and a water cooling connector (5); Each group of the beam baffle assemblies (2) comprises a beam baffle (21), a moving water cooling shaft (22) and a water inlet pipe (23), the distance between the two beam baffles (21) forming a beam channel opening (24); the beam baffle (21) is internally provided with an internal water channel, the moving water cooling shaft (22) is internally hollow, the water inlet pipe (23) is arranged in the moving water cooling shaft (22), and a gap (25) is formed between the inner wall of the moving water cooling shaft (22) and the outer wall of the water inlet pipe (23); one end of the moving water cooling shaft (22) is connected with the beam baffle (21), and the other end penetrates through the installation plate (1) and is connected with the water cooling connector (5); the water cooling connector (5) is provided with a water inlet (51) and a water outlet (52), one end of the water inlet pipe (23) is connected with the water inlet (51), and the other end is in communication with the internal water channel in the beam baffle (21); the water outlet (52) is in communication with the gap (25); The driving assembly (6) is connected with the two water cooling connectors (5) and is used for driving the two water cooling connectors (5) to move close to or away from each other, so that the two moving water cooling shafts (22) drive the two beam baffles (21) to move close to or away from each other, and the size of the beam channel opening (24) is adjusted.

2. The control device according to claim 1, characterized by The driving assembly (6) comprises a mounting frame (61), the mounting frame (61) is provided with a motor (62), a guide rail (63) and a ball screw (64), the output end of the motor (62) is connected with the ball screw (64), the two sides of the ball screw (64) are provided with left-handed threads and right-handed threads respectively, the ball screw (64) is threadedly connected with water cooling connector seats (65) on the left-handed threads and the right-handed threads respectively, the guide rail (63) is provided with two sliding blocks (66) which are slidably arranged on the guide rail (63), the bottoms of the two water cooling connector seats (65) are connected with the corresponding sliding blocks (66), and the upper ends of the two water cooling connector seats (65) are connected with the corresponding water cooling connectors (5).

3. The control device of claim 1, wherein A tool plate (3) is arranged on one side of the beam baffle (21) and is detachably connected with the installation plate (1); The water cooling connector (5) is provided with an opening (54), the opening (54) is provided with a locking screw (53), the moving water cooling shaft (22) can rotate relative to the water cooling connector (5) by loosening the locking screw (53); The beam baffle (21) can be rotated to make the bottom of the beam baffle (21) and the tool plate (3) adhere to each other.

4. The control device of claim 1, wherein The installation plate (1) is arranged on the outer side wall of the ion implanter, one side of the installation plate (1) is the vacuum side inside the ion implanter, the other side is the atmospheric side outside, the two groups of beam baffle assemblies (2) are located on the atmospheric side, and the driving assembly (6) and the water cooling connector (5) are located on the atmospheric side.

5. The control device of claim 4, wherein Also include two corrugated sealing tube (4) set in the atmosphere side, the corrugated sealing tube (4) is connected with the mounting plate (1), each said moving water cooling shaft (22) via the vacuum side through the mounting plate (1) and the corrugated sealing tube (4) and with the corresponding water cooling connector (5) is connected.

6. The control device of claim 2, wherein The guide rail (63) is also provided with two limit switches (67).

7. The control device of claim 2, wherein The slider (66) is also provided with a potentiometer (68), and the potentiometer (68) is signal connected with the motor (62).

8. The control device of claim 2, wherein A scale ruler (7) is also arranged along the length direction of the guide rail (63), and the slider (66) is provided with a pointer (69).

Images