Heating wire fixing assembly

Abstract

The utility model discloses a heating wire fixing assembly, which belongs to the technical field of heating wire fixing and comprises a plurality of ceramic back strips and ceramic clips mounted on the ceramic back strips. And the ceramic clip is used for fixing the electric heating wire. According to the technical scheme, the ceramic back strips are arranged to fix the ceramic clamps, the ceramic back strips are fixed in the top and bottom hard refractory material layers, the function of the side face light refractory material layers is split, and the heat preservation performance of the side face light refractory material layers can be improved without considering the fixing and installing problem of the ceramic clamps; the ceramic clip is kept in a stable state, and the accuracy of the position of the ceramic clip is improved.

Description

Technical Field

[0001] This utility model belongs to the field of heating wire fixing technology, and specifically relates to a heating wire fixing component. Background Technology

[0002] In semiconductor manufacturing, tube furnaces are commonly used as manufacturing equipment. The heating element of a tube furnace is formed by winding heating wire, such as... Figure 1 As shown, specifically, a refractory material layer A is set on the inner wall of the tubular heating furnace, ceramic clips B are fixed on the refractory material layer, several ceramic clips are stacked, and heating wire C passes through the gap between adjacent ceramic clips to achieve fixation.

[0003] Chinese patent CN215598085U discloses a transformerless tubular heating furnace body, in which an insulation layer is installed on the inner wall of the furnace shell, and ceramic block assemblies are arranged inside the insulation layer. That is to say, in the prior art, ceramic clips are directly fixed to the refractory material layer (insulation layer), and then the heating wire is fixed using ceramic clips.

[0004] The refractory material layer is used not only to support the ceramic clips but also for insulation. This results in insufficient strength and hardness of the refractory material after improving its insulation performance, which is not enough to support the ceramic clips. At the same time, the large number of ceramic clips makes the installation process of them into the refractory material time-consuming. The spacing between ceramic clips and the fit between adjacent ceramic clips cannot be guaranteed, which reduces the accuracy and affects the distribution of the heating wire. Utility Model Content

[0005] This invention provides a heating wire fixing component to solve the problems of insufficient stability and precision of ceramic clips due to the functional concentration of refractory material layers.

[0006] To solve the above-mentioned technical problems, the technical solution of this utility model is: an electric heating wire fixing assembly for use in a heating furnace, the heating furnace having a side lightweight refractory layer and a top and bottom hard refractory layer, including a plurality of ceramic back strips and ceramic clips embedded in the ceramic back strips, the ceramic back strips being fixed to the top and bottom hard refractory layers;

[0007] The ceramic clip is used to secure the heating wire.

[0008] Specifically, several ceramic clips are stacked along a ceramic back strip, and a through hole is formed between adjacent ceramic clips stacked on the same ceramic back strip for the power supply heating wire to pass through.

[0009] Specifically, the ceramic backing strip has a linear groove on the side away from the side lightweight refractory layer, and the ceramic clip is slidably connected to the linear groove.

[0010] Specifically, the linear slide has a 7-shaped cross-section, and the ceramic clip has a 7-shaped part, which is embedded in the linear slide and can move along the linear slide.

[0011] Specifically, the top and bottom hard refractory layers are provided with a number of fixing holes, and the end of the ceramic back strip is inserted into the fixing holes.

[0012] Specifically, the two top and bottom rigid refractory layers respectively fix the top and bottom of the ceramic backing strip. The side lightweight refractory layer is located between the two top and bottom rigid refractory layers.

[0013] The technical solution provided by this utility model has the following advantages compared with the prior art:

[0014] The ceramic backing strip and top and bottom rigid refractory material support and fixation of the ceramic clips are set up, and the function of the side lightweight refractory layer is split. The side lightweight refractory layer can improve the thermal insulation performance without considering the ceramic clip fixing installation problem. The ceramic backing strip has the characteristics of high temperature resistance, high strength and high hardness. Even when the heating furnace is running at a continuous high temperature, it can maintain the ceramic clip in a stable state and the position of the ceramic clip does not change. This improves the positioning accuracy of the ceramic clip and optimizes the installation layout of the heating wire, so that the heating wire can distribute heat more evenly when heated, improving heating efficiency and energy utilization. Furthermore, it simplifies the installation and maintenance process of the ceramic clip, making the installation process simple and quick. Attached Figure Description

[0015] Figure 1 This is a diagram of the ceramic clip connection structure in the background technology;

[0016] Figure 2 This is an overall structural diagram of the heating wire fixing assembly in this embodiment;

[0017] Figure 3 This is a diagram showing the connection relationship between the ceramic back strip and the ceramic clip in this embodiment.

[0018] As shown in the figure:

[0019] 1. Heating wire; 2. Ceramic clip; 3. Ceramic backing strip; 4. Lightweight refractory layer on the sides; 5. Hard refractory layer on the top and bottom; 6. Fixing hole; 7. 7-shaped part; 8. Linear groove; Detailed Implementation

[0020] For ease of understanding, the heating wire fixing assembly is described below with reference to embodiments. It should be understood that these embodiments are only for illustrating the present invention and are not intended to limit the scope of the present invention.

[0021] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," "side," and "top and bottom," etc., indicating the orientation or positional relationship, are based on the orientation and positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0022] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0023] like Figure 2 and Figure 3 As shown, in this embodiment, the heating wire fixing assembly is used in a heating furnace. The heating furnace has a side lightweight refractory layer 4 and a top and bottom hard refractory layer 5. The side lightweight refractory layer 4 is located between the two top and bottom hard refractory layers 5. The heating wire fixing assembly includes a ceramic backing strip 3 and a ceramic clip 2. Both are made of ceramic and have high hardness, high strength and high temperature resistance. They can maintain a stable state for a long time in a high-temperature environment, ensuring the reliability and durability of the heating furnace. The ceramic clip 2 can also maintain stability during continuous high-temperature operation of the heating furnace. The ceramic clip 2 is used to fix the heating wire 1. It not only keeps its own position unchanged, but also optimizes the installation layout of the heating wire 1, so that the heating wire 1 can distribute heat more evenly when heated, improving heating efficiency and energy utilization.

[0024] like Figure 2 As shown, the top and bottom rigid refractory layers 5 are used to fix the top of the ceramic backing strip 3, and the bottom of the ceramic backing strip 3 is also fixed. Specifically, the upper end of the ceramic backing strip 3 is inserted into the fixing hole of the first top and bottom rigid refractory layer, and the lower end of the ceramic backing strip 3 is inserted into the fixing hole of the second top and bottom rigid refractory layer. The ceramic backing strip 3 is easy and quick to install, and the top and bottom rigid refractory layers 5 fix the upper and lower ends of the ceramic backing strip 3 and the spacing between adjacent ceramic backing strips 3, ensuring the stability of the component itself.

[0025] like Figure 2As shown, the ceramic backing strip 3 has a first side and a second side arranged opposite to each other. The first side is fixed to the lightweight refractory layer on the side, and the second side has a vertically oriented linear groove 8. Several ceramic clips 2 are stacked from top to bottom along the linear groove 8, and adjacent stacked ceramic clips 2 fit together. The ceramic clips 2 are easy and quick to install.

[0026] The linear groove 8 has a 7-shaped cross-section. The ceramic clip 2 has a 7-shaped part 7, which is embedded in the linear groove 8 and can move along the linear groove 8. It is also limited by the linear groove 8 to prevent the ceramic clip 2 from falling out of the linear groove 8. A through hole is formed between adjacent ceramic clips 2 stacked on the same ceramic backing strip 3, and the heating wire 1 surrounding the heating furnace passes through the through hole.

[0027] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein, and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the various embodiments of this utility model.

Claims

1. An electric heating wire fixing assembly for a heating furnace having a side light weight refractory layer and a top and bottom hard refractory layer, characterized in that, The application relates to a ceramic back strip and a ceramic pin embedded in the ceramic back strip, and the ceramic back strip is fixed to a top and bottom hard material layer. The ceramic pin is used for fixing an electric heating wire.

2. The heating wire fixing assembly as described in claim 1, characterized in that, A plurality of the ceramic pins are stacked along the ceramic back strip, and adjacent ceramic pins stacked on the same ceramic back strip form a through hole for the electric heating wire.

3. The heating wire fixing assembly as described in claim 2, characterized in that, The ceramic back strip is provided with a linear sliding groove on the side away from the side light material layer, and the ceramic pin is slidingly connected to the linear sliding groove.

4. The heating wire fixing assembly as described in claim 3, characterized in that, The linear sliding groove has a 7-shaped cross section, and the ceramic pin has a 7-shaped part embedded in the linear sliding groove and capable of moving along the linear sliding groove.

5. An electrical heating element mounting assembly as claimed in claim 1 wherein, The top and bottom hard material layer is provided with a plurality of fixing holes, and the end of the ceramic back strip is inserted into the fixing hole.

6. The heating wire fixing assembly as described in claim 5, characterized in that, Two top and bottom hard material layers are respectively used for fixing the top and bottom of the ceramic back strip.

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