Cleaning device

Abstract

The utility model discloses a cleaning device which comprises a mechanical arm, a driving piece, a clamping jaw, a mounting plate, a clamp used for placing materials to be cleaned and a protection assembly, the protection assembly comprises a first protection sleeve and a second protection sleeve, and the first protection sleeve is connected with the second protection sleeve. The first protective sleeve and the second protective sleeve are arranged on the periphery of the driving part in a sleeving mode, the other end of the first protective sleeve is provided with a matching hole for a clamping jaw to penetrate through, the first protective sleeve is arranged on the periphery of the clamping jaw in a sleeving mode, and the clamping jaw partially penetrates through the matching hole to be exposed out of the first protective sleeve. The driving part is connected with the clamping jaw so as to drive the clamping jaw to clamp or loosen the clamp, the driving part and the first protection sleeve are installed on the installation plate, and the installation plate is connected with the mechanical arm. According to the utility model, the corrosion degree of the metal component caused by long-term concentrated acid environment can be reduced, so that the service life of the equipment is prolonged, and the cleaning quality is ensured.

Description

Technical Field

[0001] This utility model relates to the field of corrosion prevention technology for germanium wafer cleaning devices, and in particular to a cleaning device. Background Technology

[0002] Wafer cleaning is a crucial step in ensuring high-quality and stable products. Specifically, in the cleaning process of germanium wafers, concentrated sulfuric acid is first used to remove surface contaminants, followed by further cleaning with ultrapure water to guarantee product quality.

[0003] The cleaning fixtures currently in use are exposed to a concentrated acid environment for a long time. Their internal metal components, such as cylinders, fingers, and fasteners, are inevitably corroded by acid gas and acid mist, resulting in corrosion, shortening the service life of the equipment, and affecting the quality of wafer cleaning. Utility Model Content

[0004] The technical problem this invention aims to solve is that the cleaning fixtures currently in use are exposed to a concentrated acid environment for extended periods, causing the internal metal components to be corroded by acid gas and acid mist, resulting in corrosion, shortening the service life of the equipment, and affecting the quality of wafer cleaning.

[0005] To solve the above-mentioned technical problems, this utility model provides a cleaning device, including a robotic arm, a driving component, a gripper, a mounting plate, a clamp for placing materials to be cleaned, and a protective component. The protective component includes a first protective sleeve and a second protective sleeve, the first protective sleeve and the second protective sleeve being connected and fitted around the outer periphery of the driving component. The other end of the first protective sleeve has a mating hole for the gripper to pass through. The first protective sleeve is fitted around the outer periphery of the gripper, and a portion of the gripper passes through the mating hole and protrudes outside the first protective sleeve. The driving component is connected to the gripper to drive the gripper to clamp or release the clamp. The driving component and the first protective sleeve are mounted on the mounting plate, and the mounting plate is connected to the robotic arm.

[0006] Furthermore, the first protective sleeve has two mating holes, and the two mating holes are connected by a folding structure. When the grippers open, the folding structure is stretched and flattened as the grippers open.

[0007] Furthermore, the folding structure includes a connecting part and an arc-shaped part. The arc-shaped part is connected to both sides of the connecting part. The side of the arc-shaped part away from the connecting part is connected to the outer wall of the mating hole. The arc-shaped part is made of an elastic material.

[0008] Furthermore, the mating hole is a waist-shaped hole, and the mating hole and the clamp are interference fit.

[0009] Furthermore, the end of the first protective sleeve facing away from the mating hole is flared.

[0010] Furthermore, the first protective cover is made of an elastic material.

[0011] Furthermore, the second protective sleeve includes a main body and a mating part, the main body and the mating part are connected and communicate with each other, and the mating part is interference-fitted with the end of the first protective sleeve away from the mating hole.

[0012] Furthermore, a first groove is formed on the outer wall of the connection between the mating part and the main body, and the inner wall of the first protective sleeve on the side away from the mating hole has a protruding structure, and the first groove mates with the protruding structure.

[0013] Furthermore, the second protective case is made of a transparent material.

[0014] Furthermore, the gripper includes a first gripping block and a second gripping block, which pass through the corresponding mating holes and are connected to the drive member. The first gripping block has a second groove at one end near the mating hole, and the second gripping block has a third groove at one end near the mating hole. The second groove and the third groove are exposed outside the first protective sleeve.

[0015] Compared with the prior art, the cleaning device of this utility model has the following advantages:

[0016] This embodiment of the invention employs two protective sleeves to protect the drive component from the acidic environment. The first protective sleeve is directly fitted onto the outer periphery of the gripper and has mating holes for the gripper to pass through, protecting the internal structure without hindering the gripper's movement. The second protective sleeve is connected to the first protective sleeve and together they enclose the drive component, forming a double protective barrier. This effectively isolates acid gas and acid mist, reduces the risk of corrosion, and can reduce the degree of corrosion of metal components caused by long-term exposure to concentrated acid environments, thereby extending the service life of the equipment and ensuring cleaning quality. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the cleaning device provided in an embodiment of the present invention;

[0018] Figure 2 This is a schematic diagram of the cleaning device provided in this embodiment of the utility model, excluding the robotic arm and the mounting plate.

[0019] Figure 3 This is a top view of the driving component, gripper, first protective sleeve, and second protective sleeve provided in this embodiment of the utility model;

[0020] Figure 4 This is a schematic diagram of the structure of the first protective sleeve provided in this embodiment of the utility model;

[0021] Figure 5 This is a side view of the first protective sleeve provided in this embodiment of the utility model;

[0022] Figure 6 This is a schematic diagram of the structure of the second protective sleeve provided in this embodiment of the utility model;

[0023] Figure 7 This is a top view of the second protective sleeve provided in this embodiment of the utility model;

[0024] In the diagram, 1. Robotic arm; 2. Drive unit; 3. Gripper; 31. First gripping block; 311. Second groove; 32. Second gripping block; 321. Third groove; 4. Mounting plate; 5. Clamp; 51. Grip part; 52. Fixing part; 53. Hook part; 54. Hook-shaped structure; 6. Protective component; 61. First protective sleeve; 611. Mating hole; 612. Folding structure; 6121. Connecting part; 6122. Arc-shaped part; 613. Protruding structure; 62. Second protective sleeve; 621. Main body; 622. Mating part; 6221. First groove; 7. Material to be cleaned. Detailed Implementation

[0025] The specific embodiments of this utility model will be further described in detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit the scope of this utility model.

[0026] like Figures 1 to 4 As shown, this utility model provides a cleaning device, including a robotic arm 1, a driving component 2, a gripper 3, a mounting plate 4, a clamp 5 for placing materials 7 to be cleaned (such as germanium wafers), and a protective component 6. The robotic arm 1 is used to move the gripper 3 to different positions for cleaning operations. The protective component 6 includes a first protective sleeve 61 and a second protective sleeve 62. The first protective sleeve 61 and the second protective sleeve 62 are connected and are fitted around the outer periphery of the driving component 2. The other end of the first protective sleeve 61 has a mating hole 611 for the gripper 3 to pass through. The first protective sleeve 61 is fitted around the outer periphery of the gripper 3, and part of the gripper 3 passes through the mating hole 611 and protrudes outside the first protective sleeve 61. The driving component 2 is connected to the gripper 3 to drive the gripper 3 to clamp or release the clamp 5. The driving component 2 and the first protective sleeve 61 are mounted on the mounting plate 4, and the mounting plate 4 is connected to the robotic arm 1.

[0027] Based on the above structure, this embodiment uses two protective sleeves to protect the drive component 2 from the acidic environment. The first protective sleeve 61 is directly fitted onto the outer periphery of the gripper 3 and has a mating hole 611 for the gripper 3 to pass through, which protects the internal structure without hindering the movement of the gripper 3. The second protective sleeve 62 is connected to the first protective sleeve 61 and together wraps around the drive component 2, forming a double protective barrier, effectively isolating acid gas and acid mist, reducing the risk of corrosion, and reducing the degree of corrosion of metal components caused by long-term exposure to concentrated acid environment, thereby extending the service life of the equipment and ensuring the cleaning quality.

[0028] like Figure 4 As shown, the first protective sleeve 61 has two mating holes 611, and the two mating holes 611 are connected by a folding structure 612. When the gripper 3 opens, the folding structure 612 is stretched and flattened as the gripper 3 opens.

[0029] Based on the above structure, when the gripper 3 opens, the folding structure 612 stretches and flattens out along with the gripper 3, meaning that the folding structure 612 can adjust its shape according to the movement of the gripper 3. When the gripper 3 needs to open to hold or release material, the arc-shaped portion 6122 can stretch accordingly and become flatter, thereby providing sufficient space for the gripper 3 to complete its movement. This ensures that the gripper 3 can perform its function without any restrictions, while still being effectively protected by the protective sleeve. This embodiment balances the contradiction between protection requirements and operational flexibility, protecting the metal parts of the cleaning device from corrosion by the acidic environment to a large extent, while ensuring that the gripper 3 maintains its operational capability.

[0030] Furthermore, the folding structure 612 includes a connecting portion 6121 and an arc-shaped portion 6122. The arc-shaped portion 6122 is connected to both sides of the connecting portion 6121. The side of the arc-shaped portion 6122 away from the connecting portion 6121 is connected to the outer wall of the mating hole 611. The arc-shaped portion 6122 is made of an elastic material, which allows it to deform when subjected to force (e.g., when the gripper 3 opens) and return to its original shape after the force is removed.

[0031] The arc-shaped portion 6122 in this embodiment is made of an elastic material, which can stretch or retract with the movement of the gripper 3, ensuring that the gripper 3 is not obstructed during opening and closing operations. Simultaneously, it effectively encloses the gripper 3, preventing acid mist and gas from contacting the drive unit 2 and other internal components, thus avoiding corrosion. This not only increases the service life of the protective sleeve, but also ensures the flexibility of the gripper 3's operation, guaranteeing that the cleaning device can successfully perform the tasks of material clamping and release.

[0032] Furthermore, the mating hole 611 is an oblong hole, and the mating hole 611 and the gripper 3 are interference fit, which provides a tight physical contact and reduces the risk of the gripper 3 loosening due to vibration or other external forces during operation. In addition, since the interference fit provides a very tight interface, it can effectively prevent acid mist, particulate matter and other contaminants from entering the protective sleeve during the cleaning process, thereby protecting the drive component 2 and other components from corrosion or damage.

[0033] Furthermore, the end of the first protective sleeve 61 facing away from the mating hole 611 is flared, making it easier to install or replace the gripper 3. The larger opening reduces alignment difficulties and allows for smoother insertion or removal of the gripper 3, improving maintenance efficiency. In addition, the flared portion facilitates connection with the second protective sleeve 62 and helps to evenly distribute the pressure acting on the edge of the protective sleeve, preventing material damage or deformation caused by local stress concentration and extending the service life of the first protective sleeve 61 itself.

[0034] Furthermore, the first protective sleeve 61 is made of an elastic material, which can stretch or deform with the movement of the gripper 3, ensuring that the protective sleeve does not hinder the operation of the gripper 3 while still providing necessary protection. In addition, the elastic material helps to better fit the gripper 3 and other components, thereby forming a tighter sealing environment and preventing corrosive substances such as acid mist and acid gas from contacting the drive unit 2 and other internal metal parts, which can effectively extend the service life of the equipment and maintain its stable performance.

[0035] like Figure 6 As shown, the second protective sleeve 62 includes a main body 621 and a mating part 622. The main body 621 covers the main protected area, and the mating part 622 is used to connect with the first protective sleeve 61. The main body 621 and the mating part 622 are connected and communicate with each other, ensuring that the entire interior of the second protective sleeve 62 forms a continuous space, which helps to better protect its internal components. The mating part 622 is press-fitted with the end of the first protective sleeve 61 away from the mating hole 611 (that is, the flared end of the first protective sleeve 61) to ensure tight contact and prevent loosening or intrusion of external substances.

[0036] This embodiment uses an interference fit to tightly connect the first protective sleeve 61 and the second protective sleeve 62, which can effectively prevent corrosive media such as acid mist and acid gas from entering the interior of the protective sleeve, providing better protection for the drive component 2 and other components, and extending the service life of the equipment. In addition, the above-mentioned fitting method increases the mechanical stability of the entire protection system, reduces the risk of relative movement between components due to vibration or other external forces, ensures that each component can work stably, and reduces potential failure points caused by loosening.

[0037] like Figure 5 and Figure 7 As shown, a first groove 6221 is formed on the outer wall of the connection between the mating part 622 and the main body part 621, and a protruding structure 613 is formed on the inner wall of the first protective sleeve 61 on the side away from the mating hole 611. The first groove 6221 and the protruding structure 613 are mated together.

[0038] Based on the above structure, when the first protective sleeve 61 and the second protective sleeve 62 are assembled together, the protruding structure 613 inside the first protective sleeve 61 will be embedded into the first groove 6221 at the connection between the mating part 622 and the main body part 621 of the second protective sleeve 62, forming a lock. In this embodiment, by having the first groove 6221 and the protruding structure 613 cooperate with each other, a more solid connection can be established between the first protective sleeve 61 and the second protective sleeve 62. This not only increases the tightness of the connection but also reduces the risk of loosening due to vibration or movement, ensuring reliability for long-term use. In addition, the cooperation between the first groove 6221 and the protruding structure 613 can further improve the sealing effect, filling any possible tiny gaps and preventing corrosive media such as acid mist and acid gas from penetrating into the interior of the protective sleeve, thereby better protecting the internal components from corrosion.

[0039] Furthermore, the second protective cover 62 is made of transparent material, allowing people to directly observe the inside of the second protective cover 62 from the outside, so as to confirm whether there is any leakage and to facilitate the replacement of the second protective cover.

[0040] Furthermore, the gripper 3 includes a first gripping block 31 and a second gripping block 32. The first gripping block 31 and the second gripping block 32 pass through corresponding mating holes 611 and are connected to the drive member 2 to work together to complete the task of gripping and releasing materials. The end of the first gripping block 31 near the mating hole 611 has a second groove 311, and the end of the second gripping block 32 near the mating hole 611 has a third groove 321. The second groove 311 and the third groove 321 are exposed outside the first protective sleeve 61, which helps to prevent water or other liquids from entering the interior of the first protective sleeve 61 during the cleaning process, thereby protecting the internal components from corrosion or other damage. In this embodiment, the exposed second groove 311 and the third groove 321 can form a physical barrier to help block water from directly entering the interior of the first protective sleeve 61 and prevent the drive member 2 and other components from coming into contact with water.

[0041] Furthermore, the clamp 5 includes a clamping part 51 for gripping by the claws 3 and a fixing part 52 for placing the material 7 to be cleaned. The fixing part 52 has multiple hooks 53, which can more firmly fix the material 7 to be cleaned, reducing the risk of the material slipping or being damaged due to water flow impact or other external forces during the cleaning process. The end of the clamping part 51 away from the fixing part 52 has a hook-shaped structure 54, which allows the clamp 5 to be easily hung up when not in use, saving space and facilitating management and maintenance. It also facilitates drying and avoids secondary pollution or corrosion caused by residual moisture.

[0042] In summary, this utility model embodiment provides a cleaning device that uses two protective sleeves to protect the drive component 2 from the effects of an acidic environment. The first protective sleeve 61 is directly fitted onto the outer periphery of the gripper 3 and has a mating hole 611 for the gripper 3 to pass through, which protects the internal structure without hindering the movement of the gripper 3. The second protective sleeve 62 is connected to the first protective sleeve 61 and together wraps around the drive component 2, forming a double protective barrier that effectively isolates acid gas and acid mist, reduces the risk of corrosion, and can reduce the degree of corrosion of metal components caused by long-term exposure to a concentrated acid environment, thereby extending the service life of the equipment and ensuring the cleaning quality.

[0043] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of the present utility model, and these improvements and substitutions should also be considered within the protection scope of the present utility model.

Claims

1. A cleaning device, characterized in that, The utility model relates to a cleaning device, including mechanical arm, driving part, clamping jaw, mounting plate, the clamp for placing the material to be cleaned and protection assembly, the protection assembly includes first protection cover and second protection cover, first protection cover is connected with second protection cover, and first protection cover and second protection cover are covered the periphery of driving part, one end of first protection cover has the cooperation hole for clamping jaw to pass through, first protection cover is covered the periphery of clamping jaw, and clamping jaw is partially exposed outside first protection cover by passing through cooperation hole, driving part is connected with clamping jaw to drive clamping jaw to hold or loosen clamp, driving part, first protection cover are installed on mounting plate, and mounting plate is connected with mechanical arm.

2. The cleaning apparatus according to claim 1, wherein The first protection cover has two cooperation holes, and the two cooperation holes are connected by a folding structure, when the clamping jaw is opened, the folding structure is stretched and flattened with the opening of the clamping jaw.

3. The cleaning apparatus of claim 2, wherein The folding structure includes a connecting portion and an arc-shaped portion, the connecting portion is connected with the arc-shaped portion on both sides, the arc-shaped portion is connected with the outer wall of the cooperation hole away from the connecting portion, and the arc-shaped portion is made of elastic material.

4. The cleaning apparatus of claim 1, wherein The cooperation hole is a waist-shaped hole, and the cooperation hole is in interference fit with the clamping jaw.

5. The cleaning apparatus of claim 1, wherein The end of the first protection cover away from the cooperation hole is trumpet-shaped.

6. The cleaning apparatus of any one of claims 1-5, wherein, The first protection cover is made of elastic material.

7. The cleaning apparatus of claim 1, wherein The second protection cover includes a main body portion and a fitting portion, the main body portion is connected with the fitting portion, and the main body portion and the fitting portion are in communication, the fitting portion is in interference fit with the end of the first protection cover away from the cooperation hole.

8. The cleaning apparatus of claim 7, wherein The outer wall of the connection between the fitting portion and the main body portion forms a first groove, the inner wall of the side of the first protection cover away from the cooperation hole has a protruding structure, and the first groove is matched with the protruding structure.

9. The cleaning apparatus of any one of claims 1, 7 or 8, wherein, The second protection cover is made of transparent material.

10. The cleaning apparatus of claim 2, wherein The clamping jaw includes a first clamping block and a second clamping block, the first clamping block and the second clamping block are connected with the driving part through the corresponding cooperation holes, the first clamping block has a second groove at one end close to the cooperation hole, the second clamping block has a third groove at one end close to the cooperation hole, and the second groove and the third groove are exposed to the first protection cover.

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