Cleaning device

Abstract

The utility model discloses a cleaning device which comprises a mechanical arm, a clamp and a cleaning clamp, the clamp is used for placing a piece to be cleaned, the cleaning clamp comprises a mounting plate, a driving piece, a first connecting rod, a second connecting rod, a first clamping block and a second clamping block, and the mounting plate is connected with the mechanical arm. The driving part, the first connecting rod, the second connecting rod, the first clamping block and the second clamping block are all mounted on the mounting plate, the first connecting rod is hinged to the first clamping block, the second connecting rod is hinged to the second clamping block, the first clamping block is hinged to the second clamping block, the driving part is connected with the first connecting rod and the second connecting rod, and the driving part is connected with the first connecting rod and the second connecting rod. And the first clamping block and the second clamping block are driven to clamp or loosen the clamp. Manual operation is replaced by automatically controlling the opening and closing mode of the crossed clamping blocks, the risk that workers are exposed to harmful chemical substances is reduced, operation consistency is improved, and a better cleaning effect is achieved.

Description

Technical Field

[0001] This utility model relates to the field of germanium wafer cleaning technology, and in particular to a cleaning device. Background Technology

[0002] Wafer cleaning is a critical step in the manufacturing process of high-quality, highly stable products. For germanium wafers, the cleaning process typically involves initial cleaning with concentrated sulfuric acid to remove surface contaminants, followed by a thorough rinse with ultrapure water to ensure the quality of the final product.

[0003] In existing technologies, this cleaning process involves securing the wafer to a specialized wafer clip, followed by manual immersion of the wafer in concentrated sulfuric acid and ultrapure water by an employee. Although employees wear personal protective equipment during the process, prolonged exposure to acid fumes can still negatively impact their health. Furthermore, manual operation makes it difficult to ensure consistency in each cleaning step, potentially affecting the cleaning outcome. Utility Model Content

[0004] The technical problem this invention aims to solve is that manual operation can affect the health of employees and it is difficult to ensure the consistency of each cleaning action, which may affect the cleaning effect.

[0005] To address the aforementioned technical problems, this utility model provides a cleaning device, including a robotic arm, a clamp for placing the parts to be cleaned, and a cleaning fixture. The cleaning fixture includes a mounting plate, a driving component, a first connecting rod, a second connecting rod, a first clamping block, and a second clamping block. The mounting plate is connected to the robotic arm. The driving component, the first connecting rod, the second connecting rod, the first clamping block, and the second clamping block are all mounted on the mounting plate. The first connecting rod is hinged to the first clamping block, the second connecting rod is hinged to the second clamping block, and the first clamping block is hinged to the second clamping block. The driving component is connected to the first and second connecting rods to drive the first and second clamping blocks to clamp or release the clamps.

[0006] Furthermore, it also includes a first hinge member, the first clamping block having a first groove portion, the second clamping block having a second groove portion adapted to the first groove portion, the first groove portion having a first mounting hole, the second groove portion having a second mounting hole, the first hinge member passing through the first mounting hole and the second mounting hole in sequence to connect the first clamping block and the second clamping block.

[0007] Furthermore, the first clamping block includes a first connecting portion, a second connecting portion, and a third connecting portion, which are connected sequentially. The first connecting portion is perpendicular to the second connecting portion, and the second connecting portion is perpendicular to the third connecting portion. The connection points between the first and second connecting portions, the second connecting portion, and the connection points between the second and third connecting portions are all recessed to form a first groove portion of the first clamping block. The first mounting hole is formed at the second connecting portion, and the second connecting portion and the second groove portion are spaced apart in a first direction.

[0008] Furthermore, the second clamping block includes a fourth connecting portion, a fifth connecting portion, and a sixth connecting portion, which are connected sequentially. The fourth connecting portion is perpendicular to the fifth connecting portion, and the fifth connecting portion is perpendicular to the sixth connecting portion. The connection points between the fourth and fifth connecting portions, the fifth connecting portion, and the connection points between the fifth and sixth connecting portions are all recessed to form a second groove portion of the second clamping block. The second mounting hole is formed at the fifth connecting portion, and the fifth connecting portion and the first groove portion are spaced apart in a first direction.

[0009] Furthermore, the mounting plate has mating holes for connection with the robotic arm.

[0010] Furthermore, it also includes a second hinge member. The first connecting rod includes a first base. A first mounting groove is recessed on one side of the first base, and a third mounting hole communicating with the first mounting groove is opened on the other side of the first base. The first clamping block has a fourth mounting hole. One end of the first clamping block is installed in the first mounting groove, and the second hinge member passes through the third mounting hole and the fourth mounting hole in sequence to connect the first clamping block and the first connecting rod.

[0011] Furthermore, it also includes a third hinge member. The second connecting rod includes a second base. A second mounting groove is recessed on one side of the second base, and a fifth mounting hole communicating with the second mounting groove is opened on the other side of the second base. The second clamping block has a sixth mounting hole. One end of the second clamping block is installed in the second mounting groove, and the third hinge member passes through the fifth mounting hole and the sixth mounting hole in sequence to connect the second clamping block and the second connecting rod.

[0012] Furthermore, the clip includes a connecting part and a mounting part, the connecting part is connected to the mounting part, and the mounting part is provided with a plurality of hook parts, which are spaced apart at one end of the mounting part away from the connecting part.

[0013] Furthermore, the end of the connecting portion away from the mounting portion is bent to form a hook-shaped structure.

[0014] Furthermore, the driving component is a finger cylinder.

[0015] Compared with the prior art, the cleaning device of this utility model has the following advantages:

[0016] In this embodiment of the invention, the first link, the second link, the first clamping block, and the second clamping block form a linkage structure. When the driving component is working, it causes the first link and the second link to move, thereby enabling the first clamping block and the second clamping block to perform the action of clamping or releasing the clamp. This embodiment replaces manual operation by automatically controlling the opening and closing of the cross-shaped clamping blocks, which not only reduces the risk of employees being exposed to harmful chemicals, but also improves the consistency of operation and achieves better cleaning results. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the cleaning device provided in an embodiment of the present invention;

[0018] Figure 2 This is a schematic diagram of the structure of the clamp and cleaning clamp provided in this embodiment of the utility model;

[0019] Figure 3 This is a bottom view of the clamp and cleaning clamp provided in this embodiment of the utility model;

[0020] Figure 4 This is a schematic diagram of the clamping state of the cleaning clamp provided in this embodiment of the utility model, excluding the mounting plate;

[0021] Figure 5 This is a schematic diagram of the cleaning clamp provided in this embodiment of the present invention, excluding the mounting plate, in the loosened state;

[0022] In the diagram, 1. Robotic arm; 2. Clamp; 21. Connecting part; 22. Mounting part; 23. Hook part; 24. Hook-shaped structure; 3. Cleaning fixture; 31. Mounting plate; 311. Mating hole; 32. Drive component; 33. First connecting rod; 331. First base; 34. Second connecting rod; 341. Second base; 342. Second mounting groove; 35. First clamping block; 351. First groove; 352. First connecting part; 353. Second connecting part; 354. Third connecting part; 36. Second clamping block; 361. Second groove; 362. Fourth connecting part; 363. Fifth connecting part; 364. Sixth connecting part; 4. Germanium wafer; 5. First hinge; 6. Second hinge; 7. Third hinge. Detailed Implementation

[0023] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0024] like Figures 1 to 3 As shown, this utility model provides a cleaning device, including a robotic arm 1, a clamp 2, and a cleaning fixture 3. The clamp 2 is used to place the part to be cleaned (i.e., the germanium wafer 4 to be cleaned), ensuring the stability and safety of the wafer during the cleaning process. The robotic arm 1 is responsible for moving the part to be cleaned (i.e., the clamp 2 holding the germanium wafer 4) from one position to another (such as between concentrated sulfuric acid and an ultrapure water tank) to achieve automated operation. The cleaning fixture 3 includes a mounting plate 31, a driving component 32, a first connecting rod 33, a second connecting rod 34, a first clamping block 35, and a second clamping block 36. The holding block 36 and the mounting plate 31 are connected to the robotic arm 1. The driving component 32, the first connecting rod 33, the second connecting rod 34, the first clamping block 35 and the second clamping block 36 are all mounted on the mounting plate 31. The first connecting rod 33 is hinged to the first clamping block 35, the second connecting rod 34 is hinged to the second clamping block 36, and the first clamping block 35 is hinged to the second clamping block 36. The driving component 32 provides power and is connected to the first connecting rod 33 and the second connecting rod 34 to drive the opening and closing action of the first clamping block 35 and the second clamping block 36 to realize the operation of clamping or releasing the clamp 2.

[0025] Based on the above structure, the first link 33, the second link 34, the first clamping block 35, and the second clamping block 36 in this embodiment form a linkage structure. When the drive unit 32 operates, it causes the first link 33 and the second link 34 to move, thereby enabling the first clamping block 35 and the second clamping block 36 to perform the action of clamping or releasing the clamp 2. This embodiment replaces manual operation with automatic control of the opening and closing of the cross-shaped clamping blocks, which not only reduces the risk of employees being exposed to harmful chemicals but also improves the consistency of operation and achieves better cleaning results. The robotic arm 1 in this embodiment has a conventional robotic arm structure.

[0026] See also Figure 4 and Figure 5 It also includes a first hinge member 5, a first clamping block 35 having a first groove portion 351, and a second clamping block 36 having a second groove portion 361 adapted to the first groove portion 351. The first groove portion 351 has a first mounting hole, and the second groove portion 361 has a second mounting hole. The first hinge member 5 passes through the first mounting hole and the second mounting hole in sequence to connect the first clamping block 35 and the second clamping block 36. The first hinge member 5 forms a hinge point, which realizes the stability and synchronization of the relative movement between the first clamping block 35 and the second clamping block 36, so that the hinge point can not only ensure the effective opening and closing of the clamping blocks, but also provide sufficient clamping force when closed.

[0027] Based on the above structure, when the first clamping block 35 and the second clamping block 36 are closed, the first groove 351 and the second groove 361 can mate without interfering with the closing action. This helps to firmly clamp the item to be cleaned (such as the clamp 2 containing the germanium wafer 4) and ensures that it will not slip or fall off during the cleaning process. In this embodiment, the first hinge 5 passes through the first clamping block 35 and the second clamping block 36 and is fixed to the mounting plate 31, which improves the strength of the linkage mechanism and prevents deformation due to the excessive length of the linkage mechanism.

[0028] Understandably, the cross structure enhances the strength of the entire cleaning fixture 3, and the forward placement of the first and second mounting holes allows for a longer power arm, requiring less effort and increasing the clamping force of the first clamping block 35 and the second clamping block 36.

[0029] Furthermore, the first clamping block 35 includes a first connecting portion 352, a second connecting portion 353, and a third connecting portion 354. The first connecting portion 352, the second connecting portion 353, and the third connecting portion 354 are connected sequentially to form a three-dimensional structure resembling an "L" shape with a horizontal line. The first connecting portion 352 and the second connecting portion 353 are perpendicularly arranged to form a first right angle, and the second connecting portion 353 and the third connecting portion 354 are perpendicularly arranged to form a second right angle. The connection points of the first connecting portion 352 and the second connecting portion 353, the second connecting portion 353, and the second connecting portion 354 are also perpendicular to each other. The third connecting part 354 is recessed at the connection point to form the first groove 351 of the first clamping block 35, providing clearance space for the opening and closing action of the second clamping block 36. The first mounting hole is formed at the second connecting part 353 for mounting the first hinge 5, so that the first clamping block 35 can be connected to the second clamping block 36 in a hinged manner to realize the relative movement of the two. The second connecting part 353 and the second groove 361 are spaced apart in the first direction. When the two clamping blocks close or open, there is enough space between them to move, avoiding interference with their opening and closing action.

[0030] This embodiment increases the movement space during clamping by using the first groove portion 351, thus avoiding interference with its opening and closing action. It should be noted that the first direction is along the length direction of the first connecting portion 352.

[0031] Furthermore, the second clamping block 36 includes a fourth connecting portion 362, a fifth connecting portion 363, and a sixth connecting portion 364. These three portions are connected sequentially to form a three-dimensional structure resembling an "L" shape with a horizontal line. The fourth connecting portion 362 and the fifth connecting portion 363 are perpendicular to each other, forming a first right angle; the fifth connecting portion 363 and the sixth connecting portion 364 are perpendicular to each other, forming a second right angle. The connection points between the fourth connecting portion 362 and the fifth connecting portion 363, and between the fifth connecting portion 363 and... The sixth connecting part 364 is recessed at the connection point to form the second groove 361 of the second clamping block 36, providing clearance space for the opening and closing action of the first clamping block 35. The second mounting hole is formed at the fifth connecting part 363 for mounting the first hinge 5, so that the second clamping block 36 can be connected to the first clamping block 35 in a hinged manner to realize the relative movement between the two. The fifth connecting part 363 and the first groove 351 are spaced apart in the first direction, so that when the two clamping blocks close or open, there is enough space between them to move, avoiding interference with their opening and closing action.

[0032] This embodiment increases the movement space during clamping by using the cooperation between the second groove 361 and the first groove 351, avoiding interference with their opening and closing actions. When the first clamping block 35 and the second clamping block 36 are closed, the first groove 351 and the second groove 361 can align without interfering with the closing action, which helps to firmly clamp the item to be cleaned (such as the clamp 2 containing the germanium wafer 4) and ensures that it will not slip or fall off during the cleaning process. In addition, the cooperation between the second mounting hole and the first mounting hole allows the second clamping block 36 and the first clamping block 35 to be precisely connected together by the first hinge 5, ensuring the synchronicity and accuracy of the two during the opening and closing process, thereby ensuring the consistency of each operation and solving the consistency problem that is difficult to guarantee with manual operation.

[0033] Furthermore, the mounting plate 31 has a mating hole 311 for connecting with the robotic arm 1. This mating hole 311 allows the mounting plate 31 to be securely fixed to the robotic arm 1, ensuring that it will not loosen or shift during various operations (such as movement, rotation, etc.).

[0034] Furthermore, it also includes a second hinge member 6. The first connecting rod 33 includes a first base 331. A first mounting groove is recessed on one side of the first base 331 to provide a mounting position for the first clamping block 35. A third mounting hole communicating with the first mounting groove is opened on the other side of the first base 331. The first clamping block 35 has a fourth mounting hole. One end of the first clamping block 35 is installed in the first mounting groove. The second hinge member 6 passes through the third mounting hole and the fourth mounting hole in sequence to connect the first clamping block 35 and the first connecting rod 33, ensuring that no unnecessary displacement or loosening occurs during operation, so that the two can rotate around the axis of the second hinge member 6.

[0035] In this embodiment, the first connecting rod 33 and the first clamping block 35 are connected by the second hinge 6, so that the clamping block can be opened and closed as needed. In addition, the hinge structure provides a stable mounting point for the first clamping block 35 and increases the stability of the overall structure by limiting its range of movement, preventing accidental sliding or falling off during operation.

[0036] Furthermore, it also includes a third hinge 7. The second connecting rod 34 includes a second base 341. A second mounting groove 342 is recessed on one side of the second base 341 to provide a mounting position for the second clamping block 36. A fifth mounting hole communicating with the second mounting groove 342 is opened on the other side of the second base 341. The second clamping block 36 has a sixth mounting hole. One end of the second clamping block 36 is mounted in the second mounting groove 342. The third hinge 7 passes through the fifth mounting hole and the sixth mounting hole in sequence to connect the second clamping block 36 and the second connecting rod 34, ensuring that no unnecessary displacement or loosening occurs during operation, so that the two can rotate around the axis of the third hinge 7.

[0037] In this embodiment, the second link 34 and the second clamping block 36 are connected by the third hinge 7, so that the clamping block can be opened and closed as needed. In addition, the hinge structure provides a stable mounting point for the second clamping block 36 and increases the stability of the overall structure by limiting its range of movement, preventing accidental slippage or detachment during operation.

[0038] Furthermore, the driving component 32 is a finger cylinder, which uses compressed air as a power source. It can quickly respond to control signals to complete the clamping and releasing actions, and can also finely adjust the opening and closing distance and force. The finger cylinder can provide a highly consistent clamping force, ensuring consistency in each cleaning process. Understandably, the slots at the bottom of the first connecting rod 33 and the second connecting rod 34 are respectively connected and fixed to the left and right sliders of the finger cylinder by screws. The opening and closing of the finger cylinder drives the opening and closing of the first connecting rod 33 and the second connecting rod 34.

[0039] Furthermore, the clamp 2 includes a connecting part 21 and a mounting part 22. The connecting part 21 is used for clamping the first clamping block 35 and the second clamping block 36, ensuring that the clamp 2 can move and be positioned. The connecting part 21 is connected to the mounting part 22. The mounting part 22 is used to fix the part to be cleaned (germanium wafer 4). The mounting part 22 is provided with a plurality of hook parts 23. The plurality of hook parts 23 are spaced apart at one end of the mounting part 22 away from the connecting part 21 to provide points for mounting and fixing the germanium wafer 4, ensuring that the wafer can be firmly held in the predetermined position, while facilitating loading and unloading.

[0040] In this embodiment, by providing multiple hooks 23 in the mounting section 22, the germanium wafer 4 can be fixed, ensuring a secure hold while reducing pressure and potential damage to the surface of the germanium wafer 4. Furthermore, the multiple hooks 23 allow for quick installation and removal of the wafer, simplifying the operation process and improving work efficiency.

[0041] Furthermore, the end of the connecting part 21 away from the mounting part 22 is bent to form a hook-shaped structure 24. That is, this end is bent inward to form a hook-like shape, which can be better hung on a hook or slot to place the clip 2 after use.

[0042] In summary, this utility model embodiment provides a cleaning device in which the first connecting rod 33, the second connecting rod 34, the first clamping block 35, and the second clamping block 36 form a linkage structure. When the driving member 32 is working, it will cause the first connecting rod 33 and the second connecting rod 34 to move, thereby causing the first clamping block 35 and the second clamping block 36 to perform the action of clamping or releasing the clamp 2. The device can be placed in acid or alkaline solution for shaking and cleaning, which can improve working conditions. This embodiment replaces manual operation by automatically controlling the opening and closing of the cross-shaped clamping blocks, which not only reduces the risk of employees being exposed to harmful chemicals, but also improves the consistency of operation, achieves better cleaning effect, and helps to improve product quality.

[0043] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of the present utility model, and these improvements and substitutions should also be considered within the protection scope of the present utility model.

Claims

1. A cleaning device, characterized in that, The utility model provides a cleaning device, including mechanical arm, the clamp for placing the part to be cleaned and cleaning clamp, the cleaning clamp includes mounting plate, driving part, first connecting rod, second connecting rod, first clamping block and second clamping block, the mounting plate is connected with the mechanical arm, driving part, first connecting rod, second connecting rod, first clamping block and second clamping block are all installed to the mounting plate, the first connecting rod is hinged with the first clamping block, the second connecting rod is hinged with the second clamping block, the first clamping block is hinged with the second clamping block, and the driving part is connected with the first connecting rod, second connecting rod to drive the first clamping block and the second clamping block clamp or loosen the clamp.

2. The cleaning apparatus according to claim 1, wherein Also including first hinging piece, the first clamping block has first recess portion, the second clamping block has second recess portion matched with the first recess portion, the first recess portion has first mounting hole, the second recess portion has second mounting hole, the first hinging piece passes through the first mounting hole and the second mounting hole in turn to connect the first clamping block and the second clamping block.

3. The cleaning apparatus of claim 2, wherein The first clamping block includes first connecting portion, second connecting portion and third connecting portion, the first connecting portion, second connecting portion and third connecting portion are connected in turn, and the first connecting portion and the second connecting portion are arranged vertically, the second connecting portion and the third connecting portion are arranged vertically, the connection of the first connecting portion and the second connecting portion, the second connecting portion and the connection of the second connecting portion and the third connecting portion are recessed to form the first recess portion of the first clamping block, the first mounting hole is formed at the second connecting portion, and the second connecting portion and the second recess portion have a spacing in the first direction.

4. The cleaning apparatus of claim 2, wherein The second clamping block includes fourth connecting portion, fifth connecting portion and sixth connecting portion, the fourth connecting portion, fifth connecting portion and sixth connecting portion are connected in turn, and the fourth connecting portion and the fifth connecting portion are arranged vertically, the fifth connecting portion and the sixth connecting portion are arranged vertically, the connection of the fourth connecting portion and the fifth connecting portion, the fifth connecting portion and the connection of the fifth connecting portion and the sixth connecting portion are recessed to form the second recess portion of the second clamping block, the second mounting hole is formed at the fifth connecting portion, and the fifth connecting portion and the first recess portion have a spacing in the first direction.

5. The cleaning apparatus of claim 1, wherein The mounting plate has a matching hole connected with the mechanical arm.

6. The cleaning apparatus of claim 1, wherein Also including second hinging piece, the first connecting rod includes first base, the first base is recessed on one side to form first mounting slot, and the first base is provided with third mounting hole communicated with the first mounting slot on the other side, the first clamping block has fourth mounting hole, one end of the first clamping block is installed in the first mounting slot, and the second hinging piece passes through the third mounting hole and the fourth mounting hole in turn to connect the first clamping block and the first connecting rod.

7. The cleaning apparatus of claim 1, wherein The third hinge is arranged between the second clamping block and the second connecting rod.

8. The cleaning apparatus of claim 1, wherein The clip comprises a connecting portion and a mounting portion, the connecting portion is connected with the mounting portion, and the mounting portion is provided with a plurality of hook portions, the plurality of hook portions are arranged at an end of the mounting portion away from the connecting portion.

9. The cleaning apparatus of claim 8, wherein, The end of the connecting portion away from the mounting portion is bent to form a hook structure.

10. The cleaning apparatus of claim 1, wherein The driving member is a finger air cylinder.

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