Automatic carrying device

Abstract

The utility model discloses an automatic carrying device which comprises an automatic guiding carrier, a positioning jig, a mechanical arm, a material taking assembly and a visual positioning assembly, the positioning jig and the mechanical arm are both arranged on the automatic guiding carrier, and the material taking assembly is arranged at the driving end of the mechanical arm. In the crystal ingot carrying process, a to-be-carried crystal ingot can be positioned through the visual positioning assembly, the material taking assembly is made to be aligned with and pick up the to-be-carried crystal ingot under driving of the mechanical arm, then the crystal ingot is placed in the positioning jig through the mechanical arm, and then the automatic guiding carrier automatically moves to the needed position. The automatic guiding carrier expands the working range of the mechanical arm and the material taking assembly, so that automatic carrying of the crystal ingots is achieved, and the carrying efficiency is effectively improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor processing, especially relates to an automatic handling device. BACKGROUND

[0002] At present, in the processing of semiconductor ingot, the handling of ingot is basically relied on manual operation. When handling, the staff handles the ingot in the ingot incoming area to the trolley, then manually pushes or operates the trolley, so that the trolley moves to the ingot processing area, and then manually feeds the ingot to the required position. Since the handling link often needs manual participation, and the speed of manual operation is slow, the overall handling efficiency is low. SUMMARY

[0003] In view of the above deficiencies of the prior art, the present application provides an automatic handling device, which can improve the handling efficiency of the ingot.

[0004] The embodiment adopts the following technical solutions:

[0005] An automatic handling device comprises:

[0006] An automatic guided vehicle;

[0007] A positioning jig is arranged on the automatic guided vehicle and used for placing the ingot;

[0008] A manipulator is arranged on the automatic guided vehicle;

[0009] A material taking assembly is arranged on the driving end of the manipulator and used for taking and placing the ingot; and

[0010] A visual positioning assembly is used for visually positioning the ingot.

[0011] Further, in the automatic handling device, the positioning jig comprises a profiled limiting piece, the profiled limiting piece is provided with a limiting slot, the limiting slot comprises a first positioning slot and a second positioning slot, the ingot comprises a main body part and a feature part, the shape of the first positioning slot is matched with the shape of the main body part, and the shape of the second positioning slot is matched with the shape of the feature part.

[0012] Further, in the automatic handling device, the number of the profiled limiting piece is one, the profiled limiting piece is provided with multiple limiting slots, and the sizes and bearing heights of the multiple limiting slots are different.

[0013] Furthermore, in the automatic conveying device, there are multiple contouring limiting members. Some contouring limiting members have multiple first positioning grooves with different sizes and bearing heights. Other contouring limiting members have multiple second positioning grooves with different sizes and bearing heights. The crystal ingot can be accommodated in the first and second positioning grooves with the same bearing height.

[0014] Furthermore, in the automatic conveying device, a plurality of the contouring limiting members are spaced apart on the automatic guide carrier. The bearing height of the first positioning groove and the bearing height of the second positioning groove are both higher than the bottom surface height of the contouring limiting members, so that when the crystal ingot is placed in the first positioning groove and the second positioning groove, part of the crystal ingot is suspended in the air.

[0015] Furthermore, the automatic conveying device also includes a proximity sensor, which is disposed between multiple contour-following limiting members, and the sensing direction of the proximity sensor is towards the suspended portion of the ingot.

[0016] Furthermore, in the automated handling device, the material handling component includes a tray with a plurality of first suction cups, the positioning fixture is used to carry the crystal ingot and expose the bottom of the crystal ingot, and the robotic arm is used to drive the tray to move from the side of the crystal ingot to below the crystal ingot and lift the crystal ingot from the bottom.

[0017] Furthermore, in the automated handling device, the material handling component includes a first drive component and a claw. The first drive component is disposed at the drive end of the robot arm, and there are multiple claws disposed at the drive end of the first drive component. The positioning fixture is used to carry the crystal ingot and expose the bottom of the crystal ingot. The first drive component is used to drive the multiple claws to move in a centered manner, so that the claws move from the side of the crystal ingot to below the crystal ingot, and the robot arm drives the claws to lift the crystal ingot from the bottom.

[0018] Furthermore, in the automatic handling device, the material handling component includes a suction cup mounting base and a plurality of second suction cups. The suction cup mounting base is disposed on the drive end of the robot arm, and the plurality of second suction cups are disposed on the suction cup mounting base. The robot arm is used to drive the suction cup mounting base to move, so that the plurality of second suction cups contact the surface of the crystal ingot and pick up the crystal ingot.

[0019] Furthermore, in the automatic handling device, the material handling assembly further includes a second drive assembly, a third drive assembly, and a bottom support. The second drive assembly and the third drive assembly are both disposed at the drive end of the robot arm. The suction cup mounting seat is disposed at the drive end of the second drive assembly. The second drive assembly is used to drive the suction cup mounting seat to move toward the surface of the crystal ingot and to make the second suction cup adhere to the crystal ingot. There are multiple bottom supports. The third drive assembly is used to drive the multiple bottom supports to move in a centered manner, so that the multiple bottom supports move from the side of the crystal ingot to below the crystal ingot.

[0020] Compared to existing technologies, the automatic handling device provided in this application can position the crystal ingot to be handled through a vision positioning component during the handling process. This allows the picking component to align and pick up the crystal ingot under the drive of the robotic arm. The robotic arm then places the crystal ingot into a positioning fixture. Subsequently, the automatic guide carrier automatically moves to the required position, and the robotic arm loads the crystal ingot. The automatic guide carrier expands the working range of the robotic arm and the picking component, thereby realizing the automatic handling of crystal ingots and effectively improving handling efficiency. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the overall structure of a specific embodiment of the automated handling device provided in this application.

[0022] Figure 2 for Figure 1 The diagram shows the structure of the positioning fixture in the automated handling device.

[0023] Figure 3 This is a schematic diagram of the structure of a certain embodiment of a crystal ingot.

[0024] Figure 4 for Figure 1 The diagram shows a schematic representation of the material handling component in Embodiment 1 of the automated conveying device.

[0025] Figure 5 for Figure 4 A schematic diagram of the material handling component from another angle.

[0026] Figure 6 for Figure 1 The diagram shows the structure of the material handling component in Embodiment 2 of the automatic handling device.

[0027] Figure 7 for Figure 6 A schematic diagram of the internal structure of the material handling component.

[0028] Figure 8 for Figure 1 The diagram shows the structure of the material handling component in Embodiment 3 of the automatic handling device.

[0029] Figure 9 for Figure 8 Side view of the material handling component.

[0030] Among them, 10 is an automatic guiding carrier; 20 is a positioning fixture; 21 is a contouring limiting component; 211 is a first positioning groove; 212 is a second positioning groove; 22 is a proximity sensor; 23 is a base plate; 30 is a robotic arm; 40 is a material handling assembly; 41 is a tray; 42 is a first suction cup; 43 is a first drive assembly; 431 is a first bracket; 432 is a motor; 433 is a bevel gear assembly; 434 is a lead screw assembly; 435 is a synchronous belt assembly; 44 is a claw; 45 is a suction cup mounting base; 46 is a second suction cup; 47 is a second drive assembly; 48 is a third drive assembly; 49 is a bottom support component; 50 is a vision positioning assembly; 100 is a crystal ingot; 110 is a main body; and 120 is a feature part. Detailed Implementation

[0031] To make the objectives, technical solutions, and effects of this application clearer and more explicit, the following detailed description of this application is provided with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only for explaining this application and are not intended to limit this application. Unless further described, elements, structures, and features in one embodiment may be advantageously combined with other embodiments.

[0032] It should be noted that when a metastructure is referred to as "fixed to" or "set on" another metastructure, it can be directly on or indirectly on that other metastructure. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated.

[0033] The terms “length”, “width”, “upper”, “lower”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inner”, “outer”, etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation.

[0034] Please see Figure 1 The automatic handling device provided in this application includes an automatic guide carrier 10, a positioning fixture 20, a robot arm 30, a material handling component 40, and a vision positioning component 50. The positioning fixture 20 and the robot arm 30 are both mounted on the automatic guide carrier 10, and the material handling component 40 is mounted on the drive end of the robot arm 30.

[0035] The automated guided carrier 10 can realize the function of automated guided movement; the picking component 40 is used to pick up the crystal ingot 100 to be transported; the vision positioning component 50 is used to perform visual positioning of the crystal ingot 100 to be picked up; the robot arm 30 is used to drive the picking component 40 and the vision positioning component 50 to move; and the positioning fixture 20 is used to place the crystal ingot 100 to be transported.

[0036] Suppose that ingot 100 needs to be moved from a first position to a second position. During the handling process, the visual positioning component 50 first positions the ingot 100 to be moved at the first position. The picking component 40, driven by the robot arm 30, aligns with and picks up the ingot 100 to be moved. Then, the robot arm 30 drives the picking component 40 to move and place the ingot 100 in the positioning fixture 20. Subsequently, the automatic guide carrier 10 automatically moves to the second position, and the robot arm 30 drives the picking component 40 to pick up the ingot 100 in the positioning fixture 20 again and place it in the second position.

[0037] Therefore, the automatic handling device expands the working range of the robot arm 30 and the material handling component 40, and can automatically handle the crystal ingot 100 and perform loading / unloading according to actual needs. Moreover, it is accurate in positioning, convenient and reliable, and can effectively improve handling efficiency.

[0038] The automated guided vehicle 10 can be an automated guided vehicle (AGV) or other types of intelligent vehicles, such as smart cars or drones.

[0039] The visual positioning component 50 can be a camera, which can be installed on the robot arm 30, the automated guided vehicle 10 or other suitable locations as needed.

[0040] In some embodiments, the automated guided vehicle 10 is powered by a motor, which controls the steering and movement / stopping of the automated guided vehicle 10. The automated guided vehicle 10 is equipped with vision and position sensors, which makes the automated guided vehicle 10 safe, reliable and accurate in positioning. The upper part of the automated guided vehicle 10 is equipped with a safety door lock, an emergency stop switch, a display, operation buttons, an electrical control box and warning lights, and can automatically recharge after the work is completed, so that the automated guided vehicle 10 is always in a working state.

[0041] When the crystal ingot 100 to be transported is placed on the positioning fixture 20, the crystal ingot 100 can be limited by clamping, locking or other means to prevent the crystal ingot 100 from shifting position during the movement of the automatic guide carrier 10.

[0042] In addition to the clamping and locking methods mentioned above for limiting the position of ingot 100, a contour-following limiting method can also be used to limit the position of the ingot to prevent it from shifting during handling. For details, please refer to [link to relevant documentation]. Figure 2In some embodiments, the positioning fixture 20 includes a contouring limiting member 21, which has a limiting groove, including a first positioning groove 211 and a second positioning groove 212.

[0043] Please see Figure 3 The ingot 100 is usually cylindrical. According to the characteristics of the ingot 100, it is necessary to determine the orientation of the ingot's net surface (C-surface). Therefore, the ingot 100 can be divided into a main body 110 and a feature part 120. The side of the main body 110 is an arc surface, and the side of the feature part 120 is a cut surface, a groove, or other shape. The shape of the first positioning groove 211 matches the shape of the main body 110, and the shape of the second positioning groove 212 matches the shape of the feature part 120, so as to determine the orientation of the ingot 100 while limiting the ingot 100.

[0044] In some embodiments, the number of contouring limiting members 21 is set to one. Multiple limiting grooves of different heights can be formed on the contouring limiting member, and each limiting groove has a different size, so that the contouring limiting member 21 can position crystal ingots 100 of different sizes through multiple limiting grooves respectively.

[0045] In other embodiments, the number of contouring limiting members 21 is set to multiple (two or more), so that multiple contouring limiting members 21 can limit the ingot 100 from different directions, thereby reducing the size of a single contouring limiting member 21. Multiple limiting grooves can also be formed on each contouring limiting member 21, and the limiting grooves of different heights have different sizes, so as to limit the ingot 100 of different sizes.

[0046] For example, there are three contouring limiting members 21, each with two limiting grooves. Specifically, the first contouring limiting member 21 has two first positioning grooves 211, the second contouring limiting member 21 also has two first positioning grooves 211, and the third contouring limiting member 21 has two second positioning grooves 212. The two first positioning grooves 211 and one second positioning groove 212 are located at the first bearing height, while the other two first positioning grooves 211 and the other second positioning groove 212 are located at the second bearing height.

[0047] At this time, the small-sized crystal ingot 100 can be placed in the limiting groove located at the first bearing height; the large-sized crystal ingot 100 can be placed in the limiting groove located at the second bearing height.

[0048] In some embodiments, each contouring limiting member 21 is spaced apart on the automatic guide carrier 10, and the bearing height of the first positioning groove 211 and the bearing height of the second positioning groove 212 are both higher than the bottom surface height of the contouring limiting member 21.

[0049] When the crystal ingot 100 is placed in the first positioning groove 211 and the second positioning groove 212 at the same height, the bottom of the crystal ingot 100 will be a certain distance away from the bottom of the contouring limiting member 21, allowing the bottom of the crystal ingot 100 to be suspended. The material picking component 40 can enter from the gap between adjacent contouring limiting members 21 to the bottom of the crystal ingot 100, making it convenient for the material picking component 40 to pick up the crystal ingot 100 from the bottom.

[0050] In some embodiments, the positioning fixture 20 further includes a proximity sensor 22 disposed between a plurality of contouring limiting members 21, with the sensing end of the proximity sensor 22 facing the suspended portion of the ingot.

[0051] Since multiple contour-following limiting components 21 are spaced apart, and the crystal ingot 100 is suspended when placed in the first positioning groove 211 and the second positioning groove 212, there will be a certain space below the crystal ingot 100. Installing the proximity sensor 22 in this space not only improves the utilization rate of the space, but also senses and confirms whether the crystal ingot 100 exists in the first positioning groove 211 and the second positioning groove 212, thereby improving the accuracy of automated handling.

[0052] Furthermore, the positioning fixture 20 may also include a base plate 23, with the contour limiting member 21 and the proximity sensor 22 all disposed on the base plate 23, so that the positioning fixture 20 forms a whole, which facilitates the setting of multiple sets of positioning fixtures 20, and the number of positioning fixtures 20 can be increased or decreased as needed.

[0053] The robotic arm 30 can move the material handling component 40 to the required position by means of extension, rotation, and lifting. Depending on the actual needs, a robotic arm with appropriate degrees of freedom, such as a five-axis robotic arm or a six-axis robotic arm, can be selected to flexibly accommodate the handling of ingots of various sizes and positions, ensuring reliable handling accuracy.

[0054] Depending on the application scenario, the material handling component 40 can pick up and place the crystal ingot 100 by means of gripping, clamping, sucking, or holding, and can be set into corresponding gripping structure, clamping structure, sucking structure or holding structure.

[0055] Please see Figure 4 and Figure 5 In some embodiments, the material handling assembly 40 includes a tray 41 on which a plurality of first suction cups 42 are provided.

[0056] At this point, a suitable positioning fixture 20 needs to be selected so that the positioning fixture 20 can support the crystal ingot 100 and expose the bottom of the crystal ingot 100. The tray 41 is designed to fit the structure of the positioning fixture 20, such as a harpoon shape, so that it can be inserted into the positioning fixture 20.

[0057] During the process of picking up and placing the crystal ingot 100, the robotic arm 30 can drive the tray 41 to move from the side of the crystal ingot 100 to below the crystal ingot 100, lift the crystal ingot 100 from the bottom, and then use the first suction cup 42 to hold the crystal ingot 100 to prevent the crystal ingot 100 from shaking and falling off during the movement.

[0058] Please see Figure 6 and Figure 7 In some embodiments, the material handling component 40 includes a first drive component 43 and a claw 44. The first drive component 43 is disposed at the drive end of the robot arm 30, and the number of claws 44 is multiple (two or more), with the claws 44 disposed at the drive end of the first drive component 43.

[0059] At this point, a suitable positioning fixture 20 needs to be selected so that it can support the crystal ingot 100 and expose the bottom of the crystal ingot 100. During the process of picking up and placing the crystal ingot 100, the first drive assembly 43 can move multiple claws 44 in a centered position, so that the multiple claws 44 move from the outside of the crystal ingot 100 to below the crystal ingot 100. Then, the robot arm 30 drives the multiple claws 44 to move upward, so that the multiple claws 44 simultaneously lift the crystal ingot 100. The multiple claws 44 surround the side of the crystal ingot 100, which can limit the crystal ingot 100 to prevent it from shaking and falling off during movement.

[0060] Furthermore, the first drive assembly 43 includes a first bracket 431, a motor 432, a bevel gear assembly 433, and a lead screw assembly 434. The first bracket 431 is disposed on the drive end of the robot arm 30. The motor 432, the bevel gear assembly 433, and the lead screw assembly 434 are all disposed on the first bracket 431. The number of lead screw assemblies 434 is the same as the number of claws 44. The claws 44 are disposed on the drive end of the corresponding lead screw assembly 434. The motor 432 is connected to the lead screw assembly 434 through the bevel gear assembly 433.

[0061] The bevel gear assembly 433 transmits the power of the motor 432 to multiple lead screw assemblies 434 simultaneously. Each lead screw drive assembly then drives the corresponding claw 44 to move, causing the multiple claws 44 to move simultaneously and move closer to or further away from each other, thereby supporting or releasing the ingot 100. The lead screw assembly 434 is located above the ingot 100, allowing the claws 44 to pass through the side of the ingot 100 and extend below the ingot 100 through bending.

[0062] The bevel gear assembly 433 may include a driving bevel gear and multiple driven bevel gears. The driving bevel gear is mounted on the rotating shaft of the motor 432, and the driven bevel gears are mounted on the corresponding lead screw assembly 434. Each driven bevel gear meshes with the driving bevel gear. The motor 432 can drive multiple driven bevel gears to rotate simultaneously through the driving bevel gear, thereby causing the corresponding lead screw to rotate and drive the pawl 44 to move.

[0063] Furthermore, the first drive assembly 43 may also include a timing belt assembly 435, one end of which is disposed on the shaft of the motor 432 and the other end is disposed on the drive bevel gear. The motor 432 can drive the drive bevel gear to rotate through the timing belt assembly 435, so as to flexibly set the position of the motor 432.

[0064] Please see Figure 8 and Figure 9 In some embodiments, the material handling assembly 40 includes a suction cup mounting base 45 and a plurality of second suction cups 46. The suction cup mounting base 45 is disposed on the drive end of the robot arm 30, and the plurality of second suction cups 46 are disposed on the suction cup mounting base 45.

[0065] During the process of picking up and placing the crystal ingot 100, the robotic arm 30 can drive the suction cup mounting base 45 to move, so that multiple second suction cups 46 contact the surface of the crystal ingot 100 and pick up the crystal ingot 100 to complete the material picking. The second suction cups 46 can be ordinary accordion-type suction cups, ceramic suction cups or other types of suction cups, and the number is set to multiple, which are evenly distributed on the bottom of the suction cup mounting base 45.

[0066] Furthermore, the material handling component 40 may also include a second drive component 47, which is disposed at the drive end of the robot arm 30, and the suction cup mounting base 45 is disposed at the drive end of the second drive component 47.

[0067] During the process of picking up and placing the crystal ingot 100, the second drive component 47 can drive the suction cup mounting base 45 to move toward the surface of the crystal ingot 100, ensuring that the second suction cup 46 can stick tightly to the surface of the crystal ingot 100 and guarantee the adsorption effect.

[0068] Specifically, the second drive assembly 47 may include a mounting bracket and a cylinder. The mounting bracket is disposed on the drive end of the robot arm 30, the cylinder is disposed on the mounting bracket, and the suction cup mounting seat 45 is slidably mounted on the mounting bracket, with the piston rod of the cylinder connected to the suction cup mounting seat 45. When the piston rod of the cylinder extends, it drives the suction cup mounting seat 45 to move toward the surface of the ingot 100, ensuring that the second suction cup 46 can adhere tightly to the surface of the ingot 100.

[0069] Of course, the second drive component 47 can also drive the suction cup mounting base 45 to move in other ways, such as linear module, gear and rack drive, etc.

[0070] Furthermore, the material handling component 40 may also include a third drive component 48 and a bottom support 49. The third drive component 48 may be disposed on the suction cup mounting base 45, and the bottom support 49 may be multiple and disposed at the drive end of the third drive component 48.

[0071] During the process of picking up and placing the crystal ingot 100, the third drive assembly 48 drives multiple bottom-holding components 49 to move in a centered position, moving them from the side to below the crystal ingot 100. When the suction cup malfunctions and fails to pick up the crystal ingot 100, the multiple bottom-holding components 49 can act as a bottom-holding component, allowing the crystal ingot 100 to fall onto the bottom-holding component 49 instead of dropping directly, thus preventing damage to the crystal ingot 100 or other equipment.

[0072] Specifically, the bottom support 49 can adopt a structure similar to the claw 44, extending from the top and side of the ingot 100 to the bottom of the ingot 100 through bending. The third drive assembly 48 may include multiple individual lead screw drive assemblies to drive multiple bottom supports 49 to move in a centered manner. Of course, other drive methods can also be used, such as linear modules, gear and rack drives, etc.

[0073] It is understood that those skilled in the art can make equivalent substitutions or changes based on the technical solution and concept of this application, and all such substitutions or changes should fall within the protection scope of the appended claims.

Claims

1. An automated handling device, characterized in that, The application relates to an automatic guided vehicle, a positioning jig arranged on the automatic guided vehicle and used for placing a crystal ingot, a mechanical arm arranged on the automatic guided vehicle, a material taking assembly arranged on a driving end of the mechanical arm and used for taking and placing the crystal ingot, and a visual positioning assembly used for positioning the crystal ingot. The positioning jig comprises a profiled limiting piece, the profiled limiting piece is provided with a limiting groove, the limiting groove comprises a first positioning groove and a second positioning groove, the crystal ingot comprises a main body part and a feature part, the shape of the first positioning groove is matched with the shape of the main body part, and the shape of the second positioning groove is matched with the shape of the feature part. The number of the profiled limiting pieces is one, the profiled limiting piece is provided with multiple limiting grooves, and the sizes and bearing heights of the multiple limiting grooves are different. The number of the profiled limiting pieces is multiple, a part of the profiled limiting pieces are provided with multiple first positioning grooves, the sizes and bearing heights of the multiple first positioning grooves are different, another part of the profiled limiting pieces are provided with multiple second positioning grooves, the sizes and bearing heights of the multiple second positioning grooves are different, and the crystal ingot can be accommodated in the first positioning grooves and the second positioning grooves with the same bearing height. The multiple profiled limiting pieces are arranged on the automatic guided vehicle, the bearing heights of the first positioning grooves and the second positioning grooves are higher than the bottom surface height of the profiled limiting pieces, so that when the crystal ingot is accommodated in the first positioning grooves and the second positioning grooves, a part of the crystal ingot is suspended. The application further comprises a proximity sensor, the proximity sensor is arranged between the multiple profiled limiting pieces, and the sensing direction of the proximity sensor is towards the suspended part of the crystal ingot.

2. The automated handling device of claim 1, wherein, The material taking assembly comprises a tray, the tray is provided with multiple first suction cups, the positioning jig is used for bearing the crystal ingot and exposing the bottom of the crystal ingot, and the mechanical arm is used for driving the tray to move from the side of the crystal ingot to the bottom of the crystal ingot and lifting the crystal ingot from the bottom.

3. The automated handling device of claim 2, wherein, The material taking assembly comprises a first driving assembly and a supporting claw, the first driving assembly is arranged on the driving end of the mechanical arm, the number of the supporting claws is multiple, the supporting claws are arranged on the driving end of the first driving assembly, the positioning jig is used for bearing the crystal ingot and exposing the bottom of the crystal ingot, the first driving assembly is used for driving the multiple supporting claws to move in the center, so that the supporting claws move from the side of the crystal ingot to the bottom of the crystal ingot, and the mechanical arm drives the supporting claws to lift the crystal ingot from the bottom.

4. The automated handling device of claim 2, wherein, The material taking assembly comprises a suction cup mounting base and multiple second suction cups, the suction cup mounting base is arranged on the driving end of the mechanical arm, the multiple second suction cups are arranged on the suction cup mounting base, and the mechanical arm is used for driving the suction cup mounting base to move, so that the multiple second suction cups contact the surface of the crystal ingot and suck the crystal ingot.

5. The automated handling device of claim 4, wherein, ​ 6. The automated handling device of claim 5, wherein, ​ 7. The automated handling device of claim 1, wherein, ​ 8. The automated handling device of claim 1, wherein, ​ 9. The automated carrier of claim 1, wherein, ​ 10. The automated handling device of claim 9, wherein, The material taking assembly further comprises a second driving assembly, a third driving assembly and a plurality of bottoming pieces, the second driving assembly and the third driving assembly are arranged at the driving end of the mechanical arm, the suction disc mounting seat is arranged at the driving end of the second driving assembly, the second driving assembly is used for driving the suction disc mounting seat to move towards the surface of the crystal ingot and make the second suction disc tightly contact the crystal ingot, the third driving assembly is used for driving the plurality of bottoming pieces to move in the center, and the plurality of bottoming pieces move from the side of the crystal ingot to the lower side of the crystal ingot.

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