Conductive mechanism for carrier plate of photovoltaic PVD (physical vapor deposition) equipment

Abstract

The utility model provides a photovoltaic PVD (Physical Vapor Deposition) equipment carrier plate conductive mechanism, which relates to the technical field of photovoltaic PVD manufacturing, and comprises a conductive base arranged on the side surface of a conveying mechanism and connected with a conductor to conduct electricity outwards; the bottoms of the supporting plates are connected with the conductive base, and the middle parts of the supporting plates are rotationally connected with a rotating shaft; the bottoms of the rotating plates are connected with the rotating shafts in a matched mode, and the tops of the rotating plates are rotationally connected with conductive wheels; the elastic reset mechanism is arranged on the rotating shaft, keeps the conductive wheel in a jacking state in a normal state, and is used for solving the problems that a film layer on a carrier plate is continuously increased after the carrier plate is produced for a long time, the conductive effect of the carrier plate becomes poor, electrons attached to the carrier plate cannot be timely led out, and the production efficiency is low after the carrier plate is conveyed through a conveying wheel in a cavity. And abnormal discharge of the chamber is inevitable.

Description

Technical Field

[0001] This utility model mainly relates to the field of photovoltaic PVD manufacturing technology, specifically to the conductive mechanism of the carrier plate of photovoltaic PVD equipment. Background Technology

[0002] Physical vapor deposition (PVD) is a technique that uses physical methods to vaporize a material source into gaseous atoms or molecules in a vacuum environment, and then deposits functional thin films on a substrate surface using low-pressure gas or plasma. PVD technology mainly includes vacuum evaporation deposition, vacuum sputtering deposition, and vacuum ion plating, specifically encompassing methods such as vacuum evaporation, sputtering deposition, arc plasma deposition, ion plating, and molecular beam epitaxy.

[0003] In the field of photovoltaic cell manufacturing, PVD vacuum coating equipment is one of the key production equipment. It typically employs magnetron sputtering or reactive plasma coating (RPD) technology to deposit transparent conductive oxide (TCO) films, such as indium tin oxide (ITO), on the front and back sides of amorphous silicon passivated heterojunction cells. The role of this film is to collect charge carriers longitudinally and transport them laterally to the electrodes, while reducing the reflection of incident light, thereby improving the photoelectric conversion efficiency of the cell.

[0004] In existing PVD coating processes, an automated wafer loading mechanism precisely places silicon wafers onto a PVD carrier, which then carries the wafers into the PVD equipment for coating. After the process is complete, the carrier is conveyed to the unloading area, where an automated unloading mechanism removes the wafers. The carrier then returns to the loading area via a transport mechanism to begin the next production cycle. However, the PVD process places extremely high demands on the grounding performance of the carrier. It is crucial to ensure that the carrier maintains good conductivity during magnetron sputtering to prevent arcing due to charge accumulation, which could negatively impact the coating quality of the silicon wafers.

[0005] In actual production, a large number of electrons are generated in the PVD chamber during magnetron sputtering, and some of these electrons adhere to the surface of the carrier substrate. If the carrier substrate is poorly grounded, the electrons cannot be discharged in time, leading to charge accumulation and subsequent arcing. This problem not only damages the uniformity of the thin film but also increases the defect rate of silicon wafers, even causing product rework or scrap, severely impacting production efficiency and cost control. Currently, carrier substrates are generally transported through conveyor wheels within the chamber. After prolonged production, the film layer on the carrier substrate continuously increases, and the conductivity of the carrier substrate deteriorates. Electrons adhering to the carrier substrate cannot be discharged in time, inevitably leading to abnormal chamber discharge. Therefore, there is an urgent need for a PVD carrier substrate structure that can optimize the grounding performance of the carrier substrate and effectively discharge charge to solve the silicon wafer coating quality problems caused by arcing in existing technologies.

[0006] It should be noted that the above content falls within the scope of the inventor's technical knowledge. Due to the vast and complex nature of the technical content in this field, the above content of this application does not necessarily constitute prior art. Utility Model Content

[0007] 1. The technical problem to be solved by the utility model:

[0008] This utility model provides a conductive mechanism for a photovoltaic PVD equipment carrier plate to solve the technical problems existing in the background art.

[0009] 2. Technical Solution:

[0010] To achieve the above objectives, the technical solution provided by this utility model is as follows: a conductive mechanism for a photovoltaic PVD equipment carrier plate, including a conductive base disposed on the side of the conveying mechanism and connected to a conductor to conduct electricity outward;

[0011] Symmetrically arranged support plates, the bottom of which is connected to the conductive base and the middle of which is rotatably connected to a rotating shaft;

[0012] A symmetrically arranged rotating plate, the bottom of which is matched and connected to the rotating shaft, and the top of which is rotatably connected to a conductive wheel;

[0013] An elastic reset mechanism, located on the rotating shaft, normally keeps the conductive wheel in a lifted state. This device is spaced apart on one side of the conveying mechanism inside the PVD equipment. When the carrier plate carrying the silicon wafer enters the PVD equipment, the bottom of the carrier plate touches the conductive wheel. Therefore, the conductive wheel tilts towards the exit direction under the pressure of the carrier plate, which in turn drives the support plate to tilt towards the exit direction. When the top plane of the conductive wheel is at the same level as the bottom plane of the conveying mechanism, the conductive wheel will have a continuous upward supporting force due to the action of the elastic reset mechanism, so that the conductive wheel continues to contact the bottom of the carrier plate, realizing the conductive operation of the carrier plate. When the carrier plate moves out of the conductive wheel, the conductive wheel returns to a vertical state under the action of the elastic reset mechanism. The conductive base can be connected to a wire or other conductive structures. Depending on the specific setup, the conductive base is made of copper alloy material, and its side is connected to a grounding wire for discharging charge outward.

[0014] Furthermore, it also includes a support base, which has multiple first connection holes. The first connection holes are bolted to the conductive base. A support vertical plate is connected to the side of the support base, and a mounting plate is connected to the bottom side of the support vertical plate. The mounting plate is detachably connected to the conveying mechanism.

[0015] Furthermore, the conveying mechanism is a roller conveyor, and the roller conveyor is provided with a concave support frame on its side, which is detachably connected to the mounting plate.

[0016] Furthermore, the supporting vertical plate is an E-shaped plate, and the top and bottom of the E-shaped plate are symmetrically provided with second connecting holes, which are connected to the mounting plate by bolts.

[0017] Furthermore, one end of the mounting plate has a third connecting hole, which is detachably connected to the second connecting hole. The other end of the mounting plate has a plug-in groove, and a fixing plate is provided on the top of the plug-in groove. A fourth connecting hole is provided on the fixing plate.

[0018] Furthermore, the elastic reset mechanism employs a torsion spring.

[0019] Furthermore, the torsion spring has bending strips at both ends, one end of which overlaps one end of the support plate, and the other end of which overlaps the other end of the support plate on the opposite side.

[0020] 3. Beneficial effects:

[0021] Compared with the prior art, the technical solution provided by this utility model has the following advantages:

[0022] This utility model is reasonably designed. The mechanism adopts a rolling contact method between the conductive wheel and the bottom of the carrier plate, which can ensure that the carrier plate continuously and stably discharges static electricity during the transportation process, effectively preventing the accumulation of charge from having an adverse effect on the PVD process.

[0023] The conductive base can be made of high-quality copper alloy material, and with the help of professional grounding wire, the reliability of static electricity discharge is further enhanced.

[0024] The unique elastic reset mechanism design enables the conductive roller to have an automatic adjustment function. When the carrier plate contacts, the conductive roller can adaptively tilt and maintain appropriate contact pressure; after the carrier plate passes, it can automatically return to its initial position. The entire process requires no manual intervention and can adapt to carrier plate thicknesses of different specifications.

[0025] The rolling contact method of the conductive wheel greatly reduces wear on the bottom of the carrier plate, and its adaptive height adjustment function enables the mechanism to be compatible with PVD equipment with different process requirements, significantly improving the versatility and applicability of the equipment.

[0026] It should be noted that the structures not described in this utility model are the same as or can be implemented using existing technology, and will not be elaborated here, as they do not involve the design points and improvement directions of this utility model. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the structure of this utility model;

[0028] Figure 2This is a structural diagram of the present invention when connected with the supporting vertical plate and the mounting plate;

[0029] Figure 3 This is a schematic diagram of the structure of the present invention when it is working inside a PVD device;

[0030] Figure 4 This is a schematic diagram of the structure of the carrier plate of this utility model pressing down on the conductive wheel;

[0031] Figure 5 This is a side view of the structure of the carrier plate of this utility model when it presses down on the conductive wheel;

[0032] Figure 6 This is a schematic diagram of the present invention installed on a concave support frame;

[0033] Figure 7 This is a side view of the structure of the present invention when connected with the supporting vertical plate and the mounting plate.

[0034] Figure label:

[0035] 1. Conductive base;

[0036] 2. Support plate;

[0037] 3. Rotation axis;

[0038] 4. Rotating plate;

[0039] 5. Conductive wheel;

[0040] 6. Flexible reset mechanism;

[0041] 7. Support base;

[0042] 71. Supporting vertical plates;

[0043] 72. Mounting plate;

[0044] 721. Third connecting hole;

[0045] 722. Insertion groove;

[0046] 723. Fixing plate;

[0047] 8. Roller conveyor;

[0048] 81. Concave support frame. Detailed Implementation

[0049] To facilitate understanding of this utility model, a more comprehensive description of the utility model will be given below with reference to the accompanying drawings, which show several embodiments of the utility model. However, the utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of the utility model will be more thorough and complete.

[0050] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "page", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0051] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0052] In this utility model, unless otherwise explicitly specified and limited, the terms "installed," "connected," "linked," "fixed," "provided with," and "located in" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0053] It should be noted that structures not described in this invention do not involve the design points and improvement directions of this invention, and can all be achieved using existing technologies known to those skilled in the art.

[0054] The specific implementation of the present invention will be described in detail below with reference to specific embodiments.

[0055] See attached document Figure 1-7 The conductive mechanism of the photovoltaic PVD equipment carrier includes a conductive base 1, which is located on the side of the conveying mechanism and is connected to a conductor to conduct electricity outward.

[0056] Symmetrically arranged support plates 2, the bottom of the support plates 2 is connected to the conductive base 1, and the middle part is rotatably connected to the rotating shaft 3;

[0057] A symmetrically arranged rotating plate 4, the bottom of the rotating plate 4 is matched and connected to the rotating shaft 3, and the top of the rotating plate 4 is rotatably connected to the conductive wheel 5;

[0058] An elastic reset mechanism 6 is located on the rotating shaft 3, which normally keeps the conductive wheel 5 in a lifted state. This device is spaced apart on one side of the conveying mechanism inside the PVD equipment. When the carrier plate carrying the silicon wafer enters the PVD equipment, the bottom of the carrier plate will touch the conductive wheel 5. Therefore, the conductive wheel 5 will tilt towards the outlet direction under the pressure of the carrier plate, which in turn will drive the support plate 2 to tilt towards the outlet direction. When the top plane of the conductive wheel 5 is at the same level as the bottom plane of the conveying mechanism, due to the action of the elastic reset mechanism 6, the conductive wheel 5 will have a continuous upward supporting force, so that the conductive wheel 5 will continue to contact the bottom of the carrier plate, realizing the conductive operation of the carrier plate. When the carrier plate moves out of the conductive wheel 5, the conductive wheel 5 will reset again to a vertical state under the action of the elastic reset mechanism 6. The conductive base 1 can be connected to a wire or other conductive structures. Depending on the specific configuration, the conductive base 1 is made of copper alloy material, and its side is connected to a grounding wire (not shown) for discharging charge outward.

[0059] It also includes a support base 7, which has multiple first connection holes. The first connection holes are bolted to the conductive base 1. The support base 7 has a support vertical plate 71 connected to its side. The support vertical plate 71 has a mounting plate 72 connected to its bottom side. The mounting plate 72 is detachably connected to the conveying mechanism. The support base 7, the support vertical plate 71, and the mounting plate 72 are all made of conductive materials. In order to facilitate the installation of the conductive base 1, the mounting plate 72 is first connected to the conveying mechanism, then the support vertical plate 71 is connected to the mounting plate 72, and finally the support base 7 is connected to the mounting plate 72, so that the rolling direction of the conductive wheel 5 is consistent with the conveying direction of the conveying mechanism.

[0060] The conveying mechanism employs a roller conveyor 8. The roller conveyor 8 has a concave support frame 81 on its side, which is detachably connected to the mounting plate 72. During installation, multiple mounting plates 72 are installed in the gap between two conveying rollers, ensuring that the conductive wheels 5 on the side can extend upwards a certain distance from between adjacent conveying rollers. The roller conveyor 8 is positioned at the bottom of the PVD equipment for conveying. Please refer to [the relevant documentation / reference]. Figure 4 and Figure 5 Conductive wheels 5 can be installed at intervals on both sides of the roller conveyor 8 at the bottom of the PVD equipment. When the carrier plate moves, it is placed on the edge and moves along the edge, thereby conducting electrical work through the electric wheels 5.

[0061] The supporting vertical plate 71 is an E-shaped plate. The top and bottom of the E-shaped plate are symmetrically provided with second connecting holes. The second connecting holes are connected to the mounting plate 72 by bolts. The groove position of the E-shaped plate facilitates the passage of the carrier plate. The overall structure facilitates detachable connection with the mounting plate 72 on the side surface, and also reduces the overall weight and saves manufacturing costs.

[0062] The mounting plate 72 has a third connecting hole 721 at one end, which is detachably connected to the second connecting hole. The other end of the mounting plate 72 has an insertion groove 722. A fixing plate 723 is provided on the top of the insertion groove 722. A fourth connecting hole is provided on the fixing plate 723. When installing the mounting plate 72, the insertion groove 722 of the mounting plate 72 is inserted into the bottom of the concave support frame 81, and then the screw is inserted into the fourth connecting hole to connect the fixing plate 723 with the concave support frame 81.

[0063] The elastic reset mechanism 6 uses a torsion spring, and the two ends of the torsion spring overlap with the support plate 2 to perform the reset operation of the conductive wheel 5.

[0064] The torsion spring has bending strips at both ends. One end of the bending strip overlaps one end of the support plate 2, and the other end of the bending strip overlaps the other end of the support plate 2 on the opposite side. Under the action of the torsion spring, the rotating plate 4 will drive the conductive wheel 5 to be in a lifting state at all times. When the carrier plate presses against the conductive wheel 5, the conductive wheel 5 will tilt towards the outlet direction. The conductive wheel 5 is in constant contact with the bottom of the carrier plate. When the carrier plate exits the conductive wheel 5, the conductive wheel 5 will be in a reset lifting state under the action of the bending strip of the torsion spring.

[0065] Working process description: When this device is working, the conductive wheel 5 is kept raised under the action of the torsion spring, forming a height difference with the conveyor roller. When the carrier plate moves to the position of the conductive wheel 5 with the conveying mechanism, the carrier plate presses down on the conductive wheel 5 to make it rotate by an angle θ = 15°-20°. The conductive wheel 5 conducts the static electricity of the carrier plate outward through rolling contact. After the carrier plate has completely passed, the torsion spring drive mechanism resets, ready for the next discharge operation.

[0066] The above-described embodiments are merely illustrative of certain implementations of this utility model, and their descriptions are relatively specific and detailed. However, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these modifications and improvements all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A photovoltaic (PVD) apparatus carrier plate conductive mechanism, characterized by: Comprising A conductive base (1) is arranged on the side of the conveying mechanism and connected with the conductor to conduct electricity outward; Symmetrically arranged support plates (2) are connected with the conductive base (1) at the bottom and rotatably connected with rotating shafts (3) at the middle; Symmetrically arranged rotating plates (4) are connected with the rotating shafts (3) at the bottom and rotatably connected with conductive wheels (5) at the top; An elastic reset mechanism (6) is arranged on the rotating shaft (3) and keeps the conductive wheel (5) in the jacking state under normal circumstances.

2. The photovoltaic (PVD) apparatus carrier board conductive mechanism of claim 1, wherein: It also comprises a support base (7) with a plurality of first connecting holes opened thereon, which are bolted with the conductive base (1); a support vertical plate (71) is connected with the side of the support base (7); an installation plate (72) is connected with one side of the bottom of the support vertical plate (71); and the installation plate (72) is detachably connected with the conveying mechanism.

3. The photovoltaic (PVD) apparatus carrier board conductive mechanism of claim 2, wherein: The conveying mechanism adopts a roller conveyor (8) with a concave support frame (81) arranged on the side thereof, which is detachably connected with the installation plate (72).

4. The photovoltaic (PVD) apparatus carrier board conductive mechanism of claim 2, wherein: The support vertical plate (71) adopts an E-shaped plate with second connecting holes symmetrically opened at the top and the bottom thereof, which are connected with the installation plate (72) by bolts.

5. The photovoltaic (PVD) apparatus carrier board conductive mechanism of claim 4, wherein: One end of the installation plate (72) is provided with a third connecting hole (721), which is detachably connected with the second connecting hole; and the other end of the installation plate (72) is provided with a plug-in groove (722) with a fixed plate (723) arranged at the top thereof, which is provided with a fourth connecting hole.

6. The photovoltaic (PVD) apparatus carrier board conductive mechanism of claim 1, wherein: The elastic reset mechanism (6) adopts a torsion spring.

7. The photovoltaic (PVD) apparatus carrier board conductive mechanism of claim 6, wherein: Both ends of the torsion spring are provided with bent strips, one end of one of the bent strips is overlapped with one end of the support plate (2), and the other end of the other bent strip is overlapped with the other end of the support plate (2) on the opposite side.

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