Optical sensor temperature control circuit and photoetching machine

Abstract

The utility model discloses an optical sensor temperature control circuit and a photoetching machine, and belongs to the technical field of temperature control. The optical sensor temperature control circuit comprises a temperature sensor and a cooling sheet which are respectively attached to different positions of the optical sensor; the cooling fin driving module is used for driving a cooling fin to cool the optical sensor according to a signal accessed by the control end of the cooling fin driving module; at least two feedback control modules; the feedback control module is connected with the output end of the temperature sensor and used for outputting a cooling control signal according to a temperature signal output by the temperature sensor; the jumper selection module comprises jumper units of which the number is the same as that of the feedback control modules; the first connecting ends of the jumper units are connected with the output ends of the feedback control modules in a one-to-one correspondence mode, and the second connecting ends of the jumper units are connected with the control end of the cooling fin driving module. The embodiment of the utility model can stabilize the temperature of the optical sensor, thereby improving the accuracy of the detection result of the optical sensor and improving the exposure effect.

Description

Technical Field

[0001] This utility model relates to the field of temperature control technology, and in particular to a photosensitive temperature control circuit and a photolithography machine. Background Technology

[0002] During the exposure process, a photolithography machine projects an exposure beam onto the photoresist of the target object (such as a silicon wafer) through an optical channel to form a photolithographic pattern. During exposure, a photosensitive sensor is used to collect the luminous flux of the exposure beam to measure the exposure dose and control the opening and closing of the shutter accordingly. However, the high intensity of the exposure beam during exposure can cause the photosensitive sensor to heat up, leading to phenomena such as dark current, which affects the accuracy of the sensor's detection results and consequently the exposure effect. Utility Model Content

[0003] This invention provides a photosensitive temperature control circuit and a photolithography machine to stabilize the temperature of the photosensitive sensor, thereby improving the accuracy of the photosensitive sensor detection results and thus improving the exposure effect.

[0004] In a first aspect, embodiments of the present invention provide a light sensor temperature control circuit, comprising:

[0005] Temperature sensor, attached to light sensor;

[0006] Cooling plates are attached to the temperature sensor at different locations on the light sensor;

[0007] A cooling plate driving module, connected to the cooling plate, is used to drive the cooling plate to cool the optical sensor according to the signal input to the control terminal of the cooling plate driving module;

[0008] At least two feedback control modules are provided; the feedback control modules are connected to the output terminal of the temperature sensor, and the feedback control modules are used to output cooling control signals based on the temperature signals output by the temperature sensor.

[0009] The jumper selection module includes the same number of jumper units as the feedback control module; the first connection terminal of each jumper unit is connected to the output terminal of each feedback control module, and the second connection terminal of each jumper unit is connected to the control terminal of the cooling plate drive module.

[0010] Optionally, the at least two of the feedback control modules include at least two of a first feedback control module, a second feedback control module, and a third feedback control module; the first feedback control module, the second feedback control module, and the third feedback control module have different circuit structures.

[0011] Optionally, the first feedback control module includes:

[0012] A sliding rheostat, wherein the first end of the sliding rheostat is connected to a first reference signal, and the second end of the sliding rheostat is connected to analog ground;

[0013] A first comparator has its first input terminal connected to the output terminal of the temperature sensor, its second input terminal connected to the sliding terminal of the variable resistor, and its output terminal connected to the output terminal of the first feedback control module.

[0014] Optionally, the first feedback control module further includes:

[0015] A first voltage follower is connected between the sliding end of the variable resistor and the second input end of the first comparator;

[0016] A first amplifier, wherein a first input terminal of the first amplifier is connected to a second reference signal, a second input terminal of the first amplifier is connected to the output terminal of the first comparator, and the output terminal of the first amplifier is connected to the output terminal of the first feedback control module;

[0017] The cooling plate driving module includes a cooling plate driving chip, and the reference signal output pin of the cooling plate driving chip is connected to the first terminal of the sliding rheostat and the first input terminal of the first amplifier, respectively; the reference voltage output by the reference signal output pin is multiplexed as the first reference signal and the second reference signal.

[0018] Optionally, the second feedback control module includes:

[0019] The main controller includes a first output terminal; the first output terminal outputs a digital reference signal for characterizing the target temperature.

[0020] A digital-to-analog converter; the input terminal of the digital-to-analog converter is connected to the first output terminal of the main controller;

[0021] The second comparator has its first input connected to the output of the digital-to-analog converter, its second input connected to the output of the temperature sensor, and its output connected to the output of the second feedback control module.

[0022] Optionally, the second feedback control module further includes:

[0023] A second voltage follower is connected between the output of the temperature sensor and the second input of the second comparator;

[0024] The second amplifier has a first input terminal connected to a third reference signal, a second input terminal connected to the output terminal of the second comparator, and an output terminal connected to the output terminal of the second feedback control module.

[0025] The cooling pad driving module includes a cooling pad driving chip, and the reference signal output pin of the cooling pad driving chip is connected to the first input terminal of the second amplifier; the reference voltage output by the reference signal output pin serves as the third reference signal.

[0026] Optionally, the third feedback control module includes:

[0027] A main controller, the input terminal of which is connected to the output terminal of the temperature sensor, is used to generate a first control signal based on the temperature signal and output it through the second output terminal of the main controller;

[0028] The filtering unit includes a first resistor and a first capacitor; the first resistor is connected between the second output terminal of the main controller and the output terminal of the third feedback control module, and the first capacitor is connected between the output terminal of the third feedback control module and analog ground.

[0029] Optionally, the temperature sensor includes: a negative temperature coefficient thermistor, the negative temperature coefficient thermistor being attached to the photosensitive sensor; a first terminal of the negative temperature coefficient thermistor being connected to a first power signal; and a second terminal of the negative temperature coefficient thermistor serving as the output terminal of the temperature sensor.

[0030] The optical sensor temperature control circuit further includes: a detection module, including a second resistor; a first end of the second resistor is connected to a second power supply signal, and a second end of the second resistor is connected to the second end of the negative temperature coefficient thermistor; wherein the voltage of the first power supply signal and the voltage of the second power supply signal are different.

[0031] Optionally, the cooling plate driving module includes:

[0032] The cooling pad driver chip includes a reference voltage output pin, a voltage configuration pin, a control pin, a first output pin, a second output pin, a current detection pin, an analog signal output pin, and a sleep control pin. The control pin serves as the control terminal of the cooling pad driver module, the first output pin and the second output pin together serve as the output terminal of the cooling pad driver module, and the analog signal output pin outputs an analog voltage signal related to the voltage of the first output pin and the voltage of the current detection pin.

[0033] A drive voltage configuration unit includes a third resistor and a fourth resistor; the first end of the third resistor is connected to the reference voltage output pin, the second end of the third resistor is connected to the first end of the fourth resistor and the voltage configuration pin respectively, and the second end of the fourth resistor is connected to analog ground;

[0034] A current detection unit includes a fifth resistor; the fifth resistor is connected between the first output pin and the current detection pin.

[0035] A level conversion unit is provided, wherein the input terminal of the level conversion unit is connected to the sleep control signal, and the output terminal of the level conversion unit is connected to the sleep control pin.

[0036] Secondly, this utility model embodiment also provides a lithography machine, including: a photosensitive sensor and a photosensitive sensor temperature control circuit provided in any embodiment of this utility model.

[0037] The photosensitive sensor temperature control circuit provided in this embodiment of the invention achieves closed-loop temperature control of the photosensitive sensor by setting up a temperature sensor, a cooling plate, a cooling plate driving module, and a feedback control module. This stabilizes the temperature of the photosensitive sensor and prevents temperature drift from affecting the accuracy of the data collected by the photosensitive sensor. Specifically, by directly attaching the temperature sensor to the photosensitive sensor, the temperature signal detected by the temperature sensor accurately represents the temperature of the photosensitive sensor. By directly attaching the cooling plate to the photosensitive sensor, the cooling effect of the cooling plate on the photosensitive sensor is guaranteed. Furthermore, by attaching the temperature sensor and the cooling plate to different positions, the cooling process of the cooling plate can be prevented from affecting the detection results of the temperature sensor. Moreover, by setting up at least two feedback control modules and connecting them to the cooling plate driving module through jumper selection modules, redundancy of the feedback control modules is achieved. If one feedback control module fails, another normal feedback control module can be switched, thereby improving circuit reliability. On the other hand, different feedback control modules can have different structures and be suitable for different scenarios, thus improving the applicability and flexibility of the circuit. In summary, this embodiment of the invention can stabilize the temperature of the photosensitive sensor, thereby improving the accuracy of the photosensitive sensor detection results and ultimately improving the exposure effect.

[0038] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of this utility model, nor is it intended to limit the scope of this utility model. Other features of this utility model will become readily apparent from the following description. Attached Figure Description

[0039] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0040] Figure 1 This is a schematic diagram of the structure of a light sensor temperature control circuit provided in an embodiment of this utility model;

[0041] Figure 2 This is a schematic diagram of another optical sensor temperature control circuit provided in this embodiment of the present invention;

[0042] Figure 3 This is a schematic diagram of the structure of a cooling plate driving module and a jumper selection module provided in an embodiment of this utility model;

[0043] Figure 4 This is a schematic diagram illustrating the connection relationship between a temperature sensor and a detection module provided in an embodiment of this utility model;

[0044] Figure 5 This is a schematic diagram of the structure of a first feedback control module provided in an embodiment of the present invention;

[0045] Figure 6 This is a schematic diagram of another first feedback control module provided in this embodiment of the present invention;

[0046] Figure 7 This is a schematic diagram of the structure of a second feedback control module provided in an embodiment of the present invention;

[0047] Figure 8 This is a schematic diagram of another second feedback control module provided in an embodiment of the present invention;

[0048] Figure 9 This is a schematic diagram of the structure of a third feedback control module provided in an embodiment of this utility model. Detailed Implementation

[0049] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.

[0050] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this utility model are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the utility model described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion.

[0051] This utility model provides a light sensor temperature control circuit. Figure 1 This is a schematic diagram of the structure of a light sensor temperature control circuit provided in an embodiment of this utility model. See also... Figure 1 The optical sensor temperature control circuit 100 includes: a temperature sensor 10, a cooling plate 20, a cooling plate drive module 30, a jumper selection module 40, and at least two feedback control modules 50.

[0052] In this system, both the temperature sensor 10 and the cooling plate 20 are attached to the light sensor 200, with the cooling plate 20 and the temperature sensor 10 attached at different positions on the light sensor 200. The temperature sensor 10 detects the temperature of the light sensor 200 and outputs a temperature signal TEMP; the cooling plate 20 cools the light sensor 200. A cooling plate driving module 30 is connected to the cooling plate 20 and drives the cooling plate 20 to cool the light sensor 200 according to the signal input to the control terminal of the cooling plate driving module 30. A feedback control module 50 is connected to the output terminal of the temperature sensor 10 and outputs a cooling control signal according to the temperature signal TEMP output by the temperature sensor 10. The jumper selection module 40 includes the same number of jumper units 410 as the feedback control module 50; the first connection terminal of each jumper unit 410 is connected to the output terminal of each feedback control module 50, and the second connection terminal of each jumper unit 410 is connected to the control terminal of the cooling plate driving module 30. At any given time, at most one jumper unit 410 is connected to the second connection terminal. The cooling plate drive module 30 drives the cooling plate 20 according to the cooling control signal output by the feedback control module 50 connected to the control terminal, such as controlling whether the cooling plate 20 is started and controlling the cooling capacity of the cooling plate 20.

[0053] For example, the temperature sensor 10 can be implemented using a negative temperature coefficient thermistor, and the cooling plate 20 can be a thermo electric cooler (TEC). Specifically, the feedback control module 50 compares the temperature represented by the temperature signal TEMP with the target temperature and outputs a cooling control signal based on the comparison result; the target temperature can be set according to actual process requirements, such as room temperature or the rated applicable temperature of the light sensor 200. The jumper selection module 40 can be implemented using a jumper cap. The cooling plate driving module 30 can include any type of cooling plate driving chip and its peripheral circuitry.

[0054] In the optical sensor temperature control circuit 100 provided in this embodiment of the invention, by setting a temperature sensor 10, a cooling plate 20, a cooling plate driving module 30, and a feedback control module 50, closed-loop control of the temperature of the optical sensor 200 can be achieved, so as to stabilize the temperature of the optical sensor 200 and avoid the impact of temperature drift on the accuracy of the data collected by the optical sensor 200. Specifically, by directly attaching the temperature sensor 10 to the optical sensor 200, it can be ensured that the temperature signal TEMP detected by the temperature sensor can accurately characterize the temperature of the optical sensor 200; by directly attaching the cooling plate 20 to the optical sensor 200, the cooling effect of the cooling plate 20 on the optical sensor 200 can be ensured; and by attaching the temperature sensor 10 and the cooling plate 20 to different positions, the cooling process of the cooling plate can be prevented from affecting the detection results of the temperature sensor 10. Furthermore, by setting at least two feedback control modules 50 and connecting them to the cooling plate drive module 30 via jumper selection modules 40, redundancy of the feedback control modules 50 is achieved. If one feedback control module 50 fails, another functioning feedback control module 50 can be switched on, thus improving circuit reliability. On the other hand, different feedback control modules 50 can have different structures, suitable for different scenarios, thereby increasing the circuit's applicability and flexibility. In summary, this embodiment of the invention can stabilize the temperature of the light sensor 200, thereby improving the accuracy of the light sensor 200's detection results and ultimately enhancing the exposure effect.

[0055] Figure 2 This is a schematic diagram of another optical sensor temperature control circuit provided in an embodiment of this utility model. See also... Figure 2Based on the above embodiments, optionally, the cooling pad driving module 30 includes: a cooling pad driving chip U1, a driving voltage configuration unit 31, and a current detection unit 32. The cooling pad driving chip U1 includes a reference voltage output pin REF, a voltage configuration pin MAXV, a control pin CTL, a first output pin OS1, a second output pin OS2, and a current detection pin CS. The control pin CTL serves as the control terminal of the cooling pad driving module 30, and the first output pin OS1 and the second output pin OS2 together serve as the output terminals of the cooling pad driving module 30. Both the first output pin OS1 and the second output pin OS2 are connected to the cooling pad 20. The first output pin OS1 outputs a positive voltage, for example, and the second output pin OS2 outputs a negative voltage or provides a ground signal, for example. The driving voltage configuration unit 31 is connected to the reference voltage output pin REF and the voltage configuration pin MAXV respectively. The driving voltage configuration unit 31 is used to configure the value of the configuration voltage received by the voltage configuration pin MAXV according to the value of the reference voltage output by the reference voltage output pin REF, so that the voltage at the output terminal of the cooling pad driving module 30 matches the driving voltage required by the connected cooling pad 20. The current detection unit 32 is connected to the first output pin OS1 and the current detection pin CS respectively. The current detection unit 32 is used to determine the driving current to be output to the cooling plate 20 according to the voltage of the first output pin OS1 and provide it to the current detection pin CS. The cooling plate driver chip U1 can adjust the working state (e.g., power level) of the cooling plate 20 according to the driving current.

[0056] See Figure 3 The drive voltage configuration unit 31 may include a third resistor R3 and a fourth resistor R4. The first end of the third resistor R3 is connected to the reference voltage output pin REF, and the second end of the third resistor R3 is connected to the first end of the fourth resistor R4 and the voltage configuration pin MAXV. The second end of the fourth resistor R4 is connected to analog ground. The drive voltage configuration unit 31 provides the configuration voltage by dividing the reference voltage TEC_REF output from the reference voltage output pin REF using the third resistor R3 and the fourth resistor R4. Depending on the operating characteristics of the cooling chip driver U1, the final drive voltage output to the cooling chip 20 is related to this configuration voltage. For example, the cooling chip driver U1 may be a TEC driver chip of model MAX1968EUI+T, and the final drive voltage output to the cooling chip 20 may be four times the configuration voltage. It is understood that... Figure 3 Each grounding terminal shown can be a simulated ground.

[0057] The current detection unit 32 may include a fifth resistor; the fifth resistor is connected between the first output pin OS1 and the current detection pin CS. As a current detection resistor, the fifth resistor converts the voltage output from the first output pin OS1 into a drive current. It is understood that each resistor mentioned in the various embodiments of this utility model can be understood as a resistive element with a certain impedance. It can be a single resistor or a series-parallel structure of multiple resistors, and the specific configuration can be determined according to impedance requirements and component selection. For example, the fifth resistor may include... Figure 3 The first sub-resistor R51 and the second sub-resistor R52 are connected in parallel, that is, the current detection unit 32 can be a current loop structure formed by the first sub-resistor R51 and the second sub-resistor R52 connected in parallel.

[0058] See also Figure 3 Based on the above embodiments, optionally, the cooling pad driver chip U1 may further include an analog signal output pin ITEC; the analog signal output pin ITEC outputs an analog voltage signal VIEC related to the voltage of the first output pin OS1 and the voltage of the current detection pin CS, for example, provided to the main controller, which can calculate the drive current to the cooling pad 20 in real time based on the analog voltage signal VIEC. For example, VIEC = 1.5V + (Vos1 - Vcs) * 8, where Vos1 is the voltage of the first output pin OS1 and Vcs is the voltage of the current detection pin CS. The main controller may include an FPGA (Field-Programmable Gate Array) and its peripheral circuits. Furthermore, the cooling pad driver module 30 may also include a seventh resistor R7 connected between the analog signal output pin ITEC and the main controller; this seventh resistor R7 may be a 0Ω resistor. It is understood that the 0Ω resistor can be used as a jumper or as a function selection module; when a certain section of the circuit is not needed, this resistor can be left unsoldered. In this embodiment, when it is not necessary to output the analog voltage signal VIEC to the main controller, the seventh resistor R7 can be removed directly.

[0059] See also Figure 3Based on the above embodiments, optionally, the cooling pad driver chip U1 may further include a sleep control pin SHDN. The cooling pad driver chip U1 can go into sleep or be woken up according to the level of the sleep control pin SHDN. The sleep control pin SHDN is connected to the main controller, for example, and the main controller provides sleep / wake-up related control signals. Further, the cooling pad driver module 30 may further include a level conversion unit 33. The input terminal of the level conversion unit 33 is connected to the sleep control signal SLEEP (for example, provided by the main controller), and the output terminal of the level conversion unit 33 is connected to the sleep control pin SHDN. The level conversion unit 33 is used to convert the level of the sleep control signal SLEEP into a level that the sleep control pin SHDN can recognize. Specifically, the level conversion unit 33 may include a level conversion chip U2. In the level conversion chip U2, the input pin is connected to the sleep control signal SLEEP, the output pin is connected to the sleep control pin SHDN, the first power supply pin is connected to the third power supply signal V3, and the second power supply pin is connected to the fourth power supply signal V4. The voltages of the third power supply signal V3 and the fourth power supply signal V4 are different; for example, the third power supply signal V3 is 3.3V, and the fourth power supply signal V4 is 5V. Furthermore, the level conversion unit 33 may also include an external circuit composed of a sixth resistor R6, which is connected between the output pin of the level conversion chip U2 and analog ground.

[0060] The above embodiments exemplarily describe some pins of the cooling chip driver U1 related to the cooling drive function. In actual applications, the cooling chip driver U1 may also include ground pins, power supply pins, and mode configuration pins, etc. The peripheral circuit of the cooling chip driver U1 may also include a series of capacitors, resistors, and inductors for filtering and current limiting functions, etc., which will not be described in detail here. For example, the power supply signal of the cooling chip driver U1 may be the fifth power supply signal V5, specifically a 5V DC voltage signal.

[0061] See also Figure 3 In one embodiment, the jumper selection module 40 may optionally include a jumper cap JP integrating multiple sets of connection endpoints. Each set of endpoints in the jumper cap JP serves as a jumper unit; each set of endpoints includes two contacts arranged opposite to each other, one of which is used to connect to the feedback control module, and the other of which is used to connect to the control pin CTL of the cooling chip driver chip U1.

[0062] See also Figure 2Based on the above embodiments, optionally, the optical sensor temperature control circuit 100 further includes: a detection module 60; a first terminal of the temperature sensor 10 is connected to a first power signal V1, a second terminal of the temperature sensor 10 is connected to a second terminal of the detection module 60 and outputs a temperature signal TEMP, and a first terminal of the detection module 60 is connected to a second power signal V2; the voltages of the first power signal V1 and the second power signal V2 are different. Thus, the detection module 60 can provide a voltage-based temperature signal TEMP through a voltage divider with the temperature sensor 10.

[0063] For details, see Figure 4 The temperature sensor 10 may include a negative temperature coefficient thermistor (NTC), which is attached to the photosensitive sensor. The first terminal of the NTC is connected to a first power supply signal V1; the second terminal of the NTC serves as the output terminal of the temperature sensor 10, outputting a temperature signal TEMP. The detection module 60 may include a second resistor R2; the first terminal of the second resistor R2 is connected to a second power supply signal V2, and the second terminal of the second resistor R2 is connected to the second terminal of the NTC. For example, the first power supply signal V1 may be the ground signal GND connected to the photosensitive sensor, and the second power supply signal V1 may be the reference voltage TEC_REF output from the reference signal output pin REF of the cooling chip driver chip U1. This eliminates the need to provide additional first and second power supply signals V1 and V2, thus simplifying the circuit structure.

[0064] See also Figure 2 Based on the above embodiments, optionally, at least two of the feedback control modules include at least two of the following: a first feedback control module 51, a second feedback control module 52, and a third feedback control module 53. The first feedback control module 51, the second feedback control module 52, and the third feedback control module 53 have different circuit structures; for example, they differ in circuit complexity or control precision. In practical applications, the required feedback control module can be switched according to actual needs. For ease of explanation, the cooling control signal output by the first feedback control module 51 will be denoted as the first cooling control signal CTL1, the cooling control signal output by the second feedback control module 52 will be denoted as the second cooling control signal CTL2, and the cooling control signal output by the third feedback control module 53 will be denoted as the third cooling control signal CTL3.

[0065] The structure of each feedback control module is described below.

[0066] Figure 5 This is a schematic diagram of the structure of a first feedback control module provided in an embodiment of this utility model. See also... Figure 5In one embodiment, optionally, the first feedback control module 51 includes a sliding rheostat RL and a first comparator 511. The first terminal of the sliding rheostat RL is connected to a first reference signal REF1, and the second terminal of the sliding rheostat RL is connected to analog ground and connected to the analog ground signal AGND. The first input terminal of the first comparator 511 is connected to the output terminal of the temperature sensor 10 and connected to the temperature signal TEMP; the second input terminal of the first comparator 511 is connected to the sliding terminal of the sliding rheostat RL; the output terminal of the first comparator 511 is connected to the output terminal of the first feedback control module 51, used to output a first cooling control signal CTL1.

[0067] In this embodiment, a sliding rheostat RL is used to set the target voltage signal corresponding to the target temperature. Specifically, the first reference signal REF1 is a DC voltage signal with a fixed voltage. When the sliding end of the rheostat RL is in different positions, it can provide different voltage division effects on the first reference signal REF1, thereby providing different voltage values ​​to the second input terminal of the first comparator 511. In practical applications, the correspondence between the voltage value output by the sliding end of the rheostat RL and the temperature can be established in advance, and the position of the sliding end of the rheostat RL can be adjusted according to the target temperature required by the process. This embodiment adopts a purely hardware feedback circuit setting method, which can effectively ensure the reliability of the first feedback control module 51.

[0068] Figure 6 This is a schematic diagram of another first feedback control module provided in an embodiment of this utility model. See also... Figure 6 Based on the above embodiments, optionally, the first comparator 511 may include a first operational amplifier U3 and its peripheral circuits (e.g., including two resistors), with the positive input terminal of the first operational amplifier U3 serving as the first input terminal of the first comparator 511, the negative input terminal of the first operational amplifier U3 serving as the second input terminal of the first comparator 511, and the output terminal of the first operational amplifier U3 serving as the output terminal of the first comparator 511.

[0069] Furthermore, the first feedback control module 51 may also include a first voltage follower 512. The first voltage follower 512 is connected between the sliding end of the variable resistor RL and the second input terminal of the first comparator 511, and is used to improve the stability of the voltage received at the second input terminal of the first comparator 511. Specifically, the first voltage follower 512 may include a second operational amplifier U4 and its peripheral circuitry (e.g., a capacitor). The negative input terminal of the second operational amplifier U4 is connected to the sliding end of the variable resistor RL; the positive input terminal of the second operational amplifier U4 is connected to its output terminal and then connected to the second input terminal of the first comparator 511.

[0070] Furthermore, the first feedback control module 51 may also include a first amplifier 513. The first input terminal of the first amplifier 513 is connected to the second reference signal REF2, the second input terminal of the first amplifier 513 is connected to the output terminal of the first comparator 511, and the output terminal of the first amplifier 513 is connected to the output terminal of the first feedback control module 51. The first amplifier 513 amplifies the voltage output by the first comparator 511 so that the level of the first cooling control signal CTL1 can be recognized by the control terminal of the cooling plate driving module 30. Specifically, the second reference signal REF2 can be a DC voltage signal, and the first amplifier 513 may include a third operational amplifier U5 and its peripheral circuitry (which may include multiple capacitors and resistors). The positive input terminal of the third operational amplifier U5 is connected to the second reference signal REF2, the negative input terminal of the third operational amplifier U5 is connected to the output terminal of the first comparator 511, and the output terminal of the third operational amplifier U5 is connected to the output terminal of the first feedback control module 51. Furthermore, to ensure the stability of signal transmission between the first comparator 511 and the first amplifier 513, a protection circuit consisting of capacitors and resistors can be provided between the output terminal of the first comparator 511 and the second input terminal of the first amplifier 513.

[0071] Based on the above embodiments, optionally, the reference signal output pin REF of the cooling plate driver chip U1 can be connected to the first end of the sliding rheostat RL and the first input end of the first amplifier 513 respectively; the reference voltage TEC_REF output by the reference signal output pin REF can be multiplexed as the first reference signal REF1 and the second reference signal REF2, thereby simplifying the circuit structure.

[0072] Figure 7 This is a schematic diagram of the structure of a second feedback control module provided in an embodiment of this utility model. See also... Figure 7 The second feedback control module 52 includes a main controller 70, a digital-to-analog converter 521, and a second comparator 522. The main controller 70 includes a first output terminal; the first output terminal outputs a digital reference signal TEC_DREF to characterize the target temperature; the input terminal of the digital-to-analog converter 521 is connected to the first output terminal of the main controller 70; the digital-to-analog converter 521 converts the digital reference signal TEC_DREF into an analog reference signal AREF; the first input terminal of the second comparator 522 is connected to the output terminal of the digital-to-analog converter 521, and the second input terminal of the second comparator 522 is connected to the output terminal of the temperature sensor 10, receiving the temperature signal TEMP; the output terminal of the second comparator 522 is connected to the output terminal of the second feedback control module 52, and the second comparator 522 compares the temperature signal TEMP with the analog reference signal AREF and outputs a second cooling control signal CTL2.

[0073] In this embodiment, the main controller 70 is used to directly set the target temperature, and a digital-to-analog converter is used for conversion, which can effectively improve the setting accuracy of the analog reference signal AREF and improve the temperature control effect.

[0074] Figure 8 This is a schematic diagram of another second feedback control module provided in an embodiment of this utility model. See also... Figure 8 For example, the second comparator 522 may include a fourth operational amplifier U6 and its peripheral circuitry (e.g., including two resistors). The positive input terminal of the fourth operational amplifier U6 serves as the first input terminal of the second comparator 522, the negative input terminal of the fourth operational amplifier U6 serves as the second input terminal of the second comparator 522, and the output terminal of the fourth operational amplifier U6 serves as the output terminal of the second comparator 522.

[0075] Furthermore, the second feedback control module 52 may also include a second voltage follower 523. The second voltage follower 523 is connected between the output terminal of the temperature sensor 10 and the second input terminal of the second comparator 522, used to improve the stability of the voltage received at the second input terminal of the second comparator 522. Specifically, the second voltage follower 523 may include a fifth operational amplifier U7 and its peripheral circuitry (e.g., a capacitor). The negative input terminal of the fifth operational amplifier U7 is connected to the temperature signal TEMP; the positive input terminal of the fifth operational amplifier U7 is connected to its output terminal and then connected to the second input terminal of the second comparator 522. For example, the negative input terminal of the fifth operational amplifier U7 can be connected to the output terminal of the temperature sensor 10 through an eighth resistor R8, where the eighth resistor R8 can be a 0Ω resistor.

[0076] Furthermore, the second feedback control module 52 may also include a second amplifier 524. The first input terminal of the second amplifier 524 is connected to the third reference signal REF3, the second input terminal of the second amplifier 524 is connected to the output terminal of the second comparator 522, and the output terminal of the second amplifier 524 is connected to the output terminal of the second feedback control module 52. The second amplifier 524 amplifies the voltage output by the second comparator 522 so that the level of the second cooling control signal CTL2 can be recognized by the control terminal of the cooling plate drive module 30. Specifically, the third reference signal REF3 can be a DC voltage signal, and the second amplifier 524 may include a sixth operational amplifier U8 and its peripheral circuitry (which may include multiple capacitors and resistors). The positive input terminal of the sixth operational amplifier U8 is connected to the third reference signal REF3, the negative input terminal of the sixth operational amplifier U8 is connected to the output terminal of the second comparator 522, and the output terminal of the sixth operational amplifier U8 is connected to the output terminal of the second feedback control module 52. Furthermore, to ensure the stability of signal transmission between the second comparator 522 and the second amplifier 524, a protection circuit consisting of capacitors and resistors can be provided between the output terminal of the second comparator 522 and the second input terminal of the second amplifier 524.

[0077] Based on the above embodiments, optionally, the reference signal output pin REF of the cooling plate driver chip U1 can be connected to the first input terminal of the second amplifier 524; the reference voltage TEC_REF output by the reference signal output pin REF is used as the third reference signal REF3, thereby simplifying the circuit structure.

[0078] Figure 9 This is a schematic diagram of the structure of a third feedback control module provided in an embodiment of this utility model. See also... Figure 9 The third feedback control module 53 may include a main controller 70 and a filtering unit 531. The input terminal of the main controller 70 is connected to the output terminal of the temperature sensor 10, receiving the temperature signal TEMP. The main controller 70 generates a first control signal TEC_PWM based on the temperature signal TEMP and outputs it through its second output terminal. The first control signal TEC_PWM is, for example, a PWM signal, and the main controller 70 can specifically control the duty cycle of the first control signal TEC_PWM based on the temperature signal TEMP. The filtering unit 531 is connected between the second output terminal of the main controller 70 and the output terminal of the third feedback control module, and is used to perform low-pass filtering on the first control signal TEC_PWM to form a third cooling control signal CTL3.

[0079] In this embodiment, the main controller 70 directly analyzes the temperature signal TEMP (for example, compares the temperature represented by the temperature signal TEMP with the target temperature) and generates the first control signal TEC_PWM. After being filtered by the filtering unit 531, it forms the third cooling control signal CTL3 in the form of an analog signal. This eliminates the need for complex operational amplifier circuits and effectively simplifies the circuit structure.

[0080] For details, see Figure 9 The filter unit 531 can be an RC low-pass filter structure, including a first resistor R1 and a first capacitor C1. The first resistor R1 is connected between the second output terminal of the main controller 70 and the output terminal of the third feedback control module 53, and the first capacitor C1 is connected between the output terminal of the third feedback control module 53 and analog ground. For example, a ninth resistor R9 can also be provided between the filter unit 531 and the second output terminal of the main controller 70. The ninth resistor R9 can be a 0Ω resistor.

[0081] It is understood that the main controller 70 mentioned in the above embodiments can be the same main controller 70. That is, the second feedback control module 52 and the third feedback control module 53 can share the same main controller 70, and this main controller can be used to execute other control functions of the exposure system where the light sensor temperature control circuit is located, such as controlling the shutter opening and closing, to simplify the circuit structure. Furthermore, the power supply signal required by each feedback control module can be the fifth power signal V5.

[0082] In summary, this utility model embodiment provides a circuit design for maintaining a constant temperature of the photosensitive sensor in a lithography machine. By attaching both the temperature sensor 10 and the cooling plate 20 to the photosensitive sensor 200, and forming a closed-loop temperature control circuit through other modules in the circuit, precise temperature control is achieved. This ensures the stability of the photosensitive sensor's own temperature, for example, controlling the temperature difference within 0.01℃ (the detection accuracy of the temperature sensor 10, for example, reaches within 0.01℃), thus ensuring the accuracy of the data collected by the photosensitive sensor 200. This improves the accuracy of shutter opening and closing control, ensuring that the luminous flux value remains consistent with the preset value during each shutter opening and closing, thereby improving the exposure effect.

[0083] This utility model embodiment also provides a lithography machine, including the photosensitive temperature control circuit provided in any embodiment of this utility model, which has corresponding beneficial effects. For example, the lithography machine may include a photosensitive sensor and a photosensitive temperature control circuit. Both the photosensitive sensor and the photosensitive temperature control circuit can be components of the exposure system in the lithography machine; specifically, the photosensitive sensor, temperature sensor, and cooling plate can all be disposed in the light intensity acquisition board of the exposure system, and other modules in the photosensitive temperature control circuit can all be disposed in the control main board of the exposure system. The exposure system may also include a light source and an optical channel for generating the exposure beam, as well as a shutter assembly for controlling whether the exposure beam is output, etc., the specific structure of which will not be described in detail here.

[0084] The specific embodiments described above do not constitute a limitation on the scope of protection of this utility model. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.

Claims

1. An optical sensor temperature control circuit, characterized by, The application relates to a temperature sensor module, which comprises the following parts: a temperature sensor attached to a light sensor; cooling fins attached to the light sensor at different positions from the temperature sensor; a cooling fin driving module connected to the cooling fins, used for driving the cooling fins to cool the light sensor according to signals inputted into control ends of the cooling fin driving module; at least two feedback control modules connected to output ends of the temperature sensor, used for outputting cooling control signals according to temperature signals outputted by the temperature sensor; a jumper wire selection module comprising jumper wire units equal in number to the feedback control modules; first connection ends of the jumper wire units are connected to output ends of the feedback control modules one by one, and second connection ends of the jumper wire units are connected to control ends of the cooling fin driving module.

2. The optical sensor temperature control circuit of claim 1, wherein, The at least two feedback control modules comprise at least two of a first feedback control module, a second feedback control module and a third feedback control module; the first feedback control module, the second feedback control module and the third feedback control module have different circuit structures.

3. The optical sensor temperature control circuit of claim 2, wherein, The first feedback control module comprises: a sliding rheostat, a first end of the sliding rheostat being connected to a first reference signal, and a second end of the sliding rheostat being connected to an analog ground; a first comparator, a first input end of the first comparator being connected to an output end of the temperature sensor, a second input end of the first comparator being connected to a sliding end of the sliding rheostat, and an output end of the first comparator being connected to an output end of the first feedback control module.

4. The photosensor temperature control circuit of claim 3, wherein, The first feedback control module further comprises: a first voltage follower connected between the sliding end of the sliding rheostat and the second input end of the first comparator; a first amplifier, a first input end of the first amplifier being connected to a second reference signal, a second input end of the first amplifier being connected to the output end of the first comparator, and an output end of the first amplifier being connected to the output end of the first feedback control module; wherein the cooling fin driving module comprises a cooling fin driving chip, reference signal output pins of the cooling fin driving chip are respectively connected to the first end of the sliding rheostat and the first input end of the first amplifier; and reference voltages outputted by the reference signal output pins are multiplexed as the first reference signal and the second reference signal.

5. The optical sensor temperature control circuit of claim 2, wherein, The second feedback control module comprises: a master controller comprising a first output end, the first output end outputting a digital reference signal used for representing a target temperature; a digital-to-analog converter, an input end of the digital-to-analog converter being connected to the first output end of the master controller; a second comparator, a first input end of the second comparator being connected to an output end of the digital-to-analog converter, a second input end of the second comparator being connected to an output end of the temperature sensor, and an output end of the second comparator being connected to an output end of the second feedback control module.

6. The optical sensor temperature control circuit of claim 5, wherein, The second feedback control module further comprises: a second voltage follower connected between the output end of the temperature sensor and the second input end of the second comparator; A second amplifier, a first input end of the second amplifier is connected with a third reference signal, a second input end of the second amplifier is connected with an output end of the second comparator, and an output end of the second amplifier is connected with an output end of the second feedback control module; The cooling fin driving module comprises a cooling fin driving chip, and a reference signal output pin of the cooling fin driving chip is connected with the first input end of the second amplifier; and a reference voltage output by the reference signal output pin is used as the third reference signal.

7. The optical sensor temperature control circuit of claim 2, wherein, The third feedback control module comprises: A master controller, an input end of the master controller is connected with an output end of the temperature sensor, and the master controller is used for generating a first control signal according to the temperature signal and outputting the first control signal from a second output end of the master controller; A filtering unit, comprising a first resistor and a first capacitor; the first resistor is connected between the second output end of the master controller and the output end of the third feedback control module, and the first capacitor is connected between the output end of the third feedback control module and an analog ground.

8. The photosensor temperature control circuit of claim 1, wherein, The temperature sensor comprises a negative temperature coefficient thermistor, the negative temperature coefficient thermistor is attached to the light sensor, a first end of the negative temperature coefficient thermistor is connected with a first power supply signal, and a second end of the negative temperature coefficient thermistor is used as an output end of the temperature sensor. The light sensor temperature control circuit further comprises a detection module comprising a second resistor; a first end of the second resistor is connected with a second power supply signal, and a second end of the second resistor is connected with the second end of the negative temperature coefficient thermistor; wherein the voltage of the first power supply signal is different from the voltage of the second power supply signal.

9. The photosensor temperature control circuit of claim 1, wherein, The cooling fin driving module comprises: A cooling fin driving chip, comprising a reference voltage output pin, a voltage configuration pin, a control pin, a first output pin, a second output pin, a current detection pin, an analog signal output pin and a sleep control pin; the control pin is used as a control end of the cooling fin driving module, the first output pin and the second output pin are used as output ends of the cooling fin driving module, and the analog signal output pin outputs an analog voltage signal related to the voltage of the first output pin and the voltage of the current detection pin; A driving voltage configuration unit, comprising a third resistor and a fourth resistor; a first end of the third resistor is connected with the reference voltage output pin, a second end of the third resistor is connected with a first end of the fourth resistor and the voltage configuration pin respectively, and a second end of the fourth resistor is connected with an analog ground; A current detection unit, comprising a fifth resistor; the fifth resistor is connected between the first output pin and the current detection pin; A level conversion unit, an input end of the level conversion unit is connected with a sleep control signal, and an output end of the level conversion unit is connected with the sleep control pin.

10. A lithographic machine characterized by, The light sensor and the light sensor temperature control circuit according to any one of claims 1-9. ​

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