Secondary pre-alignment device for wafer position regulation and control

Abstract

The utility model provides a secondary pre-alignment device for regulating and controlling the position of a wafer, which comprises a supporting and assembling component, a bearing and positioning component, a switching guide component, a regulation and control driving component, an elastic tightening component and a pushing and shifting component. The bearing and positioning assembly can realize high-precision movement on the supporting and assembling assembly, in the wafer alignment operation process, the reduction of positioning errors and the improvement of production efficiency are facilitated, the elastic tightening assembly enables the bearing and positioning assembly to keep a stable tightening state in the movement process, the problem of inaccurate positioning caused by loosening or shaking is avoided, and the wafer alignment accuracy is improved. The alignment accuracy and stability are further improved, the whole device is compact in structural design, all the assemblies are tightly and reasonably matched, and therefore the whole device can still keep efficient working performance and a stable operation state while the occupied space is small.

Description

TECHNICAL FIELD

[0001] The utility model relates to integrated circuit production equipment especially for a secondary pre-alignment device for wafer position regulation. BACKGROUND

[0002] Wafer pre-alignment is positioning and adjusting wafer through a series of technical means to ensure the precision and consistency of wafer in the subsequent processing process, and its main purpose is to detect the eccentricity and gap (or cutting edge) of wafer, and realize the positioning of single wafer and the consistency between wafers, which plays an important role in ensuring the precision of semiconductor manufacturing. Wafer secondary pre-alignment is an important operation for further positioning and adjusting wafer to ensure high precision and consistency of wafer in subsequent processing steps. Wafer alignment device provides support for wafer position regulation, which is an important device to ensure the regulation of wafer position on photolithography machine and other related machines. The traditional secondary pre-alignment device uses guide rod and linear bearing as transmission mechanism, which has complex structure, high installation and debugging difficulty, and occupies a large amount of installation space, and has poor running stability and service life. Therefore, it is necessary to optimize its structure to overcome the above defects. SUMMARY

[0003] The utility model aims at providing a secondary pre-alignment device for wafer position regulation to improve the running stability.

[0004] The utility model adopts the technical scheme that:

[0005] A secondary pre-alignment device for wafer position regulation comprises:

[0006] A support assembly is installed in a rack through a connecting piece, and has an assembly space inside;

[0007] A bearing positioning assembly is shape-fitted with the support assembly, and has a bearing space inside;

[0008] An adapter guide assembly cooperates with the support assembly and the bearing positioning assembly respectively, so that the bearing positioning assembly can move on the support assembly through the adapter guide assembly, and the movement process is guided by the adapter guide assembly;

[0009] A regulation driving assembly is installed in the support assembly and cooperates with the bearing positioning assembly, so that the bearing positioning assembly is moved by the regulation driving assembly;

[0010] An elastic tightening assembly is installed between the support assembly and the bearing positioning assembly, and exerts elastic force on the bearing positioning assembly, so that the bearing positioning assembly is in a tight state.

[0011] The push displacement assembly is mounted in the support assembly through a movable structure, is engaged with the bearing positioning assembly, is matched with the shape of the wafer, is driven to move by the bearing positioning assembly, and drives the wafer to move by the push displacement assembly.

[0012] Specifically, the support assembly comprises:

[0013] The support base is mounted in the rack through connecting bolts, and a mounting slot is formed in the top of the support base.

[0014] The bearing positioning assembly comprises:

[0015] The bearing cover plate is located above the support base, and a positioning slot is formed in the bottom of the bearing cover plate.

[0016] The adapter guide assembly comprises:

[0017] The guide rails are provided in pairs, the fixed parts of the guide rails are mounted in the mounting slots of the support base, the movable parts of the guide rails are mounted in the positioning slots of the bearing cover plate, and the bearing cover plate can move on the support base through the guide rails.

[0018] In an embodiment of the utility model, the guide rails are cross roller linear guides.

[0019] The control driving assembly comprises:

[0020] The driving cylinder is mounted in the support base, the piston rod of the driving cylinder is engaged with the bearing cover plate, and the bearing cover plate is driven to move by the driving cylinder.

[0021] The elastic fastening assembly comprises:

[0022] The fastening tension springs are provided in pairs, the fastening tension springs are respectively located on both sides of the bearing cover plate, one end of the fastening tension springs is engaged with the support base, the other end of the fastening tension springs is engaged with the bearing cover plate, and the piston rod of the driving cylinder is parallel to the fastening tension springs, the fastening tension springs apply elastic force to the bearing cover plate, and the bearing cover plate is in a fastened state.

[0023] The push displacement assembly comprises:

[0024] The push top block is mounted on the bearing cover plate and can move together with the bearing cover plate, and the end of the push top block extends outward of the support base;

[0025] The push shaft wheels are provided in pairs, the push shaft wheels are respectively mounted at the ends of the push top block and can move together with the push top block, the push shaft wheels are matched with the shape of the wafer edge and can drive the wafer to move.

[0026] The utility model discloses the advantages are:

[0027] The alignment device is precisely guided by the adapter guide assembly composed of cross roller linear guide rails, the bearing positioning assembly can realize high-precision movement on the support assembly, and the elastic clamping assembly can keep the bearing positioning assembly in a stable clamping state during movement, thereby avoiding the problem of inaccurate positioning caused by looseness or shaking, and further improving the accuracy and stability of alignment. BRIEF DESCRIPTION OF DRAWINGS

[0028] Fig. 1 is a front structure schematic view of a secondary pre-alignment device for wafer position regulation provided by the utility model;

[0029] Fig. 2 is one of the exploded views of the alignment device;

[0030] Fig. 3 is the second exploded view of the alignment device. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in combination with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments. The components of the embodiments of the utility model described and shown in the drawings can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the utility model provided in the drawings is not intended to limit the scope of the claimed utility model, but only represents selected embodiments of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the utility model.

[0032] As Figs. 1-3As shown, the secondary pre-alignment device for wafer position regulation comprises a support assembly component, a bearing positioning component, a switching guide component, a regulation driving component, an elastic tight component and a pushing displacement component, the support assembly component is installed in the rack through the connecting piece, and has an assembly space in the inside, the bearing positioning component is shape-fitted with the support assembly component, and has a bearing space in the inside, the switching guide component is matched with the support assembly component and the bearing positioning component respectively, so that the bearing positioning component can move on the support assembly component through the switching guide component, the movement process of the bearing positioning component is guided by the switching guide component, the regulation driving component is installed in the support assembly component and matched with the bearing positioning component, the bearing positioning component is moved by the regulation driving component, the elastic tight component is installed between the support assembly component and the bearing positioning component, the elastic force is applied to the bearing positioning component by the elastic tight component, so that the bearing positioning component is in the tight state, and the pushing displacement component is installed in the support assembly component through the movable structure, is engaged with the bearing positioning component, is shape-fitted with the wafer, the pushing displacement component is moved by the bearing positioning component, and the wafer is moved by the pushing displacement component.

[0033] In the embodiment, the support assembly component comprises a support base 100, the support base is installed in the rack through the connecting bolt, and the assembly slot 110 is formed in the top of the support base.

[0034] The bearing positioning component comprises a bearing cover plate 200, the bearing cover plate is located above the support base, and the positioning slot 210 is formed in the bottom of the bearing cover plate.

[0035] The switching guide component comprises a guide rail 300, the guide rail is provided in pairs, the fixed part of each guide rail is installed in the assembly slot of the support base, and the movable part is installed in the positioning slot of the bearing cover plate, so that the bearing cover plate can move on the support base through the guide rail.

[0036] In the embodiment, the guide rail is a crossed roller linear guide rail.

[0037] The regulation driving component comprises a driving cylinder 400, the cylinder body of the driving cylinder is installed in the support base, the piston rod end is engaged with the bearing cover plate, and the bearing cover plate is moved by the driving cylinder.

[0038] In the embodiment, the air pipe joint 120 is arranged on the side of the support base, the air pipe joint is communicated with the gas supply equipment through the pipeline, is communicated with the driving cylinder, and supplies the gas to the driving cylinder.

[0039] The elastic tight component comprises a tight tension spring 500, the tight tension spring is provided in pairs, each tight tension spring is located on the two sides of the bearing cover plate, one end is engaged with the support base, the other end is engaged with the bearing cover plate, is parallel with the piston rod of the driving cylinder, the elastic force is applied to the bearing cover plate by the tight tension spring, and the bearing cover plate is in the tight state.

[0040] In the embodiment, the bearing cover plate is provided with a limiting protrusion 220 which is in abutment with the edge of the support base and can limit the movement range of the bearing cover plate.

[0041] The pushing displacement assembly comprises a pushing top block 610 and a pushing shaft wheel 620, the pushing top block is installed on the bearing cover plate and can move together with the bearing cover plate, the end of the pushing top block extends to the outside of the support base, the pushing shaft wheel is provided with a pair, each pushing shaft wheel is installed at the end of the pushing top block and can move together with the pushing top block, the pushing shaft wheel is matched with the edge shape of the wafer and can drive the wafer to move.

[0042] In the description of the utility model, it needs to explain, when the terms of indicating the orientation or position relation of "up", "down", "inner", "outer", "left", "right" and the like appear, it should be understood that the orientation or position relation based on the orientation or position relation shown in the drawing, or the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product in usual placement, or the orientation or position relation of the orientation or position relation of the utility model product

Claims

1. A secondary pre-alignment device for wafer position regulation, characterized by, The utility model relates to a kind of secondary pre-alignment device for wafer position control, including: Support assembly is mounted in rack by connecting piece, and its inside has assembly space; Bearing positioning assembly is shaped with support assembly, and its inside has bearing space; Adapter guide assembly cooperates with support assembly and bearing positioning assembly respectively, so that bearing positioning assembly can move on support assembly through adapter guide assembly, and its moving process is guided by adapter guide assembly; Regulation and control drive assembly is installed in support assembly, and cooperates with bearing positioning assembly, and bearing positioning assembly is moved by regulation and control drive assembly; Elastic tight assembly is installed between support assembly and bearing positioning assembly, and elastic force is applied to bearing positioning assembly by elastic tight assembly, so that bearing positioning assembly is in tight state; Pushing displacement component is installed in support assembly by movable structure, and it is engaged with bearing positioning assembly and shaped with wafer, and wafer is moved by bearing positioning assembly and pushing displacement component.

2. The secondary pre-alignment device for wafer position regulation of claim 1, wherein, Support assembly includes: Support base is installed in rack by connecting bolt, and assembly slot is opened in the top of support base.

3. The secondary pre-alignment device for wafer position regulation according to claim 2, wherein, Bearing positioning assembly includes: Bearing cover plate is located above support base, and positioning slot is opened in the bottom of bearing cover plate.

4. The secondary pre-alignment device for wafer position regulation of claim 3, wherein, Adapter guide assembly includes: Guide rail is provided with a pair, and the fixed part of each guide rail is installed in assembly slot of support base, and the movable part is installed in positioning slot of bearing cover plate, so that bearing cover plate can move on support base through guide rail.

5. The secondary pre-alignment device for wafer position control according to claim 4, wherein: Guide rail is replaced by crossed roller linear guide rail.

6. The secondary pre-alignment device for wafer position regulation of claim 3, wherein, Regulation and control drive assembly includes: Drive cylinder is installed in support base, and the piston rod end of drive cylinder is engaged with bearing cover plate, so that bearing cover plate is moved by drive cylinder.

7. The secondary pre-alignment device for wafer position regulation of claim 6, wherein, Elastic tight assembly includes: Tight extension spring is provided with a pair, and each tight extension spring is located on both sides of bearing cover plate, one end of each tight extension spring is engaged with support base, the other end is engaged with bearing cover plate and parallel to the piston rod of drive cylinder, and elastic force is applied to bearing cover plate by tight extension spring, so that bearing cover plate is in tight state.

8. The secondary pre-alignment device for wafer position regulation of claim 3, wherein, Pushing displacement component includes: Pushing top block is installed on bearing cover plate and can move with bearing cover plate, and the end of pushing top block extends to the outside of support base; Pushing shaft wheel is provided with a pair, and each pushing shaft wheel is installed at the end of pushing top block and can move with pushing top block, and it is shaped with wafer edge and can move wafer.

Images