High-boiling cracking system for polycrystalline silicon production

Abstract

The utility model provides a high-boiling cracking system for polycrystalline silicon production. The high-boiling cracking system comprises: a cracking generator comprising a plurality of raw material input ends and a product output end; the pressure relief pipeline is communicated with the cracking generator; and the filtering device is arranged on the pressure relief pipeline and is used for filtering the gas flowing through the pressure relief pipeline. According to the high-boiling cracking system for polycrystalline silicon production disclosed by the utility model, during pressure relief, gas flowing through the pressure relief pipeline is filtered through the filtering device, and a liquid material is prevented from being discharged along with the gas, so that the pressure relief pipeline is prevented from being blocked, the influence on the production process is reduced, and the production efficiency is improved.

Description

Technical Field

[0001] This application relates to the field of polysilicon production technology, and in particular to a high-boiling-point pyrolysis system for polysilicon production. Background Technology

[0002] Polycrystalline silicon, as an important semiconductor material, is widely used in the electronics and photovoltaic industries. Distillation is a key step in its production process, aiming to purify and separate various chlorosilane compounds to obtain high-purity polycrystalline silicon. The distillation process involves a wide variety of compounds, including low-boiling-point trichlorosilanes and high-boiling-point polychlorosilanes. To improve resource utilization and economic efficiency, the process requires the cracking of high-boiling-point polychlorosilanes to recover usable chlorosilane monomers.

[0003] The cracking of polychlorosilane requires a reaction in a cracking generator. The reactants contain gaseous substances (hydrogen chloride gas) and the process is carried out at high temperatures. The cracking generator needs to be depressurized to avoid excessive internal pressure and to recover some unreacted hydrogen chloride gas.

[0004] During depressurization, if the liquid level in the pyrolysis generator is too high, some liquid particulate material (such as high-temperature resin) will be carried out along with it, resulting in raw material loss. At the same time, this material may deposit in the pipeline, causing blockage of the depressurization pipeline and affecting production. Utility Model Content

[0005] This application provides a high-boiling-point pyrolysis system for polysilicon production. By installing a filter device in the pressure relief pipeline, the gas discharged during pressure relief is filtered to prevent liquid materials from being discharged with the gas, thereby avoiding blockage of the pressure relief pipeline, reducing the impact on the production process, and improving production efficiency.

[0006] This application provides a high-boiling-point pyrolysis system for polysilicon production, comprising: a pyrolysis generator including multiple raw material input terminals and a product output terminal; a pressure relief pipeline connected to the pyrolysis generator; and a filter device disposed in the pressure relief pipeline to filter the gas flowing through the pressure relief pipeline.

[0007] The high-boiling-point pyrolysis system for polycrystalline silicon production of this utility model filters the gas flowing through the pressure relief pipeline through a filtration device during pressure relief, preventing liquid materials from being discharged with the gas, thereby avoiding blockage of the pressure relief pipeline, reducing the impact on the production process, and improving production efficiency.

[0008] In some embodiments, the top of the pyrolysis generator is provided with an exhaust port, the pressure relief pipeline includes a first exhaust pipeline, the first exhaust pipeline is connected to the exhaust port, at least a portion of the structure of the first exhaust pipeline extends along the height direction of the pyrolysis generator, and the filter device is disposed in the first exhaust pipeline.

[0009] According to some embodiments of the present invention, the filtration device includes: a housing defining a filtration chamber; and a filtration assembly disposed within the filtration chamber, the filtration assembly being adapted to impede the passage of liquid material when gas is allowed to pass through.

[0010] According to some embodiments of the present invention, the filter assembly includes a plurality of first baffles and a plurality of second baffles. The first baffles and the second baffles are respectively connected to the inner walls of opposite sides of the housing. The first baffles and the second baffles are arranged alternately along the axial direction of the housing to define a tortuous flow channel.

[0011] According to some embodiments of the present invention, the first end of the first baffle is fixed to the inner wall of the filter chamber, and the second end of the first baffle extends toward the axis of the housing;

[0012] The third end of the second baffle is fixed to the inner wall of the filter chamber, and the fourth end of the second baffle extends toward the axis of the housing;

[0013] In a first reference plane perpendicular to the axis of the housing, the projection of the second end and the projection of the fourth end at least partially coincide.

[0014] According to some embodiments of the present invention, the second end of the first baffle and the fourth end of the second baffle are both inclined downwards.

[0015] According to some embodiments of the present invention, the filter assembly includes a filter baffle disposed in the filter cavity and extending spirally along the axial direction of the housing.

[0016] According to some embodiments of the present invention, a support rod is provided inside the filter chamber, the support rod is fixedly connected to the housing, and a filter baffle is arranged around the support rod. The filter baffle includes an inner edge connected to the support rod and an outer edge away from the support rod, and the outer edge is higher than the inner edge.

[0017] According to some embodiments of the present invention, the high-boiling pyrolysis system further includes:

[0018] A first raw material delivery pipeline is used to deliver polychlorosilane, and the first raw material delivery pipeline is connected to the raw material input end located on the top side wall of the pyrolysis generator;

[0019] The second raw material conveying pipeline is used to convey gaseous hydrogen chloride, and the second raw material conveying pipeline is connected to the raw material input end located on the bottom wall of the cracking generator.

[0020] According to some embodiments of the present invention, the product output end is located on the bottom side wall of the pyrolysis generator, and the high-boiling pyrolysis system further includes a product output pipeline, which is connected to the product output end. Attached Figure Description

[0021] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.

[0022] Figure 1 This is a process flow diagram of the high-boiling-point pyrolysis system according to an embodiment of the present invention;

[0023] Figure 2 This is a schematic diagram of the structure of the filtration device according to an embodiment of the present invention;

[0024] Figure 3 This is a schematic diagram of the internal structure of a filter device according to an embodiment of the present invention;

[0025] Figure 4 This is a schematic diagram of the internal structure of a filter device according to another embodiment of the present invention;

[0026] Explanation of reference numerals in the attached figures:

[0027] 100. High-boiling-point pyrolysis system;

[0028] 110. Cracking generator; 111. Raw material input end; 112. Product output end; 113. Exhaust port;

[0029] 120. Pressure relief pipeline; 121. First exhaust pipeline;

[0030] 130. Filter device; 131. Housing; 132. Filter chamber;

[0031] 133, Filter assembly; 1331, First baffle; 1331a, First end; 1331b, Second end; 1332, Second baffle; 1332a, Third end; 1332b, Fourth end; 1333, Tortuous flow channel; 1334, Filter baffle; 1334a, Inner edge; 1334b, Outer edge; 1335, Support rod;

[0032] 140. First raw material conveying pipeline;

[0033] 150. Second raw material conveying pipeline;

[0034] 160. Product output pipeline.

[0035] The accompanying drawings illustrate specific embodiments of this application, which will be described in more detail below. These drawings and descriptions are not intended to limit the scope of the concept in any way, but rather to illustrate the concept of this application to those skilled in the art through reference to particular embodiments. Detailed Implementation

[0036] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numbers in different drawings denote the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this application. Rather, they are merely examples of apparatuses and methods consistent with some aspects of this application as detailed in the appended claims.

[0037] In the existing polysilicon production process, the cracking of polychlorosilane needs to be carried out in a cracking generator. The reactants contain gaseous substances (hydrogen chloride gas) and the process is carried out at high temperatures. The cracking generator needs to be depressurized to avoid excessive internal pressure and to recover some unreacted hydrogen chloride gas.

[0038] During depressurization, if the liquid level in the pyrolysis generator is too high, some of the liquid particulate material in the pyrolysis generator will be carried out along with it, resulting in raw material loss. At the same time, this material may deposit in the pipeline, causing blockage of the depressurization pipeline and affecting production.

[0039] In view of this, this application provides a high-boiling-point pyrolysis system for polysilicon production. By installing a filter device in the pressure relief pipeline, the gas discharged during pressure relief is filtered to prevent liquid materials from being discharged with the gas, thereby avoiding blockage of the pressure relief pipeline, reducing the impact on the production process, and improving production efficiency.

[0040] The technical solution of this application and how it solves the above-mentioned technical problems will be described in detail below with specific embodiments. These specific embodiments can be combined with each other, and the same or similar concepts or processes may not be described again in some embodiments. The embodiments of this application will be described below with reference to the accompanying drawings.

[0041] refer to Figures 1 to 4 This application provides a high-boiling-point pyrolysis system 100 for polysilicon production. The high-boiling-point pyrolysis system 100 includes: a pyrolysis generator 110, a pressure relief pipeline 120, and a filter device 130.

[0042] The pyrolysis generator 110 is the core component of the high-boiling pyrolysis system 100, responsible for pyrolyzing high-boiling-point polychlorosilanes into short-chain chlorosilane monomers under specific conditions.

[0043] The cracking generator 110 has multiple feed inlets 111 to receive polychlorosilane and hydrogen chloride gases from different sources. These inlets can be connected to the output of the distillation column reboiler and the tail gas recovery system, respectively, to ensure a stable supply of feedstock.

[0044] The cracking generator 110 may also have a product output end 112 for conveying the cracked chlorosilane monomers to a subsequent processing unit or storage device.

[0045] During the pyrolysis process, excessive pressure may be generated inside the system, which needs to be regulated through the pressure relief line 120. The pressure relief line 120 is directly connected to the pyrolysis generator 110 to ensure that the pressure can be released quickly when it is too high, so as to protect the safe operation of the pyrolysis generator 110.

[0046] A filter device 130 is provided in the pressure relief pipeline 120 to filter the gas flowing through the pressure relief pipeline 120. For example, the filter device 130 may include a gas-liquid separation device, such as a cyclone separator, a baffle separator, a wire mesh demister, and a foam glass device, to separate the liquid material in the gas during pressure relief.

[0047] Optionally, the filtration device 130 may also include a recovery unit, through which gas passes and the recovery unit collects the separated liquid material. Alternatively, the filtration device 130 may be positioned above the pyrolysis generator 110, allowing the liquid material to return to the pyrolysis generator 110 under gravity, thereby reducing material loss and saving production costs.

[0048] Understandably, liquid materials may include, but are not limited to, reaction raw materials (such as hexachlorosilane), intermediate products (such as trichlorosilane, dichlorosilane and silicon tetrachloride), and catalysts in the cracking process (such as high-temperature resins).

[0049] The high-boiling-point pyrolysis system 100 for polycrystalline silicon production of this utility model filters the gas flowing through the pressure relief pipeline 120 through the filter device 130 during pressure relief, preventing liquid materials from being discharged with the gas, thereby avoiding blockage of the pressure relief pipeline 120, reducing the impact on the production process, and improving production efficiency.

[0050] refer to Figure 1 In some embodiments, in order to effectively manage the gas and pressure generated during the reaction, the top of the pyrolysis generator 110 is provided with an exhaust port 113, so that the gas generated during the reaction can be discharged in time, thereby maintaining the pressure balance inside the pyrolysis generator 110.

[0051] Gas inside the pyrolysis generator 110 is discharged from the pressure relief line 120 to manage and release excess pressure inside the system.

[0052] The pressure relief pipeline 120 includes a first exhaust pipeline 121, which is connected to the exhaust port 113. At least a portion of the structure of the first exhaust pipeline 121 extends along the height direction of the pyrolysis generator 110, and a filter device 130 is disposed in the first exhaust pipeline 121. Thus, after the gas in the pyrolysis generator 110 is discharged through the pressure relief pipeline 120, the filter device 130 filters the gas. At this time, the liquid material filtered by the filter device 130 collects at the bottom of the filter device 130 and falls back into the pyrolysis generator 110 under the action of gravity, which helps to avoid material loss and save production costs.

[0053] refer to Figures 2 to 4 According to some embodiments of the present invention, the filtration device 130 may include a housing 131 and a filtration assembly 133.

[0054] The housing 131 is a major structural component of the filter device 130 and is typically made of corrosion-resistant material to resist chemical corrosion. The housing 131 defines a filter chamber 132, the internal space of which is used to house the filter assembly 133 and process the incoming gas. To accommodate the first exhaust pipe 121, the housing 131 may be circular, and the filter chamber 132 may communicate with the first exhaust pipe 121.

[0055] The filter assembly 133 is disposed in the filter chamber 132, and the filter assembly 133 is adapted to impede the passage of liquid material when gas is allowed to pass through.

[0056] For example, the filter assembly 133 can be made of high-efficiency filter materials such as porous ceramics, metal mesh, or polymer membranes to effectively impede liquid materials when gas passes through. The working principle of the filter assembly 133 can be based on physical separation, utilizing the pore size and structural characteristics of the material to trap liquid materials. When gas passes through the filter assembly 133, liquid products are blocked due to their larger particle size or surface tension, thereby achieving gas-liquid separation. Alternatively, the filter assembly 133 can also be a cross-baffle structure located in the gas flow path. During gas flow, liquid materials in the gas impact and adhere to the surface of the baffle structure under inertia, forming larger droplets that then fall. Alternatively, the filter assembly 133 can also have a spiral flow channel. When gas passes through, liquid materials in the gas are subjected to centrifugal force and thrown towards the inner wall of the filter chamber 132 to achieve gas-liquid separation.

[0057] refer to Figure 3According to some embodiments of the present invention, the filter assembly 133 may include a plurality of first baffles 1331 and a plurality of second baffles 1332. The first baffles 1331 and the second baffles 1332 are respectively connected to the inner walls of opposite sides of the housing 131. The first baffles 1331 and the second baffles 1332 are arranged alternately along the axial direction of the housing 131 to define a tortuous flow channel 1333.

[0058] Thus, the first baffle 1331 and the second baffle 1332 obstruct the airflow in its path. During the gas flow, the liquid material in the gas impacts and adheres to the surfaces of the first baffle 1331 and the second baffle 1332 under inertia, forming larger droplets that then fall.

[0059] The first baffle 1331 and the second baffle 1332 form a tortuous flow channel 1333, increasing the path length and complexity of the gas flow. This causes the gas to change direction multiple times during flow, thereby increasing the contact area between the liquid material and the first baffle 1331 and the second baffle 1332, and improving the retention efficiency of the liquid material. Furthermore, the tortuous flow channel 1333 helps reduce the gas velocity and increases the contact time between the gas and the filter material, thus improving the filtration effect. In addition, it can effectively capture and settle larger particles, preventing them from entering the subsequent system with the airflow and causing blockage of the pressure relief pipe 120, thus improving the reliability of the system.

[0060] Optionally, the first baffle 1331 and the second baffle 1332 can be welded to the housing 131, or the first baffle 1331 and the second baffle 1332 can be fixed to the housing 131 by screws or other fasteners, which is convenient for production. Alternatively, the housing 131 is provided with a mounting slot, through which the first baffle 1331 and the second baffle 1332 can be fixed to the housing 131, which is beneficial for the inspection and maintenance of the filter device 130.

[0061] According to some embodiments of the present invention, the first end 1331a of the first baffle 1331 is fixed to the inner wall of the filter cavity 132, and the second end 1331b of the first baffle 1331 extends toward the axis of the housing 131, thereby obstructing the airflow in the filter cavity 132 and forcing the gas flow path to change.

[0062] The third end 1332a of the second baffle 1332 is fixed to the inner wall of the filter chamber 132, and the fourth end 1332b of the second baffle 1332 extends toward the axis of the housing 131, forming an interleaved structure with the second end 1331b of the first baffle 1331, defining the tortuous flow channel 1333 and improving the structural reliability of the tortuous flow channel 1333.

[0063] In a first reference plane perpendicular to the axis of the housing 131, the projection of the second end 1331b at least partially coincides with the projection of the fourth end 1332b. This serves two purposes: firstly, it ensures that the gas flows through the narrow space between the baffles in the filter assembly 133, increasing the contact time and path length between the gas and the filter assembly 133, thus improving the filtration effect. Secondly, it allows the projections of the first baffle 1331 and the second baffle 1332 in the first reference plane to block the projection of the filter cavity 132, ensuring the obstruction of the airflow path by the first baffle 1331 and the second baffle 1332, preventing the airflow from directly exiting the filter device 130 along the axial direction of the housing 131 between the first baffle 1331 and the second baffle 1332, thereby improving the reliability of the filtration effect of the filter device 130.

[0064] refer to Figure 3 According to some embodiments of this utility model, the second end 1331b of the first baffle 1331 and the fourth end 1332b of the second baffle 1332 are both inclined downwards. This causes the ends of the first baffle 1331 and the second baffle 1332 that are away from the housing 131 to tilt downwards, guiding and collecting the liquid material on the first baffle 1331 and the second baffle 1332. This allows the liquid material to move downwards along the first baffle 1331 and the second baffle 1332 under the influence of gravity and collect, forming larger droplets that fall and preventing them from being carried away by gas.

[0065] Furthermore, the second end 1331b of the first baffle 1331 and the fourth end 1332b of the second baffle 1332 both extend toward the axis of the housing 131, so that the second end 1331b and the fourth end 1332b are located in the middle region near the axis of the housing 131. When the liquid material gathers into larger droplets and drips downward, it is beneficial to make the larger droplets drip back into the cracking generator 110 along the part of the first exhaust pipe 121 perpendicular to the cracking generator 110, thus avoiding the droplets from falling into the first exhaust pipe 121 and improving the reliability of the high-boiling cracking system 100.

[0066] refer to Figure 4 According to some embodiments of the present invention, the filter assembly 133 includes a filter baffle 1334, which is disposed in the filter chamber 132 and extends spirally along the axial direction of the housing 131.

[0067] Thus, the spiral-shaped filter baffle 1334 increases the contact area between the gas and the filter baffle 1334 during gas flow and the path length of gas flow, allowing liquid products to have more opportunities to contact and be trapped by the filter baffle 1334 during flow. A spiral airflow path is formed, and during gas flow, the liquid material in the gas is subjected to centrifugal force and thrown towards the inner wall of the filter chamber 132 to achieve gas-liquid separation.

[0068] refer to Figure 4 According to some embodiments of the present invention, a support rod 1335 is provided inside the filter chamber 132. The support rod 1335 is fixedly connected to the housing 131. The filter baffle 1334 is wrapped around the support rod 1335. The support rod 1335 provides a stable support structure, which helps to ensure the fixation and positioning of the filter baffle 1334 inside the filter chamber 132.

[0069] For example, the support rod 1335 can be fixedly connected with multiple connecting rods, which can be welded to the inner wall of the housing 131. Of course, the inner wall of the housing 131 can also be provided with a fixing groove, and the connecting rods can be fixedly installed in the fixing groove, so as to make the maintenance and repair of the filter device 130 more convenient.

[0070] The filter baffle 1334 includes an inner edge 1334a connected to the support rod 1335 and an outer edge 1334b away from the support rod 1335, with the outer edge 1334b being higher than the inner edge 1334a. This design, where the outer edge 1334b is higher than the inner edge 1334a, helps to utilize gravity and centrifugal force to guide liquid material towards the inside of the baffle and down a spiral path. This facilitates the aggregation of liquid material into larger droplets, which then drip off under gravity, enhancing the gas-liquid separation effect and preventing liquid material from depositing on the filter baffle 1334.

[0071] Furthermore, the design that the outer edge 1334b is higher than the inner edge 1334a is conducive to the liquid material gathering at the lower end of the support rod 1335. The support rod 1335 can be coaxially arranged with the shell 131. In this way, when the larger droplets formed by the liquid material gather drip downwards, the larger droplets drip back into the cracking generator 110 along the part of the first exhaust pipe 121 perpendicular to the cracking generator 110, avoiding the droplets from falling into the first exhaust pipe 121, which helps to improve the reliability of the high-boiling cracking system 100.

[0072] refer to Figure 1 According to some embodiments of the present invention, the high-boiling-point pyrolysis system 100 may further include: a first raw material conveying pipeline 140 and a second raw material conveying pipeline 150.

[0073] The first raw material conveying pipeline 140 is used to convey polychlorosilane, which is the main raw material for the cracking reaction. The first raw material conveying pipeline 140 is connected to the raw material input end 111 located on the top side wall of the cracking generator 110, introducing polychlorosilane into the upper part of the reactor, allowing the polychlorosilane to fall naturally under gravity, increasing the chance of contact with gaseous hydrogen chloride.

[0074] The second raw material conveying pipeline 150 is used to convey gaseous hydrogen chloride. The second raw material conveying pipeline 150 is connected to the raw material input end 111 located on the bottom wall of the cracking generator 110. Through this bottom feeding method, gaseous hydrogen chloride can be fully mixed with polychlorosilane from bottom to top, promoting the cracking reaction.

[0075] Understandably, some of the hydrogen chloride gas input into the cracking generator 110 through the second raw material conveying pipeline 150 does not participate in the cracking reaction. It is discharged and recovered through the pressure relief pipeline 120 for recycling, thereby improving the utilization rate of the raw materials.

[0076] refer to Figure 1 According to some embodiments of the present invention, the product output end 112 is located on the bottom side wall of the pyrolysis generator 110, which helps to use gravity to naturally discharge the products generated by the pyrolysis reaction from the pyrolysis generator 110.

[0077] The high-boiling-point cracking system 100 also includes a product output pipeline 160, which is connected to the product output end 112. This ensures that the product is smoothly discharged from the cracking generator 110 and prevents the product from being retained and accumulated in the cracking generator 110.

[0078] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0079] In the description of this utility model, "first feature" and "second feature" may include one or more of the features.

[0080] In the description of this utility model, "multiple" means two or more.

[0081] In the description of this utility model, the first feature being "above" or "below" the second feature may include the first and second features being in direct contact, or it may include the first and second features not being in direct contact but being in contact through another feature between them.

[0082] In the description of this utility model, the terms "above", "over" and "on top" for the first feature and the second feature include the first feature being directly above or diagonally above the second feature, or simply indicate that the first feature is at a higher horizontal level than the second feature.

[0083] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0084] Other embodiments of this application will readily occur to those skilled in the art upon consideration of the specification and practice of the utility models disclosed herein. This application is intended to cover any variations, uses, or adaptations of this application that follow the general principles of this application and include common knowledge or customary techniques in the art not disclosed herein. The specification and examples are to be considered exemplary only, and the true scope and spirit of this application are indicated by the following claims.

[0085] It should be understood that this application is not limited to the precise structure described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of this application is limited only by the appended claims.

Claims

1. A high boiling pyrolysis system (100) for polysilicon production, characterized by, The application relates to a pyrolysis generator (110) comprising a plurality of raw material input ends (111) and a product output end (112); a pressure relief pipeline (120) in communication with the pyrolysis generator (110); and a filtering device (130) arranged in the pressure relief pipeline (120) to filter gas flowing through the pressure relief pipeline (120). The top end of the pyrolysis generator (110) is provided with an exhaust port (113), the pressure relief pipeline (120) comprises a first exhaust pipeline (121) in communication with the exhaust port (113), at least part of the structure of the first exhaust pipeline (121) extends along the height direction of the pyrolysis generator (110), and the filtering device (130) is arranged in the first exhaust pipeline (121). The filtering device (130) comprises: a shell (131) defining a filtering cavity (132); 2. The high boiling pyrolysis system (100) for polysilicon production according to claim 1, characterized in that, a filtering assembly (133) arranged in the filtering cavity (132) and adapted to hinder liquid material from passing through when gas passes through.

3. The high boiling pyrolysis system (100) for polysilicon production according to claim 2, characterized in that, The filtering assembly (133) comprises a plurality of first baffles (1331) and a plurality of second baffles (1332), the first baffles (1331) and the second baffles (1332) are respectively connected to the inner walls of opposite sides of the shell (131), the first baffles (1331) and the second baffles (1332) are arranged in an interlaced and spaced manner along the axial direction of the shell (131) to define a zigzag flow channel (1333). The first end (1331a) of the first baffle (1331) is fixed to the inner wall of the filtering cavity (132), and the second end (1331b) of the first baffle (1331) extends towards the axis of the shell (131); The third end (1332a) of the second baffle (1332) is fixed to the inner wall of the filtering cavity (132), and the fourth end (1332b) of the second baffle (1332) extends towards the axis of the shell (131); 4. The high boiling pyrolysis system (100) for polysilicon production according to claim 3, characterized in that, In a first reference plane perpendicular to the axis of the shell (131), the projection of the second end (1331b) at least partially overlaps the projection of the fourth end (1332b).

5. The high boiling pyrolysis system (100) for polysilicon production according to claim 4, characterized in that, The second end (1331b) of the first baffle (1331) and the fourth end (1332b) of the second baffle (1332) are both inclined downward. The filtering assembly (133) comprises a filtering baffle (1334) arranged in the filtering cavity (132) and extending in a spiral manner along the axial direction of the shell (131). The filtering cavity (132) is provided with a support rod (1335) fixedly connected to the shell (131), 6. The high-boiling pyrolysis system (100) for polysilicon production according to claim 4 or 5, characterized in that, ​ 7. The high boiling pyrolysis system (100) for polysilicon production as claimed in claim 3, wherein, ​ 8. The high-boiling pyrolysis system (100) for polysilicon production according to claim 7, characterized in that, ​ The filter baffle (1334) is arranged around the support rod (1335), and the filter baffle (1334) comprises an inner edge (1334a) connected with the support rod (1335) and an outer edge (1334b) away from the support rod (1335), and the outer edge (1334b) is higher than the inner edge (1334a).

9. The high boiling pyrolysis system (100) for polysilicon production as claimed in claim 1, wherein, Further comprising: A first raw material conveying pipeline (140) for conveying polychlorosilane, the first raw material conveying pipeline (140) being in communication with the raw material input end (111) arranged on the top side wall of the cracking generator (110); A second raw material conveying pipeline (150) for conveying gaseous hydrogen chloride, the second raw material conveying pipeline (150) being in communication with the raw material input end (111) arranged on the bottom wall of the cracking generator (110).

10. The high boiling pyrolysis system (100) for polysilicon production as claimed in claim 1, wherein, The product output end (112) is located on the bottom side wall of the cracking generator (110), The high-boiling cracking system (100) further comprises a product output pipeline (160) in communication with the product output end (112).

Images