Water slip ring mechanism for silicon carbide crystal growth furnace

Abstract

The utility model relates to a water slip ring mechanism for a silicon carbide crystal growth furnace, which is structurally characterized in that an upper cover, a water guide seat and a lower cover are sequentially mounted on the outer side of a central rotating body from top to bottom, bearings are respectively arranged between the top end of the upper cover and the central rotating body and between the bottom end of the lower cover and the central rotating body, and a mounting seat is arranged on the outer side of the bottom end of the lower cover. The upper cover and the water guide base are sealed through a fixed sealing ring, the water guide base and the lower cover are sealed through a fixed sealing ring, and an upper mechanical sealing ring, a middle spacer ring and a lower mechanical sealing ring are connected to the positions, on the inner sides of the upper cover, the water guide base and the lower cover, of the center rotating body in a sleeved mode. A water flow ring is defined between the upper mechanical sealing ring and the water guide seat, and a water flow ring is defined between the lower mechanical sealing ring and the water guide seat. Water flow channels communicated with the two water flow rings are axially formed in the bottom end of the center rotating body respectively and used for water inlet and outlet. The water slip ring has the advantages that the replacement and maintenance frequency of the water slip ring can be effectively reduced, resistance and vibration caused by rotary sealing can be reduced at the same time, ripples generated by liquid in the crucible in the rotating process can be avoided, and crystal growth is improved.

Description

Technical Field

[0001] This utility model relates to a water slide ring mechanism for a silicon carbide crystal growth furnace, specifically a two-passage rotating water slide ring with a central through hole for a silicon carbide crystal growth furnace. Background Technology

[0002] For high-temperature furnaces, such as silicon carbide crystal growth furnaces, the crucible shaft and seed crystal shaft need to be cooled by water because they need to extend into the high-temperature area inside the furnace cavity. Since the shaft needs to rotate during equipment operation, rotating water slip rings are required.

[0003] In existing technologies, most water slip ring structures use Glyd rings for rotary dynamic sealing. However, Glyd rings have high frictional resistance, wear out quickly, and often leak water, requiring maintenance and replacement. At the same time, due to the high frictional resistance, they can cause vibration, which can generate ripples in the liquid in the crucible during rotation, affecting the crystal growth effect. Utility Model Content

[0004] This invention proposes a water-cooled sliding ring mechanism for a silicon carbide crystal growth furnace, which aims to overcome the above-mentioned shortcomings of the existing technology, reduce the frequency of maintenance and replacement, and reduce the resistance and vibration caused by the rotary seal.

[0005] The technical solution of this utility model is a water-cooled sliding ring mechanism for a silicon carbide crystal growth furnace. The mechanism includes a central rotating body. From top to bottom, an upper cover, a water guide seat, and a lower cover are sequentially installed on the outer side of the central rotating body. Bearings are respectively installed between the top of the upper cover and the central rotating body, and between the bottom of the lower cover and the central rotating body. A mounting seat is provided on the outer side of the bottom of the lower cover. The upper cover and the water guide seat, and the water guide seat and the lower cover are sealed by fixed sealing rings. An upper mechanical sealing ring, an intermediate spacer ring, and a lower mechanical sealing ring are respectively fitted onto the central rotating body inside the upper cover, the water guide seat, and the lower cover. A water flow ring is formed between the upper mechanical sealing ring and the water guide seat, and between the lower mechanical sealing ring and the water guide seat. A water flow channel communicating with the two water flow rings is axially provided at the bottom of the central rotating body. The two water flow channels are an inlet water flow channel and an outlet water flow channel. The two water flow channels, one inlet and one outlet, form a freely rotatable water flow loop for cooling the shaft.

[0006] Preferably, the intermediate spacer ring is sealed to the central rotating body and the water guide seat by intermediate sealing rings to prevent water leakage.

[0007] The advantages of this utility model are: reasonable structural design, which can effectively reduce the frequency of water slip ring replacement and maintenance, and at the same time reduce the resistance and vibration caused by the rotary seal, which can prevent the liquid in the crucible from generating ripples during rotation and improve the crystal growth effect. Attached Figure Description

[0008] Figure 1This is a schematic diagram of the water slip ring mechanism of the silicon carbide crystal growth furnace of this utility model.

[0009] Figure 2 yes Figure 1 A sectional view along the AA direction.

[0010] In the diagram, 1 is the top cover, 2 is the middle spacer ring, 3 is the middle sealing ring, 4 is the lower mechanical seal ring, 5 is the central rotating body, 6 is the upper mechanical seal ring, 7 is the water guide seat, 8 is the fixed seal ring, 9 is the bottom cover, 10 is the mounting base, and 11 is the bearing. Detailed Implementation

[0011] The present invention will be further described in detail below with reference to embodiments and specific implementation methods.

[0012] like Figure 1 , 2 As shown, a water sliding ring mechanism for a silicon carbide crystal growth furnace includes a central rotating body 5. An upper cover 1, a water guide seat 7, and a lower cover 9 are sequentially installed on the outer side of the central rotating body 5 from top to bottom. Bearings 11 are respectively provided between the top of the upper cover 1 and the central rotating body 5, and between the bottom of the lower cover 9 and the central rotating body 5. A mounting seat 10 is provided on the outer side of the bottom of the lower cover 9. A fixed sealing ring 8 seals the upper cover 1 with the water guide seat 7 and the water guide seat 7 with the lower cover 9. An upper mechanical sealing ring 6, an intermediate spacer ring 2, and a lower mechanical sealing ring 4 are respectively fitted onto the central rotating body 5 inside the upper cover 1, the water guide seat 7, and the lower cover 9. An intermediate sealing ring 3 seals the central rotating body 5 and the water guide seat 7. A water flow ring is formed between the upper mechanical sealing ring 6 and the water guide seat 7, and between the lower mechanical sealing ring 4 and the water guide seat 7. A water flow channel communicating with the two water flow rings is axially provided at the bottom of the central rotating body 5. The two water flow channels are an inlet water flow channel and an outlet water flow channel, respectively.

[0013] Based on the above structure, the two water flow channels, one inlet and one outlet, form a freely rotatable water flow loop to cool the shaft.

[0014] The intermediate sealing ring 3 is designed to prevent water from seeping in.

[0015] All of the components described above are existing technologies, and those skilled in the art can use any model and existing design that can achieve their corresponding functions.

[0016] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present utility model, and these all fall within the protection scope of the present utility model.

Claims

1. A water-cooled slip ring mechanism for a silicon carbide crystal growth furnace, characterized in that, The utility model relates to a center rotating body (5) is installed successively from top to bottom with upper cover (1), water guide seat (7) and lower cover (9) outside, and the top end between upper cover (1) and center rotating body (5) and the bottom end between lower cover (9) and center rotating body (5) are equipped with bearing (11) respectively, and the bottom end outside lower cover (9) is equipped with mounting seat (10), and upper cover (1) and water guide seat (7) and water guide seat (7) and lower cover (9) between are sealed through fixed sealing ring (8) respectively, and the center rotating body (5) of upper cover (1), water guide seat (7) and lower cover (9) inside is respectively sleeved with upper mechanical sealing ring (6), intermediate spacing ring (2) and lower mechanical sealing ring (4), and upper mechanical sealing ring (6) and water guide seat (7) between and lower mechanical sealing ring (4) and water guide seat (7) between form a water flow ring respectively, and the bottom end of center rotating body (5) is axially equipped with water flow channel with two water flow rings respectively, and two water flow channels are water inlet water flow channel and outlet water flow channel respectively.

2. A water slip ring mechanism for a silicon carbide crystal growing furnace as recited in claim 1, wherein, The intermediate spacing ring (2) is sealed through the intermediate sealing ring (3) between the center rotating body (5) and the water guide seat (7).

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