Quartz crucible quality detection equipment
By using a quartz crucible quality inspection device that combines a vacuum pipe and a pressure detector with a pressure testing module, the problem of inaccurate manual inspection has been solved, enabling more efficient crack and dent detection, and improving the accuracy of inspection and production quality.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-27
- Publication Date
- 2026-03-13
AI Technical Summary
In existing technologies, manual inspection of quartz crucibles is not accurate enough and it is difficult to effectively identify cracks or unevenness.
A quartz crucible quality inspection device is used. Gas is extracted from the crucible through a vacuum tube and the pressure is monitored by a pressure detector. The detection probe moves along the arc-shaped slide of the pressure detection module to detect the flatness and unevenness of the inner wall of the quartz crucible.
It improves the accuracy of quartz crucible testing, enabling earlier detection of cracks and unevenness, reducing false detections, and improving production quality.
Smart Images
Figure CN223992677U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of quartz crucible technology, and in particular to a quartz crucible quality testing device. Background Technology
[0002] Quartz crucibles are essential materials for pulling large-diameter single-crystal silicon and developing large-scale integrated circuits. They are used to hold raw materials during the single-crystal silicon pulling process. A conventional arc-driven quartz crucible for single-crystal pulling consists of two layers: an inner transparent layer with low bubble content and an outer bubble composite layer with higher bubble content. The outer layer supports the crucible's deformation strength and allows heat to radiate uniformly from the outer layer of the quartz crucible through the graphite thermal field of the crystal pulling furnace (due to the numerous tiny bubbles, the heat source radiates as it passes through, increasing radiation efficiency).
[0003] The manufacturing process of quartz crucibles includes: high-purity quartz sand → high-purity graphite mold → vacuum loading and forming → vacuum arc melting → natural cooling and demolding → preliminary inspection of quartz crucibles → cold working sandblasting, cutting, and chamfering → secondary inspection of quartz crucibles → ultra-clean cleaning, ultrasonic cleaning, high-pressure spraying, automatic drying, and heating and baking → spraying → third inspection of quartz crucibles → vacuum packaging → finished product warehousing.
[0004] The three tests on the quartz crucible are all to check whether the crucible body has cracks, unevenness or other problems that may have occurred during the production process, which could affect the normal use of the quartz crucible. The conventional testing method is to manually inspect the quartz crucible by looking at it under a light, which can easily lead to inaccurate test results. Utility Model Content
[0005] (a) Technical problems to be solved
[0006] In view of the above-mentioned shortcomings and deficiencies of the prior art, the present invention provides a quartz crucible quality inspection device, which solves the technical problem that the results of analyzing cracks or unevenness on quartz crucibles by manually observing them are not accurate enough.
[0007] (II) Technical Solution
[0008] To achieve the above objectives, the main technical solutions adopted by this utility model include:
[0009] This utility model provides a quartz crucible quality inspection device, including an inspection platform, a crack detection component disposed on the upper surface of the inspection platform, and a concavity / convexity detection component disposed on the upper surface of the inspection platform. The crack detection component includes a double-ring sealing ring disposed on the upper surface of the inspection platform for coaxially inverted sealing and fixing of the quartz crucible, an air extraction pipe protruding from the upper surface of the inspection platform and located in the middle of the double-ring sealing ring for evacuating the interior of the quartz crucible, and a pressure detector disposed on one side of the double-ring sealing ring for monitoring the internal air pressure of the quartz crucible. The concavity / convexity detection component includes an annular slide rail horizontally disposed on the upper surface of the inspection platform and coaxial with the quartz crucible, an arc-shaped slide rail that rotates relative to the quartz crucible along the circumferential direction of the annular slide rail and is vertically aligned with the inner wall of the quartz crucible, a pressure detection module that slides along the length direction of the arc-shaped slide rail, and a detection probe disposed on the side of the pressure detection module and abutting against the inner wall of the quartz crucible as it rotates.
[0010] This utility model provides a quartz crucible quality inspection device. When inspecting the quality of a quartz crucible, the device inverts the crucible to seal the edge with a double-ring seal. Air is then extracted from the crucible through a suction pipe, and the pressure change is detected by a pressure gauge to determine if the crucible has cracks. The crucible is then coaxially placed on a ring slide rail, with the detection probe contacting the inner wall. The pressure detection module moves relative to the crucible along the length of the arc-shaped slide. The change in pressure readings indicates whether the smoothness or unevenness of a vertical section of the inner wall of the crucible is acceptable. The arc-shaped slide rail is then moved, and the pressure detection module continues to move, thus obtaining the overall smoothness and unevenness of the inner wall of the quartz crucible. This method makes the inspection results of the quartz crucible more accurate.
[0011] Optionally, the upper surface of the detection platform is provided with a black spot detection component, which includes a rotating disk that is horizontally rotatably disposed on the upper surface of the detection platform and coaxially inverted for the quartz crucible, and a light-emitting lamp bead disposed in the middle of the rotating disk.
[0012] By setting a black spot detection component on the upper part of the detection platform, black spot detection can be performed before crack and unevenness detection. If black spots are detected, subsequent detection is not required. When performing black spot detection, simply place the quartz crucible coaxially upside down on the rotating disk, then turn on the light-emitting lamp, start the rotating disk, and observe.
[0013] Optionally, a light-shielding box for covering a quartz crucible is vertically slidably disposed on the upper surface of the detection platform above the rotating disk. A camera for real-time imaging of the outer surface of the quartz crucible is disposed inside the light-shielding box, and a display screen for displaying the content captured by the camera is disposed on the upper surface of the detection platform.
[0014] By vertically sliding a light-shielding box at the top of the testing platform, a dark scene can be provided for clearer observation of black spots on the quartz crucible. The testing process is then captured in real time by a camera and displayed on an external screen, making the detection of black spots on the quartz crucible more convenient and faster.
[0015] Optionally, the double-ring sealing ring includes two sealing rings arranged coaxially, with a ring sealing groove formed between the two sealing rings for the lower edge of the quartz crucible to be inserted when it is inverted, and the end faces of the two sealing rings that are close to each other abut against the inner and outer walls of the edge of the quartz crucible.
[0016] By inserting the edge of the quartz crucible into the sealing groove between the two sealing rings, both sealing rings are pressed tightly against the inner and outer walls of the quartz crucible edge, thus achieving a seal and reducing the probability of detection errors caused by poor sealing.
[0017] Optionally, the double-ring sealing ring further includes a sealing adhesive layer disposed between the two sealing rings, and the edge of the quartz crucible is inserted into the ring sealing groove and pressed against the sealing adhesive layer.
[0018] By setting a sealing layer between the two sealing rings, the quartz crucible is inserted into the sealing groove and pressed tightly against the sealing layer. At the same time, as the air is drawn out by the evacuation pipe, the quartz crucible will press even more tightly against the sealing layer, thereby improving the sealing effect and thus improving the accuracy of the test results.
[0019] Optionally, a positioning circular plate is horizontally arranged on the upper surface of the detection platform, and the annular slide rail is coaxially arranged on the upper surface of the positioning circular plate. The diameter of the positioning circular plate is the same as the inner diameter of the edge of the quartz crucible.
[0020] By setting a positioning circular plate horizontally on the upper surface of the testing platform, when the quartz crucible is inverted, it is only necessary to coaxially embed the positioning circular plate into the quartz crucible, which is more convenient.
[0021] Optionally, the annular slide rail is provided with a plurality of arc-shaped slide tracks, which are evenly spaced around the annular slide rail and connected at their tops.
[0022] By setting multiple arc-shaped slides on the annular slide rail, each arc-shaped slide is equipped with a pressure detection module and a detection probe, allowing multiple pressure detection modules to work simultaneously, thereby enabling faster detection of the unevenness and flatness inside the quartz crucible.
[0023] Optionally, the annular slide rail is coaxially rotatably connected to the positioning circular plate.
[0024] By directly and coaxially rotating the annular slide rail to the positioning circular plate, the arc-shaped slide becomes more stable as it rotates with the annular slide rail, resulting in more accurate detection results from the pressure detection module.
[0025] Optionally, a sliding ring is coaxially fitted on the periphery of the arc-shaped slide, and the pressure detection module is fixed to the side of the sliding ring.
[0026] By coaxially sliding the sliding ring on the sliding track, the movement of the sliding ring carrying the pressure detection module is made more stable, thereby improving the accuracy of the pressure detection module's detection results.
[0027] (III) Beneficial Effects
[0028] The beneficial effects of this utility model are as follows: When the quartz crucible quality inspection equipment of this utility model is used to inspect the quality of a quartz crucible, the crucible is inverted to seal the edge of the crucible with a double-ring sealing ring. Then, air is extracted from the inside of the crucible through a suction pipe. The pressure change inside the crucible is detected by a pressure detector to determine if there are cracks. The crucible is then coaxially placed on a ring slide rail, so that the detection probe abuts against the inner wall of the crucible. At this time, the pressure detection module moves along the length of the arc-shaped slide. The change in pressure value detected by the module indicates whether the flatness and unevenness of a vertical inner wall of the crucible are up to standard. The arc-shaped slide rail is then moved, and the pressure detection module continues to move, thus obtaining the inspection result for the flatness and unevenness of the entire inner wall of the quartz crucible. This method makes the inspection results of the quartz crucible more accurate. Attached Figure Description
[0029] Figure 1 This is a perspective view of an embodiment of the present utility model;
[0030] Figure 2 for Figure 1 Enlarged view of point A;
[0031] Figure 3 This is a cross-sectional view of an embodiment of the present utility model;
[0032] Figure 4 for Figure 3 Enlarged view of point B.
[0033] [Explanation of Labels in the Attached Image]
[0034] 1. Detection platform; 2. Crack detection component; 21. Double-ring sealing ring; 211. Sealing ring; 212. Ring sealing groove; 213. Sealing adhesive layer; 22. Air extraction pipe; 23. Air pressure detector; 3. Concavity / convexity detection component; 31. Circular slide rail; 32. Arc-shaped slide; 33. Pressure detection module; 34. Detection probe; 35. Positioning circular plate; 36. Sliding ring; 37. Arc-shaped rack; 38. Gear; 4. Black spot detection component; 41. Rotating disk; 42. Illuminating LED bead; 43. Light shielding box; 44. Camera; 45. Display screen. Detailed Implementation
[0035] To better explain and facilitate understanding of this utility model, the present utility model will be described in detail below with reference to the accompanying drawings and specific embodiments.
[0036] The quartz crucible quality inspection device proposed in this embodiment of the invention involves inverting the crucible to seal its edges with a double-ring seal. Air is then extracted from the crucible via a suction pipe, and the pressure change is monitored by a pressure gauge to determine if cracks are present. The crucible is then coaxially placed on a ring-shaped slide rail, with the detection probe contacting the inner wall. A pressure detection module moves along the length of the arc-shaped slide rail, and the changes in pressure readings determine the smoothness or unevenness of a vertical section of the inner wall. The arc-shaped slide rail is then moved, and the pressure detection module continues to move, thus obtaining the overall smoothness and unevenness of the inner wall of the quartz crucible. This method makes the inspection results of the quartz crucible more accurate.
[0037] To better understand the above technical solutions, exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present invention are shown in the drawings, it should be understood that the present invention can be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that the present invention can be understood more clearly and thoroughly, and that the scope of the present invention can be fully conveyed to those skilled in the art.
[0038] Reference Figure 1 A quartz crucible quality inspection device includes an inspection platform 1, a crack detection component 2 disposed on the upper surface of the inspection platform 1, an unevenness detection component 3 disposed on the upper surface of the inspection platform 1, and a black spot detection component 4.
[0039] The crack detection assembly 2 includes a double-ring sealing ring 21 disposed on the upper end face of the detection platform 1 for coaxially inverted sealing and fixing of the quartz crucible; an extraction pipe 22 protruding from the upper end face of the detection platform 1 and located in the middle of the double-ring sealing ring 21 for evacuating air from the inside of the quartz crucible; and a pressure detector 23 disposed on one side of the double-ring sealing ring 21 and connected to the extraction pipe 22 for monitoring the internal air pressure of the quartz crucible. The quartz crucible is inverted, so that the double-ring sealing ring 21 seals the edge of the quartz crucible. Then, the air inside the quartz crucible is extracted through the extraction pipe 22. The pressure change inside the quartz crucible is detected by the pressure detector 23 to determine whether the quartz crucible has cracks.
[0040] See Figure 1 and Figure 4 The double-ring sealing ring 21 includes two coaxially arranged sealing rings 211. A ring sealing groove 212 is formed between the two sealing rings 211, allowing the lower edge of the quartz crucible to be inserted when inverted. The end faces of the two sealing rings 211 that are close to each other abut against the inner and outer walls of the quartz crucible's edge. The double-ring sealing ring 21 also includes a sealing adhesive layer 213 integrally formed between the two sealing rings 211. The edge of the quartz crucible abuts against the sealing adhesive layer 213 as it is inserted into the ring sealing groove 212. Inserting the edge of the quartz crucible into the ring sealing groove 212 between the two sealing rings 211 ensures that both sealing rings 211 abut against the inner and outer walls of the quartz crucible's edge. Simultaneously, as the evacuation pipe 22 evacuates air, the quartz crucible will abut against the sealing adhesive layer 213 more tightly, thereby improving the sealing effect.
[0041] See Figure 1 and Figure 3 The black spot detection component 4 includes a rotating disk 41 driven by a motor to rotate horizontally on the upper surface of the detection platform 1 and to coaxially invert the quartz crucible; a light-emitting LED bead 42 located in the middle of the rotating disk 41; and a light-shielding box 43 driven by a cylinder to slide vertically on the upper end of the detection platform 1 and to cover the quartz crucible. The light-shielding box 43 contains a camera 44 that captures real-time images of the outer surface of the quartz crucible, and a display screen 45 on the upper end of the detection platform 1 displays the content captured by the camera 44. Black spot detection can be performed before crack and unevenness detection, so that if black spots are detected, subsequent detection is unnecessary. The light-shielding box 43 provides a clearer dark scene for observing black spots on the quartz crucible. The camera 44 then captures the detection process in real-time and displays it on the external display screen 45, making black spot detection of the quartz crucible more convenient and faster.
[0042] See Figure 1 and Figure 2The unevenness detection component 3 includes an annular slide rail 31 horizontally mounted on the upper surface of the detection platform 1 and coaxial with the quartz crucible; an arc-shaped slide 32 rotating relative to the quartz crucible along the circumferential direction of the annular slide rail 31 and vertically aligned with the inner wall of the quartz crucible; a pressure detection module 33 sliding along the length of the arc-shaped slide 32; and a detection probe 34 mounted on the side of the pressure detection module 33 and abutting against the inner wall of the quartz crucible as it rotates. The quartz crucible is coaxially placed on the annular slide rail 31, causing the detection probe 34 to abut against the inner wall of the quartz crucible. At this time, the pressure detection module 33 moves along the length of the arc-shaped slide 32. By detecting changes in the pressure value, the unevenness of a vertical strip of the inner wall of the quartz crucible is determined to be acceptable. Subsequently, the arc-shaped slide 32 is moved, and the movement of the pressure detection module 33 continues, thereby obtaining the detection result of the unevenness of the entire inner wall of the quartz crucible.
[0043] A positioning circular plate 35 is horizontally fixed on the upper surface of the detection platform 1. An annular slide rail 31 is coaxially connected to the upper surface of the positioning circular plate 35 via a motor. The diameter of the positioning circular plate 35 is the same as the inner diameter of the edge of the quartz crucible. Multiple arc-shaped slide tracks 32 are provided on the annular slide rail 31. The multiple arc-shaped slide tracks 32 are evenly distributed around the annular slide rail 31. The tops of the multiple arc-shaped slide tracks 32 are connected together. A sliding ring 36 is coaxially slidably fitted on the side end of the arc-shaped slide track 32. An arc-shaped rack 37 is fixed to the side end of the arc-shaped slide track 32 by bolts. A gear 38 that engages with the arc-shaped rack 37 is driven by a motor on the sliding ring 36, so that the sliding ring 36 can move more smoothly and easily along the arc-shaped slide track 32. The pressure detection module 33 is fixed to the side end of the sliding ring 36.
[0044] In the description of this utility model, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.
[0045] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.
[0046] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "beneath" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0047] In the description of this specification, the terms "one embodiment," "some embodiments," "embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.
[0048] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make modifications, alterations, substitutions and variations to the above embodiments within the scope of the present invention.
Claims
1. A quartz crucible quality testing device, characterized in that: The utility model provides a quartz crucible crack and convexo concave detection device, including detection platform (1), the crack detection subassembly (2) of setting in the detection platform (1) upper end face and the concave and convex detection subassembly (3) of setting in the detection platform (1) upper end face, the crack detection subassembly (2) including setting in the detection platform (1) upper end face for quartz crucible coaxial inverted seal fixed double ring sealing ring (21), the protruding in the detection platform (1) upper end face and located in the double ring sealing ring (21) middle part to the inside of quartz crucible is carried out the air extraction of exhaust pipe (22) and sets up in the double ring sealing ring (21) one side to the inside of quartz crucible air pressure is monitored air pressure detector (23), the concave and convex detection subassembly (3) including horizontal setting in the detection platform (1) upper end face and coaxial in quartz crucible's annular slide rail (31), along the annular slide rail (31) ring around direction relative quartz crucible occurs rotation and vertical same arc in quartz crucible inner wall's arc slide (32), along the arc slide (32) length direction slip's pressure detection module (33) and set up in pressure detection module (33) side end and with rotating abut on quartz crucible inner wall's detection probe (34).
2. The quartz crucible quality inspection apparatus according to claim 1, characterized by: The upper end surface of the detection platform (1) is provided with a black spot detection assembly (4), the black spot detection assembly (4) includes a rotating disc (41) horizontally arranged on the upper end surface of the detection platform (1) and coaxially inverted for the quartz crucible, and a light-emitting lamp bead (42) arranged in the middle of the rotating disc (41).
3. The quartz crucible quality inspection apparatus according to claim 2, characterized by: The upper end surface of the detection platform (1) is vertically slidably provided with a light shielding box (43) for covering the quartz crucible on the upper side of the rotating disc (41), and the inside of the light shielding box (43) is provided with a camera (44) for shooting the outer surface of the quartz crucible in real time.
4. The quartz crucible quality inspection apparatus according to claim 1, characterized by: The double-ring sealing ring (21) includes two coaxially arranged sealing rings (211), and a ring sealing groove (212) is formed between the two sealing rings (211) for inserting the lower edge of the quartz crucible when the quartz crucible is inverted.
5. The quartz crucible quality inspection apparatus according to claim 4, characterized by: The double-ring sealing ring (21) further includes a sealing rubber layer (213) arranged between the two sealing rings (211), and the edge of the quartz crucible is tightly arranged on the sealing rubber layer (213) when inserted into the ring sealing groove (212).
6. The quartz crucible quality inspection apparatus according to claim 1, characterized by: The upper end surface of the detection platform (1) is horizontally provided with a positioning circular plate (35), the annular slide rail (31) is coaxially arranged on the upper end surface of the positioning circular plate (35), and the diameter of the positioning circular plate (35) is the same as the inner diameter of the edge of the quartz crucible.
7. The quartz crucible quality inspection apparatus according to claim 6, characterized by: The annular slide rail (31) is provided with a plurality of arc slides (32), and the plurality of arc slides (32) are uniformly and circumferentially spaced on the annular slide rail (31), and the top of the plurality of arc slides (32) is connected.
8. The quartz crucible quality inspection apparatus as claimed in claim 6, characterized by: The annular slide rail (31) is coaxially and rotationally connected to the positioning circular plate (35).
9. The quartz crucible quality inspection apparatus as claimed in claim 8, characterized by: The arc-shaped slide (32) is coaxially sleeved with a sliding ring (36) at the side end, and the pressure detection module (33) is fixed to the side end of the sliding ring (36).